CN104858844A - Novel high accuracy micrometric displacement platform and use method thereof - Google Patents
Novel high accuracy micrometric displacement platform and use method thereof Download PDFInfo
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- CN104858844A CN104858844A CN201510340162.4A CN201510340162A CN104858844A CN 104858844 A CN104858844 A CN 104858844A CN 201510340162 A CN201510340162 A CN 201510340162A CN 104858844 A CN104858844 A CN 104858844A
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- assembly
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- displacement platform
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
Abstract
The invention relates to the precise test technology and instrument field, in particular to a novel high accuracy micrometric displacement platform and a use method thereof. The novel high accuracy micrometric displacement platform comprises a moving device and an assembly, wherein the assembly comprises a first assembling part and a second assembling part, the first assembling part and the second assembling part are tightly attached to each other, the first assembling part is a micrometric displacement moving component, the second assembling part is tightly connected with the moving device, and matching surfaces of the first assembling part and the second assembling part are obliquely arranged relatively to the moving direction of the moving device. By adopting the technical scheme, displacement accuracy of the novel high accuracy micrometric displacement platform is directly improved through a mode of obtaining accuracy through the travel distance.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly a kind of novel high-precision micro-displacement platform and using method thereof.
Background technology
In recent years, along with the develop rapidly of microelectronics/optoelectronic information device manufacture, minute manufacturing, optical, mechanical and electronic integration, Ultraprecision Machining, the requirement of manufacturing equipment to precision is more and more higher.Such as, the shaping that the nano-manipulation that the distance in confined etchant layer technique (celt) electrochemical machining process between base material and template needs to control all the time within constraint etching agent layer thickness (nanometer or sub-micron), scanning probe microscopy needs to realize unimolecule or atom or assembling, nano impression equipment will carry out the 10nm yardstick of complex figure copies, the form accuracy of ultra precision diamond turning machine processing optical part and Roughness Surface on Control be within several nanometer etc.
Due to the required precision of these superelevation above-mentioned, obviously oneself cannot meet the rigors of precise motion to traditional motor driver, so have high-precision, the smart material driver that directly electric or magnetic can be converted to mechanical energy has appeared among the visual field of people.The intellectual material microdrive being suitable for nano-precision motion mainly contains piezoelectric ceramic actuator, super-magnetostrictive drive and marmen.Because having, displacement resolution is high, driving force is large, rigidity is high, volume is little, high reliability, applies among each microtechnic field at present widely, and wherein, piezoelectric ceramic actuator is a kind of intellectual material microdrive be wherein most widely used.
At present, have developed the micro-displacement platform of multiple Piezoelectric Ceramic, and successful Application is obtained in litho machine, scanning probe microscopy, electrical-chemistry method equipment, ultra-precision machine tool, space flexible mechanical arm and astronomical telescope, play a part more and more important to the research of the field nanometer/sub-nanoscales such as machinery, physics, chemistry, material and biology.
The operation principle of piezoelectric ceramics is, Direct driver controls the location that piezoelectric ceramics realizes nano-precision, controlling piezoelectric ceramic actuator is the inverse piezoelectric property utilizing piezoelectric, deformation is produced under the effect of input voltage or electric current, reach the object of mechanical movement, thus can ensure that nanometer resolution moves, have conventional motors to drive incomparable advantage.
But along with the progress of science and technology, the precision required by every field is more and more higher, the micro-displacement platform of above-mentioned Piezoelectric Ceramic day by day can not reach enough required precisions, meanwhile, along with the raising of displacement accuracy, it controls difficulty also along with considerably increasing.
So, need one at present badly and more high-precision micro-displacement platform can be provided.
Summary of the invention
The object of the invention is to overcome the lower drawback of current micro-displacement platform precision, provide one and there is more high-precision novel high-precision micro-displacement platform.
A kind of novel high-precision micro-displacement platform, include telecontrol equipment, assembly and restraint device, described assembly includes the first sub-assembly and is slidably arranged in the second sub-assembly on described first sub-assembly, fit tightly between described first sub-assembly and the second sub-assembly, described second sub-assembly and described telecontrol equipment compact siro spinning technology, the mating surface of described first sub-assembly and the second sub-assembly is obliquely installed relative to the direction of motion of described telecontrol equipment, the movement of described restraint device described first sub-assembly of restriction in the telecontrol equipment direction of motion.
As the preferred version of the application, between described first sub-assembly second sub-assembly, the angle of mating surface and the telecontrol equipment direction of motion is A degree, 0 > A > 45.
In the application's scheme, owing to being provided with assembly, mating surface between first sub-assembly and the second sub-assembly is obliquely installed relative to the direction of motion of micromotion platform telecontrol equipment, when micromotion platform works, telecontrol equipment provides certain displacement to drive the second sub-assembly, second sub-assembly is along sliding with the mating surface of the first sub-assembly, now, because restraint device limits the movement of the first assembly in the telecontrol equipment direction of motion, so, first sub-assembly will produce certain displacement perpendicular in the telecontrol equipment direction of motion, this displacement is relevant to the displacement of telecontrol equipment, also relevant to the angle of mating surface between the first sub-assembly second sub-assembly and the telecontrol equipment direction of motion.Namely, if the angle of mating surface and the telecontrol equipment direction of motion is A degree between the first sub-assembly second sub-assembly, when the displacement that telecontrol equipment provides is X, first sub-assembly is being Y=Xtan(A perpendicular to the displacement that the telecontrol equipment direction of motion produces), so, when included angle A is less than 45 degree, the displacement that one is less than X value will be obtained, when further reducing included angle A, displacement Y also reduces thereupon, so, makes in the scheme of the application, by changing the mode of precision with stroke, directly enhance the precision of the application's micro-displacement platform.
As the preferred version of the application, described first sub-assembly and the second sub-assembly are the magnetic part attracted each other.One or two in first sub-assembly and the second sub-assembly are set to magnetic part, first sub-assembly and the second sub-assembly can attract each other, make the second sub-assembly when by driving, can keep fitting tightly with the first sub-assembly, ensure the precision of the application's micro-displacement platform.
As the preferred version of the application, described micro-displacement platform is Piezoelectric micro-displacement platform.The ceramic material that mechanical energy and electric energy can be changed mutually by piezoelectric ceramics, its deformation quantity produced under electric field action is very little, be no more than at most the micrometric displacement of 1/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, further increase accuracy and the reliability of the application's micro-displacement platform.
The novel high-precision micro-displacement platform of the application, due to the included angle A that the direction of motion of the first sub-assembly and the second sub-assembly mating surface and telecontrol equipment exists, the motion of micro-displacement platform being prolonged horizontal direction (or vertical direction) is converted to vertical direction (or horizontal direction), simultaneously due to the effect of this included angle A, the displacement of telecontrol equipment is by the displacement being converted to the first sub-assembly of equal proportion, included angle A is less, and the displacement ratio that the displacement of telecontrol equipment is converted to the first sub-assembly is less; In the moving process of the first sub-assembly, due to magneticaction, first sub-assembly and the first sub-assembly are in contact condition always, the ratio that the displacement of further guarantee telecontrol equipment is converted to the first sub-assembly displacement is fixed, and further improves accuracy and the reliability of the application's micro-displacement platform.
Disclosed herein as well is a kind of using method of novel high-precision micro-displacement platform, step is as follows:
Step one: limit the motion of described first sub-assembly in the telecontrol equipment direction of motion by restraint device;
Step 2: according to the demand displacement of the first sub-assembly, calculate the displacement of the second sub-assembly.Drive the second sub-assembly motion by telecontrol equipment, by the interaction of the first sub-assembly and the second sub-assembly, the first sub-assembly is moving perpendicular in the second sub-assembly direction of motion, and transportation load is the demand displacement of the first sub-assembly.
compared with prior art, beneficial effect of the present invention:
Owing to being provided with assembly, the mating surface between the first sub-assembly and the second sub-assembly is obliquely installed relative to the direction of motion of micromotion platform telecontrol equipment, directly enhances the displacement accuracy of the application's micro-displacement platform.
Accompanying drawing illustrates:
Fig. 1 is structural representation of the present invention,
Mark in figure:
1-telecontrol equipment, 2-assembly, 3-first sub-assembly, 4-second sub-assembly, 5-restraint device.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
Embodiment 1,
Novel high-precision micro-displacement platform as shown in the figure, include telecontrol equipment 1, assembly 2 and restraint device 5, the second sub-assembly 4 that described assembly 2 includes the first sub-assembly 3 and is slidably arranged on described first sub-assembly 3, fit tightly between described first sub-assembly 3 and the second sub-assembly 4, described second sub-assembly 4 and described telecontrol equipment 1 compact siro spinning technology, the mating surface of described first sub-assembly 3 and the second sub-assembly 4 is obliquely installed relative to the direction of motion of described telecontrol equipment 1, described restraint device 5 limits described first sub-assembly 3 along the movement in telecontrol equipment 1 direction of motion, between described first sub-assembly 3 second sub-assembly 4, the included angle A of mating surface and telecontrol equipment 1 direction of motion is 5 degree.
In the present embodiment, owing to being provided with assembly 2, mating surface between first sub-assembly 3 and the second sub-assembly 4 is obliquely installed relative to the direction of motion of telecontrol equipment 1, when micromotion platform works, telecontrol equipment 1 provides certain displacement to drive the second sub-assembly 4, first sub-assembly 3 slides along the mating surface with the second sub-assembly 4, now, because restraint device 5 limits the first assembly 3 along the movement in telecontrol equipment 1 direction of motion, so, first sub-assembly 3 will produce certain displacement perpendicular in telecontrol equipment 1 direction of motion, this displacement is relevant to the displacement of telecontrol equipment 1, also relevant to the angle of mating surface between the first sub-assembly 3 second sub-assembly 4 and telecontrol equipment 1 direction of motion.Namely, if the angle of mating surface and telecontrol equipment 1 direction of motion is 5 degree between the first sub-assembly 3 second sub-assembly 4, when the displacement that telecontrol equipment 1 provides is X, first sub-assembly 4 is being Y=Xtan(5 perpendicular to the displacement that telecontrol equipment 1 direction of motion produces), so, obtain a less displacement Y, make in the scheme of the present embodiment, by changing the mode of precision with stroke, directly enhance the precision of the application's micro-displacement platform.
Embodiment 2,
As shown in the figure, as the structure of the novel high-precision micro-displacement platform of embodiment, described first sub-assembly 3 and the magnetic part of the second sub-assembly 4 for attracting each other, described telecontrol equipment is Piezoelectric micro-displacement platform.
In the present embodiment, one or two in first sub-assembly 3 and the second sub-assembly 4 are set to magnetic part, first sub-assembly 3 and the second sub-assembly 4 can attract each other, make the second sub-assembly 4 when by driving, can keep fitting tightly with the first sub-assembly 3, ensure the precision of the application's micro-displacement platform; The ceramic material that mechanical energy and electric energy can be changed mutually by piezoelectric ceramics, its deformation quantity produced under electric field action is very little, be no more than at most the micrometric displacement of 1/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, further improve accuracy and the reliability of the application's micro-displacement platform.
Embodiment 3
For a using method for novel high-precision micro-displacement platform, step is as follows:
Step one: limit described first sub-assembly 3 along moving in telecontrol equipment 1 direction of motion by restraint device 5.
Step 2: according to the demand displacement of the first sub-assembly 3, calculates the displacement of the second sub-assembly 4.Drive the second sub-assembly 4 to move by telecontrol equipment 1, by the interaction of the first sub-assembly 3 and the second sub-assembly 4, the first sub-assembly 3 is run in the direction of motion perpendicular to the second sub-assembly 4, and displacement is the demand displacement of the first sub-assembly.
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this description with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned detailed description of the invention, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (5)
1. a novel high-precision micro-displacement platform, it is characterized in that, include telecontrol equipment, assembly and restraint device, described assembly includes the first sub-assembly and is slidably arranged in the second sub-assembly on described first sub-assembly, fit tightly between described first sub-assembly and the second sub-assembly, described second sub-assembly and described telecontrol equipment compact siro spinning technology, the mating surface of described first sub-assembly and the second sub-assembly is obliquely installed relative to the direction of motion of described telecontrol equipment, the movement of described restraint device described first sub-assembly of restriction in the telecontrol equipment direction of motion.
2. novel high-precision micro-displacement platform as claimed in claim 1, it is characterized in that, between described first sub-assembly second sub-assembly, the angle of mating surface and the telecontrol equipment direction of motion is A degree, 0 > A > 45.
3. novel high-precision micro-displacement platform as claimed in claim 1 or 2, it is characterized in that, described first sub-assembly and/or the second sub-assembly are the magnetic part attracted each other.
4. novel high-precision micro-displacement platform as claimed in claim 1 or 2, it is characterized in that, described micro-displacement platform is Piezoelectric micro-displacement platform.
5. a using method for novel high-precision micro-displacement platform as claimed in claim 1 or 2, is characterized in that, comprise the steps:
Step one: the motion of the second sub-assembly in the first sub-assembly direction of motion limiting described micro-displacement platform, limits the motion of the first sub-assembly in the second sub-assembly direction of motion of described micro-displacement platform;
Step 2: according to the demand displacement of the first sub-assembly, calculate the displacement of the second sub-assembly, the second sub-assembly motion is driven by telecontrol equipment, by the interaction of the first sub-assembly and the second sub-assembly, first sub-assembly will move with the second orthogonal direction of sub-assembly, and transportation load is the demand displacement of the first sub-assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510340162.4A CN104858844A (en) | 2015-06-18 | 2015-06-18 | Novel high accuracy micrometric displacement platform and use method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510340162.4A CN104858844A (en) | 2015-06-18 | 2015-06-18 | Novel high accuracy micrometric displacement platform and use method thereof |
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| CN104858844A true CN104858844A (en) | 2015-08-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974428A (en) * | 2016-07-29 | 2016-09-28 | 北方民族大学 | Laser ranging system |
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| US5994820A (en) * | 1994-11-15 | 1999-11-30 | Kleindiek; Stephan | Electromechanical positioning unit |
| CN201389557Y (en) * | 2008-11-20 | 2010-01-27 | 无锡五冶金属压延有限公司 | Stepless adjustment device for rolling line of rolling mill |
| CN102490027A (en) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | Lifting platform |
| CN203680750U (en) * | 2014-01-02 | 2014-07-02 | 河源市昌红精机科技有限公司 | High-precision positioning structure of oil cylinder pulling core |
| CN104467349A (en) * | 2013-09-18 | 2015-03-25 | 大银微系统股份有限公司 | Linear motor precision positioning platform structure with magnetic pre-pressing function |
| CN204706354U (en) * | 2015-06-18 | 2015-10-14 | 北方民族大学 | A kind of novel stroke changes the micro-displacement platform of precision |
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2015
- 2015-06-18 CN CN201510340162.4A patent/CN104858844A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2180406Y (en) * | 1993-06-25 | 1994-10-26 | 华中理工大学 | Precision mini-feeding working table |
| US5994820A (en) * | 1994-11-15 | 1999-11-30 | Kleindiek; Stephan | Electromechanical positioning unit |
| CN201389557Y (en) * | 2008-11-20 | 2010-01-27 | 无锡五冶金属压延有限公司 | Stepless adjustment device for rolling line of rolling mill |
| CN102490027A (en) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | Lifting platform |
| CN104467349A (en) * | 2013-09-18 | 2015-03-25 | 大银微系统股份有限公司 | Linear motor precision positioning platform structure with magnetic pre-pressing function |
| CN203680750U (en) * | 2014-01-02 | 2014-07-02 | 河源市昌红精机科技有限公司 | High-precision positioning structure of oil cylinder pulling core |
| CN204706354U (en) * | 2015-06-18 | 2015-10-14 | 北方民族大学 | A kind of novel stroke changes the micro-displacement platform of precision |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105974428A (en) * | 2016-07-29 | 2016-09-28 | 北方民族大学 | Laser ranging system |
| CN105974428B (en) * | 2016-07-29 | 2019-04-30 | 北方民族大学 | A kind of laser ranging system |
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