CN109814165A - A kind of cooling miniaturization high-precision optical gravimeter of luminous power - Google Patents

A kind of cooling miniaturization high-precision optical gravimeter of luminous power Download PDF

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CN109814165A
CN109814165A CN201910143725.9A CN201910143725A CN109814165A CN 109814165 A CN109814165 A CN 109814165A CN 201910143725 A CN201910143725 A CN 201910143725A CN 109814165 A CN109814165 A CN 109814165A
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micro
cooling
lens
bead
light
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CN109814165B (en
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陈杏藩
祝训敏
李楠
胡慧珠
舒晓武
刘承
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

The invention discloses a kind of cooling miniaturization high-precision optical gravimeters of luminous power.Including vacuum cavity and release device, laser cooling chamber, optical detection chamber and micro-nano bead;Laser cooling chamber, optical detection chamber are located at upper and lower in the middle part of vacuum cavity;Laser cooling chamber includes two lens, and two beam horizontal parallel gloss are used with two perpendicular polarisation states of laser output;The focus of two lens is overlapped and forms ligh trap area in focal point;Optical detection chamber includes two lens, and the focus of two lens is overlapped and forms detecting area in focal point;Release device is equipped with release outlet, outer immediately below vacuum cavity to have a cooling light source, and cooling light source feels cold but illumination to ligh trap area upwards.The present invention is using micro-nano bead as measurement carrier, in conjunction with laser-cooling technology, the releasing position of precise measurement bead and catch position eliminate environmental disturbances to obtain the exact value of acceleration of gravity, acceleration of gravity measurement accuracy is improved, measuring speed and efficiency are improved.

Description

A kind of cooling miniaturization high-precision optical gravimeter of luminous power
Technical field
The present invention relates to the cooling miniaturization high-precision optical gravimeters of luminous power, belong to Technology of Precision Measurement field, belong to one Plant the sensor and instrument for measuring gravity acceleration value.
Background technique
Gravimeter is a kind of for measuring the precision instrument of acceleration of gravity (gravity), can be widely applied for ground talent scout It surveys, mine locating, the application fields such as prospecting have great importance for the development of national economy.The fundamental measurement principle of gravimeter It is according to Newton's second law, by detecting freely falling body the time dt and distance s of mass block, then according to g=2s/t2It obtains The measured value g of acceleration of gravity.
Mass block freely falling body process starts mass block initial velocity caused by the release process of release mechanism fixed structure, from By the gas disturbance during falling bodies falling bodies, the surface shape of used mass block object will affect the essence of measurement Degree, and then influence actual gravimetric precision.
Existing gravimeter generally uses decimetre to obtain high measurement accuracy to the measurement distance of rice magnitude, and uses number According to the mode of fitting, the influence of mass block freely falling body initial velocity is reduced, while by vacuum system, reducing air and object is transported Dynamic disturbance, thus the comprehensive measurement accuracy for improving gravimeter, but Conventional gravity instrument needs before measurement starts by being mechanically fixed Mass block is readily incorporated uncontrollable and uncertain initial velocity during release;Its mass block needs to reuse simultaneously, It after one-shot measurement process, needing to be reset mechanism and resets mass block, cause measurement efficiency low, system is huge, and it is complicated, The problems such as measuring speed is limited.
Luminous power suspension system is built upon the Men Xinxing in the technical foundation such as laser controlling, laser cooling, laser capture Subject micro-nano bead (typical such as micro-nano bead) is suspended, utilizes luminous power by the photodynamic action of laser beam Particle is supported, instead of mechanical support structure;Interact to completely cutting off between the particle and environment, avoid various environment because Element, such as vibration, interference of the heat transfer for particle displacement, thus if using micro-nano bead as in measurement sensing Better anti-interference can be obtained if mass block, and then precision performance is more preferably.
Suspended particles in luminous power suspension system use micro-nano bead, form light by the light of the contrary propagation of two beams Trap, and the capture to particle is realized using the gradient force of ligh trap and scattering force, it can similarly be resisted by the gradient force of ligh trap Terrestrial gravitation realizes the suspension of particle, so that without Mechanical Contact between suspended particles and external environment.Utilize the micro- of suspension Bead is received as the mass block in gravimeter measurement, then need to only control the laser power drop of suspension ligh trap during release Low is 0, and trapping stiffness disappears at once at this time, and compared to for Mechanical Contact, this mode will not introduce mass block uncertain Random initial velocity, so as to improve measurement accuracy.
The micro-nano bead of laser capture can be according to resonance subprocessing, and for the harmonic oscillator of free state due to its internal heat Even if movement causes harmonic oscillator to be also at random motion state when no extraneous contact itself, equivalent temperature is generally used Height describes the power of this motion state.In luminous power suspension system, often by using a set of laser cooling system pair The movement of the micro-nano bead of laser capture carries out feedback control, reduces the amplitude of its random motion, and to be known as laser cold for process for this But.Typical laser cooling system includes bead location information sensing unit, electrical information processing system, feedback system, cooling The wavelength different with capture light can be used in light, realizes that capture and particle are cooling simultaneously using same optical path.According to current technology, It can be by the Bit andits control of particle random motion in micromicron (pm:10 by laser-cooling technology-12Rice) magnitude on, equivalent temperature Degree opens (10 close to milli-3It opens).It is applied in gravimeter using this cooling technology, freely falling body mass block can be increased substantially, Displacement initial value when namely micro-nano bead discharges, reduces in freely falling body displacement measurement, calculating and calibration process The measurement accuracy of gravimeter equally can be improved in error term;The same location information measurement side using in laser-cooling technology Method, and realize and be better than micromicron (pm:10-12Rice) magnitude measurement accuracy, so as to realize initial position and final position Precise measurement.
In addition micro-nano bead volume is very small, the pyramid corner angle far smaller than used in most of gravimeter at present, can Preparatory device in a reservoir, and cooperates corresponding release device, such as superlaser transmitting, ultrasound emission mode, in application When discharge, and captured using laser, this mode eliminates in Conventional gravity instrument to be needed again in primary test Pyramid corner angle reload the process of reset, so that feasibility is high.In addition for silicon materials, diameter exists the typical micro-nano bead used Between 100nm~10um, 1 bead is used if once testing, theoretically 1mm3The micro-nano bead of volume can be realized 106 ~1012Test.Measurement mass block be not required to repeat reset by the way of also contribute to improve test speed, avoid in test process Time blind area.
Existing gravimetric mode mainly in the way of mechanical release mass block, realizes weight using the reset of mass block The duplicate measurements of power, this measurement method presence reset complexity, and volume is big, and many deficiencies such as more than error factor, and according to Present optical technology development, the especially technology in luminous power field and ligh trap field develop, continue based on these new technologies, Developing the new gravimeter technology of one kind reduces the complexity of system to improve the measurement accuracy of gravity, while realizing gravity High-precision rapid survey mode surveys gravity angular speed to meet the fields such as inertial navigation, geodesic survey and search for mineral deposit The urgent need of amount.
Summary of the invention
For the gravimetric state of the art, current gravimeter is bulky, measurement mass block need mechanical support and Release, vulnerable to interference, needs to be reset, it is difficult to which the state of the art of test constantly, the present invention utilize quantum theory and micro & nano technology, light Power innovation field technology proposes a kind of cooling miniaturization high-precision optical gravimeter of luminous power.
The basic principle of gravimeter is relatively easy, and current core difficult point and key technology are in order to for several main The control of error source can not ignore influence of the environment for measurement in practical application, here main result core error packet It includes:
First technical problem is the influence of air drag.Due to the presence of air molecule in system, so that under mass block Brownian movement during drop by air-flow and air molecule is influenced, and what actual mass block was subject to is not only that gravity accelerates Degree, also by the reaction force of air.This problem can be solved by vacuum system, freely be fallen mass block by vacuum system Gas removal in environment during body, so as to which this error source is greatly lowered.
Second technical problem is the environmental disturbances of mass block.In traditional gravimeter, measurement mass block (frequently with Pyramid corner angle), it is fixed by mechanical structure, and measuring at first in such a way that mechanical structure discharges.This mode by In there are the environment of Mechanical Contact, improve quality the initial velocity non-zero of block in release process Middle Ages, and directional velocity is random It is uncontrollable, elimination can not be modeled, this is main error source.
In the present invention, mass block (using micro-nano bead as mass block in the present invention) is supported using luminous power mode. According to the correlation theory of quantum optices, photon has momentum, how to be incident on an object, can generate one to object Pressure, referred to as light pressure, this power and light intensity magnitude, power density size and irradiated area are related, this certain power also phase When it is small.With the development of laser technology, high-power and power density light field may be implemented, so as to generate biggish light Pressure can calculate, for the bead of diameter 100nm~10um, pressure produced by the laser using mW magnitude, may be implemented and The comparable power of gravity, so as in a vacuum, form ligh trap using capture light beam, utilize the gradient force or scattering force of ligh trap Bead is suspended (namely capture bead) by luminous power, and bead connects without other any Mechanics of Machinery in this acquisition procedure Touching, by laser cut-out, it can be achieved that bead discharges, so as to eliminate the initial velocity of bead caused by Mechanical Contact.
Micro-nano bead can collide with air molecule generate momentum-exchange in air, can make cloth so as to cause itself Bright movement, this movement is sometimes referred to as warm-up movement, this to move the position that micro-nano bead is also influenced in certain degree It sets and velocity original value.Under existing technology, it can reduce molecular density by vacuum system and lower warm-up movement.And vacuum system Bead warm-up movement caused by survival in system can then be cooled down by vacuum bead cooling system.By in capture light Except increase a cooling light and movement measurement system, by monitoring position and the motion measurement of micro-nano bead constantly, utilization Cooling light beam is controlled, and the momentum of air molecule is offset, and bead positional fluctuation and speed is reduced, to realize micro-nano bead Laser is cooling, improves its initial position precision.
The cooling technology relative maturity of micro-nano bead at present, can refer to the pertinent literature in luminous power field.Micro-nano bead heat fortune Dynamic cooling can reach the temperature magnitude of mK, while the position precision of its quality center of mass can control the magnitude better than pm, to anticipate Taste bead the positioning of high-precision initial value may be implemented, reduce location error, improve gravimetric precision.
The step of this method of the technical solution adopted in the present invention, is as follows:
Gravimeter of the invention include vacuum cavity and be located at the intracorporal release device of vacuum chamber, laser cooling chamber, light Learn detection cavity and micro-nano bead;Release device is at the top of vacuum cavity, and micro-nano bead is loaded in release device, and laser is cooling Chamber, optical detection chamber are located at the upper and lower in the middle part of vacuum cavity;
The optical acquisition equipment of micro-nano bead is equipped in the laser cooling chamber, optical acquisition equipment is shared the same light including level Axis faces two lens L1 and L2 of arrangement and respectively from two beam horizontal parallel light of two two sides lens L1 and L2 incidence As capture light, two beam horizontal parallel gloss are used with two perpendicular polarisation states of laser output;Two lens L1's and L2 Focus is overlapped and is formed about the ligh trap area for capturing micro-nano bead in focal point, and ligh trap area is landed as micro-nano pellet free Initial position region;
The bead detection device of micro-nano bead is equipped in the optical detection chamber, bead detection device is shared the same light including level Axis faces two lens L3 and L4 of arrangement and respectively from the one of the one of lens side incidence of two lens L3 and L4 Beam horizon light is overlapped as detection light, the focus of two lens L3 and L4 and is formed about the spy of the small ball position of micro-nano in focal point Survey area, the end position region that detecting area is landed as micro-nano pellet free;
The release device is equipped with micro-nano bead release outlet, and the ligh trap area in laser cooling chamber is located at release device The underface of micro-nano bead release outlet, the detecting area in optical detection chamber be located at the ligh trap area in laser cooling chamber just under Side;Vacuum cavity immediately below detecting area is externally provided with cooling light source, and cooling light source issues cooling illumination upwards and is mapped to ligh trap area.
Polarization splitting prism is equipped with outside the vacuum cavity of two sides lens L1 and L2 one of lens L1 (PBS), the lower section of polarization splitting prism (PBS) is equipped with first position detection sensor (QPDA);A branch of horizon light divides from polarization Light prism (PBS) side glancing incidence is incident on after polarization splitting prism (PBS) transmission to polarization splitting prism (PBS) Mirror L1 converges to focal point through lens L1;Another beam horizon light converges from lens L2 side glancing incidence to lens L2 through lens L2 Gather focal point, then is incident on polarization splitting prism (PBS) after lens L1 recovery expands, it is anti-through polarization splitting prism (PBS) First position detection sensor (QPDA) detected reception is incident on after penetrating;It is detected by first position detection sensor (QPDA) Obtain the location information that micro-nano bead deviates ligh trap center along horizon light axis radial direction.
Reflecting mirror is equipped with outside the vacuum cavity of two sides lens L3 and L4 one of lens L4, under reflecting mirror Side is equipped with second position detection sensor (QPDB);A branch of level detection light is never equipped with the side lens L4 of reflecting mirror in side Glancing incidence converges to focal point to lens L4, through lens L4, focal point as detection center, then through lens L3 recovery expand after It is incident on reflecting mirror, is reflected into second position detection sensor (QPDB) detected reception through reflecting mirror;It is visited by the second position It surveys sensor (QPDB) detection and obtains falling on the location information for deviateing detection center along horizon light axis radial direction under micro-nano bead.
The laser that the laser in the two beams capture light source in the optical acquisition equipment is 1064nm, described is cold But light source specifically uses the laser of 532nm.
The release device uses piezoelectric ceramics (PZT), will be previously positioned at piezoelectricity pottery by the vibration of piezoelectric ceramics Micro-nano bead particle on porcelain is successively discharged with simple grain.
Further include having information-processing circuit, information-processing circuit respectively with first position detection sensor (QPDA), second The piezoelectric ceramics connection of position detection sensor (QPDB), release device.
The micro-nano bead uses the micro-nano particle of quartz material.
Open up glass transparent hole on the vacuum cavity, glass transparent hole allows and for capturing light, detection light and cold But the injection and output of the laser beam of light.
The optics gravity test process of the gravimeter is as follows:
Firstly, micro-nano bead is successively discharged with simple grain by release device, two beams of unlatching capture light and cooling light, every After falling on ligh trap area under micro-nano bead and being stable at ligh trap center, the position of micro-nano bead is recorded by wherein a branch of capture optical detection Height is set as the first height value;
Then, two beams capture light and cooling light are simultaneously turned off and starts timing, turns off ligh trap suffered by moment micro-nano bead The feedback force of scattering force and gradient force and cooling light disappears simultaneously, and micro-nano bead is only by gravity, under gravity field action The movement of falling object is done toward optical detection chamber along gravity direction;
Then, when micro-nano bead approaches or reaches optical detection chamber, detection optical detection record micro-nano bead is opened Position height terminates timing as the second height value, calculates weight using the first height value and the second height value and the timing time difference Power acceleration magnitude.
The optics gravity test process of the gravimeter is specially as follows:
1) the micro-nano bead discharged every time for release device obtains gravity acceleration value g in the following ways (n), n indicates the ordinal number of testing time;
1.1) after micro-nano bead is released device release, it is cold that micro-nano bead reaches laser along gravity fall under the effect of gravity But the ligh trap area of chamber;
1.2) laser cooling chamber opens capture light, the ligh trap area formed using capture light, by gradient force in ligh trap area and The photodynamic action of scattering force captures micro-nano bead in ligh trap immediate vicinity, obtains micro-nano bead using a branch of capture optical detection and exists The height and position in ligh trap area, and it is denoted as 0;
1.3) cooling light is opened, the cooling of laser closed loop feedback is carried out to micro-nano bead using cooling light, reduces the heat of bead Movement;
1.4) after the warm-up movement reduction of micro-nano bead reaches and presets target, capture light and cooling light are simultaneously turned off, from Turn-off time starts timing and sets target timing duration dTg (n),
1.5) micro-nano bead does free landing activity under gravity field action after turn-off time, and vertically adds along gravimetric plumb line Speed is until reaching optical detection chamber, after target timing duration dTg (n), opens detection light, is obtained using detection optical detection micro- Receive bead detecting area height and position Z (n);
1.6) it is calculated using the following equation and obtains gravity acceleration value g (n), the single measurement as optics gravimeter is defeated Out:
G (n)=2dZ/ [dTg (n)]2
Wherein, dZ indicates height and position of the detection center relative to ligh trap center;
2) it constantly repeats the above steps and 1) realizes the continuous measurements g (n) of acceleration of gravity;And gravity is being obtained every time After acceleration value g (n), relationship between the height and position Z (n) further according to micro-nano bead and the height and position dZ at detection center is pressed Update the target timing duration dTg (n+1) measured next time simultaneously according to following formula:
DTg (n+1)=dTg0, as n=0
DTg (n+1)=dTg (n)-dt0, when n ≠ 0, and when Z (n) < dZ
DTg (n+1)=dTg (n)+dt0, when n ≠ 0, and when Z (n) > dZ
DTg (n+1)=dTg (n), when n ≠ 0, and when Z (n)=dZ
Wherein, dt0Indicate the adjustment amount of target timing duration, dTg0For the initial value of target timing duration dTg (n), according to The local acceleration of gravity estimated value g of measurement position0It is calculated according to the following formula:
dTg0=(2dZ/g0)1/2
Wherein, g0Indicate local acceleration of gravity estimated value.
Gravimeter of the present invention is using micro-nano bead as measurement carrier, in conjunction with laser-cooling technology, precise measurement bead Releasing position and catch position are to obtain the exact value of acceleration of gravity.The gravimeter uses double cavity structure, wherein first light It learns chamber and realizes that the laser of bead is cooling, improve its initial position precision, second chamber realizes that bead relative position information accurately mentions It takes, and combines the positional distance real-time update whereabouts timing time of two chambers, calculate acceleration of gravity size.
Bead stimulated light cooling in first chamber in gravimeter of the present invention, it is not true to reduce position caused by displacement Qualitative, bead freely falling body in the vacuum chamber after release eliminates environmental disturbances, and release process is without mechanical bracing transform, without rising Beginning velocity error;Second chamber only provides bead relative position information, does not introduce interference in vertical direction, improves acceleration of gravity Measurement accuracy improves measuring speed and efficiency.
The invention has the advantages that:
Present invention firstly provides the schemes of two-chamber optics gravimeter, using micro-nano bead as gravimetric quality Block, eliminating mechanical release using laser capture technology influences the initial velocity of measurement mass block, is reduced using vacuum system empty Interference of the gas to micro-nano pellet free falling is eliminated caused by itself warm-up movement of micro-nano bead using laser-cooling technology The influence of initial velocity displacement, by micro-nano bead continuously discharge in the way of avoid mass block before and after mass block between measurement again The process of loading reset, to have the feature of high speed measurement.
The present invention substitutes existing mechanical support using luminous power support, and the influence of mechanical release is substituted by Beam Control, Interference of the warm-up movement of air molecule to measurement micro-nano bead is eliminated by vacuum system simultaneously, to realize high-precision gravity Rapid survey.
Scheme proposed by the invention takes full advantage of the high-precision feature of luminous power suspension system, is expected to become miniaturization height The gravity measurement instrument of precision wide bandwidth provides a kind of completely new technological approaches for gravity measurement, is expected to promote gravity measurement The development of technical field promotes gravimeter in the popularization and application in the fields such as mine locating, geologic prospecting.
Detailed description of the invention
Fig. 1 is that the optical acquisition equipment of laser cooling chamber captures the structural schematic diagram of micro-nano bead;
Fig. 2 is the complete structure schematic diagram of optics gravimeter;
Fig. 3 is the work flow diagram of acceleration of gravity test;
Fig. 4 is embodiment test data result figure.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples:
As shown in Fig. 2, gravimeter include vacuum cavity and be located at the intracorporal release device of vacuum chamber, laser cooling chamber, Optical detection chamber and micro-nano bead;Release device is at the top of vacuum cavity, and initial micro-nano bead is loaded in release device, is swashed Light cooling chamber, optical detection chamber are located at the upper and lower in the middle part of vacuum cavity, the releasing position of release device, laser cooling chamber It is sequentially arranged from top to bottom with optical detection chamber along gravity vertical direction;
As shown in Fig. 2, being equipped with the optical acquisition equipment of micro-nano bead in laser cooling chamber, optical acquisition equipment includes level Two lens L1 and L2 of arrangement and flat from two beam levels of two two sides lens L1 and L2 incidence respectively are faced with optical axis Row light as capture light, use with two perpendicular polarisation states of laser output by two beam horizontal parallel gloss;Two lens L1 and The focus of L2 is overlapped and is formed about the ligh trap area for capturing micro-nano bead in focal point, and ligh trap area is as micro-nano pellet free The initial position region of landing;
As shown in Figure 1, two incident beam zero diopters of left and right are focused on the focal position at center by two lens L1 and L2 respectively On, ligh trap area is formed about in focal point, and focus is ligh trap center, and the ligh trap area of focal point is for the micro-nano bead that is located therein Bead is captured in center with capture effect, and under the action of without other external force, this position is freely landed Beginning position.As shown in Figure 1, capturing a micro-nano bead at ligh trap area.
When micro-nano bead leaves ligh trap center, there is scattering force to captured micro-nano bead in laser capture ligh trap And gradient force, and scattering force and gradient force are directed toward ligh trap center, thus at the small ball denection ligh trap center of micro-nano, ligh trap area Micro-nano bead is retracted into ligh trap center.Wherein scattering force is due in micro-nano bead in the horizontal direction (laser light incident direction) deviation The power that the heart generates, and gradient force is since micro-nano bead is in the power that vertical direction deviates center and generates.Scattering force and gradient force Behave like the spring in physics.
In the case where gravitational field, effect due to micro-nano bead also by ground spheric stress, actually micro-nano bead are down Deviation center, to generate a gradient force up to offset the gravity of micro-nano bead.Therefore, micro-nano bead is caught in ligh trap area It obtains down, ligh trap center is still under luminous power (scattering force and gradient force) and gravity, ligh trap center is used as certainly By the initial position landed.
Scattering force effect and gravitational field and gradient force in specific implementation, due to the monosymmetric directional light in ligh trap center Injustice the effects of, surface or following position directly of the micro-nano bead essence at ligh trap center, and can not be at ligh trap center two Side position, thus there may be height tolerances.
As shown in Fig. 2, being equipped with the bead detection device of micro-nano bead in optical detection chamber, bead detection device includes level Two lens L3 and L4 of arrangement are faced with optical axis and respectively from the one of lens side incidence of two lens L3 and L4 A branch of horizon light as detection light, the focus of two lens L3 and L4, which are overlapped, is simultaneously formed about the small ball position of micro-nano in focal point Detecting area, the end position region that detecting area is landed as micro-nano pellet free;
Release device is equipped with micro-nano bead release outlet, and the micro-nano that the ligh trap area in laser cooling chamber is located at release device is small Ball discharges the underface of outlet, and the detecting area in optical detection chamber is located at the underface in the ligh trap area in laser cooling chamber;Detection Vacuum cavity immediately below area is externally provided with cooling light source, and cooling light source issues cooling illumination upwards and is mapped to ligh trap area, cooling light Optical axis passes through the ligh trap center in ligh trap area.
By the power control of the cooling light perpendicular to capture light direction, realize that the heat for micro-nano bead in ligh trap area is transported Dynamic negative feedback control, to reduce micro-nano bead in the heat movement speed in ligh trap area.
Vacuum cavity provides a vacuum working environment, and vacuum degree control is being better than 10-6Within pa, and as micro-nano bead The space that release, cooling, freely falling body and position measure passes through the vacuum working environment that vacuum cavity provides and eliminates air Molecular motion is to the motion artifacts of micro-nano bead, thus measurement accuracy result.
Glass transparent hole is opened up on vacuum cavity, glass transparent hole allows and for capturing light, detection light and cooling light The injection and output of laser beam.
As shown in Fig. 2, being equipped with polarization point outside the vacuum cavity of two sides lens L1 and L2 one of lens L1 The lower section of light prism (PBS), polarization splitting prism (PBS) is equipped with first position detection sensor (QPDA);A branch of horizon light from Polarization splitting prism (PBS) side glancing incidence enters after polarization splitting prism (PBS) transmission to polarization splitting prism (PBS) It is mapped to lens L1, converges to focal point through lens L1, it is subsequent to be emitted after lens L2 is expanded again;Another beam horizon light is from lens L2 Side glancing incidence converges to focal point to lens L2, through lens L2, then is incident on polarization spectro after lens L1 recovery expands Prism (PBS) is incident on first position detection sensor (QPDA) detected reception after polarization splitting prism (PBS) reflection; Micro-nano bead, which is obtained, by first position detection sensor (QPDA) detection deviates ligh trap center along horizon light axis radial direction Location information.Micro-nano bead along horizon light axis radial direction deviate ligh trap center range difference can be captured light irradiation and through polarizing Amici prism (PBS) is reflected on first position detection sensor (QPDA) imaging surface, and then gets the range difference information, into And micro-nano bead is conversed in the height and position in ligh trap area.Similarly second position detection sensor (QPDB) is equally detected.
As shown in Fig. 2, reflecting mirror is equipped with outside the vacuum cavity of two sides lens L3 and L4 one of lens L4, The lower section of reflecting mirror is equipped with second position detection sensor (QPDB);A branch of level detection light is never equipped with reflecting mirror in side Lens L4 side glancing incidence converges to focal point to lens L4, through lens L4, and focal point is as detection center, then through lens L3 Recovery is incident on reflecting mirror after expanding, and is reflected into second position detection sensor (QPDB) detected reception through reflecting mirror;Pass through Second position detection sensor (QPDB) detection, which obtains falling under micro-nano bead, deviates detection center along horizon light axis radial direction Location information.Micro-nano bead along horizon light axis radial direction deviate detection center range difference can be captured light irradiate and pass through instead It penetrates mirror to be reflected on second position detection sensor (QPDB) imaging surface, and then gets the range difference information, and then converse Height and position of the micro-nano bead in detecting area.
Laser cooling chamber is made of a pair of confocal lens, while the glass transmission hole of its input light path and vacuum plant weight It closing, capture laser and cooling laser are inputted from glass transmission hole, and ligh trap area is formed at confocal lens focus through confocal lens, Utilize the gradient force and scattering force capture micro-nano bead in ligh trap area.Laser cooling chamber to micro-nano bead ligh trap area specific position The detection mode that detection uses non-confocal is set, capture light, should by forming focus on light beam behind micro-nano bead after micro-nano bead Location information of the power density of light beam with micro-nano bead, by photodetector be placed in light beam back segment rather than the focus of light beam On, the detection of power density is completed, micro-nano bead location information is therefrom extracted.
Laser cooling chamber, the optical arrangement of optical detection chamber are similar, are made of two confocal lens and position sensing Sensor QPD and polarization splitting prism/light reflection mirror composition.Laser cooling chamber plays capture, need to cool down light;Optical detection chamber Play detection, is not required to cooling light, alternatively the incident a branch of level detection light in right side.
The laser that the laser in the two beams capture light source in optical acquisition equipment is 1064nm, cooling light source are specifically adopted With the laser of 532nm.
Release device uses piezoelectric ceramics (PZT), and the vibration by piezoelectric ceramics will be previously positioned on piezoelectric ceramics Micro-nano bead particle is successively discharged with simple grain.Piezoelectric ceramic vibration delivery mode is selected, can be wanted according to application in practical application It asks using other delivery modes such as high energy pulse laser delivery modes, such as other delivery modes of high energy pulse laser can be used.
Release device is discharged the micro-nano bead particle being previously positioned on piezoelectric ceramics by the vibration of piezoelectric ceramics, Micro-nano bead is moved downward along gravity direction in the optical acquisition equipment for reaching laser cooling chamber later, is caught in ligh trap area It obtains.Movement during release process is in ligh trap area belongs to the micro-nano bead preparation stage of measurement, this process is not involved in Actual measurement, so that this process does not influence measurement accuracy.
Since release device successively discharges micro-nano bead particle with simple grain, micro-nano bead is using the side not reused Formula is not required to reseting procedure again, and each measurement class uses different particles, improves measurement efficiency, and the specific weight of particle Measurement accuracy and measuring speed are not influenced with size.
Further include having information-processing circuit, information-processing circuit respectively with first position detection sensor (QPDA), second The piezoelectric ceramics connection of position detection sensor (QPDB), release device, the workflow of entire gravimeter is by information processing electricity Road is carried out by preset workflow sequence.
Gravimeter WorkFlow Managerment uses unified information processing circuit, and the time base of information-processing circuit uses atom Clock is chosen as clock reference, the clock stability of atomic clock according to gravity measurement required precision, and the clock of typical atomic clock is steady Qualitative index for selection is better than 10-10
Micro-nano bead uses the micro-nano particle of quartz material, and diameter range is between 100 nanometers to 10 microns, and micro- with 1 The micro-nano bead of rice or so is best.
As shown in figure 3, the optics gravity test process of gravimeter is specially as follows:
1) the micro-nano bead discharged every time for release device, such as (n is test ordinal number, is for n-th test Natural number since 1), gravity acceleration value g (n) is obtained in the following ways, n indicates the ordinal number of testing time;
1.1) after micro-nano bead is released device release, it is cold that micro-nano bead reaches laser along gravity fall under the effect of gravity But the ligh trap area of chamber;
1.2) laser cooling chamber opens capture light, the ligh trap area formed using capture light, by gradient force in ligh trap area and The photodynamic action of scattering force captures micro-nano bead in ligh trap immediate vicinity, obtains micro-nano bead using a branch of capture optical detection and exists The height and position in ligh trap area, and it is denoted as 0;
1.3) cooling light is opened, the cooling of laser closed loop feedback is carried out to micro-nano bead using cooling light, reduces the heat of bead Movement, until meeting preset cooling target;
1.4) after the warm-up movement reduction of micro-nano bead reaches and presets target, capture light and cooling light are simultaneously turned off, from Turn-off time starts timing and sets target timing duration dTg (n),
1.5) feedback force for turning off ligh trap scattering force and gradient force suffered by moment micro-nano bead and cooling light disappears simultaneously It losing, micro-nano bead does the movement of falling object toward optical detection chamber along gravity direction under gravity field action only by gravity, and Vertically accelerate along gravimetric plumb line until reaching optical detection chamber, after target timing duration dTg (n), opens detection light, utilize It detects optical detection and obtains micro-nano bead in the height and position Z (n) of detecting area;
I.e. in detection light opening time, second position detection sensor QPDB detects the location information Z of micro-nano bead (n), the relative position signal of itself and the focal point of confocal lens group is provided, namely above relative position, lower section or proper Fortunately focal point position.
Level detection light default conditions are in off state, and are only beaten when timing time is equal to setting value dTg (n) It opens, to detect position and update of the micro-nano bead in chamber timing time setting value dTg next time for position detection sensor (n+1) detection signal is provided, is closed later.
1.6) following according to relationship, use between the height and position Z (n) of micro-nano bead and the height and position dZ at detection center Formula, which calculates, obtains gravity acceleration value g (n), and the single measurement as optics gravimeter exports:
G (n)=2dZ/ [dTg (n)]2
Wherein, dZ indicates height and position of the detection center relative to ligh trap center;That is laser cooling chamber and optical detection chamber Center vertical range be dZ.
It is displaced dZ (displacement of releasing position to optical detection chamber focus, the value can demarcate in advance) in conjunction with this, then can be counted Calculation obtains the gravity acceleration value g (n) of measured place.
2) it constantly repeats the above steps and 1) realizes the continuous measurements g (n) of acceleration of gravity;And gravity is being obtained every time After acceleration value g (n), relationship between the height and position Z (n) further according to micro-nano bead and the height and position dZ at detection center is pressed Update the target timing duration dTg (n+1) measured next time simultaneously according to following formula:
DTg (n+1)=dTg0, as n=0
DTg (n+1)=dTg (n)-dt0, when n ≠ 0, and Z (n) < dZ
DTg (n+1)=dTg (n)+dt0, when n ≠ 0, and Z (n) > dZ
DTg (n+1)=dTg (n), when n ≠ 0, and Z (n)=dZ
Wherein, dTg0And dt0It is constant, dt0Indicate the adjustment amount of target timing duration, dTg0For target timing duration The initial value of dTg (n), according to the local acceleration of gravity estimated value g of measurement position0It is calculated according to the following formula:
dTg0=(2dZ/g0)1/2
Wherein, g0It indicates local acceleration of gravity estimated value, is known quantity.
The adjustment amount dt of target timing duration0It is true in advance according to the design of feedback speed of system and gravity measurement aimed at precision It is fixed, typical optional 1 nanosecond.
This process constitutes a closed loop control process, and wherein detection limit is the relative position of micro-nano bead and focus, and Control amount is gate time next time.
In Closed loop operation, bead finally be will stabilise near focal point, and have faint random fluctuation, and this Fluctuation size is decided by the noise situations of system;At this time corresponding gate time dTg (n) then for corresponding to micro-nano bead from first A ligh trap cooling chamber releasing position drops to the fall time during the focus of second chamber.
In Fig. 2 right side simply illustrate bead starting releasing position and detecting location relationship, bead from Z=0 when Release is waited, and is detected after timing dTg (n), if the position detected at this time when Z=dZ, illustrates at this time oneself It is dTg (n) by the falling bodies time, if bead does not reach the position of dZ also at this time, illustrates that the timing duration of bead at this time is inadequate, To which next time increases timing duration, vice versa.By this process, the freely falling body process of dZ is finally realized using dTg (n) The measurement of middle time, to obtain the measured value of g (n) indirectly.In this measurement process, pass through the step-length dt of time adjustment0 A compromise most having can be chosen between measurement starting time and measurement accuracy.
Simultaneously in order to reduce influence of the time technical error for g (n) precision, the benchmark of timing is needed using atomic clock, It is better than 10 using stability-10The typical atomic clock of stability can inhibit time error 10 as time base-10Within.
In optics gravimeter, in order to eliminate the influence of air drag, core measuring part is provided using vacuum system Working vacuum environment, the wherein light path system and second optical detection chamber of the release device of micro-nano bead, first optics cavity Main component be placed in vacuum chamber as shown in Fig. 2 center, there are the glass orifices of light transmission on the wall of vacuum chamber, thus permit Permitted to be placed in the detection optical path outside the detection light output to chamber of the light beam input and inside outside chamber.
Fig. 4 is the test data example of the embodiment of the present invention, and according to workflow, by software emulation, consideration exists Closed loop feedback under noise situations measures situation.Abscissa is testing time serial number in figure, wherein a upper subgraph is fall time DTg (n) time, the following figure are the acceleration of gravity measured value g (n) being calculated and the ratio of theoretical weight acceleration value g.In figure The decline length of gravimeter used is 20 centimetres, and the time of decline, it was 1 nanosecond that the time, which adjusts increment, at 0.2 millisecond or so.
Thus above-mentioned implementation as it can be seen that the present invention using micro-nano bead as measurement carrier, in conjunction with laser-cooling technology, accurately Releasing position and the catch position of bead are measured to obtain the exact value of acceleration of gravity, environmental disturbances is eliminated, improves gravity Acceleration analysis precision, improves measuring speed and efficiency.

Claims (10)

1. a kind of cooling miniaturization high-precision optical gravimeter of luminous power, it is characterised in that: gravimeter includes vacuum cavity and position In the intracorporal release device of vacuum chamber, laser cooling chamber, optical detection chamber and micro-nano bead;Release device is in vacuum cavity top Portion, micro-nano bead are loaded in release device, and laser cooling chamber, optical detection chamber are located at upper and lower in the middle part of vacuum cavity Side;The optical acquisition equipment of micro-nano bead is equipped in the laser cooling chamber, optical acquisition equipment includes level with optical axis phase Face arrangement two lens L1 and L2 and respectively from two beam horizontal parallel light conducts of two two sides lens L1 and L2 incidence Light is captured, two beam horizontal parallel gloss are used with two perpendicular polarisation states of laser output;The focus of two lens L1 and L2 It is overlapped and is formed about the ligh trap area for capturing micro-nano bead in focal point, ligh trap area rises as what micro-nano pellet free landed The beginning band of position;The bead detection device of micro-nano bead is equipped in the optical detection chamber, bead detection device includes level Two lens L3 and L4 of arrangement are faced with optical axis and respectively from the one of lens side incidence of two lens L3 and L4 A branch of horizon light as detection light, the focus of two lens L3 and L4, which are overlapped, is simultaneously formed about the small ball position of micro-nano in focal point Detecting area, the end position region that detecting area is landed as micro-nano pellet free;The release device is equipped with micro-nano bead Release exports, and the ligh trap area in laser cooling chamber is located at the underface of the micro-nano bead release outlet of release device, optical detection Detecting area in chamber is located at the underface in the ligh trap area in laser cooling chamber;Vacuum cavity immediately below detecting area is externally provided with cooling Light source, cooling light source issue cooling illumination upwards and are mapped to ligh trap area.
2. the cooling miniaturization high-precision optical gravimeter of a kind of luminous power according to claim 1, it is characterised in that: at two It is equipped with polarization splitting prism (PBS) outside the vacuum cavity of the side lens L1 and L2 one of lens L1, polarization splitting prism (PBS) lower section is equipped with first position detection sensor (QPDA);A branch of horizon light is horizontal from the side polarization splitting prism (PBS) It is incident on polarization splitting prism (PBS), lens L1 is incident on after polarization splitting prism (PBS) transmission, is converged to through lens L1 Focal point;Another beam horizon light converges to focal point from lens L2 side glancing incidence to lens L2, through lens L2, then through lens L1 recovery is incident on polarization splitting prism (PBS) after expanding, and is incident on first position after polarization splitting prism (PBS) reflection and visits Survey sensor (QPDA) detected reception;Micro-nano bead is obtained along horizon light by first position detection sensor (QPDA) detection The location information at axis radial direction deviation ligh trap center.
3. the cooling miniaturization high-precision optical gravimeter of a kind of luminous power according to claim 1, it is characterised in that: at two Reflecting mirror is equipped with outside the vacuum cavity of the side lens L3 and L4 one of lens L4, the lower section of reflecting mirror is equipped with the second position Detection sensor (QPDB);A branch of level detection light is never in lens L4 side glancing incidence of the side equipped with reflecting mirror to lens L4 converges to focal point through lens L4, and focal point is incident on reflecting mirror as detection center, then after lens L3 recovery expands, Second position detection sensor (QPDB) detected reception is reflected into through reflecting mirror;Pass through second position detection sensor (QPDB) Detection obtains falling on the location information for deviateing detection center along horizon light axis radial direction under micro-nano bead.
4. the cooling miniaturization high-precision optical gravimeter of a kind of luminous power according to claim 1, it is characterised in that: described The laser that the laser in the two beams capture light source in optical acquisition equipment is 1064nm, the cooling light source specifically use The laser of 532nm.
5. the cooling miniaturization high-precision optical gravimeter of a kind of luminous power according to claim 1, it is characterised in that: described Release device uses piezoelectric ceramics (PZT), the micro-nano bead that will be previously positioned on piezoelectric ceramics by the vibration of piezoelectric ceramics Particle is successively discharged with simple grain.
6. the cooling miniaturization high-precision optical gravimeter of a kind of luminous power according to claim 1, it is characterised in that: further include Have an information-processing circuit, information-processing circuit respectively with first position detection sensor (QPDA), second position detection sensor (QPDB), the piezoelectric ceramics connection of release device.
7. the cooling miniaturization high-precision optical gravimeter of a kind of luminous power according to claim 1, it is characterised in that: described Micro-nano bead uses the micro-nano particle of quartz material.
8. the cooling miniaturization high-precision optical gravimeter of a kind of luminous power according to claim 1, it is characterised in that: described Glass transparent hole is opened up on vacuum cavity, glass transparent hole allows and the laser beam for capturing light, detection light and cooling light Injection and output.
9. the cooling miniaturization high-precision optical gravimeter of luminous power according to claim 1, it is characterised in that:
The optics gravity test process of the gravimeter is as follows:
Firstly, successively discharging micro-nano bead with simple grain by release device, two beams capture light and cooling light, every micro-nano are opened After falling on ligh trap area under bead and being stable at ligh trap center, the position height of micro-nano bead is recorded by wherein a branch of capture optical detection Degree is used as the first height value;
Then, two beams capture light and cooling light are simultaneously turned off and starts timing, turns off the scattering of ligh trap suffered by moment micro-nano bead The feedback force of power and gradient force and cooling light disappears simultaneously, and micro-nano bead is only by gravity, in gravity field action lower edge weight The movement of falling object is done toward optical detection chamber in power direction;
Then, when micro-nano bead approaches or reaches optical detection chamber, the position of detection optical detection record micro-nano bead is opened Height is used as the second height value, and terminates timing, calculates gravity using the first height value and the second height value and the timing time difference and adds Velocity magnitude.
10. the cooling miniaturization high-precision optical gravimeter of luminous power according to claim 9, it is characterised in that: the gravity The optics gravity test process of instrument is specially as follows:
1) the micro-nano bead discharged every time for release device obtains gravity acceleration value g (n) in the following ways, n table Show the ordinal number of testing time;
1.1) after micro-nano bead is released device release, micro-nano bead reaches laser cooling chamber along gravity fall under the effect of gravity Ligh trap area;
1.2) laser cooling chamber opens capture light, and the ligh trap area formed using capture light passes through gradient force and scattering in ligh trap area The photodynamic action of power captures micro-nano bead in ligh trap immediate vicinity, obtains micro-nano bead in ligh trap using a branch of capture optical detection The height and position in area, and it is denoted as 0;
1.3) cooling light is opened, the cooling of laser closed loop feedback is carried out to micro-nano bead using cooling light, reduces the warm-up movement of bead;
1.4) after the warm-up movement reduction of micro-nano bead reaches and presets target, capture light and cooling light are simultaneously turned off, from shutdown Time starts timing and sets target timing duration dTg (n),
1.5) micro-nano bead does free landing activity under gravity field action after turn-off time, and vertically accelerates directly along gravimetric plumb line To optical detection chamber is reached, after target timing duration dTg (n), detection light is opened, it is small to obtain micro-nano using detection optical detection Height and position Z (n) of the ball in detecting area;
1.6) it is calculated using the following equation and obtains gravity acceleration value g (n), the single measurement as optics gravimeter exports:
G (n)=2dZ/ [dTg (n)]2
Wherein, dZ indicates height and position of the detection center relative to ligh trap center;
2) it constantly repeats the above steps and 1) realizes the continuous measurements g (n) of acceleration of gravity;And accelerate obtaining gravity every time After angle value g (n), relationship between height and position Z (n) further according to micro-nano bead and the height and position dZ for detecting center, according to Lower formula updates the target timing duration dTg (n+1) measured next time simultaneously:
DTg (n+1)=dTg0, as n=0
DTg (n+1)=dTg (n)-dt0, when n ≠ 0, and when Z (n) < dZ
DTg (n+1)=dTg (n)+dt0, when n ≠ 0, and when Z (n) > dZ
DTg (n+1)=dTg (n), when n ≠ 0, and when Z (n)=dZ
Wherein, dt0Indicate the adjustment amount of target timing duration, dTg0For the initial value of target timing duration dTg (n), according to measurement The local acceleration of gravity estimated value g of position0It is calculated according to the following formula:
dTg0=(2dZ/g0)1/2
Wherein, g0Indicate local acceleration of gravity estimated value.
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