CN102610649B - 高可靠ldmos功率器件 - Google Patents
高可靠ldmos功率器件 Download PDFInfo
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- CN102610649B CN102610649B CN201210103642.5A CN201210103642A CN102610649B CN 102610649 B CN102610649 B CN 102610649B CN 201210103642 A CN201210103642 A CN 201210103642A CN 102610649 B CN102610649 B CN 102610649B
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- power device
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- 238000002347 injection Methods 0.000 claims abstract description 45
- 239000007924 injection Substances 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims description 15
- 239000002800 charge carrier Substances 0.000 claims description 13
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 230000003071 parasitic effect Effects 0.000 abstract description 9
- 238000002955 isolation Methods 0.000 abstract description 8
- 239000000969 carrier Substances 0.000 abstract 2
- 238000000605 extraction Methods 0.000 abstract 2
- 208000033999 Device damage Diseases 0.000 description 6
- 230000005611 electricity Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000035755 proliferation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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Abstract
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Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210103642.5A CN102610649B (zh) | 2012-04-10 | 2012-04-10 | 高可靠ldmos功率器件 |
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CN201210103642.5A CN102610649B (zh) | 2012-04-10 | 2012-04-10 | 高可靠ldmos功率器件 |
Publications (2)
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CN102610649A CN102610649A (zh) | 2012-07-25 |
CN102610649B true CN102610649B (zh) | 2014-09-10 |
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CN201210103642.5A Active CN102610649B (zh) | 2012-04-10 | 2012-04-10 | 高可靠ldmos功率器件 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101257047A (zh) * | 2008-04-03 | 2008-09-03 | 北京大学 | 一种耐高压的横向双扩散mos晶体管 |
CN101692454A (zh) * | 2009-10-15 | 2010-04-07 | 苏州博创集成电路设计有限公司 | 绝缘体上硅的高压p型金属氧化物半导体管 |
CN102222620A (zh) * | 2011-06-23 | 2011-10-19 | 上海集成电路研发中心有限公司 | 一种有效收集衬底电流的ldmos制备方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5385679B2 (ja) * | 2008-05-16 | 2014-01-08 | 旭化成エレクトロニクス株式会社 | 横方向半導体デバイスおよびその製造方法 |
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2012
- 2012-04-10 CN CN201210103642.5A patent/CN102610649B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101257047A (zh) * | 2008-04-03 | 2008-09-03 | 北京大学 | 一种耐高压的横向双扩散mos晶体管 |
CN101692454A (zh) * | 2009-10-15 | 2010-04-07 | 苏州博创集成电路设计有限公司 | 绝缘体上硅的高压p型金属氧化物半导体管 |
CN102222620A (zh) * | 2011-06-23 | 2011-10-19 | 上海集成电路研发中心有限公司 | 一种有效收集衬底电流的ldmos制备方法 |
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Publication number | Publication date |
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CN102610649A (zh) | 2012-07-25 |
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Owner name: BEIJING YANDONG MICROELECTRNIC CO.,LTD. Free format text: FORMER OWNER: INST OF MICROELECTRONICS, C. A. S Effective date: 20150717 |
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Effective date of registration: 20150717 Address after: 100015 Beijing city Chaoyang District Dongzhimen West eight room Wanhong No. 2 West Street Patentee after: BEIJING YANDONG MICROELECTRONIC Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |
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Effective date of registration: 20170116 Address after: 225004 Longquan Road, Guangling Industrial Park, Jiangsu, China, No. 16, No. Patentee after: YANGZHOU JIANGXIN ELECTRONICS Co.,Ltd. Address before: 100015 Beijing city Chaoyang District Dongzhimen West eight room Wanhong No. 2 West Street Patentee before: BEIJING YANDONG MICROELECTRONIC Co.,Ltd. |