CN102645316B - Large-caliber deflection type device for checking radial shear interference under center shielding condition and method for checking radial shear interference - Google Patents
Large-caliber deflection type device for checking radial shear interference under center shielding condition and method for checking radial shear interference Download PDFInfo
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Abstract
The invention discloses a large-caliber deflection type device for checking radial shear interference under a center shielding condition and a method for checking radial shear interference. The device and the method are technically characterized in that on the basis of a traditional radial shear interference checking method, by means of increasing the shear rate of a telescope system and vertically inclining a reflector, a beam contracting light spot is shifted to a marginal area of a beam expanding light spot and separated from a shadow position shielded by a target in the beam expanding light spot to form interference, and radial shear interference of a specific spatial area is checked under the center shielding condition of the target. The device and the method have the advantages that the problem that the traditional radial shear interference checking method cannot be used for realizing wavefront sensing for the area with a target center shield, interference patterns can be processed by a simple phase unpacking method instead of a radial shear wave surface iteration reconfiguration method as an interference area is shifted to the edge of the beam expanding light spot, the processing procedure of the interference patterns is simplified to a certain degree, and processing time is shortened.
Description
Technical field
The present invention relates to heavy caliber deviation type radial shear interference pick-up unit and method thereof in a kind of central shielding situation.
Background technology
In the test of hypersonic speed flow field aerodynamics, to object in wind-tunnel, the accurate measurement in flow field is around a problem demanding prompt solution.Traditional comparatively ripe method has shadowing method and schlieren method, the second derivative sensitivity that wherein shadowing method stream field changes, and schlieren method stream field change first order derivative sensitivity, but due to their adopt be the principle of geometrical optics, it still has much room for improvement in measuring accuracy.Adopting Radial shearing interferometer to detect to High Speed Flow Field region is also a kind of effective means.First, radial shear interference has adopted the method for optical interference, and the accuracy of detection of distorted wavefront behind flow field has been brought up to optical wavelength magnitude; Secondly, radial-shear interferometer belongs to accurate concurrent path interference system, has higher antijamming capability, has ensured still can obtain comparatively stable interference fringe under high noisy in wind-tunnel detection, the high environment vibrating, thereby has guaranteed the correctness of experimental result; In addition, the data that adopt the method for radial shear interference finally to obtain after the data processing in later stage are to detect the wavefront position phase distributed intelligence of light beam through flow field, can carry out on this basis the reconstruct of space refractive index field or density field, this is to adopt shadowing method and the schlieren method of luminous intensity distribution measurement not to possess.
Detect for High Speed Flow Field, to wind-tunnel focus target thing, the detection in flow field is around comparatively common situation, but because traditional Radial shearing interferometer adopts contracting bundle hot spot and expands the coaxial concentric configuration of hot spot, contracting bundle hot spot expands in the shadow region that in hot spot, object projects dropping on, and causes interference fringe to form.Therefore, just need to propose a kind of can be in object central shielding situation to around the interference detection method that detects of flow field.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, heavy caliber deviation type radial shear interference pick-up unit and method thereof in a kind of central shielding situation are provided.
Heavy caliber deviation type radial shear interference pick-up unit in central shielding situation comprises that laser instrument, collimating and beam expanding system, object, region to be measured, spectroscope, the first catoptron, high shear are than heavy caliber telescopic system, the second catoptron, imaging len and detector; Wherein, object is placed in regional center to be measured, and laser instrument, collimating and beam expanding system, object, spectroscope, the first catoptron, high shear are arranged than heavy caliber telescopic system, the second catoptron, spectroscope, imaging len and detector order in Article 1 light path; Laser instrument, collimating and beam expanding system, object, spectroscope, the second catoptron, high shear are arranged than heavy caliber telescopic system, the first catoptron, spectroscope, imaging len and detector order in Article 2 light path; The first catoptron and the second catoptron are all in vertical direction with angle theta, and θ is 1 °~5 °, make through high shear than the contracting Shu Guang of heavy caliber telescopic system and expand light to depart from former optical axis and propagate.
Heavy caliber deviation type radial shear interference detection method in central shielding situation comprises the steps:
(1) regulate laser instrument, collimating and beam expanding system, spectroscope, the first catoptron, high shear contour more coaxial than heavy caliber telescopic system, the second catoptron, imaging len, detector, regulate collimating and beam expanding system to make heavy caliber parallel light emergence;
(2) regulate spectroscopical angle to make through spectroscopical transmitted light and the mutual angle in 90 ° of reflected light, and be radiated at respectively on the first catoptron and the second catoptron;
(3) regulate the inclination angle on the first catoptron and the second catoptron angle and vertical direction in the horizontal direction, Article 1 light path and the hot spot of Article 2 light path after imaging len are overlapped on detector;
(3) between the first catoptron and the second catoptron, add high shear than heavy caliber telescopic system, regulate the position of this telescopic system and inclination angle to make contracting bundle hot spot on detector and to expand hot spot concentric, and produce interference fringe;
(4) inclination angle of adjusting the first catoptron and the second catoptron in the vertical direction, makes the contracting bundle hot spot on detector shift out the object shaded side the generation interference that expand hot spot;
(5) gather the interferogram receiving on detector, the part light wave that expands wavefront participation interference is approximately to plane wave, interferogram is carried out to phase unwrapping, obtain the phase data of interferogram.
The present invention adopts contracting beam optical path and the method that expands light path and optical axis deviation, make the contracting bundle hot spot on detector can move on to the fringe region that expands hot spot, solve a difficult problem that adopts conventional radial shear interference method cannot carry out to the area of space that contains object central shielding wavefront detection, again because described high shear has higher shearing ratio than heavy caliber telescopic system, the part light wave that expands wavefront participation interference can be approximately to plane wave processes, make the processing of interferogram can adopt the comparatively phase unwrapping method of the safe graceful Green's interference system of simple tradition, regard a road as and detect the interference of light wave He Yi road reference planes light wave, and without using radial shear corrugated iterative reconstruction algorithm comparatively consuming time, simplify to a certain extent the processing procedure of experimental data, shorten the processing time.
Brief description of the drawings
Fig. 1 is the heavy caliber deviation type radial shear interference structure of the detecting device schematic diagram in central shielding situation;
Fig. 2 be contracting light beams of the present invention and expand BEAM SQUINT optical axis by high shear than the light path schematic diagram of heavy caliber telescopic system;
Fig. 3 is the process flow diagram of the heavy caliber deviation type radial shear interference detection method in central shielding situation;
Fig. 4 is contracting bundle hot spot and expand hot spot and wherein schematic diagram and the interferogram of object shadow positions before detector;
Fig. 5 is the interferogram that the detector after intercepting receives;
Fig. 6 adopts the wavefront position phase distribution plan of interfering the removal object shield portions obtaining after phase demodulation method.
Embodiment
As shown in Figure 1, 2, the heavy caliber deviation type radial shear interference pick-up unit in central shielding situation comprises that laser instrument S1, collimating and beam expanding system S2, object S3, region S4 to be measured, spectroscope S5, the first catoptron S6, high shear are than heavy caliber telescopic system S7, the second catoptron S8, imaging len S9 and detector S10; Wherein, object S3 is placed in S4 center, region to be measured, and laser instrument S1, collimating and beam expanding system S2, object S3, spectroscope S5, the first catoptron S6, high shear are arranged than heavy caliber telescopic system S7, the second catoptron S8, spectroscope S5, imaging len S9 and detector S10 order in Article 1 light path; Laser instrument S1, collimating and beam expanding system S2, object S3, spectroscope S5, the second catoptron S8, high shear are arranged than heavy caliber telescopic system S7, the first catoptron S6, spectroscope S5, imaging len S9 and detector S10 order in Article 2 light path; The first catoptron S6 and the second catoptron S8 are all in vertical direction with angle theta, and θ is 1 °~5 °, make through high shear than the contracting Shu Guang of heavy caliber telescopic system S7 and expand light to depart from former optical axis and propagate.
Heavy caliber deviation type radial shear interference detection method in central shielding situation comprises the steps:
(1) regulate laser instrument S1, collimating and beam expanding system S2, spectroscope S5, the first catoptron S6, high shear contour more coaxial than heavy caliber telescopic system S7, the second catoptron S8, imaging len S9, detector S10, regulate collimating and beam expanding system S2 to make heavy caliber parallel light emergence;
(2) regulate the angle of spectroscope S5 to make transmitted light and the mutual angle in 90 ° of reflected light through spectroscope S5, and be radiated at respectively on the first catoptron S6 and the second catoptron S8;
(3) regulate the inclination angle on the first catoptron S6 and the second catoptron S8 angle and vertical direction in the horizontal direction, Article 1 light path and the hot spot of Article 2 light path after imaging len S9 are overlapped on detector S10;
(3) between the first catoptron S6 and the second catoptron S8, add high shear than heavy caliber telescopic system S7, regulate the position of this telescopic system and inclination angle to make contracting bundle hot spot on detector S10 and to expand hot spot concentric, and produce interference fringe;
(4) inclination angle of adjusting the first catoptron S6 and the second catoptron S8 in the vertical direction, makes the contracting bundle hot spot on detector S10 shift out the object shaded side the generation interference that expand hot spot;
(5) gather the interferogram receiving on detector S10, the part light wave that expands wavefront participation interference is approximately to plane wave, interferogram is carried out to phase unwrapping, obtain the phase data of interferogram.
As shown in Figure 2, represented through the contracting light beams of catoptron S6 and catoptron S8 reflection and expand BEAM SQUINT former optical axis by high shear than the light path of heavy caliber telescopic system S7.Adding high shear than heavy caliber telescopic system S7 and making contracting bundle hot spot on detector S10 and expand that hot spot is concentric to be produced after interference fringe, the angle of catoptron S6 and catoptron S8 and vertical direction is 0.Fine setting catoptron S6 makes itself and vertical direction have the angle of a θ, makes to move on contracting bundle hot spot, and now interference fringe disappears.Can find that the feedback light on laser instrument S1 end face has also shifted out laser emitting window simultaneously.Fine setting catoptron S8 makes to present near light return laser light device outgoing window, and interference fringe occurs again, and contracting bundle hot spot is now with to expand hot spot no longer concentric, but moves a little to some extent.Continue fine setting catoptron S6 and make itself and the angle theta increase of vertical direction, on continuing, moves contracting bundle hot spot, finely tune again catoptron S8 and make to present light return laser light device outgoing window, there is interference fringe, so repeatable operation, until contracting bundle hot spot moves to the fringe region that expands hot spot, the interference fringe obtaining is the heavy caliber deviation type radial shear interference diagram data in central shielding situation.
Because described high shear adopts higher shearing ratio than heavy caliber telescopic system S7, and last interference fringe is positioned at the fringe region that expands wavefront, the part light wave that expands wavefront participation interference can be approximately to plane wave processes, make the processing of interferogram can adopt the comparatively phase unwrapping method of the safe graceful Green's interference system of simple tradition, regard a road as and detect the interference of light wave He Yi road reference planes light wave, and without using radial shear corrugated iterative reconstruction algorithm comparatively consuming time, simplify to a certain extent the processing procedure of experimental data, shorten the processing time.
Embodiment
The present invention is applied to a heavy caliber deviation type radial shear interference detection method example based in central shielding situation and is described below.
Fig. 1 is the light path layout of the heavy caliber deviation type radial shear interference detection system in central shielding situation.The tested area size of embodiment is f70mm, and there is the object of a blunted cone shape its center.The laser instrument adopting is He-Ne LASER Light Source, laser instrument S1 produces bigbore directional light through collimating and beam expanding system S2, through the surveyed area S4 of object S3 centering position, through spectroscope S5 beam splitting Hou Yi road toward mirror S6, toward mirror S8 after restrainting than heavy caliber telescopic system S7 contracting through high shear, enters imaging len S9 by spectroscope S5 transmission; Another road light toward mirror S8, toward mirror S6 after expanding than heavy caliber telescopic system S7 through high shear, enter imaging len S9 by spectroscope S5 reflection, the two-beam that enters imaging len S9 through spectroscope S5 transmission or reflection obtains interference fringe on detector S10.Wherein, catoptron S6 and catoptron S8 are all in vertical direction with angle theta, and θ is 1 °~5 °, make through high shear than the contracting bundle of heavy caliber telescopic system S7 and expand light to depart from former optical axis and propagate.
Table one for the effective measurement bore in embodiment, shear and the index parameter such as compare
Effectively measure bore | Telescopic system is sheared ratio | CCD pixel count |
70mm | 16:1 | 1024 × 1024 |
In described deviation type radial shear interference system, the quality of standard source of parallel light is for follow-up measurement accuracy of detection important.In embodiment, utilize a biconcave lens to separate object lens with a pair of and form collimating and beam expanding system S2, finally can obtain the parallel beam of about Φ 70mm.Tieing up adjusting mechanism by a precision five can adjust biconcave lens and separate the coaxial of object lens with two.
High shear in embodiment adopts heavy caliber Galileo to expand contracting beam system than heavy caliber telescopic system S7.Wherein, effective clear aperture of large end mirror group
, effective clear aperture of small end mirror group
, expand contracting beam ratio
.The theoretical wavefront distortion of whole mirror group is less than
, this can alleviate the impact of edge diffraction effect effectively, improve the quality that obtains interferogram.
In embodiment, regulate light path to make each several part optical system contour coaxial, and make the mutual angle in 90 ° of two-beam through spectroscope S5, accommodation reflex mirror S6 and catoptron S8 inclination angle in the horizontal direction make to overlap on detector S10 through the hot spot of the two-beam of imaging len S9, after adding high shear than heavy caliber telescopic system S7, regulate its position and inclination angle to make contracting bundle hot spot on detector S10 and to expand hot spot concentric, and produce interference fringe.On this basis, the progressively inclination angle of accommodation reflex mirror S6 and catoptron S8 in the vertical direction, shifts out contracting bundle hot spot on detector S10 to expand hot spot object shaded side and produce to interfere.Fig. 4 is contracting bundle hot spot and expand hot spot and wherein position view and the interferogram of object shade before detector S10.Can find that contracting bundle hot spot now has shifted out the shadow region that expands object in hot spot, also form interference fringe simultaneously.Fig. 5 is the interference fringe that the detector S10 after intercepting receives.Utilize this interference fringe can be to object being measured of region to be detected around.
For the phase demodulation of interference fringe, traditional phase shift technology has very large advantage in precision and squelch, but because needs gather multi-frame interferometry figure, does not meet the requirement that transient state detects; And Fourier transformation method is not easy to use in the situation that blocking.In view of multiple phase demodulation technology cannot be applied to the interference fringe phase demodulation in central shielding situation, in embodiment, adopt two-dimentional regularization striped phase demodulation technology to process the interferogram obtaining.Fig. 6 adopts the wavefront position phase distribution plan of interfering the removal object shield portions obtaining after phase demodulation method.
Claims (2)
1. the heavy caliber deviation type radial shear interference pick-up unit in central shielding situation, is characterized in that comprising that laser instrument (S1), collimating and beam expanding system (S2), object (S3), region to be measured (S4), spectroscope (S5), the first catoptron (S6), high shear are than heavy caliber telescopic system (S7), the second catoptron (S8), imaging len (S9) and detector (S10); Wherein, object (S3) is placed in center, region to be measured (S4), and laser instrument (S1), collimating and beam expanding system (S2), object (S3), spectroscope (S5), the first catoptron (S6), high shear are arranged than heavy caliber telescopic system (S7), the second catoptron (S8), spectroscope (S5), imaging len (S9) and detector (S10) order in Article 1 light path; Laser instrument (S1), collimating and beam expanding system (S2), object (S3), spectroscope (S5), the second catoptron (S8), high shear are arranged than heavy caliber telescopic system (S7), the first catoptron (S6), spectroscope (S5), imaging len (S9) and detector (S10) order in Article 2 light path; The first catoptron (S6) and the second catoptron (S8) are all in vertical direction with angle theta, and θ is 1 °~5 °, make through high shear than the contracting Shu Guang of heavy caliber telescopic system (S7) and expand light to depart from former optical axis and propagate.
2. the heavy caliber deviation type radial shear interference detection method in the central shielding situation that use is installed as claimed in claim 1, is characterized in that comprising the steps:
(1) regulate laser instrument (S1), collimating and beam expanding system (S2), spectroscope (S5), the first catoptron (S6), high shear contour more coaxial than heavy caliber telescopic system (S7), the second catoptron (S8), imaging len (S9), detector (S10), regulate collimating and beam expanding system (S2) to make heavy caliber parallel light emergence;
(2) regulate the angle of spectroscope (S5) to make transmitted light and the mutual angle in 90 ° of reflected light through spectroscope (S5), and be radiated at respectively on the first catoptron (S6) and the second catoptron (S8);
(3) regulate the inclination angle on the first catoptron (S6) and the second catoptron (S8) angle and vertical direction in the horizontal direction, make Article 1 light path and the Article 2 light path hot spot after imaging len (S9) in the upper coincidence of detector (S10);
(3) between the first catoptron (S6) and the second catoptron (S8), add high shear than heavy caliber telescopic system (S7), regulate the position of this telescopic system and inclination angle to make contracting bundle hot spot on detector (S10) and to expand hot spot concentric, and produce interference fringe;
(4) inclination angle of adjusting the first catoptron (S6) and the second catoptron (S8) in the vertical direction, makes the contracting bundle hot spot on detector (S10) shift out the object shaded side the generation interference that expand hot spot;
(5) gather the interferogram receiving on detector (S10), the part light wave that expands wavefront participation interference is approximately to plane wave, interferogram is carried out to phase unwrapping, obtain the phase data of interferogram.
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CN104183177B (en) * | 2014-09-10 | 2016-03-30 | 哈尔滨工业大学 | Based on the aero-optical effect simulator of distorted image |
CN112033647B (en) * | 2020-08-27 | 2022-08-02 | 中国科学院光电技术研究所 | Multi-aperture system pupil detection and correction method |
CN112113739A (en) * | 2020-09-04 | 2020-12-22 | 中国空气动力研究与发展中心高速空气动力研究所 | Method for measuring boundary layer density field by using loop radial shearing interferometry |
CN112964203B (en) * | 2021-02-08 | 2022-09-16 | 杭州晶耐科光电技术有限公司 | Glancing incidence common-path self-interference device for detecting rough plane surface type |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10311440A1 (en) * | 2003-03-15 | 2004-09-23 | Leica Microsystems Heidelberg Gmbh | 4Pi microscope optical length equalization procedure converts path length to wavelength specific spatial intensity distributions by tilting phase plane |
US7733492B1 (en) * | 2004-06-04 | 2010-06-08 | University Of Hawaii | Sagnac fourier transform spectrometer having improved resolution |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002296005A (en) * | 2001-03-29 | 2002-10-09 | Nikon Corp | Aligning method, point diffraction interference measuring instrument, and high-accuracy projection lens manufacturing method using the same instrument |
JP2010169472A (en) * | 2009-01-21 | 2010-08-05 | Konica Minolta Opto Inc | Method of interference measurement |
-
2012
- 2012-04-24 CN CN201210121717.2A patent/CN102645316B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10311440A1 (en) * | 2003-03-15 | 2004-09-23 | Leica Microsystems Heidelberg Gmbh | 4Pi microscope optical length equalization procedure converts path length to wavelength specific spatial intensity distributions by tilting phase plane |
US7733492B1 (en) * | 2004-06-04 | 2010-06-08 | University Of Hawaii | Sagnac fourier transform spectrometer having improved resolution |
Non-Patent Citations (6)
Title |
---|
《Measurement of transient near-infrared laser pulse wavefront with high precision by radial shaearing interferometer》;Dong Liu.etc;《Optics Communications》;20071231;第173-178页 * |
Dong Liu.etc.《Measurement of transient near-infrared laser pulse wavefront with high precision by radial shaearing interferometer》.《Optics Communications》.2007,第173-178页. |
JP特开2002-296005A 2002.10.09 |
JP特开2010-169472A 2010.08.05 |
使用双波带板径向剪切干涉仪检测非球面透镜;张斌等;《激光技术》;20070228;第31卷(第1期);第37-46页 * |
张斌等.使用双波带板径向剪切干涉仪检测非球面透镜.《激光技术》.2007,第31卷(第1期), |
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