CN216488011U - Clamping force detection tool for mechanical arm and mechanical arm - Google Patents
Clamping force detection tool for mechanical arm and mechanical arm Download PDFInfo
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- CN216488011U CN216488011U CN202123039299.6U CN202123039299U CN216488011U CN 216488011 U CN216488011 U CN 216488011U CN 202123039299 U CN202123039299 U CN 202123039299U CN 216488011 U CN216488011 U CN 216488011U
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Abstract
The utility model provides a press from both sides power detection instrument and robotic arm for robotic arm, the last centre gripping unit that is provided with of robotic arm, press from both sides power detection instrument and include: the pressure sensing unit is used for detecting the clamping force of the clamping unit; the surface of the base is provided with at least one position adjustment mounting area, and the pressure sensing unit is positioned in the position adjustment mounting area; the display device is connected with the pressure sensing unit and displays the clamping force detected on the pressure sensing unit. The utility model provides a press from both sides power detection instrument and robotic arm can detect robotic arm presss from both sides the size of power to the adjustment presss from both sides power and reduces robotic arm presss from both sides and gets when the wafer right the influence of wafer.
Description
Technical Field
The utility model relates to a semiconductor manufacturing field especially relates to a clamping force detects instrument and robotic arm for robotic arm.
Background
In the semiconductor manufacturing process, wafers are mainly conveyed by a clamping mode through a mechanical arm, the clamping force of the mechanical arm is monitored indirectly through the clamping and loosening speed of the mechanical arm at present, an accurate tool is not used for quantitatively detecting the clamping force of the mechanical arm for clamping the wafers, however, the clamping force of the mechanical arm influences the wafers, and the wafers are damaged when the clamping force of the mechanical arm changes or is not properly set. In addition, for some robot arms with two clamps, when the positions of the two clamps are changed asymmetrically, the clamping force of one clamp on the wafer is increased, and therefore, the edge of the wafer contacting with the clamp is damaged and even broken.
Therefore, how to provide a clamping force detection tool for a robot arm and the robot arm to overcome the above-mentioned defects in the prior art is becoming one of the technical problems to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a press from both sides power detection instrument and robotic arm for robotic arm to solve the robotic arm's that prior art exists single clamp press from both sides power change or set for improper and cause the damage to the wafer, and after the double-layered position changes the asymmetry, one of them clip to the clamp power grow of wafer, lead to with the wafer edge of clip contact produces the problem of damage fragmentation.
In order to achieve the above object, the utility model provides a press from both sides power detection instrument for robotic arm, the last centre gripping unit that is provided with of robotic arm, press from both sides power detection instrument and include: the pressure sensing unit is used for detecting the clamping force of the clamping unit;
the surface of the base is provided with at least one position adjustment mounting area, and the pressure sensing unit is positioned in the position adjustment mounting area;
the display device is connected with the pressure sensing unit and displays the clamping force detected on the pressure sensing unit.
Optionally, the clamping unit includes a single clamp or a double clamp, and the pressure sensing unit includes at least one first pressure sensing unit and at least two second pressure sensing units.
Optionally, when the clamping unit is a single clamp, the single clamp clamps the first pressure sensing unit, and the first pressure sensing unit is used for detecting the clamping force of the single clamp.
Optionally, when the clamping unit is a double clamp, the two end chucks of the double clamp respectively clamp one of the second pressure sensing units, and the second pressure sensing unit is used for detecting the clamping force of the double clamp.
Optionally, the distance between the two second pressure sensing devices is adapted to the distance between the two ends of the dual clip.
Optionally, the area of the force measuring surface of the pressure sensing unit is larger than or equal to the contact area of the clamping unit and the pressure sensing unit.
Optionally, the pressure sensing unit includes: a pressure sensor.
Optionally, a plurality of mounting fixing points are arranged in the position adjusting mounting area, and the pressure sensing unit is connected with the mounting fixing points.
Optionally, the pressure sensing unit is detachably connected with the installation fixing point.
The utility model also provides a robotic arm, including above-mentioned arbitrary the power of pressing from both sides detect the instrument.
Compared with the prior art, the utility model provides a pair of a clamp power detects instrument and robotic arm for robotic arm has following beneficial effect:
the utility model provides a pair of a clamp power detects instrument for robotic arm, the last centre gripping unit that is provided with of robotic arm, the clamp power detects the instrument and includes: the pressure sensing unit is used for detecting the clamping force of the clamping unit; the surface of the base is provided with at least one position adjustment mounting area, and the pressure sensing unit is positioned in the position adjustment mounting area; the display device is connected with the pressure sensing unit and displays the clamping force detected on the pressure sensing unit. The utility model provides a press from both sides power detection instrument can detect directly perceivedly the power size of pressing from both sides of centre gripping subassembly to make when pressing from both sides power nonconformity with the requirement, can in time adjust the power of pressing from both sides of centre gripping subassembly, thereby avoid the influence that causes the wafer because of robotic arm's power problem of pressing from both sides.
Because the utility model provides a robotic arm has included foretell clamp power detection tool, utilizes clamp power detection tool can detect directly perceivedly on robotic arm the clamp power size of centre gripping subassembly to make when the clamp power is unsatisfactory, can in time adjust the clamp power of centre gripping subassembly, thereby avoid the influence that causes the wafer because of robotic arm's clamp power problem.
Drawings
Fig. 1 is a schematic structural view of a clamping force detection tool according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a clamping force detection tool of a single clamp according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a clamping force detection tool of a dual clamp according to an embodiment of the present invention;
the display device comprises a pressure sensing unit 100, a pressure sensing unit 101, a first pressure sensing unit 102a, a second pressure sensing unit I, a second pressure sensing unit 102b, a second pressure sensing unit II, a clamping unit 200, a base 300, a position adjusting installation area 301 and a display device 400.
Detailed Description
The following description of the embodiments of the present invention will be described in more detail with reference to the drawings. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention. It is to be understood that the drawings are not necessarily to scale, showing the particular construction of the invention, and that the illustrative features shown in the drawings, which are used to illustrate certain principles of the invention, are also somewhat simplified. Specific design features of the invention disclosed herein, including, for example, specific dimensions, orientations, locations, and configurations, will be determined in part by the particular intended application and environment of use. In the embodiments described below, the same reference numerals are used in common between different drawings to denote the same portions or portions having the same functions, and a repetitive description thereof will be omitted. In this specification, like reference numerals and letters are used to designate like items, and therefore, once an item is defined in one drawing, further discussion thereof is not required in subsequent drawings.
These terms, as used herein, are interchangeable where appropriate. Similarly, if the method described herein includes a series of tasks, the order in which these tasks are presented herein is not necessarily the only order in which these tasks may be performed, and some of the described tasks may be omitted and/or some other tasks not described herein may be added to the method.
Example one
The present embodiment provides a clamping force detection tool for a robot arm, referring to fig. 1 to fig. 3, and fig. 1 is a schematic structural diagram of the clamping force detection tool provided in an embodiment of the present invention; fig. 2 is a schematic structural view of a clamping force detection tool of a single clamp according to an embodiment of the present invention; fig. 3 is a schematic structural view of a clamping force detection tool of a dual clamp according to an embodiment of the present invention; as can be seen from fig. 1 to 3, a clamping unit 200 is disposed on the robot arm, and the clamping force detection tool includes: a base 300, a display device 400 and a pressure sensing unit 100 matched with the clamping unit 200, wherein the pressure sensing unit 100 is used for detecting the clamping force of the clamping unit 200; wherein, the surface of the base 300 has at least one position adjustment installation area 301, and the pressure sensing unit 100 is located in the position adjustment installation area 301; the display device 400 is connected to the pressure sensing unit 100 and displays the magnitude of the clamping force detected by the pressure sensing unit 100.
According to the configuration, the utility model provides a clamping force detects instrument can detect directly perceivedly the clamping force size of centre gripping subassembly to make when clamping force is unsatisfactory, can in time adjust the clamping force of centre gripping subassembly, thereby avoid the influence that causes the wafer because of robotic arm's clamping force problem.
Preferably, the clamping unit 200 includes a single clamp or a double clamp, and the pressure sensing unit 100 includes at least one first pressure sensing unit 101 and at least two second pressure sensing units 102. The two second pressure sensing units 102 are a second pressure sensing unit i 102a and a second pressure sensing unit ii 102b, respectively. Thus, when the robot arm has different types of grip units 200, the gripping force detection tool can perform gripping force detection on the robot arm having different types of grip units 200. The clamping force detection tool can only detect the clamping force of one mechanical arm.
Referring to fig. 2 again, when the clamping unit 200 is a single clamp, the single clamp clamps the first pressure sensing unit 101, and the first pressure sensing unit 101 is configured to detect a clamping force of the single clamp. With the arrangement, when the clamping unit 200 is a single clamp, the clamping force of the mechanical arm is detected, the single clamp can be used for clamping the first pressure sensing unit 101, and whether the clamping force of the single clamp is in a proper range is determined in real time through the display device 400. When the clamping force of the single clamp exceeds a proper range, an operator can adjust the clamping force of the single clamp in time, and the single clamp is prevented from damaging the wafer in the clamping process. In one preferred embodiment, the width of the single clip on the clipping surface and the width of the first pressure sensing unit 101 are 20 mm.
Referring to fig. 3, when the clamping unit 200 is a double clamp, the two end chucks of the double clamp respectively clamp one of the second pressure sensing units 102, and the second pressure sensing unit 102 is configured to detect the clamping force of the double clamp. With the arrangement, when the clamping unit 200 is a double clamp, and the mechanical arm is subjected to clamping force detection, the two end chucks of the double clamp can be used for clamping the second pressure sensing unit I102 a and the second pressure sensing unit II 102b respectively, and the stress conditions of the second pressure sensing unit I102 a and the second pressure sensing unit II 102b are known in real time through the display device 400, so that whether the clamping force of the double clamp is in a proper range or not is judged, and whether the clamping forces of the two chucks of the double clamp are the same or not is judged. When the stress on the second pressure sensing unit I102 a and the second pressure sensing unit II 102b exceeds a proper range, or the stress on the second pressure sensing unit I102 a and the stress on the second pressure sensing unit II 102b are different, an operator can adjust the clamping force of the double clamp in time, so that the clamping force of two clamping heads of the double clamp is ensured to be the same and in a proper range. In a preferred embodiment, the width of the two-end chuck of the double clamp on the clamping surface and the width of the second pressure sensing unit I102 a and the second pressure sensing unit II 102b are both 12 mm.
Preferably, the distance between the two second pressure sensing units 102 is adapted to the distance between the two ends of the dual clip. So set up, the power of pressing from both sides detects the instrument and is right when the double clamp carries out the power of pressing from both sides and detects, the both ends chuck of double clamp just can clip respectively second forced induction unit I102 a with second forced induction unit II 102b to survey the power of pressing from both sides size.
Preferably, the area of the force-measuring surface of the pressure sensing unit 100 is greater than or equal to the area of the surface of the clamping unit 200 contacting the pressure sensing unit 100. Therefore, when the clamping unit 200 clamps the clamping force detection tool, the clamping force of the clamping unit 200 can be completely transmitted to the pressure sensing unit 100, so that whether the clamping force of the clamping unit 200 is within an appropriate range can be more accurately measured.
Preferably, the pressure sensing unit includes: a pressure sensor. Pressure sensor measuring range and precision are high, stable performance and long service life, and are adapted to the utility model provides a clamping force detects instrument.
Preferably, a plurality of fixing points (not shown) are disposed in the position adjustment mounting region 301, and the pressure sensing unit 100 is connected to the fixing points. With this arrangement, when the clamping force detection tool is used, the pressure sensing unit 100 can be stably mounted on the base 300 through the mounting fixing point. In one preferred embodiment, the base 300 is circular with a diameter of 300 mm. The base 300 is set to be the same as the wafer in size and shape, so that the state of clamping the wafer can be simulated more accurately when the mechanical arm clamps the clamping force detection tool, and the force measurement accuracy of the clamping force detection tool is improved.
Preferably, the pressure sensing unit 100 is detachably connected to the fixing point. Therefore, when different types of the clamping units 200 are measured, different clamping units 200 can be adapted by replacing the pressure sensing unit 100 with different clamping force ranges. Meanwhile, when the clamping unit 200 is a double clamp, distances between two ends of the double clamp on different mechanical arms are different, and the distance between the pressure sensing units 100 matched with the double clamp can be adjusted to adapt to different mechanical arms.
Example two
This embodiment provides a robotic arm, robotic arm has included foretell clamp power detection tool, utilizes clamp power detection tool can detect directly perceivedly on robotic arm the clamp power size of centre gripping subassembly to make when the clamp power is unsatisfactory, can in time adjust the clamp power of centre gripping subassembly, thereby avoid the influence that causes the wafer because of robotic arm's clamp power problem.
In addition, the functional modules in the embodiments herein may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part. In addition, it is to be noted that the terms "first", "second", "third", and the like in the description are used only for distinguishing the respective components in the description, unless otherwise specified or indicated. Elements, steps, etc., rather than representing logical or sequential relationships between various components, elements, steps, etc.
In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example.
To sum up, the utility model provides a pair of a clamp power detects instrument for robotic arm, the last centre gripping unit 200 that is provided with of robotic arm, the clamp power detects the instrument and includes: a base 300, a display device 400 and a pressure sensing unit 100 matched with the clamping unit 200, wherein the pressure sensing unit 100 is used for detecting the clamping force of the clamping unit 200; wherein, the surface of the base 300 has at least one position adjustment installation area 301, and the pressure sensing unit 100 is located in the position adjustment installation area 301; the display device 400 is connected to the pressure sensing unit 100 and displays the magnitude of the clamping force detected by the pressure sensing unit 100. The utility model provides a press from both sides power detection instrument can detect directly perceivedly the power size of pressing from both sides of centre gripping subassembly to make when pressing from both sides power nonconformity with the requirement, can in time adjust the power of pressing from both sides of centre gripping subassembly, thereby avoid the influence that causes the wafer because of robotic arm's power problem of pressing from both sides.
The utility model provides a robotic arm has included foretell clamp power detection tool, utilizes clamp power detection tool can detect directly perceivedly on robotic arm the clamp power size of centre gripping subassembly to make when the clamp power is unsatisfactory, can in time adjust the clamp power of centre gripping subassembly, thereby avoid the influence that causes the wafer because of robotic arm's clamp power problem.
The above description is only for the preferred embodiment of the present invention, and does not limit the present invention in any way. Any technical personnel who belongs to the technical field, in the scope that does not deviate from the technical scheme of the utility model, to the technical scheme and the technical content that the utility model discloses expose do the change such as the equivalent replacement of any form or modification, all belong to the content that does not break away from the technical scheme of the utility model, still belong to within the scope of protection of the utility model.
Claims (10)
1. The utility model provides a press from both sides power detection instrument for robotic arm, the last centre gripping unit that is provided with of robotic arm, its characterized in that, press from both sides power detection instrument and include: the pressure sensing unit is used for detecting the clamping force of the clamping unit;
the surface of the base is provided with at least one position adjustment mounting area, and the pressure sensing unit is positioned in the position adjustment mounting area;
the display device is connected with the pressure sensing unit and displays the clamping force detected on the pressure sensing unit.
2. A clamping force detection kit for a robot arm as claimed in claim 1, wherein said clamping unit comprises a single clamp or a double clamp, and said pressure sensing units comprise at least one first pressure sensing unit and at least two second pressure sensing units.
3. The clamping force detection tool for a robot arm as claimed in claim 2, wherein when the clamping unit is a single clamp, the single clamp clamps the first pressure sensing unit, and the first pressure sensing unit is used for detecting the clamping force of the single clamp.
4. The clamping force detection tool for a robot arm as claimed in claim 2, wherein when the clamping unit is a dual clamp, the two end chucks of the dual clamp respectively clamp one of the second pressure sensing units, and the second pressure sensing unit is configured to detect the clamping force of the dual clamp.
5. A clamping force detection tool for a robot arm as claimed in claim 4, wherein the distance between said two second pressure sensing means is adapted to the distance between the two ends of said dual clamp.
6. The clamping force detection tool for a mechanical arm as claimed in claim 1, wherein the area of the force measuring surface of the pressure sensing unit is larger than or equal to the contact area of the clamping unit and the pressure sensing unit.
7. A clamping force detection tool for a robot arm as claimed in claim 1, wherein said pressure sensing unit comprises: a pressure sensor.
8. A clamping force detecting tool for a robot arm as claimed in claim 1, wherein a plurality of fixing points are provided in said position adjustment mounting region, and said pressure sensing unit is connected to said fixing points.
9. A clamping force detecting tool for a robot arm as claimed in claim 8, wherein said pressure sensing unit is detachably connected to said mounting fixing point.
10. A robot arm comprising the clamping force detection tool for a robot arm according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123039299.6U CN216488011U (en) | 2021-12-06 | 2021-12-06 | Clamping force detection tool for mechanical arm and mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123039299.6U CN216488011U (en) | 2021-12-06 | 2021-12-06 | Clamping force detection tool for mechanical arm and mechanical arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216488011U true CN216488011U (en) | 2022-05-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123039299.6U Active CN216488011U (en) | 2021-12-06 | 2021-12-06 | Clamping force detection tool for mechanical arm and mechanical arm |
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|---|---|
| CN (1) | CN216488011U (en) |
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2021
- 2021-12-06 CN CN202123039299.6U patent/CN216488011U/en active Active
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Address after: 510000 No. 28, Fenghuang fifth road, Huangpu District, Guangzhou, Guangdong Patentee after: Yuexin Semiconductor Technology Co.,Ltd. Address before: 510000 No. 28, Fenghuang fifth road, Huangpu District, Guangzhou, Guangdong Patentee before: Guangzhou Yuexin Semiconductor Technology Co.,Ltd. |