CN2180406Y - Precision mini-feeding working table - Google Patents
Precision mini-feeding working table Download PDFInfo
- Publication number
- CN2180406Y CN2180406Y CN 93216958 CN93216958U CN2180406Y CN 2180406 Y CN2180406 Y CN 2180406Y CN 93216958 CN93216958 CN 93216958 CN 93216958 U CN93216958 U CN 93216958U CN 2180406 Y CN2180406 Y CN 2180406Y
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- CN
- China
- Prior art keywords
- wedge
- working face
- driver
- support
- elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a precision mini-feeding working table, which is composed of a bracket, a driver, an elastic rib element, wedge blocks, etc. The elastic rib element composing an elastic working face is arranged on the bracket, one wedge block is arranged under the elastic working face, a slant plane is matched with the other sliding wedge block which can move on a track, a screw and screw nut pair is arranged in the sliding wedge block, the screw is driven by the driver, and the effect of the two wedge blocks is used to realize the parallel micrometric displacement of the elastic working face. The utility model has the advantages of running stability, good repeatability, realization of feedback control, high precision, compact structure, convenient operation, low cost, easy popularization and accomplishment, etc.
Description
It is accurate that the utility model belongs to, ultraprecise flat surface grinding manufacture field.
The professor Chen Riyao of HUST, just propose the theory of machining as thin as a wafer as far back as the beginning of the sixties, and successively on " Chinese science ", " mechanical engineering journal ", " HUST's journal ", delivered a series of articles of processing notion as thin as a wafer that relate to.The Peter Langenback of Germany is at " Precision Engineering " magazine, Jan.1992Vol.14No.1, PP.43-46 delivered one piece and was entitled as the article of " Ultrafine infeedcontrol ", introduced a kind of fine feed controller of processing optical part, its control that realizes the fine amount of feeding is sharp with Wedged piece operation principle, but the upper elastic member of this device is in cantilever position, so a little less than the rigidity, the translation poor performance can not be suitable for effective high-precision requirement of metalwork and the machining that surface quality requires.
The purpose of this utility model is that at weak point of the prior art, it is steady to design a kind of worktable displacement, and good rigidly is beneficial to and guarantees the accurate micro-feed stage of grinding accuracy as thin as a wafer.
The formation main points of the said accurate micro-feed stage of the utility model are, the flexible muscle element of fixed in position on the support of table 1, elasticity muscle element cuts out hinged 2 of two flexibilities by reaching the standard grade at a treated sheet material and forms, the two ends of elasticity muscle element are stiff end 3, between two flexibilities hinged 2 is elastic working face 4, be elastic working face 4, flexibility hinged 2 and stiff end 3 common formation elasticity muscle elements.The micrometric displacement of elastic working face 4 relies on the relative displacement of two wedges to realize.Concrete structure is, is mounted with a pair of wedge under the elastic working face, and one is stationary wedge piece 5, and another piece is a slip wedge 6, and slip wedge 6 can slide along guide rail bracket 7, and the inclined-plane of two wedges is settled relatively.
The operation principle of workbench described in the utility model is, after on slip wedge 6, applying driving force F, slip wedge 6 is along producing lateral displacement on the guide rail bracket 7, because the interaction on the inclined-plane of two wedges is so can make this lateral displacement be transformed into the length travel of elastic working face 4 by stationary wedge piece 5.Again owing to elastic working face 4 on the elasticity muscle element of workbench described in the utility model is arranged between two flexibilities 2, and combine with a certain wedge large tracts of land, add that the two ends of elasticity muscle element and support 1 are for being fixedly connected entirely, therefore, it is accurate translation that elastic working face 4 relies on two hinged 2 length travels that produced, to realize the requirement of high accuracy processing.
Accurate micro-feed stage described in the utility model owing to adopted complete fixed elasticity muscle element as core parts, therefore has the working face motion not have friction, no gap, noiseless, motion translation, reliable advantage; Produce vertical micrometric displacement owing to adopt mechanical Wedge-type laterally to move again, can change the direction of motion, change reduce in scale, good rigidly, advantages such as self-lock ability are arranged so have.Workbench described in the utility model can stably be realized little feeding, and its minimum amount of feeding can reach 0.05 μ m, and good reproducibility, and mechanical system is reliable and stable.When adopting computer control, can utilize to be arranged on the displacement transducer realization FEEDBACK CONTROL that is associated with working plate and/or elastic working face in the support, control accuracy can reach 0.03 this precision of μ m(and be decided by sensor accuracy).This micro-feed stage is independently parts, can with the direct supporting use of surface grinding machine, under the situation that does not change any performance of surface grinding machine, machining accuracy can be improved an order of magnitude.Advantages such as in addition, this device also has compact conformation, and easy to use, with low cost, principle is simple, and is easy to implement and promote the use of.
Accompanying drawing 1, accurate micro-feed stage schematic diagram;
A) the flexible hinged form that connects mutually for stationary wedge piece and elastic working face;
B) cantilevered fashion that connects mutually for stationary wedge piece and elastic working face;
C) the flexible hinged form that connects mutually for stationary wedge piece and support;
Accompanying drawing 2, accurate micro-feed stage structure chart;
Accompanying drawing 3, the A-A of accompanying drawing 2 is to cutaway view;
Accompanying drawing 4 utilizes the structure chart of piezoelectric ceramics as driver.
Further describe formation of the present utility model below in conjunction with embodiment.
What accompanying drawing 2 provided is a kind of version of utilizing stepper motor as drive force source.As constituting partly said structure in this manual, the flexible muscle element of fixed in position on support 1, below its elastic working face 4, be mounted with Gu and Ding Wedged shape piece 5, contact to being placed in the slip wedge 6 on the guide rail bracket 7 with the inclined-plane of stationary wedge piece 5, guide rail bracket 7 is fixed in the support 1, the screw rod 9 that has relatively-stationary with it nut 8 and nut 8 to match in slip wedge 6 links with driver 10, and driver 10 can be installed on the support 1.On the surrounding edge of platen 11 working plates 11 of can arranging work on the elastic working face 4, backplate 12 can be arranged.Between the stiff end 3 of said support 1 and elasticity muscle element, can be added with trimmer 13.Press accompanying drawing 2, said driver can be a stepper motor, also can be handle wheel.
What accompanying drawing 4 provided is a kind of version of utilizing piezoelectric ceramics as drive force source.With last routine difference is to pay without bolt and nut to drive slip wedge 6, and uses piezoelectric ceramics directly to drive slip wedge 6, can settle back-moving spring 14 at the other end of the relative driver of slip wedge.
The position of said stationary wedge piece 5 and slip wedge 6 can reciprocity in the utility model.
Claims (6)
1, a kind of accurate micro-feed stage, mainly by support, elasticity muscle element, composition such as wedge, driver, it is characterized in that, elasticity muscle element is hinged by two flexibilities of the cutting of reaching the standard grade at a sheet material, the elastic working face between two flexibilities are hinged and the stiff end be combined at two ends, the stiff end of elasticity muscle element is placed on the support; Be mounted with the wedge that a pair of its inclined-plane is settled relatively under the elastic working face, one is the stationary wedge piece, the slip wedge for moving on guide rail bracket.
According to the said workbench of claim 1, it is characterized in that 2, said stationary wedge piece is placed under the elastic working face, guide rail bracket is placed in the support, and the slip wedge is placed between stationary wedge piece and the guide rail bracket.
According to the said workbench of claim 1, it is characterized in that 3, said guide rail bracket is placed under the elastic working face, the stationary wedge piece is placed in the support, and the slip wedge is placed between stationary wedge piece and the guide rail bracket.
According to claim 2 or 3 said workbench, it is characterized in that 4, when said driver was stepper motor or handle wheel, its driver and screw rod linked, screw rod matches with nut in being arranged on the slip wedge; When said driver was piezoelectric ceramics, its driver can be placed between support and the slip wedge, at the other end of the relative driver of slip wedge back-moving spring can be arranged.
5, according to the said workbench of claim 4, it is characterized in that, on said elastic working face, can be mounted with working plate.
6, according to the said workbench of claim 5, it is characterized in that the displacement transducer that can setting in said support be associated with working plate and/or elastic working face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93216958 CN2180406Y (en) | 1993-06-25 | 1993-06-25 | Precision mini-feeding working table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93216958 CN2180406Y (en) | 1993-06-25 | 1993-06-25 | Precision mini-feeding working table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2180406Y true CN2180406Y (en) | 1994-10-26 |
Family
ID=33796992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 93216958 Expired - Fee Related CN2180406Y (en) | 1993-06-25 | 1993-06-25 | Precision mini-feeding working table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2180406Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102941519A (en) * | 2012-11-18 | 2013-02-27 | 大连理工大学 | High-precision drum involute cam grinding device |
| CN104279945A (en) * | 2013-10-12 | 2015-01-14 | 上海工程技术大学 | Displacement sensor used for diesel engine oil pump rack |
| CN104858844A (en) * | 2015-06-18 | 2015-08-26 | 北方民族大学 | Novel high accuracy micrometric displacement platform and use method thereof |
| CN104908013A (en) * | 2015-06-29 | 2015-09-16 | 北方民族大学 | A magnetic high-precision micro-displacement platform and a using method thereof |
| CN106624951A (en) * | 2017-01-17 | 2017-05-10 | 河南理工大学 | Z-direction micro displacement structure based on wedge feeding horizontal compensation |
-
1993
- 1993-06-25 CN CN 93216958 patent/CN2180406Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102941519A (en) * | 2012-11-18 | 2013-02-27 | 大连理工大学 | High-precision drum involute cam grinding device |
| CN104279945A (en) * | 2013-10-12 | 2015-01-14 | 上海工程技术大学 | Displacement sensor used for diesel engine oil pump rack |
| CN104858844A (en) * | 2015-06-18 | 2015-08-26 | 北方民族大学 | Novel high accuracy micrometric displacement platform and use method thereof |
| CN104908013A (en) * | 2015-06-29 | 2015-09-16 | 北方民族大学 | A magnetic high-precision micro-displacement platform and a using method thereof |
| CN106624951A (en) * | 2017-01-17 | 2017-05-10 | 河南理工大学 | Z-direction micro displacement structure based on wedge feeding horizontal compensation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |