CN102598291A - 太阳能电池单元的制造方法 - Google Patents
太阳能电池单元的制造方法 Download PDFInfo
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- CN102598291A CN102598291A CN2010800475284A CN201080047528A CN102598291A CN 102598291 A CN102598291 A CN 102598291A CN 2010800475284 A CN2010800475284 A CN 2010800475284A CN 201080047528 A CN201080047528 A CN 201080047528A CN 102598291 A CN102598291 A CN 102598291A
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- Prior art keywords
- silane
- type layer
- electrode
- butyl
- battery cell
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- 239000011248 coating agent Substances 0.000 claims abstract description 32
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- 239000013078 crystal Substances 0.000 abstract description 17
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- 239000010936 titanium Substances 0.000 description 47
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Images
Classifications
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- H—ELECTRICITY
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/228—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a liquid phase, e.g. alloy diffusion processes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Electromagnetism (AREA)
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- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Photovoltaic Devices (AREA)
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JP2009247813 | 2009-10-28 | ||
JP2009-247813 | 2009-10-28 | ||
PCT/JP2010/068563 WO2011052465A1 (fr) | 2009-10-28 | 2010-10-21 | Procédé de fabrication d'une pile solaire |
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Publication Number | Publication Date |
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CN102598291A true CN102598291A (zh) | 2012-07-18 |
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CN2010800475284A Pending CN102598291A (zh) | 2009-10-28 | 2010-10-21 | 太阳能电池单元的制造方法 |
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US (1) | US20120231575A1 (fr) |
EP (1) | EP2495770A1 (fr) |
JP (1) | JPWO2011052465A1 (fr) |
KR (1) | KR20120068945A (fr) |
CN (1) | CN102598291A (fr) |
TW (1) | TW201125154A (fr) |
WO (1) | WO2011052465A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104392899A (zh) * | 2014-10-08 | 2015-03-04 | 程德明 | 整流单晶硅片免喷砂扩散镀镍工艺 |
CN108311112A (zh) * | 2018-03-16 | 2018-07-24 | 嘉兴学院 | 基于低温等离子体技术的表面巯基化碳纤维制备方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5886591B2 (ja) * | 2011-08-09 | 2016-03-16 | 株式会社ダイセル | 印刷用溶剤及びペースト組成物 |
US8945978B2 (en) * | 2013-06-28 | 2015-02-03 | Sunpower Corporation | Formation of metal structures in solar cells |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5270248A (en) * | 1992-08-07 | 1993-12-14 | Mobil Solar Energy Corporation | Method for forming diffusion junctions in solar cell substrates |
US20080000519A1 (en) * | 2004-07-29 | 2008-01-03 | Kyocera Corporation | Solar Cell Device and Method for Manufacturing the Same |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59136926A (ja) | 1983-01-25 | 1984-08-06 | Seiko Epson Corp | 半導体装置の製法 |
JPH0543489Y2 (fr) * | 1987-07-28 | 1993-11-02 | ||
JP3267452B2 (ja) * | 1993-08-31 | 2002-03-18 | キヤノン株式会社 | 光電変換装置及び太陽電池モジュール |
JPH09293889A (ja) * | 1996-04-25 | 1997-11-11 | Kyocera Corp | 太陽電池素子 |
JP3722326B2 (ja) * | 1996-12-20 | 2005-11-30 | 三菱電機株式会社 | 太陽電池の製造方法 |
JP3749079B2 (ja) * | 2000-04-10 | 2006-02-22 | シャープ株式会社 | 太陽電池セル及びその製造方法 |
JP2006041105A (ja) * | 2004-07-26 | 2006-02-09 | Sharp Corp | 太陽電池およびその製造方法 |
JP2006135017A (ja) * | 2004-11-04 | 2006-05-25 | Sharp Corp | 光電変換装置およびその製造方法 |
US20100224241A1 (en) * | 2005-06-22 | 2010-09-09 | Kyocera Corporation | Solar Cell and Solar Cell Manufacturing Method |
US20070163634A1 (en) * | 2005-07-14 | 2007-07-19 | Kyocera Corporation | Solar cell, manufacturing method and manufacturing management system thereof, and solar cell module |
JP5047186B2 (ja) * | 2006-09-27 | 2012-10-10 | 京セラ株式会社 | 太陽電池素子とその製造方法 |
JP4842191B2 (ja) | 2007-03-29 | 2011-12-21 | シャープ株式会社 | 太陽電池セルの製造方法 |
-
2010
- 2010-10-21 EP EP10826597A patent/EP2495770A1/fr not_active Withdrawn
- 2010-10-21 WO PCT/JP2010/068563 patent/WO2011052465A1/fr active Application Filing
- 2010-10-21 CN CN2010800475284A patent/CN102598291A/zh active Pending
- 2010-10-21 US US13/504,483 patent/US20120231575A1/en not_active Abandoned
- 2010-10-21 KR KR1020127010430A patent/KR20120068945A/ko not_active Application Discontinuation
- 2010-10-21 JP JP2011538375A patent/JPWO2011052465A1/ja active Pending
- 2010-10-27 TW TW099136777A patent/TW201125154A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5270248A (en) * | 1992-08-07 | 1993-12-14 | Mobil Solar Energy Corporation | Method for forming diffusion junctions in solar cell substrates |
US20080000519A1 (en) * | 2004-07-29 | 2008-01-03 | Kyocera Corporation | Solar Cell Device and Method for Manufacturing the Same |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104392899A (zh) * | 2014-10-08 | 2015-03-04 | 程德明 | 整流单晶硅片免喷砂扩散镀镍工艺 |
CN108311112A (zh) * | 2018-03-16 | 2018-07-24 | 嘉兴学院 | 基于低温等离子体技术的表面巯基化碳纤维制备方法 |
CN108311112B (zh) * | 2018-03-16 | 2021-01-01 | 嘉兴学院 | 基于低温等离子体技术的表面巯基化碳纤维制备方法 |
Also Published As
Publication number | Publication date |
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WO2011052465A1 (fr) | 2011-05-05 |
US20120231575A1 (en) | 2012-09-13 |
TW201125154A (en) | 2011-07-16 |
EP2495770A1 (fr) | 2012-09-05 |
JPWO2011052465A1 (ja) | 2013-03-21 |
KR20120068945A (ko) | 2012-06-27 |
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Application publication date: 20120718 |