CN104808254A - Optical multiple-frequency laser interference system for high-precision absolute gravity meter and application thereof - Google Patents

Optical multiple-frequency laser interference system for high-precision absolute gravity meter and application thereof Download PDF

Info

Publication number
CN104808254A
CN104808254A CN201510196862.0A CN201510196862A CN104808254A CN 104808254 A CN104808254 A CN 104808254A CN 201510196862 A CN201510196862 A CN 201510196862A CN 104808254 A CN104808254 A CN 104808254A
Authority
CN
China
Prior art keywords
prism
test
diaphragm
light beam
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510196862.0A
Other languages
Chinese (zh)
Other versions
CN104808254B (en
Inventor
黄腾超
庞斌
贺青
舒晓武
刘承
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang University ZJU
Original Assignee
Zhejiang University ZJU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University ZJU filed Critical Zhejiang University ZJU
Priority to CN201510196862.0A priority Critical patent/CN104808254B/en
Publication of CN104808254A publication Critical patent/CN104808254A/en
Application granted granted Critical
Publication of CN104808254B publication Critical patent/CN104808254B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses an optical multiple-frequency laser interference system for a high-precision absolute gravity meter. The optical multiple-frequency laser interference system comprises a frequency stabilized laser, a collimation and beam expanding mirror, an adjustable reflector, a beam splitter, a reference prism, a faller prism, a horizontal liquid level, a reflecting prism, a diaphragm, a focusing lens and a photoelectric detector, wherein laser is emitted by the frequency stabilized laser, after passing through collimation and beam expanding mirror vertically downwards transmitted after being reflected by the adjustable reflector, and then split into a test light beam vertically downwards transmitted and a reference light beam horizontally transmitted to the right by the beam splitter, wherein the test light beam is shot to the horizontal liquid level after being reflected by the reference prism and the faller prism for many times, then returns according to the original light path after being reflected to join with the reference light beam to generate interference fringes, and the interference fringes pass through the opened diaphragm and are focused on the photoelectric detector by the focusing lens. The invention also discloses an absolute gravity meter adopting the system. According to the optical multiple-frequency laser interference system for the high-precision absolute gravity meter and the application thereof, the test precision can be improved for multiple times, and the direction of the test light beam can be simply and effectively adjusted to ensure that the direction is parallel to the direction of the gravity acceleration.

Description

High precision absolute gravimeter optics frequency multiplier type laser interference system and application
Technical field
The present invention relates to absolute gravity measuring technology, especially, relate to a kind of high precision absolute gravimeter optics frequency multiplier type laser interference system, utilize the drop-off positions of falling bodies prism in this system energy Precision measurement absolute gravity test process.
Background technology
Gravity field is the basic physical field of the earth, high precision absolute gravity observation data is widely used in the fields such as geodesy, geophysics, geodynamics and seismology, is also widely used in military affairs, space flight, navigation, resource exploration and Development Engineering field simultaneously.The general absolute gravimeter that adopts is measured acceleration of gravity at present.
Fig. 1 is prior art absolute gravimeter structural representation.As shown in Figure 1, in prior art, absolute gravimeter utilizes laser interferometry, accurately measures the position time data (h of falling bodies prism in vacuum environment during free-falling i, t i), then bring data into movement of falling object equation and utilize the method for fitting of a polynomial to obtain the optimum evaluation of acceleration of gravity.Absolute gravimeter is generally made up of laser interference system, vacuum freely falling body control system, ultralow frequency vertical vibration isolation system, high-speed signal acquisition system and data processing and instrumentation control system five part.
Laser interference system provides length standard for absolute gravity test, and ensureing that test beams is consistent with acceleration of gravity direction, is the important component part of absolute gravimeter.
Fig. 2 is prior art absolute gravimeter laser interference system structural representation.As shown in Figure 2, laser sends the rear test beams being divided into the reference beam of horizontal transport by the first beam splitter and upwards transmitting by frequency stabilized laser, test beams is upwards by the backward lower transmission of falling bodies prismatic reflection doing the movement of falling object in the vacuum chamber, after the plane mirror of two adjustment light paths, the second beam splitter is met at reference beam after being installed in the reference prism reflection on overlength spring vibrating isolation system again, produce and interfere, optical interference signals is converted to electric signal by photodetector, is for data processing for follow-up system.
Absolute gravity acceleration is a little determined in absolute gravimeter detection, needs to ensure that in laser interference system, test beams is parallel with absolute gravity acceleration direction, therefore in existing absolute gravimeter laser interference system, all has corresponding laser vertical direction regulon.
Fig. 3 is laser vertical direction regulon in prior art absolute gravimeter laser interference system.As shown in Figure 3, before absolute gravity test starts, need to regulate test beams direction in laser interference system, make it parallel with acceleration of gravity direction, test beams Shi Qiyanyuan road in general horizontal liquid level reflection original optical path returns, and produce with reference beam and interfere, recycling telescopic system observes whether interference image is Homogeneous Circular hot spot, judge whether test beams is adjusted to vertical direction with this, test beams to be determined is modulated is vertical direction, remove horizontal liquid level, carry out absolute gravity acceleration analysis.
In prior art absolute gravimeter, only reflection is once, low to test prism distance of fall susceptibility between falling bodies prism and reference prism for laser interference system test beams; Test beams vertical direction regulates simultaneously needs by telescopic system auxiliary observation, system is comparatively complicated, and test beams vertical direction needs to withdraw horizontal liquid level after having regulated could start absolute gravity test, change the state of instrument, can not the vertical direction situation of Real-Time Monitoring test beams.
Summary of the invention
In order to overcome above-mentioned deficiency, the invention provides high precision absolute gravimeter optics frequency multiplier type laser interference system and application.
A kind of high precision absolute gravimeter optics frequency multiplier type laser interference system, it comprises frequency stabilized laser, collimator and extender mirror, adjustable mirror, beam splitter, reference prism, falling bodies prism, horizontal liquid level, reflecting prism, diaphragm, condenser lens, photodetector; Laser is sent by frequency stabilized laser, transmit straight down after being reflected by adjustable mirror after collimator and extender mirror, again through reference beam that beam splitter is divided into the test beams transmitted straight down and level to transmit to the right, wherein test beams is respectively through directive horizontal liquid level after the multiple reflections of reference prism and falling bodies prism, then after horizontal liquid level reflection, turn back to beam splitter place by original optical path to converge with the reference beam reflected through reflecting prism, produce interference fringe, interfering beam is focused lens through the diaphragm opened and converges on photodetector.
Described horizontal liquid level is alcohol or mercury.
The transmittance of described beam splitter, test beams when generation can be made to interfere is equal with reference beam light intensity.
A kind of absolute gravimeter adopting described system.
A systematic difference method described in basis, before absolute gravity test starts, closes diaphragm, when incident beam and vertical direction have an angle theta, test error can be caused to be oblique incidence light beam becomes the identical light beam in inclination angle through reference prism after the multiple reflections of falling bodies prism, light beam incides on horizontal liquid level, after reflection, outgoing beam and beam separation, angle is 2 θ, outgoing beam becomes light beam through the multiple reflections of falling bodies prism and reference prism again, light beam is become test beams by after beam splitter reflection, test beams produces with the reference beam reflected via reflecting prism interferes, its angle is α=2 θ, diaphragm face forms equally spaced interference fringe, regulate adjustable mirror, interference image is made to become an isocandela circle spot, at this moment test beams is parallel with acceleration of gravity direction, i.e. θ=0, open diaphragm again, start absolute gravity test, in test process, diaphragm can be closed at any time, on observation diaphragm face, whether interference image remains an isocandela circle spot whether carry out Real-Time Monitoring test beams parallel with vertical direction, if interference image changes, adjustable mirror to interference image is regulated to become isocandela circle spot again, close diaphragm again, continue absolute gravity test.
Beneficial effect of the present invention:
1, make full use of the bore of reference prism and falling bodies prism, adopt the mode of optical frequency-doubling, testing laser is reflected N time between reference prism and falling bodies prism, on the basis not changing other assembly of absolute gravimeter, measuring accuracy can be improved N doubly;
2, a kind of laser interference system test beams vertical direction regulon is devised, the direction of test beams can be regulated simply and effectively, ensure that it is parallel with acceleration of gravity direction, in absolute gravity test process, Real-Time Monitoring and adjustment can be carried out to the direction of test beams simultaneously.
Accompanying drawing explanation
Fig. 1 is prior art absolute gravimeter structural representation;
Fig. 2 is prior art absolute gravimeter laser interference system structural representation;
Fig. 3 is laser vertical direction regulon in prior art absolute gravimeter laser interference system;
To be that test beams and acceleration of gravity direction are not parallel cause measuring error schematic diagram to Fig. 4;
Fig. 5 is laser interference schematic diagram;
Fig. 6 shows a kind of embodiment absolute gravimeter laser interference system structural representation of the present invention; Wherein, 1-frequency stabilized laser, 2-collimator and extender mirror, 3-adjustable mirror, 4-beam splitter, 5-reference prism, 6-falling bodies prism, 7-horizontal liquid level, 8-reflecting prism, 9-diaphragm, 10-condenser lens, 11-photodetector.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with embodiment also with reference to accompanying drawing, the present invention is described in further detail.
Absolute gravimeter utilizes laser interferometry, accurately measures the position time data (h of falling bodies prism free-falling in vacuum environment i, t i), then carry it into freely falling body formula adopt the method for fitting of a polynomial to obtain the optimum evaluation of acceleration of gravity, its principle of interference is similar with Michelson interferometer, and falling bodies prism often falls λ/2 (wherein λ optical maser wavelength), just a generation interference fringe.
Acceleration of gravity is a little determined in absolute gravimeter test, needs to ensure that test beams is parallel with acceleration of gravity direction, if both are not parallel, can introduce error in measuring process.As shown in Figure 4, when test beams and vertical direction have an angle theta, test error is therefore absolute gravimeter laser interference system must have test beams vertical direction regulon, to ensure that test beams direction is vertical, reduces test error.
Laser interference image is determined by the optical path difference participating in the light beam of interfering, and interference fringe and aplanatism difference track, as shown in Figure 5, λ is for interfering optical maser wavelength, and ω is the angle of two interfering beams, then interference fringe spacing when ω=0, namely interfering beam is parallel, then fringe spacing e levels off to infinity, film viewing screen is shown as an isocandela circular light spot, utilize this character, can the direction of laser interference system test beams in absolute gravimeter be detected and be regulated, make it parallel with acceleration of gravity direction.
Fig. 6 is a kind of high precision absolute gravimeter of the present invention optics frequency multiplier type laser interference system structural representation.Its ultimate principle is utilize the method for optical frequency-doubling to realize in absolute gravity test for the high-acruracy survey of falling bodies prism location, can monitor testing laser bundle vertical direction in absolute gravity test process and regulate in real time simultaneously, whole laser interference system comprises frequency stabilized laser 1, collimator and extender mirror 2, adjustable mirror 3, beam splitter 4, reference prism 5, falling bodies prism 6, horizontal liquid level 7, reflecting prism 8, diaphragm 9, condenser lens 10, photodetector 11.
Wherein laser is sent by frequency stabilized laser 1, transmit straight down after being reflected by adjustable mirror 3 after collimator and extender mirror 2, again through reference beam that beam splitter 4 is divided into the test beams transmitted straight down and level to transmit to the right, wherein test beams is respectively through (being illustrated as 4 times) directive horizontal liquid level 7 after the multiple reflections of reference prism 5 and falling bodies prism 6, then converge with the reference beam reflected through reflecting prism 8 via turning back to beam splitter 4 place by original optical path after horizontal liquid level reflection, produce interference fringe, the diaphragm 9 of interfering beam again through opening is focused lens 10 and converges on photodetector 11, optical interference signals is converted to electric signal and goes out the valuation of absolute gravity acceleration for absolute gravimeter data handling system the Fitting Calculation by photodetector 11.
Horizontal liquid level 7 is that alcohol or mercury etc. can the liquid surfaces of reflected light, when light beam is with vertical direction incoming Level liquid level 7, it can return by original optical path, and when incident beam has an inclination angle incident relative to vertical direction, folded light beam can be separated with incident beam.
In test process, test beams is through the multiple reflections of horizontal liquid level 7 and reference prism 5 and falling bodies prism 6, decay comparatively strong, the transmittance of special design beam splitter 4, test beams when generation is interfered is equal with reference beam light intensity, intetference-fit strengthening levels off to 1, improves follow-up measurement signal to noise ratio (S/N ratio).
In laser interference system of the present invention, test beams need (be 4 times in figure through the N of reference prism 5 and falling bodies prism 6, but have more than and be limited to this) secondary reflection, that often falls λ/2N when falling bodies prism 6 just can produce an interference fringe, an interference fringe is produced relative to λ/2, falling bodies prism whereabouts in the absolute gravimeter of prior art, absolute gravity acceleration analysis precision when other assemblies of absolute gravimeter are constant, can be improved N doubly by the present invention.
Before absolute gravity test, diaphragm 9 need be closed, regulate test beams direction, due to the reflection of horizontal liquid level 7, interference image will be produced on diaphragm 9, as shown in phantom in Figure 6, if incident beam 12 and vertical direction have an angle theta, light beam 13 is become by reference to after the multiple reflections of prism 5 and falling bodies prism 6, it incides on horizontal liquid level 7 with identical angle, through reflection, outgoing beam 14 can be separated with light beam 13, angle is 2 θ, outgoing beam 14 becomes light beam 15 through the multiple reflections of test prism 6 and reference prism 5 again, light beam 15 is reflected as test beams 16 through beam splitter 4, test beams 16 produces with the reference beam 17 reflected via reflecting prism 8 interferes, its angle is α=2 θ, equally spaced interference fringe 18 can be formed on diaphragm face, regulate adjustable mirror 3, interference image is made to gradually become an isocandela circle spot 19, then represent that two interfering beam angles are minimum, i.e. θ=0, test beams is parallel with acceleration of gravity direction.
The He-Ne Frequency Stabilized Lasers of λ=632.8nm is generally adopted to be light source in absolute gravimeter, light beam expands as 3mm through collimator and extender mirror 2, by eye recognition, can ensure that interference image on diaphragm 9 is within the scope of half striped, the angle that can be derived from test beams and vertical direction is to the maximum the measuring error caused is: Δg = g · θ 2 2 = 1.4 μGal .
Adjustable mirror 3 to be regulated makes the upper interference image of diaphragm 9 be after an isocandela circle spot 19, opens diaphragm 9, starts absolute gravity measurement.
In test process, diaphragm 9 can be closed at any time, on observation diaphragm face, whether interference image remains an isocandela circle spot 19 whether carry out Real-Time Monitoring test beams parallel with vertical direction, if interference image is not isocandela circle spot 19, after regulating adjustable mirror 3 to interference image to become isocandela circle spot 19, close diaphragm 9, continue absolute gravity test.

Claims (5)

1. a high precision absolute gravimeter optics frequency multiplier type laser interference system, it is characterized in that, it comprises frequency stabilized laser (1), collimator and extender mirror (2), adjustable mirror (3), beam splitter (4), reference prism (5), falling bodies prism (6), horizontal liquid level (7), reflecting prism (8), diaphragm (9), condenser lens (10), photodetector (11), laser is sent by frequency stabilized laser (1), (transmit straight down after being reflected by adjustable mirror (3) after 2 through collimator and extender mirror, again through reference beam that beam splitter (4) is divided into the test beams transmitted straight down and level to transmit to the right, wherein test beams is respectively through directive horizontal liquid level (7) after the multiple reflections of reference prism (5) and falling bodies prism (6), then after horizontal liquid level (7) reflection, turn back to beam splitter (4) place by original optical path to converge with the reference beam reflected through reflecting prism (8), produce interference fringe, interfering beam is focused lens (10) through the diaphragm (9) opened and converges on photodetector (11).
2. system according to claim 1, is characterized in that, described horizontal liquid level (7) is alcohol or mercury.
3. system according to claim 1, is characterized in that, the transmittance of described beam splitter (4), test beams when generation can be made to interfere is equal with reference beam light intensity.
4. one kind adopts the absolute gravimeter of system according to any one of claim 1-3.
5. a systematic difference method according to claim 1, is characterized in that, before absolute gravity test starts, closes diaphragm (9), and when incident beam (12) and vertical direction have an angle theta, test error can be caused to be oblique incidence light beam (12) becomes the identical light beam in inclination angle (13) through reference prism (5) after the multiple reflections of falling bodies prism (6), light beam (13) incides on horizontal liquid level (7), after reflection, outgoing beam (14) is separated with light beam (13), angle is 2 θ, outgoing beam (14) becomes light beam (15) through the multiple reflections of falling bodies prism (6) and reference prism (5) again, light beam (15) is become test beams (16) by after beam splitter (4) reflection, test beams (16) produces with the reference beam (17) reflected via reflecting prism (8) interferes, its angle is α=2 θ, diaphragm (9) face is formed equally spaced interference fringe (18), regulate adjustable mirror (3), interference image is made to become isocandela circle spot (19), at this moment test beams is parallel with acceleration of gravity direction, i.e. θ=0, open diaphragm (9) again, start absolute gravity test, in test process, diaphragm (9) can be closed at any time, on observation diaphragm (9) face, whether interference image remains isocandela circle spot (19) whether carry out Real-Time Monitoring test beams parallel with vertical direction, if interference image changes, adjustable mirror (3) to interference image is regulated to become isocandela circle spot (19) again, close diaphragm (9) again, continue absolute gravity test.
CN201510196862.0A 2015-04-23 2015-04-23 High-precision absolute gravimeter optics frequency multiplier type laser interference system and application Expired - Fee Related CN104808254B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510196862.0A CN104808254B (en) 2015-04-23 2015-04-23 High-precision absolute gravimeter optics frequency multiplier type laser interference system and application

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510196862.0A CN104808254B (en) 2015-04-23 2015-04-23 High-precision absolute gravimeter optics frequency multiplier type laser interference system and application

Publications (2)

Publication Number Publication Date
CN104808254A true CN104808254A (en) 2015-07-29
CN104808254B CN104808254B (en) 2018-04-10

Family

ID=53693239

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510196862.0A Expired - Fee Related CN104808254B (en) 2015-04-23 2015-04-23 High-precision absolute gravimeter optics frequency multiplier type laser interference system and application

Country Status (1)

Country Link
CN (1) CN104808254B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107219561A (en) * 2017-05-03 2017-09-29 浙江大学 A kind of High-Precision Gravimeter Survey device based on luminous power effect
CN107315200A (en) * 2017-05-03 2017-11-03 浙江大学 A kind of high accuracy definitely relative gravity meter of luminous power driving
RU2663542C1 (en) * 2017-06-07 2018-08-07 Анатолий Борисович Попов Interferometer of absolute gravimeter
CN109814165A (en) * 2019-02-25 2019-05-28 浙江大学 A kind of cooling miniaturization high-precision optical gravimeter of luminous power
CN111060165A (en) * 2019-12-23 2020-04-24 合肥固泰自动化有限公司 High-precision punching plate flowmeter

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2724122C1 (en) * 2019-11-11 2020-06-22 Федеральное государственное бюджетное учреждение науки Институт автоматики и электрометрии Сибирского отделения Российской академии наук (ИАиЭ СО РАН) Method of setting vertical of working laser beam in ballistic gravimeter

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995025266A1 (en) * 1994-03-14 1995-09-21 The Regents Of The University Of California Optical fiber gravity meter
CN102323624A (en) * 2011-08-05 2012-01-18 清华大学 Absolute gravity measuring system and measuring method as well as falling method of free-falling body
CN202141813U (en) * 2011-07-20 2012-02-08 中国地震局地球物理研究所 Light path adjusting device
RU2475786C2 (en) * 2011-05-06 2013-02-20 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт метрологии им. Д.И. Менделеева" (ФГУП "ВНИИМ им. Д.И. Менделеева") Absolute ballistic gravimeter
CN103941301A (en) * 2014-04-13 2014-07-23 浙江大学 Catapulting type absolute gravimeter faller prism upward-throwing control device and gravity test method
CN204631269U (en) * 2015-04-23 2015-09-09 浙江大学 High precision absolute gravimeter optics frequency multiplier type laser interference system and application

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995025266A1 (en) * 1994-03-14 1995-09-21 The Regents Of The University Of California Optical fiber gravity meter
RU2475786C2 (en) * 2011-05-06 2013-02-20 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт метрологии им. Д.И. Менделеева" (ФГУП "ВНИИМ им. Д.И. Менделеева") Absolute ballistic gravimeter
CN202141813U (en) * 2011-07-20 2012-02-08 中国地震局地球物理研究所 Light path adjusting device
CN102323624A (en) * 2011-08-05 2012-01-18 清华大学 Absolute gravity measuring system and measuring method as well as falling method of free-falling body
CN103941301A (en) * 2014-04-13 2014-07-23 浙江大学 Catapulting type absolute gravimeter faller prism upward-throwing control device and gravity test method
CN204631269U (en) * 2015-04-23 2015-09-09 浙江大学 High precision absolute gravimeter optics frequency multiplier type laser interference system and application

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
吴书清: "基于自由落体原理的绝对重力仪关键技术的研究及应用", 《中国优秀硕士学位论文全文数据库•基础科学辑》 *
张琢: "《激光干涉测试技术及应用》", 31 October 1998, 机械工业出版社 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107219561A (en) * 2017-05-03 2017-09-29 浙江大学 A kind of High-Precision Gravimeter Survey device based on luminous power effect
CN107315200A (en) * 2017-05-03 2017-11-03 浙江大学 A kind of high accuracy definitely relative gravity meter of luminous power driving
CN107315200B (en) * 2017-05-03 2019-04-16 浙江大学 A kind of absolute relative gravity meter of high-precision of luminous power driving
RU2663542C1 (en) * 2017-06-07 2018-08-07 Анатолий Борисович Попов Interferometer of absolute gravimeter
CN109814165A (en) * 2019-02-25 2019-05-28 浙江大学 A kind of cooling miniaturization high-precision optical gravimeter of luminous power
CN111060165A (en) * 2019-12-23 2020-04-24 合肥固泰自动化有限公司 High-precision punching plate flowmeter
CN111060165B (en) * 2019-12-23 2021-06-29 合肥固泰自动化有限公司 High-precision punching plate flowmeter

Also Published As

Publication number Publication date
CN104808254B (en) 2018-04-10

Similar Documents

Publication Publication Date Title
CN204631269U (en) High precision absolute gravimeter optics frequency multiplier type laser interference system and application
CN104808254B (en) High-precision absolute gravimeter optics frequency multiplier type laser interference system and application
CN108152013B (en) Electro-optical system pointing accuracy measuring device optical path adjusting process
Williams Optical methods in engineering metrology
CN104296677B (en) Common light path heterodyne ineterferometer based on low frequency differences acousto-optic frequency shifters phase shift
CN104296676B (en) Heterodyne point diffraction interferometer based on phase shift of low-frequency-difference acousto-optic frequency shifter
CN111610571B (en) System and method for monitoring and compensating dynamic errors of atomic interference gravimeter
CN105675262B (en) The high depth of parallelism wavefront of optical components detection device of heavy caliber
CN104360095B (en) A kind of method for measuring instantaneous rotation speed based on Beams, apparatus and system
CN103307985A (en) Equal-arm-length heterodyne laser interferometry ranging system
CN106017864B (en) Put mirror characteristic parameter testing device and test method
CN104949630A (en) Point diffraction interference device with adjustable large-numerical-aperture fringe contrast
CN102840964A (en) Large-caliber long-focus collimator focal point real-time monitoring system
CN109579777A (en) The anti-interference big working distance autocollimation of double light sources high-precision and method
CN109631827A (en) The anti-interference big working distance autocollimation of double light sources high-precision and method based on measurement of absolute angle
CN106767395A (en) One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method
CN105333815A (en) Super lateral resolution surface three-dimensional online interference measuring system based on spectral dispersion line scanning
CN105674875B (en) A kind of full filed low frequency heterodyne point-diffraction interferometer
CN101858788A (en) Method and device for measuring wave height of emergent light wave of inter-satellites laser communication by interference wedge plate
CN103697806A (en) Optical interferometer for detecting outer arc surface of annular guide rail
CN109579776A (en) Anti-interference big working distance autocollimation and method in high precision
CN106546165B (en) laser feedback interferometer
CN106770335B (en) A kind of position phase defect detecting system and method based on reflection type point diffraction interferometer
CN103105283A (en) Focal distance measuring device of single-spectrum large-diameter long-focus lens
CN205940927U (en) Oscillating mirror performance parameters testing arrangement

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
EXSB Decision made by sipo to initiate substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180410

Termination date: 20200423