CN105415153A - Hydraulic pressure suspension polishing device with controllable fluid boundary - Google Patents

Hydraulic pressure suspension polishing device with controllable fluid boundary Download PDF

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Publication number
CN105415153A
CN105415153A CN201510905872.7A CN201510905872A CN105415153A CN 105415153 A CN105415153 A CN 105415153A CN 201510905872 A CN201510905872 A CN 201510905872A CN 105415153 A CN105415153 A CN 105415153A
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China
Prior art keywords
polishing
polishing device
fluid container
fluid boundary
shaft coupling
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Granted
Application number
CN201510905872.7A
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Chinese (zh)
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CN105415153B (en
Inventor
洪滔
谢重
孙白冰
姬孟托
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Publication of CN105415153A publication Critical patent/CN105415153A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B24B49/165Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load for grinding tyres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a hydraulic pressure suspension polishing device with a controllable fluid boundary. The hydraulic pressure suspension polishing device comprises a horizontal workbench, a polishing system, a lifting system, a fine adjustment system and a pressure detection system. The polishing system comprises a polishing disc, a polishing liquid container, a first coupling, a spindle, a second coupling, a motor support and a serve motor. The hydraulic pressure suspension polishing device has the advantages that a gap between the polishing disc and the wall of the polishing liquid container is small, a good condition is provided for forming good hydraulic pressure, and accordingly the machining efficiency and the surface machining effect can be improved; a polishing tool is separated from a workpiece, and the workpiece is immersed in the polishing liquid, so that the abrasion of the polishing tool is relieved easily, and negative effects caused by friction heat in the polishing process are reduced; the polishing disc is directly driven by the servo motor, error accumulation caused by complex transmission links is avoided, and the machining precision is improved.

Description

What a kind of fluid boundary was controlled surge pressure suspension polishing device
Technical field
The present invention relates to precise polished field, in particular, design the pressure suspension polishing device that surges that a kind of fluid boundary is controlled.
Background technology
Ultraprecise polished is a kind of non-contacting polishing, and by surging, pressure suspension polishing device carries out precise polished to surface of the work.Precision and Ultra-precision Machining technology, manufacturing automation are two large fields of advanced manufacturing technology, and precision engineering, meticulous engineering and nanometer technology are the forward positions of Modern Manufacturing Technology, are also the bases of following manufacturing technology.Ultra-precision Turning is an emerging comprehensive process technology, it is integrated with the advanced technology achievements such as modern mechanical, electronics, measurement and material, current machining accuracy is had greatly improve, significantly improve the performance of product and improve the reliability of product.Technique of super smooth surface processing is an important component part of Ultra-precision Turning system.
Common polishing technology has the polishing of bath method, floating polishing (face contact), dynamic pressure to float off polishing and elastic emission machining (linear contact lay).Existing employing be the pressure suspension polishing that surges, be different from above several modes, pass through immersion liquid, the buoyancy formed from Hydrodynamic is formed when polishing tool rotates, by restrained boundary, hydrodynamic pressure is evenly distributed, motor direct-drive polishing tool also meets the stationarity of transmission and larger rotating speed.
Summary of the invention
Object of the present invention is just to solve the problem that in existing noncontact suspension burnishing device, fluid boundary is controlled, provide the pressure suspension polishing device that surges that a kind of fluid boundary is controlled, this device is the device of deformation based mechanism controls, the problem of fluid boundary sealing during accurate control suspension polishing, this burnishing device optimizes the relative position relation between polishing disk and container, improve the stability of hydrodynamic, improve working (machining) efficiency.
The present invention is achieved through the following technical solutions above-mentioned purpose: what a kind of fluid boundary was controlled surge pressure suspension polishing device, comprise horizontal table, polishing system, jacking system, micro-tensioning system and pressure detecting system, described polishing system comprises polishing disk, polishing fluid container, first shaft coupling, main shaft, second shaft coupling, supporting plate, electric machine support and servomotor, servomotor is fixed on bottom supporting plate by electric machine support, the output of servomotor connects the upper end of main shaft by the first shaft coupling, the lower end of main shaft connects polishing disk by the second shaft coupling, polishing fluid container is fixed on immediately below polishing disk, described lowering or hoisting gear comprises elevating screws mechanism and the gripper shoe for fixing polishing liquid container, described elevating screws mechanism is fixed on horizontal table, described elevating screws mechanism comprises four columns and a spiral lifting post for regulating gripper shoe to be elevated vertically installed, the lower end of spiral lifting post is fixed on horizontal table, upper end is used for supported plate, four root posts fix as a whole lifting frame by positioning sleeve and four horizontal guide, described gripper shoe is provided with four sliding shaft sleeves matched with four root posts, gripper shoe is sleeved in elevating screws mechanism by sliding shaft sleeve and also can moves up and down along elevating screws mechanism, described micro-tensioning system comprises ball-screw, X axis vernier knob and Y-axis vernier knob, two ball-screws are mutually vertically and all through described supporting plate, the two ends of two ball-screws are connected in four horizontal guide, and the two ends of two ball-screws are respectively equipped with X axis vernier knob for adjusting supporting board position and Y-axis vernier knob, described pressure detecting system comprise be located at polishing fluid container bottom for detecting polishing time produce the force cell of hydraulic power.
Further, described first shaft coupling is two diaphragm couplings.
Further, described second shaft coupling is two diaphragm couplings.
Further, described pressure sensor is located at polishing fluid container bottom, and described pressure sensor to comprise along polishing fluid container bottom same circumferentially equally distributed three.
Further, described polishing disk is provided with wedge groove on the surface.
Further, the minim gap that can form the press mold that surges is provided with between described polishing disk and polishing fluid container.
Further, described pressure sensor is by wire Bonding pressure display instrument.
The present invention mainly comprises polishing part, lifting part, X/Y axle fine setting part and pressure detecting part, also can provide stable hydraulic pressure, thus ensure that the uniformity of polishing process hydraulic pressure while that polishing part providing high-revolving; Lifting part can provide initial manufacture position adjustments, realizes micron-sized positional precision; X/Y axle fine setting part regulates polishing disk and polishing fluid container to realize aiming at, and the controlling of fluid boundary is better, is conducive to the formation of hydrodynamic film; Pressure detecting part can carry out real-time measurement to the hydraulic pressure produced in polishing process, thus regulator solution dynamic pressure can make polishing stable operation.
Polishing part mainly comprises polishing disk, polishing fluid container, the first shaft coupling, main shaft, the second shaft coupling, supporting plate, electric machine support and servomotor.Servomotor is connected with main shaft, by power transmission to main shaft by the first shaft coupling.Servomotor adopts the servo-driver supporting with it to control, and can realize the rotation of high-precision high-speed.Main shaft is connected with polishing disk by the second shaft coupling, drives polishing disk High Rotation Speed.Workpiece to be processed is affixed in the parallel zone of polishing disk by paraffin, polishing disk be immersed in fill polishing fluid container in and keep certain polishing gap, thus the pressure suspension polishing that surges to workpiece can be realized.
The servomotor be fixed on supporting plate, by X axis vernier knob and Y-axis vernier knob, is realized plane motion by described fine setting part.Servomotor connects polishing disk by shaft coupling, thus can realize the adjustment of polishing disk position.Realize the gap shrinks of polishing disk and polishing container, the formation for hydraulic pressure provides better condition.
Described pressure detecting part is same circumferentially uniform three pressure sensors in the bottom of polishing fluid container, the real-time hydraulic pressure detected in suspension polishing.
By X axis vernier knob and Y-axis vernier knob, the position coaxial with polishing fluid container center is transferred in polishing disk center, then the Z-direction position of polishing fluid container is changed by lowering or hoisting gear, in the suspension that polishing disk is immersed in polishing fluid container, finally utilize servomotor by the first shaft coupling and the second shaft coupling, moment of torsion is passed to polishing disk, makes polishing disk high-speed rotation.Processed wedge-shaped slot in the bottom of polishing disk, due under the High Rotation Speed of polishing disk, make to produce hydrodynamic pressure between dish and liquid, polishing disk can produce slight floating due to hydraulic pressure simultaneously.At polishing fluid container bottom, force cell is housed, the hydraulic pressure produced when accurately can measure polishing.
Beneficial effect of the present invention is: apparatus structure is simple, and function easily realizes, and economical; Polishing disk and polishing fluid chamber wall gap little, provide good condition for forming good hydraulic pressure, thus can improve working (machining) efficiency and improve finishes.Polishing tool is separated with workpiece, and polishing fluid submergence workpiece, is conducive to reducing the wearing and tearing of polishing tool and reduces the negative effect that polishing process frictional heat brings; By servomotor Direct driver polishing disk, avoid the accumulation of error that complicated transmission link causes, improve machining accuracy.
Accompanying drawing explanation
Fig. 1 is the graphics of the micro-tensioning system structure of the controlled pressure suspension polishing device that surges of a kind of fluid boundary of the present invention.
Fig. 2 is that the structural representation of suspension polishing device is pressed in controlled the surging of a kind of fluid boundary of the present invention.
Fig. 3 is that the side view of suspension polishing device is pressed in controlled the surging of a kind of fluid boundary of the present invention.
In figure, the axial vernier knob of 1-positioning sleeve, 2-horizontal guide, 3-X, 4-column, 5-sliding shaft sleeve, 6-gripper shoe, 7-horizontal table, 8-polishing fluid container, 9-polishing disk, 10-first shaft coupling, 11-second shaft coupling, 12-spiral lifting post, 13-force cell, 14-main shaft, 15-electric machine support, 16-servomotor, 17-ball-screw, 18-leading screw connector, 19-supporting plate, 20-pressure display instrument, the axial vernier knob of 21-Y.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described:
As shown in Figure 1, Fig. 1 is the graphics of the micro-tensioning system structure of the controlled pressure suspension polishing device that surges of a kind of fluid boundary of the present invention, in the structure shown here mainly by regulating X axis vernier knob 3 and Y-axis vernier knob 21, realize the plane motion of supporting plate 19, namely polishing disk 9 is regulated to move in the geometric center of polishing fluid container 8, for lowering or hoisting gear regulates polishing fluid container 8 to prepare in the position of Z-direction below.
Fig. 2 and Fig. 3 is that the structural representation of suspension polishing device is pressed in controlled the surging of a kind of fluid boundary, critical piece comprises horizontal table 7, spiral lifting post 12, polishing fluid container 8, polishing disk 9, servomotor 16, polishing fluid container 8 is fixed in gripper shoe 6, force cell 13 is arranged on the bottom of polishing fluid container 8, the lifting of polishing fluid container 8 is controlled by spiral lifting post 12, polishing disk 9 is connected with servomotor 16 by shaft coupling, main shaft 14, servomotor 16 is fixed on supporting plate 19, and supporting plate 19 is controlled by the trim button on the ball screw 17 of X, Y-direction.The data that force cell 13 detects are reflected on pressure display instrument 20.
Lowering or hoisting gear comprises elevating screws mechanism and the gripper shoe 6 for fixing polishing liquid container, described elevating screws mechanism is fixed on horizontal table 7, described elevating screws mechanism comprises four columns 4 and a spiral lifting post 12 for regulating gripper shoe 6 to be elevated vertically installed, the lower end of spiral lifting post 12 is fixed on horizontal table 7, upper end is used for supported plate 6, four root posts 4 fix as a whole lifting frame by positioning sleeve 1 and four horizontal guide 2, described gripper shoe 6 is provided with four sliding shaft sleeves 5 matched with four root posts 4, gripper shoe 6 is sleeved in elevating screws mechanism by sliding shaft sleeve 5 and also can moves up and down along elevating screws mechanism.
During the device work of pressure of surging suspension polishing, lifting part is realized by spiral lifting post 12.Polishing fluid container 8 is fixed in gripper shoe 6, and spiral lifting post 12 moves up and down by driving gripper shoe 6 the lifting realizing polishing fluid container 8.
Described micro-tensioning system comprises ball-screw 17, X axis vernier knob and Y-axis vernier knob, two ball-screws 17 are mutually vertically and all through described supporting plate, the two ends of two ball-screws 17 are connected in four horizontal guide respectively by leading screw connector 18, and the two ends of two ball-screws 17 are respectively equipped with X axis vernier knob 3 for adjusting supporting board position and Y-axis vernier knob 21.
Servomotor 16 is fixed on supporting plate 19 by electric machine support 15, and supporting plate 19 controls its motion by the leading screw of X, Y-direction, is mainly regulated by X axis vernier knob 3 and Y-axis vernier knob 21.Thus control polishing disk 9 can realize the motion in XY plane, finally realize the clearance control of polishing disk 9 and polishing fluid container 8 wall in less scope.Whole suspension polishing device is symmetrical, sound construction and anti-vibration is effective, after the distance factor considering polishing disk 9 and polishing fluid container 8 wall, and can be better to the effect producing hydraulic pressure oil film during suspension polishing.Thus reach the object improving working (machining) efficiency and improve finishes.
Above-described embodiment is preferred embodiment of the present invention; it is not the restriction to technical solution of the present invention; as long as without the technical scheme that creative work can realize on the basis of above-described embodiment, all should be considered as falling within the scope of the rights protection of patent of the present invention.

Claims (7)

1. the pressure suspension polishing device that surges that a fluid boundary is controlled, it is characterized in that: comprise horizontal table, polishing system, jacking system, micro-tensioning system and pressure detecting system, described polishing system comprises polishing disk, polishing fluid container, first shaft coupling, main shaft, second shaft coupling, supporting plate, electric machine support and servomotor, servomotor is fixed on bottom supporting plate by electric machine support, the output of servomotor connects the upper end of main shaft by the first shaft coupling, the lower end of main shaft connects polishing disk by the second shaft coupling, polishing fluid container is fixed on immediately below polishing disk, described lowering or hoisting gear comprises elevating screws mechanism and the gripper shoe for fixing polishing liquid container, described elevating screws mechanism is fixed on horizontal table, described elevating screws mechanism comprises four columns and a spiral lifting post for regulating gripper shoe to be elevated vertically installed, the lower end of spiral lifting post is fixed on horizontal table, upper end is used for supported plate, four root posts fix as a whole lifting frame by positioning sleeve and four horizontal guide, described gripper shoe is provided with four sliding shaft sleeves matched with four root posts, support and to be sleeved in elevating screws mechanism by sliding shaft sleeve and can to move up and down along elevating screws mechanism, described micro-tensioning system comprises ball-screw, X axis vernier knob and Y-axis vernier knob, two ball-screws are mutually vertically and all through described supporting plate, the two ends of two ball-screws are connected in four horizontal guide, and the two ends of two ball-screws are respectively equipped with X axis vernier knob for adjusting supporting board position and Y-axis vernier knob, described pressure detecting system comprise be located at polishing fluid container bottom for detecting polishing time produce the force cell of hydraulic power.
2. what fluid boundary according to claim 1 was controlled surge pressure suspension polishing device, is characterized in that: described first shaft coupling is two diaphragm couplings.
3. what fluid boundary according to claim 1 was controlled surge pressure suspension polishing device, is characterized in that: described second shaft coupling is two diaphragm couplings.
4. what fluid boundary according to claim 1 was controlled surge pressure suspension polishing device, it is characterized in that: described pressure sensor is located at polishing fluid container bottom, and described pressure sensor to comprise along polishing fluid container bottom same circumferentially equally distributed three.
5. what fluid boundary according to claim 1 was controlled surge pressure suspension polishing device, is characterized in that: described polishing disk is provided with wedge groove on the surface.
6. what fluid boundary according to claim 1 was controlled surge pressure suspension polishing device, is characterized in that: be provided with the minim gap that can form the press mold that surges between described polishing disk and polishing fluid container.
7. what fluid boundary according to claim 1 was controlled surge pressure suspension polishing device, is characterized in that: described pressure sensor is by wire Bonding pressure display instrument.
CN201510905872.7A 2015-12-09 2015-12-09 A kind of controllable pressure suspension polishing device that surges of fluid boundary Active CN105415153B (en)

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Cited By (11)

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Publication number Priority date Publication date Assignee Title
CN106671846A (en) * 2017-03-08 2017-05-17 南京三光电科技有限公司 Manual and automatic integrated balancing device and balancing method
CN107263297A (en) * 2017-07-31 2017-10-20 浙江洁宇环保装备科技有限公司 A kind of dedusting airduct outer wall polishing machine
CN107414613A (en) * 2017-07-31 2017-12-01 浙江洁宇环保装备科技有限公司 A kind of dedusting airduct polishing method
CN108426137A (en) * 2018-06-06 2018-08-21 上海海洋大学 Oceanographic buoy monitors system sensor spiral lifting mechanism
CN108705411A (en) * 2018-05-29 2018-10-26 昆明理工大学 A kind of pressure adjustable floats off burnishing device
CN109100285A (en) * 2018-10-12 2018-12-28 谢重 The PIV observation device and observation method of abrasive grain in a kind of two phase flow polishing
CN109590830A (en) * 2018-10-29 2019-04-09 泉州智驰自动化机械有限公司 A kind of high-efficiency ceramic product inner hole grinding apparatus
CN109957831A (en) * 2019-04-10 2019-07-02 福建工程学院 A kind of electrobrightening and residual stress detect integrated device
CN110116362A (en) * 2019-05-30 2019-08-13 江苏兴利达齿轮有限公司 A kind of automobile gearbox gear special efficient rate burnishing device
CN110744431A (en) * 2019-11-18 2020-02-04 浙江工业大学 Pressure detection system for linear hydraulic pressure polishing device
CN113199384A (en) * 2021-06-08 2021-08-03 浙江工业大学 Polishing tool using spherical polishing roller with grooved structural units

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CN101708592A (en) * 2009-11-05 2010-05-19 浙江工业大学 Base disc used for suspension polishing
CN101973000A (en) * 2010-11-08 2011-02-16 浙江工业大学 Die matching device of liquid flow suspension ultraprecise cylinder polishing head
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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106671846A (en) * 2017-03-08 2017-05-17 南京三光电科技有限公司 Manual and automatic integrated balancing device and balancing method
CN107263297A (en) * 2017-07-31 2017-10-20 浙江洁宇环保装备科技有限公司 A kind of dedusting airduct outer wall polishing machine
CN107414613A (en) * 2017-07-31 2017-12-01 浙江洁宇环保装备科技有限公司 A kind of dedusting airduct polishing method
CN108705411A (en) * 2018-05-29 2018-10-26 昆明理工大学 A kind of pressure adjustable floats off burnishing device
CN108705411B (en) * 2018-05-29 2024-05-28 昆明理工大学 Pressure-adjustable floating polishing device
CN108426137A (en) * 2018-06-06 2018-08-21 上海海洋大学 Oceanographic buoy monitors system sensor spiral lifting mechanism
CN108426137B (en) * 2018-06-06 2024-05-28 上海海洋大学 Sensor spiral lifting mechanism of ocean buoy monitoring system
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CN109590830A (en) * 2018-10-29 2019-04-09 泉州智驰自动化机械有限公司 A kind of high-efficiency ceramic product inner hole grinding apparatus
CN109957831B (en) * 2019-04-10 2024-04-02 福建工程学院 Electrolytic polishing and residual stress detection integrated device
CN109957831A (en) * 2019-04-10 2019-07-02 福建工程学院 A kind of electrobrightening and residual stress detect integrated device
CN110116362B (en) * 2019-05-30 2024-01-12 江苏兴利达齿轮有限公司 Special high efficiency burnishing device of automotive transmission gear
CN110116362A (en) * 2019-05-30 2019-08-13 江苏兴利达齿轮有限公司 A kind of automobile gearbox gear special efficient rate burnishing device
CN110744431A (en) * 2019-11-18 2020-02-04 浙江工业大学 Pressure detection system for linear hydraulic pressure polishing device
CN110744431B (en) * 2019-11-18 2024-05-03 浙江工业大学 Pressure detection system for linear hydrodynamic polishing device
CN113199384A (en) * 2021-06-08 2021-08-03 浙江工业大学 Polishing tool using spherical polishing roller with grooved structural units
CN113199384B (en) * 2021-06-08 2024-05-17 浙江工业大学 Polishing tool using ball-type polishing roller with grooved structure unit

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