CN102528950B - Debugging device of scribing machine material transmission system - Google Patents
Debugging device of scribing machine material transmission system Download PDFInfo
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- CN102528950B CN102528950B CN201010592711.4A CN201010592711A CN102528950B CN 102528950 B CN102528950 B CN 102528950B CN 201010592711 A CN201010592711 A CN 201010592711A CN 102528950 B CN102528950 B CN 102528950B
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- center
- workbench
- debugging apparatus
- transmission system
- sliding bar
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Abstract
The invention provides a debugging device of a scribing machine material transmission system, which is used for solving the problems of great difficulty in ensuring the coplanarity of the centers of all parts in the scribing machine material transmission system as well as poorer detectability of the center of each part in the prior art. The debugging device comprises a manipulator connecting piece, a sliding rod and a workbench connecting piece, wherein a sliding clamping groove is formed on the manipulator connecting piece; the manipulator connecting piece is fixedly connected with a scale parallel to the sliding clamping groove; one end of the sliding rod is clamped in the sliding clamping groove in a sliding way while the other end of the sliding rod is fixedly connected with an inserting head; the sliding rod is fixedly connected with a pointer in parallel; the pointer points to scale marks on the scale; the workbench connecting piece is of cylindrical shape; and an inserting hole capable of matching with the inserting head is formed at the center of the top end of the workbench connecting piece. The debugging device provided by the invention can be used for debugging the center of each part in the scribing machine material transmission system; convenience, simplicity and rapidness in the debugging process are obtained; the center of each part can be positioned on the same plane so that the coplanarity of the center of each part is ensured; and detectability also is obtained for the center of each part in the scribing machine material transmission system.
Description
Technical field
The present invention relates to integrated antenna package equipment manufacturing technology field, particularly a kind of debugging apparatus of scribing machine material transmission system.
Background technology
Scribing machine is the equipment that a kind of wafer by element circuit or element is divided into set junior unit.The working mechanism of scribing machine comprises automatic loading/unloading, auto-alignment, automatic cleaning, automatic cutting-up etc.
Material transmission system is the leading portion execution unit of Full Auto Dicing Saw, relates generally to feeding system, pre-alignment system, arm-and-hand system, θ platform system, purging system etc.When scribing machine material transmission system work, upper and lower manipulator center, pre-alignment system center, θ workbench center, cleaning wafer-supporting platform center must be in same plane, as long as wherein this plane of misalignment of some, will cause the position skew of manipulator sucker on paster ring, make sucker vacuum leak, automatic transmission failure, therefore in material transmission system, the adjustment at each several part center is the emphasis of whole system assembling.Owing to being subject to the restriction of locus, the installation base surface of each several part is distributed in different parts, and common assembly method is difficult to ensure the coplanarity at each several part center, and the detectability at each several part center is poor.
Visible, prior art has the coplanarity at each several part center in guarantee scribing machine material transmission system, the poor problem of detectability at each several part center of being difficult to.
Summary of the invention
The embodiment of the present invention provides a kind of debugging apparatus of scribing machine material transmission system, is difficult to ensure the coplanarity at each several part center in scribing machine material transmission system, the poor problem of detectability at each several part center in order to solve prior art.
The embodiment of the present invention provides a kind of debugging apparatus of scribing machine material transmission system, comprising:
Manipulator connector, is provided with slip draw-in groove, is fixedly connected with the scale parallel with described slip draw-in groove;
Sliding bar, slide and be arranged in described slip draw-in groove in one end, and the other end is fixedly connected with a plug, and the parallel pointer that is fixedly connected with of described sliding bar, the graduation mark described in described pointed on scale;
Workbench connector, is cylindric, and center, top has the jack that can coordinate with described plug.
Described slip draw-in groove is: cross section is T-shaped T-shaped slip draw-in groove.
Described one end of described sliding bar is: the ring flange being slidably matched with described T-shaped slip draw-in groove.
Described sliding bar is fixedly connected with described pointer by the first nut and screw are parallel.
Described workbench connector is: first cylinder that can coordinate with the seam hole of θ workbench.
Described workbench connector comprises the second cylinder and the three cylindrical body that are fixedly connected with, wherein:
The dead in line of described the second cylinder and described three cylindrical body;
Described the second center, cylindrical top has the jack that can coordinate with described plug;
Described three cylindrical physical efficiency coordinates with the seam hole of θ workbench.
Described debugging apparatus, also comprises:
Fixture, for being fixed on described sliding bar to stop slip place.
Described fixture comprises:
Be enclosed within the second nut and pad on described sliding bar.
The debugging apparatus of the scribing machine material transmission system that the embodiment of the present invention provides, can be used to debug each several part center in scribing machine material transmission system, debug process facilitates simple and direct, can make each several part center at grade, ensure the coplanarity at each several part center, assembling and the debugging efficiency of scribing machine material transmission system are improved, can make scribing machine material transmission system can keep at work stable material transferring function, can not cause the phenomenon that occurs falling sheet or can not inhale slice, thin piece because of sucker vacuum leak because of off-centring; In addition, this debugging apparatus also makes each several part center in scribing machine material transmission system have detectability.
Brief description of the drawings
Fig. 1 is the decomposition plan view of the debugging apparatus of scribing machine material transmission system in the embodiment of the present invention;
Fig. 2 is the overall top view of debugging apparatus in Fig. 1;
Fig. 3 is the cross-sectional view of debugging apparatus in Fig. 2;
Fig. 4 is the overall top view of the debugging apparatus of scribing machine material transmission system in another embodiment of the present invention.
Detailed description of the invention
For technical problem, technical scheme and advantage that the embodiment of the present invention will be solved are clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
The decomposition plan view of the debugging apparatus of the scribing machine material transmission system that Fig. 1 provides for the embodiment of the present invention; Fig. 2 is the overall top view of debugging apparatus in Fig. 1; Fig. 3 is the cross-sectional view of debugging apparatus in Fig. 2.
As Fig. 1,2 and 3, the debugging apparatus of the scribing machine material transmission system that the embodiment of the present invention provides, comprising:
Manipulator connector 1, is provided with slip draw-in groove, is fixedly connected with the scale parallel with the draw-in groove that slides 2;
Sliding bar 3, slide and be arranged in slip draw-in groove in one end, and the other end is fixedly connected with a plug 4, and the parallel pointer 5 that is fixedly connected with of sliding bar 3, and pointer 5 points to the graduation mark on scale 2;
Workbench connector 6, is cylindric, and center, top has the jack that can coordinate with plug 4.
Exemplarily, slip draw-in groove is: cross section is T-shaped T-shaped slip draw-in groove.Now, above-mentioned one end of sliding bar 3 can be: the ring flange being slidably matched with T-shaped slip draw-in groove.
Exemplarily, slip draw-in groove also can be: cross section is the L-type slip draw-in groove of L-type.Now, above-mentioned one end of sliding bar 3 can be: the L-type termination being slidably matched with L-type slip draw-in groove.
Above-mentioned one end of slip draw-in groove and sliding bar 3 also can be embodied as other pattern neatly, as long as can ensure that above-mentioned one end of sliding bar 3 can slide and not depart from slip draw-in groove in slip draw-in groove.
The overall top view of the debugging apparatus of the scribing machine material transmission system that Fig. 4 provides for another embodiment of the present invention.
Exemplarily, as Fig. 4, the parallel concrete mode that is fixedly connected with pointer 5 of sliding bar 3 is:
Sliding bar 3 is by the parallel pointer 5 that is fixedly connected with of the first nut 7 and screw 8.
Exemplarily, as Fig. 4, workbench connector comprises the second cylinder 61 and the three cylindrical body 62 being fixedly connected with, wherein:
The dead in line of the second cylinder 61 and three cylindrical body 62;
The center, top of the second cylinder 61 has the jack that can coordinate with plug 4;
Three cylindrical body 62 can coordinate with the seam hole of θ workbench.
Also can be as Fig. 1,2 and 3, workbench connector is: first cylinder that can coordinate with the seam hole of θ workbench.
Workbench connector also can be embodied as other pattern neatly.
Preferably, above-mentioned debugging apparatus, can also comprise:
Fixture, for being fixed on sliding bar 3 to stop slip place.
Exemplarily, as Fig. 4, fixture comprises:
Be enclosed within the second nut 9 and pad 10 on sliding bar 3.
The following describes the process of utilizing above-mentioned debugging apparatus to adjust each several part center in scribing machine material transmission system.
(1), utilize debugging apparatus to make the center of manipulator and the center of θ workbench at grade.
Before installation and debugging, manipulator connector is connected with the connecting plate of upper manipulator with screw or other device, the bottom of workbench connector is connected with the seam hole of θ workbench, and the center line of workbench connector should overlap with the center line in seam hole.
θ workbench is transferred to by X workbench near the prealignment frame center of just installing, and upper manipulator is moved to θ workbench top, and upper manipulator moves down.
Mobile sliding bar in the slip draw-in groove of manipulator connector, inserts the plug of sliding bar in the jack on workbench connector top, and Stable sliding bar makes sliding bar stop sliding, and sliding bar is stabilized in to current slip place that stops.Wherein, in the time having fixture on sliding bar, can utilize fixture that sliding bar is stabilized in to current slip place that stops, such as being while being enclosed within the first nut on sliding bar and pad when fixture, screw the first nut towards the direction of slip draw-in groove, sliding bar is stabilized in to current slip place that stops.
The distance value of reading the graduation range scale center that pointer indicates on scale, this distance value is the deviate at sliding bar and workbench connector center, and this deviate is similarly the deviate at the center of manipulator and the center of θ workbench; Regulate upper position of manipulator according to this deviate, make the center of manipulator and the center of θ workbench at grade.
Conventionally, the deviate at the center of the center of upper manipulator and θ workbench is the bulk of more difficult measurement, and this deviate is converted into visualization plane size by above-mentioned debugging apparatus, and it is very convenient simple and direct that the process that needs are constantly repeated to debug becomes.
(2), utilize debugging apparatus to make the center of lower manipulator and the center of θ workbench at grade.
Method is with described in (1).
(3), adjust prealignment frame center, make prealignment framework in the time opening with closure, the center superposition of prealignment frame center line and θ workbench.
(4), adjust the center of purging system workbench according to the prealignment frame center line after adjusting, the center of purging system workbench is overlapped with prealignment frame center line.
(5), manipulator, to the top of purging system workbench, is adjusted limiting buffer device and is also put down paster ring in movement, adjusts the center of purging system workbench and the center superposition of paster ring.
(6), adjust the center line of loading working table magazine according to the prealignment frame center line after adjusting, the center line of loading working table magazine is overlapped with prealignment frame center line.
(7), according to the center line of the center of purging system workbench, prealignment frame center line and magazine, determine each operating position of lower manipulator.
Visible, the debugging apparatus of the scribing machine material transmission system that the embodiment of the present invention provides, can be used to debug each several part center in scribing machine material transmission system, debug process facilitates simple and direct, can make each several part center at grade, ensure the coplanarity at each several part center, assembling and the debugging efficiency of scribing machine material transmission system are improved, can make scribing machine material transmission system can keep at work stable material transferring function, can not cause the phenomenon that occurs falling sheet or can not inhale slice, thin piece because of sucker vacuum leak because of off-centring; In addition, this debugging apparatus also makes each several part center in scribing machine material transmission system have detectability.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, do not departing under the prerequisite of principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (8)
1. a debugging apparatus for scribing machine material transmission system, is characterized in that, comprising:
Manipulator connector, is provided with slip draw-in groove, is fixedly connected with the scale parallel with described slip draw-in groove;
Sliding bar, slide and be arranged in described slip draw-in groove in one end, and the other end is fixedly connected with a plug, and the parallel pointer that is fixedly connected with of described sliding bar, the graduation mark described in described pointed on scale;
Workbench connector, is cylindric, and center, top has the jack that can coordinate with described plug.
2. debugging apparatus as claimed in claim 1, is characterized in that,
Described slip draw-in groove is: cross section is T-shaped T-shaped slip draw-in groove.
3. debugging apparatus as claimed in claim 2, is characterized in that,
Described one end of described sliding bar is: the ring flange being slidably matched with described T-shaped slip draw-in groove.
4. debugging apparatus as claimed in claim 1, is characterized in that,
Described sliding bar is fixedly connected with described pointer by the first nut and screw are parallel.
5. debugging apparatus as claimed in claim 1, is characterized in that,
Described workbench connector is: first cylinder that can coordinate with the seam hole of θ workbench.
6. debugging apparatus as claimed in claim 1, is characterized in that,
Described workbench connector comprises the second cylinder and the three cylindrical body that are fixedly connected with, wherein:
The dead in line of described the second cylinder and described three cylindrical body;
Described the second center, cylindrical top has the jack that can coordinate with described plug;
Described three cylindrical physical efficiency coordinates with the seam hole of θ workbench.
7. as the debugging apparatus as described in arbitrary in claim 1 to 6, it is characterized in that, also comprise:
Fixture, for being fixed on described sliding bar to stop slip place.
8. debugging apparatus as claimed in claim 7, is characterized in that, described fixture comprises:
Be enclosed within the second nut and pad on described sliding bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010592711.4A CN102528950B (en) | 2010-12-08 | 2010-12-08 | Debugging device of scribing machine material transmission system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010592711.4A CN102528950B (en) | 2010-12-08 | 2010-12-08 | Debugging device of scribing machine material transmission system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102528950A CN102528950A (en) | 2012-07-04 |
| CN102528950B true CN102528950B (en) | 2014-12-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010592711.4A Expired - Fee Related CN102528950B (en) | 2010-12-08 | 2010-12-08 | Debugging device of scribing machine material transmission system |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106808318A (en) * | 2015-12-01 | 2017-06-09 | 安徽鸿远机电科技有限公司 | A kind of drilling and milling machine workbench scale |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328553A (en) * | 1976-12-07 | 1982-05-04 | Computervision Corporation | Method and apparatus for targetless wafer alignment |
| JPH02102559A (en) * | 1988-10-11 | 1990-04-16 | Rohm Co Ltd | Semiconductor manufacturing device |
| CN1787201A (en) * | 2005-10-24 | 2006-06-14 | 中国电子科技集团公司第四十五研究所 | Apparatus for automatically distinguishing and aligning wafer of wafer cutter and method thereof |
| CN1887520A (en) * | 2006-07-14 | 2007-01-03 | 沈阳仪表科学研究院 | Automatic aligning device for scribing machine platform datum |
| US7165331B1 (en) * | 2005-05-24 | 2007-01-23 | Micro Processing Technology, Inc. | Apparatus and method for scribing a semiconductor wafer while controlling scribing forces |
-
2010
- 2010-12-08 CN CN201010592711.4A patent/CN102528950B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328553A (en) * | 1976-12-07 | 1982-05-04 | Computervision Corporation | Method and apparatus for targetless wafer alignment |
| JPH02102559A (en) * | 1988-10-11 | 1990-04-16 | Rohm Co Ltd | Semiconductor manufacturing device |
| US7165331B1 (en) * | 2005-05-24 | 2007-01-23 | Micro Processing Technology, Inc. | Apparatus and method for scribing a semiconductor wafer while controlling scribing forces |
| CN1787201A (en) * | 2005-10-24 | 2006-06-14 | 中国电子科技集团公司第四十五研究所 | Apparatus for automatically distinguishing and aligning wafer of wafer cutter and method thereof |
| CN1887520A (en) * | 2006-07-14 | 2007-01-03 | 沈阳仪表科学研究院 | Automatic aligning device for scribing machine platform datum |
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| CN102528950A (en) | 2012-07-04 |
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Granted publication date: 20141210 Termination date: 20181208 |