CN102564306B - 表面感测设备 - Google Patents

表面感测设备 Download PDF

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Publication number
CN102564306B
CN102564306B CN201110358458.0A CN201110358458A CN102564306B CN 102564306 B CN102564306 B CN 102564306B CN 201110358458 A CN201110358458 A CN 201110358458A CN 102564306 B CN102564306 B CN 102564306B
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CN
China
Prior art keywords
probe
rotation
surface finish
support member
unidirectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201110358458.0A
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English (en)
Chinese (zh)
Other versions
CN102564306A (zh
Inventor
戴维·斯文·瓦利亚塞
彼得·海杜基威兹
若弗雷·麦克法兰
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Renishaw PLC
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Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=39156862&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN102564306(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GB0617344A external-priority patent/GB0617344D0/en
Priority claimed from GB0708572A external-priority patent/GB0708572D0/en
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of CN102564306A publication Critical patent/CN102564306A/zh
Application granted granted Critical
Publication of CN102564306B publication Critical patent/CN102564306B/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201110358458.0A 2006-09-05 2007-08-31 表面感测设备 Active CN102564306B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB0617344A GB0617344D0 (en) 2006-09-05 2006-09-05 Surface sensing device
GB0617344.7 2006-09-05
GB0708572.3 2007-05-03
GB0708572A GB0708572D0 (en) 2007-05-03 2007-05-03 Surface sensing device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN200780032763.2A Division CN101512285B (zh) 2006-09-05 2007-08-31 表面感测设备

Publications (2)

Publication Number Publication Date
CN102564306A CN102564306A (zh) 2012-07-11
CN102564306B true CN102564306B (zh) 2014-09-24

Family

ID=39156862

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110358458.0A Active CN102564306B (zh) 2006-09-05 2007-08-31 表面感测设备

Country Status (7)

Country Link
US (1) US8006399B2 (https=)
EP (2) EP2064514B2 (https=)
JP (1) JP5124579B2 (https=)
CN (1) CN102564306B (https=)
AT (1) ATE459856T1 (https=)
DE (1) DE602007005150D1 (https=)
WO (1) WO2008029094A1 (https=)

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SE533198C2 (sv) * 2008-02-14 2010-07-20 Hexagon Metrology Ab Mätanordning med mäthuvud för kontrollmätning av föremål
GB0804114D0 (en) * 2008-03-05 2008-04-09 Renishaw Plc Surface sensing device
EP2381212B1 (en) * 2010-04-26 2018-04-25 Tesa Sa Coordinate measuring system for rotationally symmetric workpieces
EP2384851B1 (en) 2010-05-03 2018-01-03 Tesa Sa Coordinate Measuring System with rotatory adapter
US9279441B2 (en) * 2010-09-10 2016-03-08 Carl Zeiss 3D Automation Gmbh Tracer pin arrangement
JP6104557B2 (ja) * 2012-10-18 2017-03-29 株式会社ミツトヨ 表面粗さ測定ユニット、三次元測定装置
US8881611B2 (en) 2013-02-26 2014-11-11 The Boeing Company Automated inspection system
DE102015203369B4 (de) 2015-02-25 2020-02-20 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen der Messbedingungen eines Rauheitssensors, Verfahren zum Vermessen der Rauheit einer Werkstückoberfläche, Computerprogrammprodukt sowie Messgerät eingerichtet zur Durchführung der Verfahren
DE102015209193A1 (de) 2015-05-20 2016-11-24 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Erfassung dynamischer Schwingungen eines Rauheitssensors, Verfahren zur Vermessung der Rauheit einer Werkstückoberfläche, Computerprogrammprodukt sowie Messgerät eingerichtet zur Durchführung der Verfahren.
JP6649013B2 (ja) * 2015-08-27 2020-02-19 株式会社ミツトヨ プローブヘッド回転機構
EP3430349B1 (en) * 2016-03-16 2023-08-09 Hexagon Metrology, Inc Optical probe with crash protection and probe clips
US10663274B2 (en) 2017-01-27 2020-05-26 Faro Technologies, Inc Articulated arm coordinate measuring machine
GB201702391D0 (en) 2017-02-14 2017-03-29 Renishaw Plc Surface sensing device
WO2018150178A1 (en) 2017-02-15 2018-08-23 Renishaw Plc Surface finish or surface roughness probe
DE102017103938A1 (de) 2017-02-24 2018-08-30 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung zum Messen der Rauheit einer Werkstückoberfläche
DE102017105814B3 (de) 2017-03-17 2018-05-30 Carl Zeiss Industrielle Messtechnik Gmbh System zum Messen der Rauheit einer Oberfläche eines Werkstücks
DE102017106425B4 (de) 2017-03-24 2020-02-06 Carl Zeiss Industrielle Messtechnik Gmbh Von einem Koordinatenmessgerät verfahrbare Vorrichtung zum Positionieren eines Messinstruments bezüglich eines Werkstücks
JP6368986B1 (ja) * 2017-03-27 2018-08-08 株式会社東京精密 検出器、表面性状測定機、及び真円度測定機
DE102017108033A1 (de) 2017-04-13 2018-10-18 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Messung von Koordinaten oder Eigenschaften einer Werkstückoberfläche
DE102017003641B4 (de) 2017-04-13 2019-10-17 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Messung von Koordinaten oder Eigenschaften einer Werkstückoberfläche
GB201806830D0 (en) * 2018-04-26 2018-06-13 Renishaw Plc Surface finish stylus
WO2020021417A1 (en) 2018-07-26 2020-01-30 Tesa Sarl Accessory for rotary probe support

Citations (5)

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DE4308823A1 (de) * 1993-03-19 1994-09-22 Zeiss Carl Fa Messender Tastkopf für Koordinatenmeßgeräte
CN1630804A (zh) * 2002-02-14 2005-06-22 Faro科技有限公司 带有铰接臂的便携式坐标测量机
CN1695036A (zh) * 2002-07-01 2005-11-09 瑞尼斯豪公司 探头或探针定向
CN1721811A (zh) * 2004-07-16 2006-01-18 特莎有限公司 一种可定向的探针
EP1495282B1 (en) * 2002-04-05 2006-06-14 Renishaw plc Kinematic coupling with damper

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DE4039336C5 (de) * 1990-12-10 2004-07-01 Carl Zeiss Verfahren zur schnellen Werkstück-Temperaturmessung auf Koordinatenmeßgeräten
JPH0743102A (ja) * 1993-07-27 1995-02-10 Etsuzo Fukuda 測定子の位置ぎめ用具
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DE50002092D1 (de) † 1999-06-26 2003-06-12 Kuka Schweissanlagen Gmbh Verfahren und vorrichtung zum kalibrieren von robotermessstationen, manipulatoren und mitgeführten optischen messeinrichtungen
DE10006753A1 (de) * 2000-02-15 2001-08-16 Zeiss Carl Dreh-Schwenkeinrichtung für den Tastkopf eines Koordinatenmeßgerätes
EP1322909B2 (de) * 2000-09-28 2016-12-21 Carl Zeiss Industrielle Messtechnik GmbH Koordinatenmessgerät
EP1342050B1 (de) * 2000-09-28 2006-06-14 Carl Zeiss Industrielle Messtechnik GmbH Ermittlung von korrekturparametern einer dreh- schwenkeinheit mit messendem sensor ( koordinatenmessgerät ) über zwei parameterfelder
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JP2003014405A (ja) * 2001-07-04 2003-01-15 Okuma Corp ワークの表面・裏面共用計測スタイラス
FR2837567B1 (fr) † 2002-03-19 2005-05-06 Romain Granger Capteur pour machine de mesure de coordonnees tridimensionnelles
DE10260670B4 (de) † 2002-12-23 2007-04-05 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung zum optischen Abtasten von Werkstücken
GB2417090A (en) † 2003-04-28 2006-02-15 Stephen James Crampton CMM arm with exoskeleton
US7257992B2 (en) 2004-07-06 2007-08-21 Cim Systems, Inc. Surface finish tester apparatus and methods
JP4582446B2 (ja) † 2004-11-18 2010-11-17 株式会社東京精密 測定装置
JP4568621B2 (ja) 2005-02-28 2010-10-27 株式会社ミツトヨ 表面性状測定機の真直度補正方法および表面性状測定機
GB0605796D0 (en) * 2006-03-23 2006-05-03 Renishaw Plc Apparatus and method of measuring workpieces
EP1978328B1 (en) * 2007-04-03 2015-02-18 Hexagon Metrology AB Oscillating scanning probe with constant contact force

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4308823A1 (de) * 1993-03-19 1994-09-22 Zeiss Carl Fa Messender Tastkopf für Koordinatenmeßgeräte
CN1630804A (zh) * 2002-02-14 2005-06-22 Faro科技有限公司 带有铰接臂的便携式坐标测量机
EP1495282B1 (en) * 2002-04-05 2006-06-14 Renishaw plc Kinematic coupling with damper
CN1695036A (zh) * 2002-07-01 2005-11-09 瑞尼斯豪公司 探头或探针定向
CN1721811A (zh) * 2004-07-16 2006-01-18 特莎有限公司 一种可定向的探针

Also Published As

Publication number Publication date
ATE459856T1 (de) 2010-03-15
EP2064514B2 (en) 2014-08-06
EP2064514B1 (en) 2010-03-03
WO2008029094A1 (en) 2008-03-13
US20090255139A1 (en) 2009-10-15
EP2207006A3 (en) 2010-11-03
JP5124579B2 (ja) 2013-01-23
DE602007005150D1 (de) 2010-04-15
US8006399B2 (en) 2011-08-30
CN102564306A (zh) 2012-07-11
EP2207006B2 (en) 2022-01-26
JP2010502976A (ja) 2010-01-28
EP2207006B1 (en) 2013-10-02
EP2064514A1 (en) 2009-06-03
EP2207006A2 (en) 2010-07-14

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