CN102655195B - 发光二极管及其制造方法 - Google Patents
发光二极管及其制造方法 Download PDFInfo
- Publication number
- CN102655195B CN102655195B CN201110051041.XA CN201110051041A CN102655195B CN 102655195 B CN102655195 B CN 102655195B CN 201110051041 A CN201110051041 A CN 201110051041A CN 102655195 B CN102655195 B CN 102655195B
- Authority
- CN
- China
- Prior art keywords
- gallium nitride
- nitride layer
- type gallium
- layer
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 229910002601 GaN Inorganic materials 0.000 claims abstract description 142
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims abstract description 142
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 239000012670 alkaline solution Substances 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims description 21
- 238000005520 cutting process Methods 0.000 claims description 20
- 230000010287 polarization Effects 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000004020 luminiscence type Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910017083 AlN Inorganic materials 0.000 claims description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical group [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 238000007788 roughening Methods 0.000 abstract description 2
- 238000005530 etching Methods 0.000 description 8
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 210000005056 cell body Anatomy 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical group [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110051041.XA CN102655195B (zh) | 2011-03-03 | 2011-03-03 | 发光二极管及其制造方法 |
TW100107669A TWI420706B (zh) | 2011-03-03 | 2011-03-08 | 發光二極體及其製造方法 |
US13/233,194 US8501514B2 (en) | 2011-03-03 | 2011-09-15 | Method for manufacturing light emitting diode by etching with alkaline solution |
US13/932,178 US8912557B2 (en) | 2011-03-03 | 2013-07-01 | Light emitting diode having N-face GaN with roughened surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110051041.XA CN102655195B (zh) | 2011-03-03 | 2011-03-03 | 发光二极管及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102655195A CN102655195A (zh) | 2012-09-05 |
CN102655195B true CN102655195B (zh) | 2015-03-18 |
Family
ID=46730788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110051041.XA Expired - Fee Related CN102655195B (zh) | 2011-03-03 | 2011-03-03 | 发光二极管及其制造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US8501514B2 (zh) |
CN (1) | CN102655195B (zh) |
TW (1) | TWI420706B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103378264A (zh) * | 2012-04-28 | 2013-10-30 | 展晶科技(深圳)有限公司 | 发光二极体封装制程及其封装结构 |
CN104124321B (zh) * | 2013-04-24 | 2017-03-01 | 展晶科技(深圳)有限公司 | 半导体发光元件及其制造方法 |
US11695098B2 (en) * | 2019-02-02 | 2023-07-04 | Xiamen Changelight Co., Ltd. | High voltage light-emitting diode and method of producing the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200847493A (en) * | 2007-04-23 | 2008-12-01 | Lg Innotek Co Ltd | Light emitting device and method for manufacturing the same |
CN101740692A (zh) * | 2009-12-24 | 2010-06-16 | 上海蓝光科技有限公司 | 提高led芯片亮度的方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6841800B2 (en) * | 1997-12-26 | 2005-01-11 | Matsushita Electric Industrial Co., Ltd. | Light-emitting device comprising a gallium-nitride-group compound-semiconductor |
US7186580B2 (en) * | 2005-01-11 | 2007-03-06 | Semileds Corporation | Light emitting diodes (LEDs) with improved light extraction by roughening |
KR100631975B1 (ko) * | 2005-03-30 | 2006-10-11 | 삼성전기주식회사 | 질화물 반도체 발광소자 |
JP2007081180A (ja) * | 2005-09-15 | 2007-03-29 | Matsushita Electric Ind Co Ltd | 半導体発光素子 |
KR20070081184A (ko) * | 2006-02-10 | 2007-08-16 | 삼성전기주식회사 | 질화물계 반도체 발광소자 및 그 제조방법 |
WO2007099855A1 (ja) * | 2006-02-28 | 2007-09-07 | Rohm Co., Ltd. | 半導体発光素子 |
JP4362125B2 (ja) * | 2006-03-15 | 2009-11-11 | ローム株式会社 | 側面発光半導体素子及び側面発光半導体素子の製造方法 |
US7674639B2 (en) * | 2006-08-14 | 2010-03-09 | Bridgelux, Inc | GaN based LED with etched exposed surface for improved light extraction efficiency and method for making the same |
JP4660453B2 (ja) * | 2006-11-13 | 2011-03-30 | 昭和電工株式会社 | 窒化ガリウム系化合物半導体発光素子 |
JP4765916B2 (ja) * | 2006-12-04 | 2011-09-07 | サンケン電気株式会社 | 半導体発光素子 |
TW200905928A (en) * | 2007-03-29 | 2009-02-01 | Univ California | Dual surface-roughened N-face high-brightness LED |
CN100583475C (zh) * | 2007-07-19 | 2010-01-20 | 富士迈半导体精密工业(上海)有限公司 | 氮化物半导体发光元件及其制作方法 |
US7858995B2 (en) * | 2007-08-03 | 2010-12-28 | Rohm Co., Ltd. | Semiconductor light emitting device |
KR101501307B1 (ko) * | 2007-09-21 | 2015-03-10 | 가부시끼가이샤 도시바 | 발광 장치 제작 방법 |
TWI446571B (zh) * | 2008-10-14 | 2014-07-21 | Ind Tech Res Inst | 發光二極體晶片及其製作方法 |
KR20100046619A (ko) * | 2008-10-27 | 2010-05-07 | 삼성엘이디 주식회사 | 질화물 반도체 발광 소자 및 이의 제조 방법 |
US8062916B2 (en) * | 2008-11-06 | 2011-11-22 | Koninklijke Philips Electronics N.V. | Series connected flip chip LEDs with growth substrate removed |
TWI436505B (zh) * | 2009-01-17 | 2014-05-01 | Semi Photonics Co Ltd | 具有反射與低阻抗接觸電極之發光二極體及其製造方法 |
CN101494273B (zh) * | 2009-02-27 | 2011-01-19 | 上海蓝光科技有限公司 | 一种发光二极管芯片及其制造方法 |
TW201101538A (en) | 2009-06-19 | 2011-01-01 | Ubilux Optoelectronics Corp | Light emitting diode |
CN101944559B (zh) * | 2009-07-09 | 2013-01-23 | 晶发光电股份有限公司 | 发光二极管 |
CN102456784B (zh) * | 2010-10-29 | 2014-10-15 | 展晶科技(深圳)有限公司 | 发光二极管及其制造方法 |
CN102683533B (zh) * | 2011-03-14 | 2014-12-10 | 展晶科技(深圳)有限公司 | 发光二极管及其制造方法 |
US8343788B2 (en) * | 2011-04-19 | 2013-01-01 | Epistar Corporation | Light emitting device and manufacturing method thereof |
-
2011
- 2011-03-03 CN CN201110051041.XA patent/CN102655195B/zh not_active Expired - Fee Related
- 2011-03-08 TW TW100107669A patent/TWI420706B/zh not_active IP Right Cessation
- 2011-09-15 US US13/233,194 patent/US8501514B2/en not_active Expired - Fee Related
-
2013
- 2013-07-01 US US13/932,178 patent/US8912557B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200847493A (en) * | 2007-04-23 | 2008-12-01 | Lg Innotek Co Ltd | Light emitting device and method for manufacturing the same |
CN101740692A (zh) * | 2009-12-24 | 2010-06-16 | 上海蓝光科技有限公司 | 提高led芯片亮度的方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201238080A (en) | 2012-09-16 |
TWI420706B (zh) | 2013-12-21 |
US20120223324A1 (en) | 2012-09-06 |
CN102655195A (zh) | 2012-09-05 |
US20130292692A1 (en) | 2013-11-07 |
US8912557B2 (en) | 2014-12-16 |
US8501514B2 (en) | 2013-08-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: ADVANCED OPTOELECTRONIC TECHNOLOGY INC. Effective date: 20150121 Owner name: SCIENBIZIP CONSULTING (SHENZHEN) CO., LTD. Free format text: FORMER OWNER: ZHANJING TECHNOLOGY (SHENZHEN) CO., LTD. Effective date: 20150121 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150121 Address after: 518109 Guangdong province Shenzhen city Longhua District Dragon Road No. 83 wing group building 11 floor Applicant after: SCIENBIZIP CONSULTING (SHEN ZHEN) CO., LTD. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Street tabulaeformis Industrial Zone tenth east two Ring Road No. two Applicant before: Zhanjing Technology (Shenzhen) Co., Ltd. Applicant before: Advanced Optoelectronic Technology Inc. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150318 Termination date: 20160303 |