CN1887520A - Automatic aligning device for scribing machine platform datum - Google Patents
Automatic aligning device for scribing machine platform datum Download PDFInfo
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- CN1887520A CN1887520A CN 200610047191 CN200610047191A CN1887520A CN 1887520 A CN1887520 A CN 1887520A CN 200610047191 CN200610047191 CN 200610047191 CN 200610047191 A CN200610047191 A CN 200610047191A CN 1887520 A CN1887520 A CN 1887520A
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Abstract
The automatic aligning device for scribing machine platform datum includes a main shaft seat, a main shaft carrying cutting head, a cutting datum platform and its driving device and an automatic control system. The technological features include the aligning circuit of the automatic control system with aligning point JK connected to the conductor connected to the main shaft and the aligning point PT connected to the conductor connected to the datum platform fixed onto the datum platform, and the PLC connected to the aligning points through wires, relay, step motor driver, optoelectronic isolator and starting button. The present invention has reasonable structure, easy operation and convenient regulation, can realize the automatic aligning of the scribing machine platform datum to ensure high cutting quality.
Description
Technical field
The present invention relates to the automatic technique of alignment of a kind of platform datum, the particularly a kind of automation of automated control technology, Digital Electronic Technique, Machine Design and manufacturing technology, efficient automatic alignment device of scribing machine platform of integrating, the tool setting precision is in 0.003mm.It is applicable to the automatic calibration process of scribing machine platform datum, also can be used for the automatic calibration process of other same category of device.
Background technology
Sand-wheel slice cutting machine is the special cutting device of the brilliant substrate of circle such as processing various semiconductors etc. and other similar substrates, it is important equipment in the semiconductor production process, is mainly used in the processing of products such as semiconductor chip, thermistor, B ultrasonic transducing head, solar cell.Sand-wheel slice cutting machine is to utilize thickness minimum that the subparticle diamond dust the makes disc wheel cutter for 0.02mm, under the cutting speed of 0.1～400m/s, the emery wheel blade is cut into along the cut-off rule of being cut part.What have only cuts half of silicon wafer thickness into, and then adopts and manually break disconnected method off with the fingers and thumb separately, also have adopt cut whole silicon wafer thickness method separately.Under the precision of X, the Y under industrial computer control, Z, θ four direction micro machine drives, by X, Y, Z to reciprocating motion and θ to rotation, according to default size the megacryst garden is cut apart, thereby is obtained single little tube core.Need in the cutting process by cooling fluid take away contact zone between emery wheel and workpiece frictional heat, clear up emery wheel, wash away abrasive dust and lubricated grinding position.During scribing work, emery wheel blade outer is a very important positioning index with respect to the height of workbench.If the error of this index is excessive, can influence the crudy of scribing, not only can reduce production efficiency, also can increase manufacturing cost and labor intensity of operating personnel.
At present, the following mode of the general use of the calibration of the scribing machine machining benchmark of home and abroad:
The one, utilize alignment sensor to position.Promptly adopt the localization method that one or several sensor (use that also has be optical sensor) is installed in the relevant position of general platform in advance, when the emery wheel blade arrives the position of any one sensor wherein, the output of the signal of execution is just arranged.But this method can not position operation in a continuous space.And reference platform often dismantles and installs or change the platform of different-thickness as required in the work, will have error to produce when reinstalling, the error that above-mentioned localization method can not solve frequent dismounting automatically and brought.This not only damages sensor easily, increases maintenance cost, but also can be subjected to the influence of factors such as environment, aqueous vapor, dust, electrical interference, brings error for the accuracy of platform alignment.Often change impaired sensor, equipment cost is increased, the aligning operation is complicated.
The 2nd, utilize height sensor, the wearing and tearing of cutting blade are measured, by the computing of computer, before blade need cut, it is compensated then, with quasi-complement since the benchmark that causes of blade abrasion change.This blade is carried out the method that wear extent is handled, and the transmission signal of employed height sensor is an analog quantity, and signal is easy to be subjected to the influence and the interference of external environment condition, brings the error of sensor itself, and then causes the inaccurate of abrasion amount measuring.This method, not only signal is interfered easily and causes the reliability decrease of transmission, and owing to often changing the sensor that damages, also can produce shortcomings such as increasing maintenance cost, increasing maintenance workload.
The 3rd, the benchmark alignment so of employing contact, still, the circuit that present this method adopted is an analog circuit.Its principle is, wants moment of contacting to produce a pulse signal with reference platform when the blade outer, and this pulse signal becomes square-wave signal through the processing of oversampling circuit again.In this method use,, be very easy to be interfered, cause maloperation owing to be subjected to the restriction of circuit self structure.In addition, because of the imperfection of its circuit self, also can often send wrong activation signal.Discrete component in the circuit also often needs to change, and causes the increase of maintenance cost and labour intensity.
Summary of the invention
The purpose of this invention is to provide the automatic alignment device of a kind of scribing machine platform datum, its reasonable in design has solved the position error that exists in the prior art and has been subjected to defectives such as interference, cost height, maintenance load be big greatly, easily.Its processing ease, easy to adjust, can not only realize that scribing machine platform datum aims at automatically, provide reliable operation guarantee to the cut quality of scribing machine, and reduced maintenance cost, obviously prolong the service life of scribing machine, significantly improve operating efficiency and reduce labor intensity of operating personnel.
The object of the present invention is achieved like this: this device comprises spindle drum, be assembled in the main shaft that has cutting head on the spindle drum, cutting reference platform and transmission device and automatic control system, its technical essential is: on the conductor that the alignment point JK in the alignment circuit of described automatic control system is connected to main shaft is communicated with, alignment point PT be connected to be fixed on insulation board on the conductor that is communicated with of reference platform on, the Programmable Logic Controller PLC in the alignment circuit is by lead and relay K D1, stepper motor driver DT, photoisolator U1 is connected described alignment point JK and PT respectively with start button S1.
Because cutting reference platform of the present invention is kept apart with division board and other parts, activation signal produces by photoisolator U1, and reasonable in design so can get rid of interference, helps producing an activation signal.The ultra-thin blade of the emery wheel of cutting head is assembled on the main shaft by the blade installing rack, main shaft is by guide rail and motor-driven leading screw, realize moving continuously up and down, therefore, can on any one position, finish aligning, can satisfy the platform of any thickness or substrate to alignment request, and can reduce the height error that regular mounting or dismounting bring to greatest extent.In addition, main shaft can move forward and backward, and by alignment point JK and PT, its processing ease, easy to adjust can make blade on the main shaft on datum level, finds the alignment area of needs.Because this device do not have the alignment sensor of fixed position, be subjected to defectives such as interference, cost height, maintenance load are big greatly, easily so solved the position error that exists in the prior art, can finish aligning at any height.The present invention can not only realize that scribing machine platform datum aims at automatically, cut quality to scribing machine provides reliable operation guarantee, and reduced maintenance cost, and obviously prolong the service life of scribing machine, significantly improve operating efficiency and reduce labor intensity of operating personnel.
Description of drawings
Below in conjunction with accompanying drawing the present invention is further described.
Fig. 1 is a frame for movement schematic diagram of the present invention.
Fig. 2 is a kind of electrical schematic diagram of the present invention.
Sequence number explanation among the figure: 1 insulation board, 2 cutting reference platforms, 3 installing racks, the ultra-thin blade of 4 emery wheels, 5 main shafts, motor 6, guide rail 7, screw mandrel 8, slide carriage 9, spindle drum 10.
The specific embodiment
Describe the composition of the present invention and the course of work in detail according to Fig. 1-2.This device comprises spindle drum 10, is assembled in the main shaft that has cutting head 5, cutting reference platform 2 and transmission device and automatic control system on the spindle drum 10.Automatic control system in this device comprises that control has the main shaft of cutting head and Pneumatic control circuit, electric control loop and the alignment circuit of cutting reference platform and transmission device action thereof.Spindle drum 10 wherein, main shaft 5, by be assembled on the main shaft installing rack 3 and on the cutting head that constitutes of the ultra-thin blade 4 of emery wheel, structure that structure and the applicant of being fixed on cutting reference platform 2 on the insulation board 1 and the Pneumatic control circuit in transmission device and the automatic control system thereof, electric control loop formerly applies for a patent (application number is 200520093727.5) basic identical.Do not give unnecessary details one by one at this.
Alignment point JK in the alignment circuit of automatic control system is connected on the conductor that is communicated with main shaft 5, alignment point PT is connected on the conductor that is communicated with reference platform 2, and the Programmable Logic Controller PLC in the alignment circuit is connected above-mentioned alignment point JK and PT by lead respectively with relay K D1, stepper motor driver DT, photoisolator U1 and start button S1.Wherein the specification of Programmable Logic Controller PLC, stepper motor D and driver DT thereof, resistance R 1, R2, R3, model should be chosen according to actual needs.
The output Y7 of PLC is connected to the pulse control end of stepper motor driver DT, feed back to input X0 simultaneously, input X1 connects start button S1, input X2 connects the output of photoisolator U1, output Y0 is connected to the coil control end of relay K D1, Y2 is connected to the direction control end of stepper motor driver DT, and COM is a common port.Control module PLC also can select for use other single-chip microcomputer or Industrial Control Computer etc. as control module as required.
When non-benchmark alignment function, relay K D1 does not work, the contact KD1-1 of relay K D1 and also not conducting of KD1-2, and the alignment line rood is in off position less than power supply.
When carrying out the benchmark alignment function, press " startup " button S1 earlier, be input to PLC through the input X1 of PLC, then PLC holds output signal at Y0, makes relay K D1 work the contact KD1-1 of relay K D1 and KD1-2 conducting.The positive rotaring signal of Y2 end output is to driver DT, at Y7 end output high-speed pulse signal, rotate with drive motors D positive direction, driving screw mandrel 8 rotates synchronously, make slide carriage 9 drive main shaft 5 and blade 4, move upward, behind the arrival certain altitude along motion guide rail 7, stop at Y7 end output high-speed pulse signal, motor D is stopped the rotation.Y2 end output reverse signal is to DT, at Y7 end output high-speed pulse signal, with drive motors D opposite spin, driving screw mandrel 8 rotates synchronously, make slide carriage 9 drive main shaft 5 and blade 4, move to reference platform 2 directions, contact in a flash with reference platform in emery wheel blade outer along motion guide rail 7, just be connected conducting between JK and PT, at this moment, U1 work, and produce a high level signal and be sent to PLC through the input X2 of PLC, then PLC stops the signal output of Y7 end, and motor D is stopped the rotation.Then, export the positive direction signal to DT through the Y2 end, at the fixing high-speed pulse number of Y7 end output, with the rotation of drive motors D positive direction, drive screw mandrel 8 and rotate synchronously, make slide carriage 9 drive main shaft 5 and blade 4, move upward along motion guide rail 7, after arriving level altitude, stop at Y7 end output high-speed pulse signal, motor D is stopped the rotation.Then can finish the alignment work of platform.
Claims (1)
1, the automatic alignment device of a kind of scribing machine platform datum, this device comprises spindle drum, be assembled in the main shaft that has cutting head on the spindle drum, cutting reference platform and transmission device and automatic control system, it is characterized in that: on the conductor that the alignment point JK in the alignment circuit of described automatic control system is connected to main shaft is communicated with, alignment point PT be connected to be fixed on insulation board on the conductor that is communicated with of reference platform on, the Programmable Logic Controller PLC in the alignment circuit is by lead and relay K D1, stepper motor driver DT, photoisolator U1 is connected described alignment point JK and PT respectively with start button S1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610047191 CN1887520A (en) | 2006-07-14 | 2006-07-14 | Automatic aligning device for scribing machine platform datum |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610047191 CN1887520A (en) | 2006-07-14 | 2006-07-14 | Automatic aligning device for scribing machine platform datum |
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| CN1887520A true CN1887520A (en) | 2007-01-03 |
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| CN 200610047191 Pending CN1887520A (en) | 2006-07-14 | 2006-07-14 | Automatic aligning device for scribing machine platform datum |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528950A (en) * | 2010-12-08 | 2012-07-04 | 北京中电科电子装备有限公司 | Debugging device of scribing machine material transmission system |
| CN102581752A (en) * | 2011-01-06 | 2012-07-18 | 北京中电科电子装备有限公司 | Electric main shaft and scribing machine of ceramic ball |
| CN105195765A (en) * | 2015-10-30 | 2015-12-30 | 江苏耀阳电子有限公司 | Slicer main shaft structure for machining solar cell panel |
| CN114326597A (en) * | 2021-12-30 | 2022-04-12 | 沈阳和研科技有限公司 | Automatic tool capable of realizing movement of each shaft of dicing saw and using method thereof |
-
2006
- 2006-07-14 CN CN 200610047191 patent/CN1887520A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528950A (en) * | 2010-12-08 | 2012-07-04 | 北京中电科电子装备有限公司 | Debugging device of scribing machine material transmission system |
| CN102528950B (en) * | 2010-12-08 | 2014-12-10 | 北京中电科电子装备有限公司 | Debugging device of scribing machine material transmission system |
| CN102581752A (en) * | 2011-01-06 | 2012-07-18 | 北京中电科电子装备有限公司 | Electric main shaft and scribing machine of ceramic ball |
| CN105195765A (en) * | 2015-10-30 | 2015-12-30 | 江苏耀阳电子有限公司 | Slicer main shaft structure for machining solar cell panel |
| CN114326597A (en) * | 2021-12-30 | 2022-04-12 | 沈阳和研科技有限公司 | Automatic tool capable of realizing movement of each shaft of dicing saw and using method thereof |
| CN114326597B (en) * | 2021-12-30 | 2022-07-22 | 沈阳和研科技有限公司 | Automatic tool capable of realizing movement of each shaft of dicing saw and using method thereof |
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