CN102565082A - 对位装置及对位方法 - Google Patents

对位装置及对位方法 Download PDF

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Publication number
CN102565082A
CN102565082A CN2011103530218A CN201110353021A CN102565082A CN 102565082 A CN102565082 A CN 102565082A CN 2011103530218 A CN2011103530218 A CN 2011103530218A CN 201110353021 A CN201110353021 A CN 201110353021A CN 102565082 A CN102565082 A CN 102565082A
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CN
China
Prior art keywords
image
inspection
magnification process
measurement
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011103530218A
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English (en)
Chinese (zh)
Inventor
加藤阳治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN102565082A publication Critical patent/CN102565082A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN2011103530218A 2010-11-09 2011-11-09 对位装置及对位方法 Pending CN102565082A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010250948A JP5653724B2 (ja) 2010-11-09 2010-11-09 位置合わせ装置、位置合わせ方法および位置合わせプログラム
JP2010-250948 2010-11-09

Publications (1)

Publication Number Publication Date
CN102565082A true CN102565082A (zh) 2012-07-11

Family

ID=46267519

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011103530218A Pending CN102565082A (zh) 2010-11-09 2011-11-09 对位装置及对位方法

Country Status (4)

Country Link
JP (1) JP5653724B2 (https=)
KR (1) KR20120049826A (https=)
CN (1) CN102565082A (https=)
TW (1) TW201229500A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106353318A (zh) * 2015-07-15 2017-01-25 通用汽车环球科技运作有限责任公司 使用手持式检查设备的安装的部件的引导检查
CN110268266A (zh) * 2017-02-08 2019-09-20 富士胶片株式会社 免疫检查装置
CN112919106A (zh) * 2021-01-29 2021-06-08 中山市美鼎机械制造有限公司 一种线路板光学智能检测设备

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113125434B (zh) * 2019-12-31 2024-11-19 深圳迈瑞生物医疗电子股份有限公司 图像分析系统和控制拍摄样本图像的方法
JP7701216B2 (ja) * 2021-08-27 2025-07-01 株式会社Ｓｃｒｅｅｎホールディングス 描画システム、描画方法およびプログラム

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0634233B2 (ja) * 1987-05-26 1994-05-02 株式会社安川電機 階層化構造的テンプレ−ト・マッチング方法
JP3246616B2 (ja) * 1992-10-01 2002-01-15 株式会社ニコン 位置合わせ方法
JP2001201338A (ja) * 2000-01-20 2001-07-27 Jeol Ltd 座標リンク機構
JP3993817B2 (ja) * 2002-12-11 2007-10-17 株式会社日立製作所 欠陥組成分析方法及び装置
JP4847685B2 (ja) * 2004-04-16 2011-12-28 株式会社日立ハイテクノロジーズ パターンサーチ方法
JP5059297B2 (ja) * 2005-05-09 2012-10-24 株式会社日立ハイテクノロジーズ 電子線式観察装置
JP2008152555A (ja) * 2006-12-18 2008-07-03 Olympus Corp 画像認識方法及び画像認識装置
JP2008311668A (ja) * 2008-07-07 2008-12-25 Hitachi High-Technologies Corp 基板又は半導体ウエーハに形成されたパターンの，重ね合わせ誤差検査装置及び重ね合わせ誤差検査方法
JP2010107412A (ja) * 2008-10-31 2010-05-13 Toshiba Corp 欠陥観察装置、欠陥観察方法
JP5315076B2 (ja) * 2009-02-06 2013-10-16 株式会社日立ハイテクノロジーズ 電子線の影響を考慮した半導体検査方法及び装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106353318A (zh) * 2015-07-15 2017-01-25 通用汽车环球科技运作有限责任公司 使用手持式检查设备的安装的部件的引导检查
CN106353318B (zh) * 2015-07-15 2019-11-15 通用汽车环球科技运作有限责任公司 使用手持式检查设备的安装的部件的引导检查
CN110268266A (zh) * 2017-02-08 2019-09-20 富士胶片株式会社 免疫检查装置
CN112919106A (zh) * 2021-01-29 2021-06-08 中山市美鼎机械制造有限公司 一种线路板光学智能检测设备

Also Published As

Publication number Publication date
JP5653724B2 (ja) 2015-01-14
JP2012103072A (ja) 2012-05-31
TW201229500A (en) 2012-07-16
KR20120049826A (ko) 2012-05-17

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Application publication date: 20120711