CN205940927U - Testing device for characteristic parameters of swing mirror - Google Patents
Testing device for characteristic parameters of swing mirror Download PDFInfo
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- CN205940927U CN205940927U CN201620588020.XU CN201620588020U CN205940927U CN 205940927 U CN205940927 U CN 205940927U CN 201620588020 U CN201620588020 U CN 201620588020U CN 205940927 U CN205940927 U CN 205940927U
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Abstract
The utility model discloses a testing device for the characteristic parameters of a swing mirror, which comprises a light source component, a developing screen, a facula center acquisition system and a swing mirror arranged on the emergent light path of the light source component; the exit port of the light source component is provided with a diaphragm, and the diaphragm is provided with a plurality of circular light through holes with different sizes; the display screen is positioned on the reflection light path of the swing mirror and can receive the reflection light of the swing mirror at each position, and the reflection light of the swing mirror forms light spots on the display screen; and the light spot center acquisition system is used for recording the light spot image on the developing screen and the center coordinates thereof. The utility model has the advantages of angle measurement scope is big, measurement of efficiency is high.
Description
Technical field
This utility model belongs to technical field of optical precision measurement, is related to a kind of pendulum mirror characteristic parameter testing device, is suitable for
In general pendulum mirror, it is particularly suited for high frequency pendulum mirror characterisitic parameter test.Described pendulum mirror characterisitic parameter includes scanning resolution, scanning
Angular velocity, scan uniformity, scanning angle repeatability, scanning linearity section time, effective scanning visual field, rate of scanning etc..
Background technology
Satellite, investigation air-mapping plane, the optical imagery load of the carrying such as unmanned plane often can be subject to move with respect to picture affected and
The picture matter leading to acquired image obscures, and pendulum mirror is to be used for, in camera, the critical component that retrieved image moves, and can overcome relatively as moving
Impact, improve image quality.Limited with ground target speed of related movement by optics systemic vectors, the period of motion of pendulum mirror
It is likely to be breached Millisecond.Therefore, put the characterisitic parameter of mirror, especially high frequency is put the characterisitic parameter of mirror, directly influenced task
Success or failure.Additionally, in field of laser processing, putting mirror and be used for controlling laser beam, realize the processing to workpiece diverse location, put mirror
Characterisitic parameter directly decides the crudy of processed workpiece, and in order to improve working (machining) efficiency, the frequency of pendulum mirror is also higher.
At present, the measuring method of conventional pendulum mirror characterisitic parameter has：Circular gratings angle-measuring method, laser interference angle-measuring method, interior anti-
Penetrate the differential little pivot angle angle-measuring method of high accuracy and Auto-collimation angular measurement method etc..Circular gratings angle-measuring method measures pendulum mirror by Morie fringe and turns over
Angle, its measuring speed is fast, high precision, environment resistant interference performance are strong, but the method needs to install Circular gratings knot on pendulum mirror
It is impossible to realize non-cpntact measurement, range is greatly limited structure；Laser interference angle-measuring method is caused using pendulum mirror corner
Measuring beam, the corner to measure pendulum mirror for the optical path difference of reference beam, its certainty of measurement is higher, however it is necessary that pacifying on pendulum mirror
Dress auxiliary device, this influences whether to put the dynamic property of mirror；The internal reflection differential little pivot angle angle-measuring method of high accuracy is by two reflecting mirrors
It is placed on spectroscopical transmission and reflection direction, the change using two reflectance of reflector measures the big of incident angle
Little, the method can achieve non-cpntact measurement and measures at a high speed, but because the linear relationship of reflectance and angle of incidence is critical
Set up near angle, limit range, need in use to carry out bigness scale with other angle-measuring equipments, measurement efficiency is low, and in measurement
During two dimension angular, light channel structure is complicated.Auto-collimation angular measurement method utilizes optical system image relation property to measure the angle of incident illumination,
Two dimension angular can be measured, and be non-cpntact measurement, but its measurable angle range very little, frequency response are low, apply relatively in pendulum mirror test
For difficulty.
Patent【CN 101609250 B】The middle one kind that proposes combines Circular gratings angle measuring system and low-angle high precision angle-measuring system
The pendulum mirror characteristic parameter testing device of system, it can enter the measurement of Mobile state contactless high-precision to pendulum mirror characterisitic parameter, but, should
Method needs to put mirror using tracks of device real-time tracking, and the tracking stability to tracks of device and precision have very high requirement, and
The measurement putting mirror characterisitic parameter for high frequency has difficulties.
Patent【CN 103884491 A】In propose a kind of infinity target that includes the dynamic angular measurement of system, two dimension occur
System, the dynamic angle measuring device of pendulum mirror two dimension of synchronous three part, its have at high speed, on a large scale with non-contacting
Advantage, but due to pendulum mirror incident ray after reflection, spatially there is larger angle, and therefore, this device needs to use
Large-sized spectroscope, and large scale spectroscopical process technology difficulty is big, high cost.
Utility model content
Based on background above, this utility model provides a kind of pendulum mirror characteristic parameter testing device, enables high frequency pendulum mirror
The non-cpntact measurement of characterisitic parameter, and measurable angle range is big, measurement efficiency is high, low cost.
Ultimate principle of the present utility model is：
Set up three-dimensional cartesian coordinate system with reference to the collimated light beam that light source assembly is sent first；Beam delivery system emission port
The certain collimated light beam in footpath, described collimated light beam forms hot spot after pendulum mirror reflection on development screen；Spot center obtains system
Extract the center of this hot spot coordinate in three-dimensional cartesian coordinate system；In conjunction with the phasor coordinate direction of pendulum mirror incident beam, inverting
Go out to put mirror reflecting surface in not law vector direction in the same time；By the time-varying characteristics curve of law vector, calculate the characteristic ginseng of pendulum mirror
Number.
The technical solution of the utility model is：
Pendulum mirror characteristic parameter testing device, including light source assembly and the pendulum mirror being arranged on light source assembly emitting light path；?
At the exit ports of light source assembly, diaphragm is installed；It is characterized in that：Described diaphragm includes multiple thang-kngs of different sizes
Hole, described light hole is circular hole；Described test device also includes development screen and spot center obtains system；Described development screen position
On the reflected light path of pendulum mirror, pendulum reflected light at each position for the mirror can be received, the reflected light of pendulum mirror is formed on development screen
Hot spot；Described spot center obtains system and is used for recording the light spot image on described development screen, and obtains the center of light spot image
Coordinate.
Above-mentioned light hole has two, is designated as the first light hole and the second light hole.
The diameter of above-mentioned first light hole is at least the twice of the second thang-kng bore dia, is easy to spot center acquisition system and distinguishes
Know corresponding impact point.
The utility model has the advantages that：
(1) this utility model utilizes spot center to obtain system and obtains collimated light beam institute on development screen after pendulum mirror reflection
Form the exact position at the center of hot spot, derive that pendulum mirror reflecting surface normal, will not in the same time in not three-dimensional sensing in the same time
Three-dimensional sensing integrate, realize the non-cpntact measurement that high frequency puts mirror characterisitic parameter, measurable angle range is big, measurement efficiency is high, low cost.
(2) this utility model enables to put the dynamic non-cpntact measurement of mirror characterisitic parameter, and measurable angle range is big；A whole set of test dress
Put movement-less part, real-time tracking need not be carried out to pendulum mirror, high frequency pendulum mirror characterisitic parameter can be tested；Using particular design
Diaphragm it is achieved that obtain the function of multiple spot center simultaneously, measurement efficiency is high；
(3) pass through the spacing between adjustment development screen and pendulum mirror, can effectively suppress light source drift, spot center to obtain and calculate
The test error that the factors such as method error cause, realizes the high-acruracy survey that high frequency puts mirror characterisitic parameter.
Brief description
Fig. 1 is the schematic diagram of test device of the present utility model；
Fig. 2 is the structural representation of diaphragm of the present utility model；
Fig. 3 is the scheme schematic diagram that this utility model is demarcated to each part position relations.
Specific embodiment
With reference to the accompanying drawings and detailed description this utility model is further elaborated.
As shown in figure 1, pendulum mirror characteristic parameter testing device provided by the utility model, including light source assembly 1 and pendulum mirror
2nd, development screen 3 and spot center obtain system 4.
At the exit ports of light source assembly 1, diaphragm is installed；Multiple light holes of different sizes, institute are offered on diaphragm
(center of circular hole is easily extracted, and the collimated light beam being projected by circular hole, after pendulum mirror reflection, is developing to have light hole to be circular hole
The light spot image of screen display is still symmetrical, and spot center is easily extracted, and test error is little).Here the quantity of light hole and its distribution
The linear equation of the central ray of collimated light beam from each light hole outgoing and described central ray can be affected anti-with pendulum mirror 2
Penetrate the intersecting point coordinate in face.The light hole of the present embodiment diaphragm has two, is designated as the first light hole 5 and the second light hole 6 respectively；
And obtain the corresponding impact point of system identification for the ease of spot center, the diameter of the first light hole 5 is at least the second thang-kng
The twice of the diameter in hole 6.
Pendulum mirror 2 is arranged on the emitting light path of light source assembly 1.
Development screen 3 is arranged on the reflected light path of pendulum mirror 2, and can receive pendulum reflected light at each position for the mirror 2；Pendulum
The reflected light of mirror 2 forms hot spot on development screen 3.
The method testing pendulum mirror characterisitic parameter using this utility model is as follows：
Define three-dimensional cartesian coordinate system first, the initial point O of coordinate system is located at described first light hole 5 and the second light hole 6
The midpoint of the line of centres, Z-direction is identical with the direction of the outgoing beam of light source assembly 1, and Y-axis is perpendicular to development screen 3 place
Plane (as shown in Figure 1)；Then mirror characterisitic parameter is put in test according to the following steps：
1) position relationship obtaining system 4 to light source assembly 1, development screen 3 and spot center is demarcated：
1.1) pentaprism 7 is arranged on the emitting light path of light source assembly 1, using pentaprism 7 by light source assembly 1 send flat
Row light beam turns back 90 °；
1.2) elements of interior orientation obtaining system 4 to spot center is calibrated；
1.3) obtain, with spot center, the parallel rayies that system 4 directly gathers pentaprism 7 outgoing, adjust spot center and obtain
The position of system 4, until the punctate opacity of the cornea of its acquired parallel rays is demarcated at pixel as coordinate is in elements of interior orientation；
1.4) development screen 3 is moved into the light path between pentaprism 7 and spot center acquisition system 4, the position of adjustment development screen 3
Put the center position making the outgoing beam of pentaprism 7 be in development screen 3；
1.5) paste a double mirror at development screen 3 surfaces, adjust the position of development screen 3, until double mirror
The reflected beams are completely in light source assembly 1；
1.6) double mirror is removed, pentaprism 7 is substituted with pendulum mirror 2 to be measured.
2) open light source assembly 1, the directional light that it sends forms hot spot after pendulum mirror 2 reflection on development screen 3；
3) open spot center and obtain system 4, the light spot image on record development screen 3 and its centre coordinate；
4) data processing is carried out to acquired light spot image, obtain putting the characterisitic parameter of mirror 2：
4.1) calculate the unit normal vector of pendulum mirror reflecting surface：
The parametric equation of the central ray of the collimated light beam through the first light hole 5 outgoing for the light source assembly 1 isThe parametric equation of the central ray of the collimated light beam through the second light hole 6 outgoing for the light source assembly 1 isIn formula, a is the first light hole 5 and the distance of center circle of the second light hole 6；
Described central ray is designated as M respectively with the intersecting point coordinate of pendulum mirror reflecting surface1(0,-a/2,z7) and M2(0,a/2,z8)；
Described central ray, after pendulum mirror 2 reflection, is designated as N respectively with the intersecting point coordinate of development screen 31(x5,L,z5) and N2
(x6,L,z6), wherein x5、z5、x6And z6Value by spot center obtain system 4 obtain；
The plane equation of described pendulum mirror reflecting surface is Ax+By+Cz=D (3), and in formula, parameter A, B, C vector (A, B, C) are i.e.
For putting the unit normal vector of mirror reflecting surface；
The plane equation of described development screen 3 is y=L (4), and in formula, L is the distance that development screen 3 arrives Z axis, is through described step
The given value that rapid 1) is demarcated；
In conjunction with described formula (1)～(4), and coordinate N1(x5,L,z5) and N2(x6,L,z6) derived it can be deduced that：
In formula, k1And k2For introduced parameter of deriving.
Formula (5) is equivalent to solution Nonlinear System of Equations F (A, B, C, D, z7,z8,k1,k2)=0 (6), its solution can adopt
Quasi_Kantorovich operator or Broyden method.Get parms from the solution vector of formula (6) value of A, B, C, that is, obtain putting mirror reflecting surface
In not unit normal vector in the same time
4.2) by pendulum mirror reflecting surface in not law vector in the same timeIntegrate as follows, obtain pendulum mirror reflecting surface and exist
Not t in the same timeiLaw vectorWith respect to pendulum mirror reflecting surface in initial time t0Unit normal vectorAngle
In formula：For t0Moment puts the unit normal vector of mirror reflecting surface；
For tiMoment puts the unit normal vector of mirror reflecting surface；
According toPendulum mirror not t in the same time can be obtainediWith respect to initial time t0The angle being swung, thus obtain putting mirror
The time-varying characteristics curve of motion, realizes the noncontact dynamic test of pendulum mirror characterisitic parameter.
Claims (3)
1. put mirror characteristic parameter testing device, including light source assembly and the pendulum mirror being placed on light source assembly emitting light path；In light
At the exit ports of source component, diaphragm is installed；It is characterized in that：
Described diaphragm includes multiple light holes of different sizes, and described light hole is circular hole；
Described test device also includes development screen and spot center obtains system；Described development screen is located at the reflected light path of pendulum mirror
On, pendulum reflected light at each position for the mirror can be received, the reflected light of pendulum mirror forms hot spot on development screen；Described spot center
Acquisition system is used for recording the light spot image on described development screen, and obtains the centre coordinate of light spot image.
2. according to claim 1 pendulum mirror characteristic parameter testing device it is characterised in that：Described light hole has two, note
For the first light hole and the second light hole.
3. according to claim 2 pendulum mirror characteristic parameter testing device it is characterised in that：The diameter of described first light hole
The twice of at least the second thang-kng bore dia.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620588020.XU CN205940927U (en) | 2016-06-16 | 2016-06-16 | Testing device for characteristic parameters of swing mirror |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620588020.XU CN205940927U (en) | 2016-06-16 | 2016-06-16 | Testing device for characteristic parameters of swing mirror |
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| CN205940927U true CN205940927U (en) | 2017-02-08 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106017864A (en) * | 2016-06-16 | 2016-10-12 | 中国科学院西安光学精密机械研究所 | Testing device and testing method for characteristic parameters of swing mirror |
| CN113967608A (en) * | 2021-12-22 | 2022-01-25 | 南京英田光学工程股份有限公司 | Ground screening test device and method for satellite-borne MEMS beam control swing mirror |
-
2016
- 2016-06-16 CN CN201620588020.XU patent/CN205940927U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106017864A (en) * | 2016-06-16 | 2016-10-12 | 中国科学院西安光学精密机械研究所 | Testing device and testing method for characteristic parameters of swing mirror |
| CN113967608A (en) * | 2021-12-22 | 2022-01-25 | 南京英田光学工程股份有限公司 | Ground screening test device and method for satellite-borne MEMS beam control swing mirror |
| CN113967608B (en) * | 2021-12-22 | 2022-04-26 | 南京英田光学工程股份有限公司 | Ground screening test device and method for satellite-borne MEMS beam control swing mirror |
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Granted publication date: 20170208 Effective date of abandoning: 20181102 |