CN219696431U - Calibration jig and measurement system - Google Patents
Calibration jig and measurement system Download PDFInfo
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- CN219696431U CN219696431U CN202321246619.1U CN202321246619U CN219696431U CN 219696431 U CN219696431 U CN 219696431U CN 202321246619 U CN202321246619 U CN 202321246619U CN 219696431 U CN219696431 U CN 219696431U
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- 238000012546 transfer Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
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- 230000002159 abnormal effect Effects 0.000 description 1
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Abstract
The utility model provides a calibration jig and a measurement system, wherein the calibration jig is configured to determine a target position of a wafer on a clamp block so as to place the wafer on the clamp block according to the target position; the calibration jig comprises a jig body, wherein a positioning structure corresponding to the clamp block is arranged on the jig body, and the positioning structure is configured to position the position of the calibration jig on the clamp block. According to the calibration jig and the measurement system, the positioning structure corresponding to the clamp blocks is arranged on the jig body, so that the positioning structure can more conveniently position the position of the calibration jig on the clamp blocks; the position of the wafer is calibrated through the calibration jig, so that a foundation is laid for accurately conveying the wafer to the clamp blocks.
Description
Technical Field
The present utility model relates to the field of integrated circuit manufacturing equipment, and in particular, to a calibration jig and a measurement system.
Background
The semiconductor factory generally faces the problems of multiple processes and complex processes, and in order to ensure the quality of the wafer, the parameters such as the critical dimension of the wafer are required to be measured through optical line width measuring equipment, so that whether the production line is abnormal or not can be timely detected, and the measurement of the wafer plays a vital role in keeping the process stable and reducing the production cost.
Before the mechanical arm grabs the wafer to the optical line width measuring equipment for measurement, the wafer can be simulated to be transmitted through the grabbing jig, and the wafer position can be calibrated.
Specifically, please refer to fig. 1-4, wherein fig. 1 schematically shows a top view of a fixture in the prior art clamped on a mechanical arm; FIG. 2 schematically shows a top view of a prior art metrology apparatus;
FIG. 3 schematically shows a schematic view of the structure of a caliper of the prior art; fig. 4 schematically shows a cross-sectional view of a prior art robot arm transferring a jig to a jaw. In the prior art, the wafer position is calibrated by the jig: first, as shown in fig. 1, the mechanical arm 10 is allowed to clamp the jig 20; then, as shown in fig. 2 and 3, the measuring apparatus 30 includes a caliper 301 and a carrying table 302, and a caliper block 3011 is provided on the caliper 301; moving the mechanical arm 10 to horizontally move the jig 20 to above the caliper 301; next, as shown in fig. 4, the mechanical arm 10 holds the clamping jig 20, moves the jig 20 downward along the Z-axis direction, and fine-adjusts the position of the jig 20 along the X, Y direction as required, so that the jig 20 moves onto the clamp block 3011, and the demonstrator (not shown in the figure) records the X-axis and Y-axis coordinates of the mechanical arm 10 and sets them as target coordinates of the mechanical arm 10; finally, the self-contained software of the equipment front-end module production company is adopted, the mechanical arm 10 is operated to perform a transfer (non-product wafer) test, the transfer condition is visually observed, and then the position of the mechanical arm 10 is finely adjusted in the X, Y direction according to the requirements.
However, in the current calibration method, the transfer condition of the non-product wafer needs to be visually detected, and then the position of the mechanical arm 10 is finely adjusted in the X, Y direction according to the requirement, so that the process is complicated; moreover, because different wafers have certain differences in bending rate, edge, and the like, the situation that the position of the mechanical arm 10 for conveying the wafers to the clamp block 3011 is inaccurate is easy to occur. Therefore, how to ensure that the horizontal position of the robot arm 10 for transferring the wafer to the chuck block 3011 is accurate and reliable is becoming one of the technical problems to be solved in the art.
Disclosure of Invention
The utility model aims to provide a calibration jig and a measurement system, which are used for solving one or more problems in the prior art that the calibration process is complicated because the transmission condition of non-product wafers is needed to be visually detected, and the position of a mechanical arm is adjusted according to the requirement, and the position of the mechanical arm for transmitting the wafers to a clamp block is inaccurate due to certain differences of different wafers in the aspects of bending rate, wafer edges and the like.
In order to achieve the above purpose, the utility model is realized by the following technical scheme: a calibration jig configured to determine a target position of a wafer on a chuck so as to place the wafer on the chuck according to the target position; the calibration jig comprises a jig body, wherein a positioning structure corresponding to the clamp block is arranged on the jig body, and the positioning structure is configured to position the position of the calibration jig on the clamp block.
Optionally, the shape of the jig body is matched with the shape of the wafer, and the positioning structure is arranged at the edge of the jig body.
Optionally, the positioning structure and the jig body are integrally formed.
Optionally, the positioning structure is provided with four.
Optionally, the calibration jig is moved onto the jaw block by a clamping device of the mechanical arm.
Optionally, when the clamping device clamps the calibration jig, a clamping position of the clamping device on the calibration jig is different from a setting position of the positioning structure on the jig body.
Optionally, the edge of the positioning structure far from the jig body is a preset length away from the edge of the jig body, and the preset length is smaller than the length of the clamp block.
Optionally, the preset length is 0.5 mm.
In order to achieve the above object, the present utility model further provides a measurement system, which includes a measurement device having a caliper, a mechanical arm having a clamping device, and the calibration jig according to any one of the above claims; the caliper is provided with a caliper block, and the mechanical arm moves the positioning structure arranged on the calibration jig to the caliper block through the clamping device.
Preferably, the measuring system further comprises a demonstrator, wherein the demonstrator is used for recording the movement positioning of the mechanical arm.
Compared with the prior art, the calibration jig and the measurement system provided by the utility model have the following beneficial effects:
the calibration jig provided by the utility model is configured to determine a target position of a wafer on a clamp block so as to place the wafer on the clamp block according to the target position; the calibration jig comprises a jig body, wherein a positioning structure corresponding to the clamp block is arranged on the jig body, and the positioning structure is configured to position the position of the calibration jig on the clamp block. Therefore, the calibration jig provided by the utility model can determine the target position of the wafer on the clamp block, so that the wafer can be placed on the clamp block according to the target position; further, since the calibration jig comprises a jig body, a positioning structure corresponding to the clamp block is arranged on the jig body, and the positioning structure is configured to position the calibration jig at the position on the clamp block, the positioning structure is configured to position the calibration jig at the position on the clamp block through the positioning structure corresponding to the clamp block arranged on the jig body, and therefore, the position of the wafer is calibrated through the calibration jig, and a foundation is laid for accurately conveying the wafer to the clamp block.
Further, the shape of the jig body is matched with the shape of the wafer, and the positioning structure is arranged at the edge of the jig body. Therefore, the calibration jig provided by the utility model can ensure that a gap is reserved between the wafer and one side of the clamp block, which is close to the clamp, after the calibration jig is used for calibrating the position of the wafer by arranging the positioning structure at the edge of the jig body, so that a foundation is laid for not touching the clamp when the wafer is placed later, and the wafer is better protected and the wafer conveying efficiency is improved.
Still further, when the clamping device is used to clamp the calibration jig, the clamping position of the clamping device on the calibration jig is different from the setting position of the positioning structure on the jig body. Therefore, the calibration jig provided by the utility model can enable the positioning structure to more conveniently position the position of the calibration jig on the clamp block.
The measuring system provided by the utility model comprises measuring equipment with calipers, a mechanical arm with a clamping device and the calibration jig; the caliper is provided with a caliper block, and the mechanical arm moves the positioning structure arranged on the calibration jig to the caliper block through the clamping device. Therefore, the measurement system provided by the utility model has at least all advantages of the calibration jig, and is not described herein.
Drawings
FIG. 1 is a top view of a prior art fixture clamped to a robotic arm;
FIG. 2 is a top view of a prior art metrology apparatus;
FIG. 3 is a schematic view of a prior art caliper;
FIG. 4 is a cross-sectional view of a prior art robot arm transferring a jig to a jaw block;
fig. 5 is a top view of a calibration jig according to a first embodiment of the present utility model;
FIG. 6 is a top view of a calibration jig according to a first embodiment of the present utility model when the calibration jig is transferred onto a clamp block;
FIG. 7 is a schematic view of a mechanical arm;
FIG. 8 is a cross-sectional view of a calibration fixture according to a first embodiment of the present utility model;
the reference numerals in fig. 1-8 are illustrated as follows:
10-mechanical arm, 101-clamping device, 1011-expansion component, 1012-dog, 20-tool, 30-measuring equipment, 301-calliper, 3011-clamp block, 302-bearing table, 40-tool body, 41-location structure.
Detailed Description
The calibration jig and the measurement system according to the present utility model are described in further detail below with reference to the accompanying drawings and embodiments. The advantages and features of the present utility model will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model. For a better understanding of the utility model with objects, features and advantages, refer to the drawings. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the present disclosure for the understanding and reading of the present disclosure, and are not intended to limit the scope of the utility model, which is defined by the appended claims, and any structural modifications, proportional changes, or dimensional adjustments, which may be made by the present disclosure, should fall within the scope of the present disclosure under the same or similar circumstances as the effects and objectives attained by the present utility model. Specific design features of the utility model disclosed herein, including for example, specific dimensions, orientations, positions, and configurations, will be determined in part by the specific intended application and use environment. In the embodiments described below, the same reference numerals are used in common between the drawings to denote the same parts or parts having the same functions, and the repetitive description thereof may be omitted.
Example 1
The embodiment provides a calibration jig. Specifically, referring to fig. 5 and 6, fig. 5 is a top view of a calibration jig according to the present embodiment; fig. 6 is a top view of a calibration jig according to the present embodiment when the calibration jig is transferred onto the clamp block 3011. As shown in fig. 5 and 6, the calibration jig provided in this embodiment is configured to determine a target position of a wafer (not shown in the drawings) on the clamp block 3011, so as to place the wafer on the clamp block 3011 according to the target position; the calibration jig comprises a jig body 40, wherein a positioning structure 41 corresponding to the clamp block 3011 is arranged on the jig body 40, and the positioning structure 41 is configured to position the calibration jig on the clamp block 3011. Thus, the target position of the wafer on the clamp block 3011 can be determined through the calibration jig, so that the wafer is placed on the clamp block 3011 according to the target position; by arranging the positioning structure 41 corresponding to the clamp block 3011 on the jig body 40, the positioning structure 41 is configured to position the calibration jig at the position on the clamp block 3011, and the position of the wafer can be calibrated by the calibration jig, so that a foundation is laid for accurately conveying the wafer to the clamp block 3011.
The robot arm 10 places the wafer using the same movement parameters as the placement calibration jig, thereby enabling the robot arm 10 to accurately transfer the wafer onto the clamp block 3011.
Specifically, referring to fig. 7, fig. 7 is a schematic structural diagram of the mechanical arm 10. As can be seen from fig. 7, the mechanical arm 10 is provided with a clamping device 101, the clamping device 101 includes two stoppers 1012 and telescopic components 1011, the stoppers 1012 are disposed on the outer side of the mechanical arm 10, and the telescopic components 1011 are disposed on the inner side of the mechanical arm 10. When the clamping device 101 is used for grabbing a wafer or a calibration jig, firstly, the telescopic component 1011 of the mechanical arm 10 is in a retracted state, and the mechanical arm 10 moves to the lower part of the wafer or the calibration jig; then, the mechanical arm 10 is lifted upwards to pick up the wafer or the calibration jig; finally, the telescoping assembly 1011 is extended to successfully grasp the wafer or calibrate the jig.
Preferably, the shape of the jig body 40 is adapted to the shape of the wafer, and the positioning structure 41 is disposed at the edge of the jig body 40. Therefore, by arranging the positioning structure 41 at the edge of the jig body 40, after the position of the wafer is calibrated by using the calibration jig, a gap is reserved between the wafer and one side, close to the clamp 301, of the clamp block 3011, so that a foundation is laid for not touching the clamp 301 when the wafer is placed later, and the wafer is better protected and the wafer conveying efficiency is improved.
Preferably, the positioning structure 41 is integrally formed with the jig body 40. Thereby, the connection between the positioning structure 41 and the jig body 40 can be made more firm.
It should be noted that, the connection manner of the positioning structure 41 and the jig body 40 is not limited in the present utility model, for example, in some embodiments, the positioning structure 41 and the jig body 40 are connected by adopting an adhesive manner; in other embodiments, the positioning structure 41 is connected to the jig body 40 by a screw.
Preferably, the positioning structure 41 is provided with four. Thus, the positioning structures 41 are in one-to-one correspondence with the clamp blocks 3011, so that enough space is available on the calibration jig to enable the mechanical arm 10 to be clamped by the clamping device 101.
It should be noted that, as those skilled in the art can understand, the positioning structure 41 may be disposed at other positions of the jig body 40, so long as the jig body 40 is located on the clamp block 3011, and a gap is left between an edge of the jig body 40 and a side of the clamp block 3011 close to the clamp 301.
Further, the calibration jig is moved onto the jaw block 3011 by the gripping device 101 of the robotic arm 10. Thus, the wafer transfer is simulated by clamping the calibration jig by the clamping device 101 of the mechanical arm 10, and the wafer damage caused by directly transferring the wafer can be avoided.
Preferably, when the clamping device 101 clamps the calibration jig, the clamping position of the clamping device 101 on the calibration jig is different from the setting position of the positioning structure 41 on the jig body 40. Thereby, the clamping device 101 can more conveniently move the calibration jig onto the jaw 3011.
Preferably, the edge of the positioning structure 41 that is farther from the jig body 40 is spaced from the edge of the jig body 40 by a predetermined length, and the predetermined length is smaller than the length of the clamp block 3011. Therefore, the jig body 40 can be placed on the clamp block 3011 without touching the clamp 301 by mistake, so that when the wafer is placed by the mechanical arm 10 by using the same moving parameters as those of the placing calibration jig, the wafer can be more accurately transferred onto the clamp block 3011.
Further preferably, the preset length is 0.5 mm. Thereby, the position where the wafer is transferred onto the clamp block 3011 can be made more accurate.
The preset length depends on the length of the jaw 3011. Typically, when the length of the jaw 3011 is in the range of 2 mm to 3 mm, the preset length is in the range of 0 mm to 1 mm.
For easier understanding of the present utility model, please refer to fig. 6 and 8, wherein fig. 8 is a cross-sectional view of a calibration jig provided in the present embodiment above a caliper 301. The following describes an exemplary calibration method of the calibration jig according to the present utility model:
first, as shown in fig. 8, the calibration jig is clamped by the clamping device 101 on the mechanical arm 10, and is horizontally moved above the caliper 301;
then, as shown in fig. 6, the calibration jig is held by the robot arm 10, moved downward in the Z-axis direction, and fine-tuned in the X, Y direction as needed, so that the calibration jig is moved onto the clamp block 3011, and the demonstrator records the X-axis and Y-axis coordinates of the robot arm 10 and sets them as target coordinates of the robot arm 10;
finally, the wafer is grasped by the robot arm 10, and transferred to the gripper block 3011 according to the X-axis and Y-axis coordinates of the robot arm 10 recorded by the above-described teaching tool.
Because the calibration jig provided by the utility model comprises the positioning structure 41, after the wafer transmission position is calibrated by the calibration jig, a gap between the wafer and one side of the clamp block 3011, which is close to the clamp 301, is reserved, the position of the mechanical arm 10 is not required to be adjusted, the production time is saved, and the wafer can be accurately transmitted to the clamp block 3011.
Example two
The embodiment provides a measuring system. The measuring system comprises measuring equipment 30 with calipers 301, a mechanical arm 10 with a clamping device 101 and the calibration jig according to any embodiment; the clamp 301 is provided with a clamp block 3011, and the mechanical arm 10 moves the positioning structure 41 arranged on the calibration jig to the clamp block 3011 through the clamping device 101. Thereby, the clamping device 101 clamps the calibration jig onto the clamp block 3011, and a target position of the wafer on the clamp block 3011 is determined; the robot 10 places the wafer using the same movement parameters as the placement calibration jig, accurately transfers the wafer to the clamp block 3011, and lowers the wafer through the clamp 301 to the carrier 302 in the measurement apparatus 30 for measurement.
Further, the measuring system further comprises a teach pendant (not shown) for recording the mobile positioning of the robotic arm 10. Therefore, after the demonstrator records the movement positioning of the mechanical arm 10, the mechanical arm 10 can convey the wafer according to the recorded movement positioning.
Specifically, the measuring device 30 may be an optical line width measuring device.
Since the measurement system provided in this embodiment includes the calibration jig provided in any of the foregoing embodiments, the measurement system provided in this embodiment at least has all the advantages of the calibration jig provided in each of the foregoing embodiments, and will not be described in detail herein.
In summary, the calibration jig and the measurement system provided by the utility model have the following advantages: the calibration jig is configured to determine a target position of a wafer on a clamp block so as to place the wafer on the clamp block according to the target position; the calibration jig comprises a jig body, wherein a positioning structure corresponding to the clamp block is arranged on the jig body, and the positioning structure is configured to position the position of the calibration jig on the clamp block. Therefore, the calibration jig provided by the utility model can determine the target position of the wafer on the clamp block, so that the wafer can be placed on the clamp block according to the target position; further, since the calibration jig comprises a jig body, a positioning structure corresponding to the clamp block is arranged on the jig body, and the positioning structure is configured to position the calibration jig at the position on the clamp block, the positioning structure is configured to position the calibration jig at the position on the clamp block through the positioning structure corresponding to the clamp block arranged on the jig body, and therefore, the position of the wafer is calibrated through the calibration jig, and a foundation is laid for accurately conveying the wafer to the clamp block.
Further, the shape of the jig body is matched with the shape of the wafer, and the positioning structure is arranged at the edge of the jig body. Therefore, the calibration jig provided by the utility model can ensure that a gap is reserved between the wafer and one side of the clamp block, which is close to the clamp, after the calibration jig is used for calibrating the position of the wafer by arranging the positioning structure at the edge of the jig body, so that a foundation is laid for not touching the clamp when the wafer is placed later, and the wafer is better protected and the wafer conveying efficiency is improved.
Still further, when the clamping device is used to clamp the calibration jig, the clamping position of the clamping device on the calibration jig is different from the setting position of the positioning structure on the jig body. Therefore, the calibration jig provided by the utility model can enable the positioning structure to more conveniently position the position of the calibration jig on the clamp block.
The measuring system provided by the utility model comprises measuring equipment with calipers, a mechanical arm with a clamping device and the calibration jig; the caliper is provided with a caliper block, and the mechanical arm moves the positioning structure arranged on the calibration jig to the caliper block through the clamping device. Therefore, the measurement system provided by the utility model has at least all advantages of the calibration jig, and is not described herein.
Finally, it should be noted that the above-mentioned embodiments are merely for illustrating the technical solution of the present utility model and not for limiting the same, and although the present utility model has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made to the technical solution of the present utility model without departing from the spirit and scope of the technical solution of the present utility model.
Claims (10)
1. A calibration jig configured to determine a target position of a wafer on a chuck so as to place the wafer on the chuck according to the target position; the calibration jig comprises a jig body, wherein a positioning structure corresponding to the clamp block is arranged on the jig body, and the positioning structure is configured to position the position of the calibration jig on the clamp block.
2. The alignment jig of claim 1, wherein the shape of the jig body is adapted to the shape of the wafer, and the positioning structure is disposed at an edge of the jig body.
3. The alignment jig of claim 1, wherein the positioning structure is integrally formed with the jig body.
4. The calibration jig of claim 1, wherein the positioning structure is provided with four.
5. The calibration jig of claim 1 wherein the calibration jig is moved onto the jaw block by a clamping device of a robotic arm.
6. The alignment jig of claim 5, wherein a clamping position of the clamping device on the alignment jig is different from a set position of the positioning structure on the jig body when the clamping device clamps the alignment jig.
7. The alignment jig of claim 1, wherein the edge of the positioning structure that is farther from the jig body is a predetermined length from the edge of the jig body, the predetermined length being less than the length of the jaw.
8. The calibration jig of claim 7, wherein the preset length is 0.5 millimeters.
9. A measuring system comprising a measuring device with a caliper, a robot arm with a clamping device and a calibration jig according to any one of claims 1-8; the caliper is provided with a caliper block, and the mechanical arm moves the positioning structure arranged on the calibration jig to the caliper block through the clamping device.
10. The metrology system of claim 9, further comprising a teach pendant for recording a mobile position of the robotic arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321246619.1U CN219696431U (en) | 2023-05-22 | 2023-05-22 | Calibration jig and measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321246619.1U CN219696431U (en) | 2023-05-22 | 2023-05-22 | Calibration jig and measurement system |
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| Publication Number | Publication Date |
|---|---|
| CN219696431U true CN219696431U (en) | 2023-09-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202321246619.1U Active CN219696431U (en) | 2023-05-22 | 2023-05-22 | Calibration jig and measurement system |
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| CN (1) | CN219696431U (en) |
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- 2023-05-22 CN CN202321246619.1U patent/CN219696431U/en active Active
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