CN102544363A - 相变存储器底电极结构的制备方法 - Google Patents
相变存储器底电极结构的制备方法 Download PDFInfo
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104276764A (zh) * | 2013-07-11 | 2015-01-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 玻璃衬底的工艺方法 |
CN104425709A (zh) * | 2013-08-20 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | 相变存储器的形成方法 |
CN107305924A (zh) * | 2016-04-18 | 2017-10-31 | 中芯国际集成电路制造(上海)有限公司 | 相变存储器的制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101026178A (zh) * | 2006-02-25 | 2007-08-29 | 尔必达存储器股份有限公司 | 热效率下降最小化的相变存储器件及其制造方法 |
CN101335328A (zh) * | 2008-08-05 | 2008-12-31 | 中国科学院上海微系统与信息技术研究所 | 一种相变存储器器件单元结构及其制作方法 |
CN101393965A (zh) * | 2007-07-12 | 2009-03-25 | 三星电子株式会社 | 用于形成具有底电极的相变存储器件的方法 |
US20090250679A1 (en) * | 2008-04-04 | 2009-10-08 | Hynix Semiconductor Inc. | Phase-change memory device and method of fabricating the same |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101026178A (zh) * | 2006-02-25 | 2007-08-29 | 尔必达存储器股份有限公司 | 热效率下降最小化的相变存储器件及其制造方法 |
CN101393965A (zh) * | 2007-07-12 | 2009-03-25 | 三星电子株式会社 | 用于形成具有底电极的相变存储器件的方法 |
US20090250679A1 (en) * | 2008-04-04 | 2009-10-08 | Hynix Semiconductor Inc. | Phase-change memory device and method of fabricating the same |
CN101335328A (zh) * | 2008-08-05 | 2008-12-31 | 中国科学院上海微系统与信息技术研究所 | 一种相变存储器器件单元结构及其制作方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104276764A (zh) * | 2013-07-11 | 2015-01-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 玻璃衬底的工艺方法 |
WO2015003656A1 (zh) * | 2013-07-11 | 2015-01-15 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 玻璃衬底的刻蚀方法 |
CN104276764B (zh) * | 2013-07-11 | 2017-03-22 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 玻璃衬底的工艺方法 |
CN104425709A (zh) * | 2013-08-20 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | 相变存储器的形成方法 |
CN104425709B (zh) * | 2013-08-20 | 2017-07-14 | 中芯国际集成电路制造(上海)有限公司 | 相变存储器的形成方法 |
CN107305924A (zh) * | 2016-04-18 | 2017-10-31 | 中芯国际集成电路制造(上海)有限公司 | 相变存储器的制备方法 |
CN107305924B (zh) * | 2016-04-18 | 2019-11-26 | 中芯国际集成电路制造(上海)有限公司 | 相变存储器的制备方法 |
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