CN106624951B - A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating - Google Patents
A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating Download PDFInfo
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- CN106624951B CN106624951B CN201710031879.XA CN201710031879A CN106624951B CN 106624951 B CN106624951 B CN 106624951B CN 201710031879 A CN201710031879 A CN 201710031879A CN 106624951 B CN106624951 B CN 106624951B
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- Prior art keywords
- wedge block
- ball
- straight line
- screw
- wedge
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
Abstract
The invention discloses a kind of Z-direction micro-displacement structures based on wedge shape feeding level compensating, mainly include two sets of servo motors, line slide rail, slide pedestal, ball-screw, support base, polished rod guide rail and wedge block, wherein a set of line slide rail is fixed on platform and slides pedestal and connect with a wedge block, other set line slide rail is fixed on first wedge block and straight line pedestal is connect with second wedge block, and polished rod guide rail is connected with the outer bottom of line slide rail, in addition, wedge block can allow the relationship that the displacement of horizontal direction and the displacement of vertical direction form an angle.The present invention can meet the precision under relatively large load, the Z-direction Fine Feed needs in Ultra-precision Turning, closed-loop control system can be built using the right-angle relationship of wedge shape by measuring horizontal displacement method, and the amount of movement of horizontal direction is compensated, realize the feeding that precision reaches micron level, it is low to solve current micro-displacement mechanism load capacity, the few problem of the Z-direction amount of feeding.
Description
Technical field
The invention belongs to precise and ultraprecise machining technical fields more particularly to a kind of based on wedge shape feeding level compensating
Z-direction micro-displacement structure.
Background technology
Recently as the development of the subjects such as microelectric technique, aerospace, bioengineering, as precision machinery and precision instrument
The Micro-displacement Technique of one of key technology also develop rapidly.In precision instrument, the accurate of either big voyage is determined
Position or small-scale optical alignment all be unable to do without Micro-displacement Technique.Micro-displacement Technique is own through becoming modern precision instrumentation industry
Common base, be the important symbol for weighing national science and technology level, represent the height of country's processing technology level,
The level of shift technique also reflects a national mixed economy and technical merit, is the important mark of national manufacturing technology level
Will is the mainstay of advanced manufacturing technology.
Although microfeed structure technology has been achieved with developing on a large scale very much, high-precision, big stroke, performance are really developed
Excellent microfeed structure but not a duck soup, also there are many urgent problems to be solved.In microfeed structure, big stroke
This conflict still has with high-precision, and the microfeed structure developed at present can only often meet first, and cannot meet
Secondly.As although piezoelectric ceramics microfeed structure positioning accuracy is very high（Less than 0.01 μm）, but its impulse stroke is too small, and machine
Tool transmission microfeed structure can reach very big impulse stroke, but its positioning accuracy is not high.Existing micro-displacement mechanism is deposited
Loading low, Z-direction（Short transverse）The drawbacks of amount of feeding is few, and multiplicity is small, and precision is not high.Up to the present it not yet solves ripe
Method and product come out.
Invention content
The present invention provides a kind of Z-direction based on wedge shape feeding level compensating to solve shortcoming of the prior art
Micro-displacement structure, which can meet the precision under relatively large load, the Z-direction Fine Feed needs in Ultra-precision Turning, and grasp
Make simplicity, it is simple in structure.
In order to solve the above technical problems, the present invention adopts the following technical scheme that：A kind of Z based on wedge shape feeding level compensating
To micro-displacement structure, including the first installation frame, the second installation frame, first straight line sliding rail, second straight line sliding rail, the first servo
Motor, the second servo motor, the first wedge block, the second wedge block, the first ball-screw, the second ball-screw, the first sliding stand
Seat, second slide pedestal, the first polished rod guide rail, the second polished rod guide rail, the first support base and the second support base；
First straight line sliding rail is horizontally set in left-right direction on the first installation frame, the first installation frame left upper portion and
Right upper portion is respectively equipped with a first support, and the first polished rod guide rail, the first ball-screw and first straight line sliding rail are arranged in parallel,
First polished rod guide rail both ends are fixed in two first supports, and there are two the settings of the first support base, and two the first support bases are fixed
Top left side and the right side of first straight line sliding rail are arranged on, the first ball-screw both ends are located at two first by bearing rotation
It supports on seat, the right end of the first ball-screw is connect by first shaft coupling with the spindle drive of the first servo motor, and first slides
Pedestal wears and is threaded on the first ball-screw, and the first wedge block is arranged at the top of the first slip pedestal, the first polished rod
It is slided on guide rail and is provided with the first sliding block, the first slider top is fixedly connected with the first wedge block bottom；The thickness of first wedge block
Gradually increase, the lower surface of the first wedge block are horizontally disposed with degree from left to right, the upper surface inclination with left lower than right of the first wedge block
Setting；
Second installation frame bottom is fixed at the top of the first wedge block, and second straight line sliding rail is arranged in left-right direction
On second installation frame, the second installation frame left upper portion and right upper portion are respectively equipped with a second support, and the second polished rod is led
Rail, the second ball-screw and second straight line sliding rail are arranged in parallel, and the second polished rod guide rail both ends are fixed in two second supports, the
There are two the settings of two support bases, and two the second support bases are fixed at top left side and the right side of second straight line sliding rail, and second
Ball-screw both ends are located at by bearing rotation on two the second support bases, and the left end of the second ball-screw passes through second shaft coupling
It is connect with the spindle drive of the second servo motor, the second slip pedestal wears and is threaded on the second ball-screw, second
Wedge block is arranged at the top of the second slip pedestal, is slided on the second polished rod guide rail and is provided with the second sliding block, the second slider top with
Second wedge block bottom is fixedly connected；The thickness of second wedge block is gradually reduced from left to right, the thickness upper table of the second wedge block
Face is horizontally disposed with, and the upper surface of the first wedge block is parallel to the lower surface of the second wedge block；
First installation frame bottom is arranged on platen, when the first servo motor of startup and the second servo motor
When, the first servo motor drives the first ball screw turns, and the second servo motor drives the second ball screw turns, is slided first
Under the support limit of block and the second sliding block, the direction that pedestal is moved along first straight line sliding rail is slided in the first ball-screw driving first
It is opposite along the direction that second straight line sliding rail moves that pedestal is slided with the second ball-screw driving second；Due to the first wedge block and
The displacement amount of movement of second straight line sliding rail is divided into the component of horizontal direction displacement and vertical by the wedge-shaped right-angle relationship of two wedge blocks
The component of direction displacement, by driving the component of horizontal direction displacement, by measuring the method for horizontal displacement by horizontal direction position
The component of shifting, which is fed back in control system, builds closed-loop control system and to first straight line sliding rail and second straight line sliding rail level side
To amount of movement compensate, improve amount of movement of the workbench in Z-direction, realize precision reach micron level into
It gives；When workpiece, which is placed on, to be processed on the second wedge block, workpiece only shows the amount of movement of Z-direction.
First sliding block and the first wedge block, the first slip pedestal and the first wedge block, the second installation frame and the first wedge shape
It is connected between block, the second sliding block and the second wedge block and the second slip pedestal and the second wedge block using screw.
Above-mentioned technical proposal is used, the invention has the advantages that:The present invention first will when testing or working experiment
The present invention is placed on 401 millimeters long, wide 356 millimeters of fine turning lathe workbench, by adjusting the first servo motor and the
The amount of movement of second straight line sliding rail can be divided into level side by the rotation of two servo motors using the right-angle relationship of the first wedge block
The component of component and vertical direction displacement to displacement, and then the component of horizontal direction displacement is driven, by measuring horizontal displacement
Method by the component of horizontal direction displacement feed back in control system build closed-loop control system and to wherein first straight line slide
Rail and the amount of movement of second straight line sliding rail horizontal direction compensate, and improve workbench in Z-direction（Vertical direction）Shifting
Momentum realizes the feeding that precision reaches micron level.
Compared with prior art, the present invention is based on the Z-direction micro-displacement structures of wedge shape feeding level compensating, wedge-shaped in of the invention
Block can carry larger workpiece, and line slide rail has larger stroke, and servo motor has higher precision.The present invention realizes
Workbench is in the amount of feeding of Z-direction, and so as to improve previous workpiece, the amount of feeding is few in the Z-axis direction, and multiplicity is small, and precision is not
The drawbacks of high, also solving micro-displacement mechanism, stroke is short in the prior art, and precision is low, the few difficulty of the mechanism Z-direction amount of feeding
Topic.Also have very great significance to the development of Micro-displacement Technique.
The present invention is low for micro-displacement mechanism precision, and stroke is short, and the few situation of the mechanism Z axis amount of feeding passes through servo motor
Ball-screw is driven, builds intelligent micro-displacement control system, it, can be with to meet Fine Feed needs accurate, in Ultra-precision Turning
The machining accuracy of workpiece is further improved, improves working efficiency during work pieces process, improves the load capacity of workbench.
Description of the drawings
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is the vertical view of Fig. 1.
Specific embodiment
As depicted in figs. 1 and 2, a kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating of the invention, including the
One installation frame 1, the second installation frame 2, first straight line sliding rail 3, second straight line sliding rail 4, the first servo motor 5, the second servo
Motor 6, the first wedge block 7, the second wedge block 8, the first ball-screw 9, the second ball-screw 10, first slide pedestal 11, the
Two slide pedestal 12, the first polished rod guide rail 13, the second polished rod guide rail 14, the first support base 15 and the second support base 16；
First straight line sliding rail 3 is horizontally set in left-right direction on the first installation frame 1, on 1 left side of the first installation frame
Portion and right upper portion are respectively equipped with a first support 17, the first polished rod guide rail 13, the first ball-screw 9 and first straight line sliding rail
3 are arranged in parallel, and 13 both ends of the first polished rod guide rail are fixed in two first supports 17, and there are two the settings of the first support base 15, and two
A first support base 15 is fixed at top left side and the right side of first straight line sliding rail 3, and 9 both ends of the first ball-screw pass through axis
It forwards to move and be located on two the first support bases 15, the right end of the first ball-screw 9 passes through 18 and first servo of first shaft coupling electricity
The spindle drive connection of machine 5, the first slip pedestal 11 wear and are threaded on the first ball-screw 9, and the first wedge block 7 is set
Put and slide the top of pedestal 11 first, slided on the first polished rod guide rail 13 and be provided with the first sliding block 19,19 top of the first sliding block with
First wedge block, 7 bottom is fixedly connected；The thickness of first wedge block 7 gradually increases from left to right, the lower surface of the first wedge block 7
Horizontally disposed, the upper surface of the first wedge block 7 is with left lower than right to be obliquely installed；
Second installation frame, 2 bottom is fixed at 7 top of the first wedge block, and second straight line sliding rail 4 is set in left-right direction
It puts on the second installation frame 2,2 left upper portion of the second installation frame and right upper portion are respectively equipped with a second support 20, the
Two polished rod guide rails 14, the second ball-screw 10 and second straight line sliding rail 4 are arranged in parallel, and 14 both ends of the second polished rod guide rail are fixed on two
In a second support 20, there are two the settings of the second support base 16, and two the second support bases 16 are fixed at second straight line sliding rail 4
Top left side and right side, 10 both ends of the second ball-screw by bearing rotation be located on two the second support bases 16, second rolling
The left end of ballscrew 10 is connect by second shaft coupling 21 with the spindle drive of the second servo motor 6, and the second slip pedestal 12 is worn
And if be threaded on the second ball-screw 10, the second wedge block 8 is arranged on the top of the second slip pedestal 12, and the second polished rod is led
It is slided on rail 14 and is provided with the second sliding block, the second slider top is fixedly connected with 8 bottom of the second wedge block；The thickness of second wedge block
Degree is gradually reduced from left to right, and the thickness upper surface of the second wedge block 8 is horizontally disposed with, and the upper surface of the first wedge block 7 is parallel to
The lower surface of second wedge block 8；
First installation frame, 1 bottom is arranged on platen, when the first servo motor 5 of startup and the second servo motor
When 6, the first servo motor 5 drives the first ball-screw 9 to rotate, and the second servo motor 6 drives the second ball-screw 10 to rotate,
Under the support limit of first sliding block 19 and the second sliding block, the first ball-screw 9 driving the first slip pedestal 11 is slided along first straight line
The direction that rail 3 moves and the second ball-screw 10 driving the second slip pedestal 12 are opposite along the direction that second straight line sliding rail 4 moves；
Due to the first wedge block 7 and the wedge-shaped right-angle relationship of the second wedge block 8, the displacement amount of movement of second straight line sliding rail 3 is divided into water
Square to the component of displacement and the component of vertical direction displacement, by driving the component of horizontal direction displacement, pass through measure it is horizontal
The method of displacement, which feeds back to the component of horizontal direction displacement in control system, to be built closed-loop control system and first straight line is slided
The amount of movement of 4 horizontal direction of rail 3 and second straight line sliding rail compensates, and improves amount of movement of the workbench in Z-direction, realizes
Precision reaches the feeding of micron level；When workpiece, which is placed on, to be processed on the second wedge block 8, workpiece only shows Z-direction
Amount of movement.
First sliding block 19 and the first wedge block 7, first slide 11 and first wedge block 7 of pedestal, the second installation frame 2 and the
Screw is used between one wedge block 7, the second sliding block and the second wedge block 8 and the second slip 12 and second wedge block 8 of pedestal
Connection, the in this way installation and removal convenient for each component.
The present embodiment is every according to this hair not to the limitation of works in any form such as shape, material, the structures of the present invention
Any simple modification, equivalent change and modification that bright technical spirit makees above example, belongs to the technology of the present invention side
The protection domain of case.
Claims (2)
1. a kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating, it is characterised in that：Including the first installation frame,
Two installation frames, first straight line sliding rail, second straight line sliding rail, the first servo motor, the second servo motor, the first wedge block,
Two wedge blocks, the first ball-screw, the second ball-screw, first slide pedestal, second slide pedestal, the first polished rod guide rail, the
Two polished rod guide rails, the first support base and the second support base；
First straight line sliding rail is horizontally set in left-right direction on the first installation frame, the first installation frame left upper portion and right side
Top is respectively equipped with a first support, and the first polished rod guide rail, the first ball-screw and first straight line sliding rail are arranged in parallel, and first
Polished rod guide rail both ends are fixed in two first supports, and there are two the settings of the first support base, two the first support base fixed settings
Top left side and right side in first straight line sliding rail, the first ball-screw both ends are located at two the first support bases by bearing rotation
On, the right end of the first ball-screw is connect by first shaft coupling with the spindle drive of the first servo motor, and first slides pedestal
It wears and is threaded on the first ball-screw, the first wedge block is arranged at the top of the first slip pedestal, the first polished rod guide rail
Upper slip is provided with the first sliding block, and the first slider top is fixedly connected with the first wedge block bottom；The thickness of first wedge block by
From left to right gradually increases, and the lower surface of the first wedge block is horizontally disposed with, and the upper surface of the first wedge block is with left lower than right to be obliquely installed；
Second installation frame bottom is fixed at the top of the first wedge block, and second straight line sliding rail is arranged on second in left-right direction
On installation frame, the second installation frame left upper portion and right upper portion are respectively equipped with a second support, the second polished rod guide rail,
Two ball-screws and second straight line sliding rail are arranged in parallel, and the second polished rod guide rail both ends are fixed in two second supports, second
It supports there are two seat settings, two the second support bases are fixed at top left side and the right side of second straight line sliding rail, the second ball
Leading screw both ends are located at by bearing rotation on two the second support bases, and the left end of the second ball-screw passes through second shaft coupling and the
The spindle drive connection of two servo motors, the second slip pedestal wear and are threaded on the second ball-screw, the second wedge shape
Block is arranged at the top of the second slip pedestal, is slided on the second polished rod guide rail and is provided with the second sliding block, the second slider top and second
Wedge block bottom is fixedly connected；The thickness of second wedge block is gradually reduced from left to right, the thickness upper surface water of the second wedge block
Flat setting, the upper surface of the first wedge block is parallel to the lower surface of the second wedge block；
First installation frame bottom is arranged on platen, when starting the first servo motor and the second servo motor, the
One servo motor drives the first ball screw turns, and the second servo motor drives the second ball screw turns, in the first sliding block and
Under the support limit of second sliding block, direction that the first ball-screw driving the first slip pedestal is moved along first straight line sliding rail and the
It is opposite along the direction that second straight line sliding rail moves that pedestal is slided in two ball-screws driving second；Due to the first wedge block and the second wedge
The displacement amount of movement of second straight line sliding rail is divided into the component and vertical direction of horizontal direction displacement by the wedge-shaped right-angle relationship of shape block
The component of displacement, by driving the component of horizontal direction displacement, by measuring the method for horizontal displacement by horizontal direction displacement
Component, which is fed back in control system, builds closed-loop control system and to first straight line sliding rail and second straight line sliding rail horizontal direction
Amount of movement compensates, and improves amount of movement of the workbench in Z-direction, realizes the feeding that precision reaches micron level；When
Workpiece is placed on when being processed on the second wedge block, and workpiece only shows the amount of movement of Z-direction.
2. a kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating according to claim 1, it is characterised in that：
First sliding block and the first wedge block, the first slip pedestal and the first wedge block, the second installation frame and the first wedge block, second are slided
It is connected between block and the second wedge block and the second slip pedestal and the second wedge block using screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710031879.XA CN106624951B (en) | 2017-01-17 | 2017-01-17 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710031879.XA CN106624951B (en) | 2017-01-17 | 2017-01-17 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106624951A CN106624951A (en) | 2017-05-10 |
| CN106624951B true CN106624951B (en) | 2018-07-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710031879.XA Expired - Fee Related CN106624951B (en) | 2017-01-17 | 2017-01-17 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
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| Country | Link |
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| CN (1) | CN106624951B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3025803B1 (en) * | 2014-11-26 | 2018-05-30 | TRUMPF Werkzeugmaschinen GmbH + Co. KG | Drive device for a machine tool and machine tool with such a drive device |
| CN111099520B (en) * | 2019-12-10 | 2021-07-16 | 上海建工四建集团有限公司 | Device for adjusting vertical position of object and using method thereof |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2180406Y (en) * | 1993-06-25 | 1994-10-26 | 华中理工大学 | Precision mini-feeding working table |
| CN202562431U (en) * | 2012-05-24 | 2012-11-28 | 曹玉 | Micrometric displacement measurement device |
| CN203037993U (en) * | 2012-12-04 | 2013-07-03 | 彩虹（佛山）平板显示有限公司 | Micro displacement mechanism for stepping photoetching device |
| KR20140086046A (en) * | 2012-12-28 | 2014-07-08 | 현대위아 주식회사 | Thermal displacement correction device of machine tools ball screw using cylinderical capacitor displacement sensor and method thereof |
| CN104329543A (en) * | 2014-10-09 | 2015-02-04 | 保定标正机床有限责任公司 | Machine tool fine adjustment sizing block |
| CN205363558U (en) * | 2015-11-28 | 2016-07-06 | 重庆市健隆家具有限公司 | Glass edging clamping device |
| CN206436040U (en) * | 2017-01-17 | 2017-08-25 | 河南理工大学 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
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2017
- 2017-01-17 CN CN201710031879.XA patent/CN106624951B/en not_active Expired - Fee Related
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Granted publication date: 20180703 Termination date: 20220117 |