CN106624951A - Z-direction micro displacement structure based on wedge feeding horizontal compensation - Google Patents

Z-direction micro displacement structure based on wedge feeding horizontal compensation Download PDF

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CN106624951A
CN106624951A CN201710031879.XA CN201710031879A CN106624951A CN 106624951 A CN106624951 A CN 106624951A CN 201710031879 A CN201710031879 A CN 201710031879A CN 106624951 A CN106624951 A CN 106624951A
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wedge
ball screw
wedge block
slide rail
linear slide
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CN106624951B (en
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闫艳燕
孙珍宝
崔晓斌
郭强
李瑜
张�成
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Henan University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

本发明公开了一种基于楔形进给水平补偿的Z向微位移结构,主要包括两套伺服电机、直线滑轨、滑动台座、滚珠丝杠、支撑座、光杆导轨和楔形块,其中一套直线滑轨固定在平台上且滑动台座与一个楔形块连接,另外一套直线滑轨固定在第一个楔形块上且直线台座与第二个楔形块连接,而光杆导轨与直线滑轨的外底部相连,此外,楔形块可以让水平方向的位移和竖直方向的位移成一定夹角的关系。本发明可以满足了较大负载下的精密、超精密加工中的Z向微进给需要,利用楔形的直角关系可以通过测量水平位移方法构建闭环控制系统,并对水平方向的移动量进行补偿,实现了精度达到微米级别的进给,解决了目前微位移机构负载能力低,Z轴方向进给量少的难题。

The invention discloses a Z-direction micro-displacement structure based on wedge-shaped feed level compensation, which mainly includes two sets of servo motors, linear slide rails, sliding pedestals, ball screws, support seats, polished rod guide rails and wedge-shaped blocks, one of which is a linear The slide rail is fixed on the platform and the slide base is connected to a wedge block, another set of linear slide rails is fixed on the first wedge block and the linear base is connected to the second wedge block, and the polished rod guide rail is connected to the outer bottom of the linear slide rail In addition, the wedge block can make the displacement in the horizontal direction and the displacement in the vertical direction form a certain angle relationship. The present invention can meet the requirement of Z-direction micro-feed in precision and ultra-precision machining under relatively large loads. By using the wedge-shaped right-angle relationship, a closed-loop control system can be constructed by measuring the horizontal displacement, and the movement amount in the horizontal direction can be compensated. It realizes the feeding with the precision reaching the micron level, and solves the problem of low load capacity of the current micro-displacement mechanism and the small amount of feed in the Z-axis direction.

Description

一种基于楔形进给水平补偿的Z向微位移结构A Z-direction Micro-displacement Structure Based on Wedge Feed Horizontal Compensation

技术领域technical field

本发明属于精密与超精密加工技术领域,尤其涉及一种基于楔形进给水平补偿的Z向微位移结构。The invention belongs to the technical field of precision and ultra-precision machining, and in particular relates to a Z-direction micro-displacement structure based on wedge feed level compensation.

背景技术Background technique

近年来随着微电子技术、宇航、生物工程等学科的发展,作为精密机械与精密仪器的关键技术之一的微位移技术也迅速发展起来了。在精密仪器中,无论是大航程的精确定位还是小范围的光学对准,都离不开微位移技术。微位移技术己经成为现代精密仪器工业的共同基础,是衡量一个国家科技水平的重要标志,代表了一个国家加工技术水平的高低,位移技术的水平也反映了一个国家的综合经济和技术水平,是国家制造技术水平的重要标志,是先进制造技术的重要支柱。In recent years, with the development of microelectronics technology, aerospace, bioengineering and other disciplines, micro-displacement technology, one of the key technologies of precision machinery and precision instruments, has also developed rapidly. In precision instruments, micro-displacement technology is inseparable from precise positioning over a long range or optical alignment within a small range. Micro-displacement technology has become the common basis of modern precision instrument industry. It is an important symbol to measure a country's scientific and technological level. It represents the level of a country's processing technology. The level of displacement technology also reflects a country's comprehensive economic and technological level. It is an important symbol of the national manufacturing technology level and an important pillar of advanced manufacturing technology.

尽管微量进给机构技术已经取得很大发展,但要真正开发出高精度、大行程、性能优良的微量进给机构却并非易事,还存在许多亟待解决的问题。在微量进给机构中,大行程与高精度这一对矛盾仍然存在,目前开发的微量进给机构往往只能满足其一,而不能满足其二。如压电陶瓷微量进给机构虽然定位精度很高(小于0.01μm),但其工作行程太小,而机械传动微量进给机构可以达到很大的工作行程,但其定位精度不高。现有的微位移机构存在负载低、Z向(高度方向)进给量少,复合度小,精度不高的弊端。到目前为止尚未解决成熟的方法及产品问世。Although the micro-feeding mechanism technology has made great progress, it is not easy to develop a micro-feeding mechanism with high precision, large stroke and excellent performance, and there are still many problems to be solved urgently. In the micro-feeding mechanism, the contradiction between large stroke and high precision still exists, and the micro-feeding mechanism developed at present can only satisfy one of them, but not the other. For example, although the piezoelectric ceramic micro-feed mechanism has high positioning accuracy (less than 0.01 μm), its working stroke is too small, while the mechanical transmission micro-feed mechanism can achieve a large working stroke, but its positioning accuracy is not high. The existing micro-displacement mechanism has the disadvantages of low load, small Z-direction (height direction) feed, small compound degree, and low precision. So far, mature methods and products have not yet been solved.

发明内容Contents of the invention

本发明为了解决现有技术中的不足之处,提供一种基于楔形进给水平补偿的Z向微位移结构,该结构可以满足了较大负载下的精密、超精密加工中的Z向微进给需要,且操作简便,结构简单。In order to solve the deficiencies in the prior art, the present invention provides a Z-direction micro-displacement structure based on wedge-shaped feed level compensation, which can meet the Z-direction micro-feeding in precision and ultra-precision machining under relatively large loads. According to the needs, the operation is simple and the structure is simple.

为解决上述技术问题,本发明采用如下技术方案:一种基于楔形进给水平补偿的Z向微位移结构,包括第一安装框架、第二安装框架、第一直线滑轨、第二直线滑轨、第一伺服电机、第二伺服电机、第一楔形块、第二楔形块、第一滚珠丝杠、第二滚珠丝杠、第一滑动台座、第二滑动台座、第一光杆导轨、第二光杆导轨、第一支撑座和第二支撑座;In order to solve the above-mentioned technical problems, the present invention adopts the following technical solution: a Z-direction micro-displacement structure based on wedge feed level compensation, including a first installation frame, a second installation frame, a first linear slide rail, a second linear slide Rail, first servo motor, second servo motor, first wedge block, second wedge block, first ball screw, second ball screw, first sliding base, second sliding base, first polished rod guide rail, second Two polished rod guide rails, a first support seat and a second support seat;

第一直线滑轨沿左右方向水平设置在第一安装框架上,第一安装框架左侧上部和右侧上部分别设有一个第一支架,第一光杆导轨、第一滚珠丝杠和第一直线滑轨平行设置,第一光杆导轨两端固定在两个第一支架上,第一支撑座设置有两个,两个第一支撑座固定设置在第一直线滑轨的顶部左侧和右侧,第一滚珠丝杠两端通过轴承转动设在两个第一支撑座上,第一滚珠丝杠的右端通过第一联轴器与第一伺服电机的主轴传动连接,第一滑动台座穿设并螺纹连接在第一滚珠丝杠上,第一楔形块设置在第一滑动台座顶部,第一光杆导轨上滑动设置有第一滑块,第一滑块顶部与第一楔形块底部固定连接;第一楔形块的厚度由左向右逐渐增大,第一楔形块的下表面水平设置,第一楔形块的上表面左低右高倾斜设置;The first linear slide rail is arranged horizontally on the first installation frame along the left and right directions, and the first installation frame is provided with a first bracket on the left upper part and the right upper part respectively, and the first polished rod guide rail, the first ball screw and the first The linear slide rails are arranged in parallel, the two ends of the first polished rod guide rail are fixed on the two first brackets, there are two first support seats, and the two first support seats are fixed on the top left side of the first linear slide rail and the right side, the two ends of the first ball screw are rotated by bearings on the two first support seats, the right end of the first ball screw is connected with the main shaft of the first servo motor through the first coupling, and the first sliding The pedestal is threaded and connected to the first ball screw. The first wedge block is set on the top of the first sliding pedestal. Fixed connection; the thickness of the first wedge gradually increases from left to right, the lower surface of the first wedge is set horizontally, and the upper surface of the first wedge is set with a lower left and a higher right;

第二安装框架底部固定设置在第一楔形块顶部,第二直线滑轨沿左右方向设置在第二安装框架上,第二安装框架左侧上部和右侧上部分别设有一个第二支架,第二光杆导轨、第二滚珠丝杠和第二直线滑轨平行设置,第二光杆导轨两端固定在两个第二支架上,第二支撑座设置有两个,两个第二支撑座固定设置在第二直线滑轨的顶部左侧和右侧,第二滚珠丝杠两端通过轴承转动设在两个第二支撑座上,第二滚珠丝杠的左端通过第二联轴器与第二伺服电机的主轴传动连接,第二滑动台座穿设并螺纹连接在第二滚珠丝杠上,第二楔形块设置在第二滑动台座顶部,第二光杆导轨上滑动设置有第二滑块,第二滑块顶部与第二楔形块底部固定连接;第而楔形块的厚度由左向右逐渐减小,第二楔形块的厚度上表面水平设置,第一楔形块的上表面平行于第二楔形块的下表面;The bottom of the second installation frame is fixedly arranged on the top of the first wedge block, the second linear slide rail is arranged on the second installation frame along the left and right directions, and a second bracket is respectively provided on the upper left side and the upper right side of the second installation frame, The second polished rod guide rail, the second ball screw and the second linear slide rail are arranged in parallel, the two ends of the second polished rod guide rail are fixed on two second brackets, two second support seats are provided, and the two second support seats are fixedly arranged On the left and right sides of the top of the second linear slide rail, the two ends of the second ball screw are rotated on the two second support seats through bearings, and the left end of the second ball screw is connected with the second shaft through the second coupling. The main shaft transmission connection of the servo motor, the second sliding pedestal is threaded and connected to the second ball screw, the second wedge block is arranged on the top of the second sliding pedestal, and the second sliding block is slidably arranged on the second polished rod guide rail. The top of the second slider is fixedly connected to the bottom of the second wedge; the thickness of the second wedge gradually decreases from left to right, the thickness of the upper surface of the second wedge is horizontal, and the upper surface of the first wedge is parallel to the second wedge the lower surface of the block;

第一安装框架底部设置在机床工作台上,当启动第一伺服电机和第二伺服电机时,第一伺服电机驱动第一滚珠丝杠转动,第二伺服电机驱动第二滚珠丝杠转动,在第一滑块和第二滑块的支撑限位下,第一滚珠丝杠驱动第一滑动台座沿第一直线滑轨移动的方向与第二滚珠丝杠驱动第二滑动台座沿第二直线滑轨移动的方向相反;由于第一楔形块和第二楔形块的楔形直角关系,将第一直线滑轨的位移移动量分为水平方向位移的分量和竖直方向位移的分量,通过驱动水平方向位移的分量,通过测量水平位移的方法将水平方向位移的分量反馈到控制系统中构建闭环控制系统并对第一直线滑轨和第二直线滑轨水平方向的移动量进行补偿,提高了工作台在Z轴方向的移动量,实现了精度达到微米级别的进给;当工件放在第二楔形块上进行加工时,工件只显示Z轴方向的移动量。The bottom of the first installation frame is set on the machine tool table. When the first servo motor and the second servo motor are started, the first servo motor drives the first ball screw to rotate, and the second servo motor drives the second ball screw to rotate. Under the support limit of the first slider and the second slider, the first ball screw drives the first sliding pedestal to move along the first linear slide rail and the second ball screw drives the second sliding pedestal to move along the second straight line The direction of slide rail movement is opposite; due to the wedge-shaped right-angle relationship between the first wedge block and the second wedge block, the displacement movement of the first linear slide rail is divided into a component of horizontal displacement and a component of vertical displacement. The component of the horizontal displacement is fed back to the control system by measuring the horizontal displacement to build a closed-loop control system and compensate the horizontal movement of the first linear slide rail and the second linear slide rail to improve The movement amount of the worktable in the Z-axis direction is ensured, and the feeding accuracy reaches the micron level; when the workpiece is placed on the second wedge block for processing, the workpiece only shows the movement amount in the Z-axis direction.

第一滑块与第一楔形块、第一滑动台座与第一楔形块、第二安装框架与第一楔形块、第二滑块与第二楔形块以及第二滑动台座与第二楔形块之间均采用螺钉连接。Between the first slide block and the first wedge block, the first slide base and the first wedge block, the second installation frame and the first wedge block, the second slide block and the second wedge block, and the second slide base and the second wedge block All are connected by screws.

采用上述技术方案,本发明具有以下有益效果:本发明在实验或工作实验时,先将本发明放置在长401毫米、宽356毫米的精密车床的工作台上,通过调节第一伺服电机和第二伺服电机的转动,利用第一楔形块的直角关系可以将第二直线滑轨的移动量分为水平方向位移的分量和竖直方向位移的分量,进而驱动水平方向位移的分量,通过测量水平位移的方法将水平方向位移的分量反馈到控制系统中构建闭环控制系统并对其中第一直线滑轨和第二直线滑轨水平方向的移动量进行补偿,提高了工作台在Z轴方向(垂直方向)的移动量,实现了精度达到微米级别的进给。Adopt above-mentioned technical scheme, the present invention has following beneficial effect: the present invention is placed on the workbench of the precision lathe of long 401 millimeters, wide 356 millimeters earlier when the present invention is experimenting or work experiment, by adjusting the first servomotor and the second Second, the rotation of the servo motor, using the right-angle relationship of the first wedge block, can divide the movement of the second linear slide rail into a component of horizontal displacement and a component of vertical displacement, and then drive the component of horizontal displacement. By measuring the horizontal The displacement method feeds back the component of the displacement in the horizontal direction to the control system to build a closed-loop control system and compensates the horizontal movement of the first linear slide rail and the second linear slide rail, which improves the workbench in the Z-axis direction ( The amount of movement in the vertical direction) realizes feeding with an accuracy of micron level.

与现有技术相比,本发明基于楔形进给水平补偿的Z向微位移结构,本发明中楔形块能够承载较大的工件,直线滑轨具有较大的行程,伺服电机具有较高的精度。本发明实现工作台在Z轴方向的进给量,从而改进了以往工件在Z轴方向上进给量少,复合度小,精度不高的弊端,也解决了微位移机构在现有技术中行程短,精度低,机构Z轴方向进给量少的难题。对微位移技术的发展也有非常重大的意义。Compared with the prior art, the present invention is based on the Z-direction micro-displacement structure with wedge-shaped feed level compensation. In the present invention, the wedge-shaped block can carry larger workpieces, the linear slide rail has a larger stroke, and the servo motor has higher precision. . The invention realizes the feed amount of the worktable in the Z-axis direction, thereby improving the disadvantages of the previous work piece in the Z-axis direction, such as small feed amount, small compound degree, and low precision, and also solves the problem of the micro-displacement mechanism in the prior art. Short, low precision, and less feed in the Z-axis direction of the mechanism. It is also of great significance to the development of micro-displacement technology.

本发明对于微位移机构精度低,行程短,机构Z轴进给量少的情况,通过伺服电机驱动滚珠丝杠,构建智能微位移控制系统,以满足精密、超精密加工中的微进给需要,可以进一步完善工件的加工精度,提高工件加工时的工作效率,改善了工作台的负载能力。In the case of the micro-displacement mechanism with low precision, short stroke and small Z-axis feed of the mechanism, the present invention constructs an intelligent micro-displacement control system through the servo motor to drive the ball screw to meet the micro-feed requirements in precision and ultra-precision machining , can further improve the processing accuracy of the workpiece, improve the work efficiency of the workpiece processing, and improve the load capacity of the workbench.

附图说明Description of drawings

图1是本发明的结构示意图;Fig. 1 is a structural representation of the present invention;

图2是图1的俯视图。FIG. 2 is a top view of FIG. 1 .

具体实施方式detailed description

如图1和图2所示,本发明的一种基于楔形进给水平补偿的Z向微位移结构,包括第一安装框架1、第二安装框架2、第一直线滑轨3、第二直线滑轨4、第一伺服电机5、第二伺服电机6、第一楔形块7、第二楔形块8、第一滚珠丝杠9、第二滚珠丝杠10、第一滑动台座11、第二滑动台座12、第一光杆导轨13、第二光杆导轨14、第一支撑座15和第二支撑座16;As shown in Figure 1 and Figure 2, a Z-direction micro-displacement structure based on wedge feed horizontal compensation of the present invention includes a first installation frame 1, a second installation frame 2, a first linear slide rail 3, a second Linear slide rail 4, first servo motor 5, second servo motor 6, first wedge block 7, second wedge block 8, first ball screw 9, second ball screw 10, first slide base 11, second Two sliding pedestals 12, the first polished rod guide rail 13, the second polished rod guide rail 14, the first support base 15 and the second support base 16;

第一直线滑轨3沿左右方向水平设置在第一安装框架1上,第一安装框架1左侧上部和右侧上部分别设有一个第一支架17,第一光杆导轨13、第一滚珠丝杠9和第一直线滑轨3平行设置,第一光杆导轨13两端固定在两个第一支架17上,第一支撑座15设置有两个,两个第一支撑座15固定设置在第一直线滑轨3的顶部左侧和右侧,第一滚珠丝杠9两端通过轴承转动设在两个第一支撑座15上,第一滚珠丝杠9的右端通过第一联轴器18与第一伺服电机5的主轴传动连接,第一滑动台座11穿设并螺纹连接在第一滚珠丝杠9上,第一楔形块7设置在第一滑动台座11顶部,第一光杆导轨13上滑动设置有第一滑块19,第一滑块19顶部与第一楔形块7底部固定连接;第一楔形块7的厚度由左向右逐渐增大,第一楔形块7的下表面水平设置,第一楔形块7的上表面左低右高倾斜设置;The first linear slide rail 3 is horizontally arranged on the first installation frame 1 along the left-right direction, and the first installation frame 1 is provided with a first bracket 17 on the left upper part and the right upper part respectively, the first polished rod guide rail 13, the first ball bearing The lead screw 9 and the first linear slide rail 3 are arranged in parallel, the two ends of the first polished rod guide rail 13 are fixed on two first brackets 17, two first support seats 15 are provided, and the two first support seats 15 are fixedly arranged On the left and right sides of the top of the first linear slide rail 3, the two ends of the first ball screw 9 are rotated on the two first support seats 15 through bearings, and the right end of the first ball screw 9 is passed through the first coupling. The shaft device 18 is connected to the main shaft of the first servo motor 5 through transmission, the first sliding pedestal 11 is threaded and connected to the first ball screw 9, the first wedge block 7 is arranged on the top of the first sliding pedestal 11, and the first polished rod The first slide block 19 is slidingly arranged on the guide rail 13, and the top of the first slide block 19 is fixedly connected with the bottom of the first wedge block 7; the thickness of the first wedge block 7 gradually increases from left to right, and the bottom of the first wedge block 7 The surface is set horizontally, and the upper surface of the first wedge-shaped block 7 is set with a low left and a high right;

第二安装框架2底部固定设置在第一楔形块7顶部,第二直线滑轨4沿左右方向设置在第二安装框架2上,第二安装框架2左侧上部和右侧上部分别设有一个第二支架20,第二光杆导轨14、第二滚珠丝杠10和第二直线滑轨4平行设置,第二光杆导轨14两端固定在两个第二支架20上,第二支撑座16设置有两个,两个第二支撑座16固定设置在第二直线滑轨4的顶部左侧和右侧,第二滚珠丝杠10两端通过轴承转动设在两个第二支撑座16上,第二滚珠丝杠10的左端通过第二联轴器21与第二伺服电机6的主轴传动连接,第二滑动台座12穿设并螺纹连接在第二滚珠丝杠10上,第二楔形块8设置在第二滑动台座12顶部,第二光杆导轨14上滑动设置有第二滑块,第二滑块顶部与第二楔形块8底部固定连接;第而楔形块的厚度由左向右逐渐减小,第二楔形块8的厚度上表面水平设置,第一楔形块7的上表面平行于第二楔形块8的下表面;The bottom of the second installation frame 2 is fixedly arranged on the top of the first wedge block 7, the second linear slide rail 4 is arranged on the second installation frame 2 along the left and right directions, and the upper left side and the upper right side of the second installation frame 2 are respectively provided with a The second bracket 20, the second polished rod guide rail 14, the second ball screw 10 and the second linear slide rail 4 are arranged in parallel, the two ends of the second polished rod guide rail 14 are fixed on the two second brackets 20, and the second support seat 16 is set There are two, two second support seats 16 are fixedly arranged on the left and right sides of the top of the second linear slide rail 4, and the two ends of the second ball screw 10 are rotated on the two second support seats 16 through bearings, The left end of the second ball screw 10 is connected with the main shaft transmission of the second servo motor 6 through the second coupling 21, the second slide base 12 is penetrated and screwed on the second ball screw 10, and the second wedge block 8 Set on the top of the second sliding pedestal 12, the second polished rod guide rail 14 is slidably provided with a second slide block, the top of the second slide block is fixedly connected with the bottom of the second wedge block 8; the thickness of the second wedge block gradually decreases from left to right. Small, the thickness upper surface of the second wedge 8 is set horizontally, and the upper surface of the first wedge 7 is parallel to the lower surface of the second wedge 8;

第一安装框架1底部设置在机床工作台上,当启动第一伺服电机5和第二伺服电机6时,第一伺服电机5驱动第一滚珠丝杠9转动,第二伺服电机6驱动第二滚珠丝杠10转动,在第一滑块19和第二滑块的支撑限位下,第一滚珠丝杠9驱动第一滑动台座11沿第一直线滑轨3移动的方向与第二滚珠丝杠10驱动第二滑动台座12沿第二直线滑轨4移动的方向相反;由于第一楔形块7和第二楔形块8的楔形直角关系,将第一直线滑轨3的位移移动量分为水平方向位移的分量和竖直方向位移的分量,通过驱动水平方向位移的分量,通过测量水平位移的方法将水平方向位移的分量反馈到控制系统中构建闭环控制系统并对第一直线滑轨3和第二直线滑轨4水平方向的移动量进行补偿,提高了工作台在Z轴方向的移动量,实现了精度达到微米级别的进给;当工件放在第二楔形块8上进行加工时,工件只显示Z轴方向的移动量。The bottom of the first installation frame 1 is arranged on the machine tool table. When the first servo motor 5 and the second servo motor 6 are started, the first servo motor 5 drives the first ball screw 9 to rotate, and the second servo motor 6 drives the second The ball screw 10 rotates, under the support limit of the first slider 19 and the second slider, the first ball screw 9 drives the first sliding base 11 to move along the direction of the first linear slide rail 3 and the second ball Lead screw 10 drives the second slide base 12 to move along the opposite direction of the second linear slide rail 4; due to the wedge-shaped right-angle relationship between the first wedge block 7 and the second wedge block 8, the displacement displacement of the first linear slide rail 3 It is divided into the component of horizontal displacement and the component of vertical displacement. By driving the component of horizontal displacement and measuring the horizontal displacement, the component of horizontal displacement is fed back to the control system to construct a closed-loop control system and control the first straight line. The horizontal movement of the slide rail 3 and the second linear slide 4 is compensated, which improves the movement of the worktable in the Z-axis direction and realizes feeding with an accuracy of micron level; when the workpiece is placed on the second wedge block 8 During processing, the workpiece only displays the movement amount in the Z-axis direction.

第一滑块19与第一楔形块7、第一滑动台座11与第一楔形块7、第二安装框架2与第一楔形块7、第二滑块与第二楔形块8以及第二滑动台座12与第二楔形块8之间均采用螺钉连接,这样便于各构件的安装和拆卸。The first slide block 19 and the first wedge block 7, the first slide base 11 and the first wedge block 7, the second installation frame 2 and the first wedge block 7, the second slide block and the second wedge block 8, and the second sliding block Both the pedestal 12 and the second wedge block 8 are connected by screws, which facilitates the installation and disassembly of each component.

本实施例并非对本发明的形状、材料、结构等作任何形式上的限制,凡是依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均属于本发明技术方案的保护范围。This embodiment does not impose any formal restrictions on the shape, material, structure, etc. of the present invention. All simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention belong to the protection of the technical solution of the present invention. scope.

Claims (2)

1.一种基于楔形进给水平补偿的Z向微位移结构,其特征在于:包括第一安装框架、第二安装框架、第一直线滑轨、第二直线滑轨、第一伺服电机、第二伺服电机、第一楔形块、第二楔形块、第一滚珠丝杠、第二滚珠丝杠、第一滑动台座、第二滑动台座、第一光杆导轨、第二光杆导轨、第一支撑座和第二支撑座;1. A Z direction micro-displacement structure based on wedge feed level compensation, characterized in that: comprising a first mounting frame, a second mounting frame, a first linear slide rail, a second linear slide rail, a first servo motor, Second servo motor, first wedge block, second wedge block, first ball screw, second ball screw, first slide base, second slide base, first polished rod guide, second polished rod guide, first support seat and the second support seat; 第一直线滑轨沿左右方向水平设置在第一安装框架上,第一安装框架左侧上部和右侧上部分别设有一个第一支架,第一光杆导轨、第一滚珠丝杠和第一直线滑轨平行设置,第一光杆导轨两端固定在两个第一支架上,第一支撑座设置有两个,两个第一支撑座固定设置在第一直线滑轨的顶部左侧和右侧,第一滚珠丝杠两端通过轴承转动设在两个第一支撑座上,第一滚珠丝杠的右端通过第一联轴器与第一伺服电机的主轴传动连接,第一滑动台座穿设并螺纹连接在第一滚珠丝杠上,第一楔形块设置在第一滑动台座顶部,第一光杆导轨上滑动设置有第一滑块,第一滑块顶部与第一楔形块底部固定连接;第一楔形块的厚度由左向右逐渐增大,第一楔形块的下表面水平设置,第一楔形块的上表面左低右高倾斜设置;The first linear slide rail is arranged horizontally on the first installation frame along the left and right directions, and the first installation frame is provided with a first bracket on the left upper part and the right upper part respectively, and the first polished rod guide rail, the first ball screw and the first The linear slide rails are arranged in parallel, the two ends of the first polished rod guide rail are fixed on the two first brackets, there are two first support seats, and the two first support seats are fixed on the top left side of the first linear slide rail and the right side, the two ends of the first ball screw are rotated by bearings on the two first support seats, the right end of the first ball screw is connected with the main shaft of the first servo motor through the first coupling, and the first sliding The pedestal is threaded and connected to the first ball screw. The first wedge block is set on the top of the first sliding pedestal. Fixed connection; the thickness of the first wedge gradually increases from left to right, the lower surface of the first wedge is set horizontally, and the upper surface of the first wedge is set with a lower left and a higher right; 第二安装框架底部固定设置在第一楔形块顶部,第二直线滑轨沿左右方向设置在第二安装框架上,第二安装框架左侧上部和右侧上部分别设有一个第二支架,第二光杆导轨、第二滚珠丝杠和第二直线滑轨平行设置,第二光杆导轨两端固定在两个第二支架上,第二支撑座设置有两个,两个第二支撑座固定设置在第二直线滑轨的顶部左侧和右侧,第二滚珠丝杠两端通过轴承转动设在两个第二支撑座上,第二滚珠丝杠的左端通过第二联轴器与第二伺服电机的主轴传动连接,第二滑动台座穿设并螺纹连接在第二滚珠丝杠上,第二楔形块设置在第二滑动台座顶部,第二光杆导轨上滑动设置有第二滑块,第二滑块顶部与第二楔形块底部固定连接;第而楔形块的厚度由左向右逐渐减小,第二楔形块的厚度上表面水平设置,第一楔形块的上表面平行于第二楔形块的下表面;The bottom of the second installation frame is fixedly arranged on the top of the first wedge block, the second linear slide rail is arranged on the second installation frame along the left and right directions, and a second bracket is respectively provided on the upper left side and the upper right side of the second installation frame, The second polished rod guide rail, the second ball screw and the second linear slide rail are arranged in parallel, the two ends of the second polished rod guide rail are fixed on two second brackets, two second support seats are provided, and the two second support seats are fixedly arranged On the left and right sides of the top of the second linear slide rail, the two ends of the second ball screw are rotated on the two second support seats through bearings, and the left end of the second ball screw is connected with the second shaft through the second coupling. The main shaft transmission connection of the servo motor, the second sliding pedestal is threaded and connected to the second ball screw, the second wedge block is arranged on the top of the second sliding pedestal, and the second sliding block is slidably arranged on the second polished rod guide rail. The top of the second slider is fixedly connected to the bottom of the second wedge; the thickness of the second wedge gradually decreases from left to right, the thickness of the upper surface of the second wedge is horizontal, and the upper surface of the first wedge is parallel to the second wedge the lower surface of the block; 第一安装框架底部设置在机床工作台上,当启动第一伺服电机和第二伺服电机时,第一伺服电机驱动第一滚珠丝杠转动,第二伺服电机驱动第二滚珠丝杠转动,在第一滑块和第二滑块的支撑限位下,第一滚珠丝杠驱动第一滑动台座沿第一直线滑轨移动的方向与第二滚珠丝杠驱动第二滑动台座沿第二直线滑轨移动的方向相反;由于第一楔形块和第二楔形块的楔形直角关系,将第一直线滑轨的位移移动量分为水平方向位移的分量和竖直方向位移的分量,通过驱动水平方向位移的分量,通过测量水平位移的方法将水平方向位移的分量反馈到控制系统中构建闭环控制系统并对第一直线滑轨和第二直线滑轨水平方向的移动量进行补偿,提高了工作台在Z轴方向的移动量,实现了精度达到微米级别的进给;当工件放在第二楔形块上进行加工时,工件只显示Z轴方向的移动量。The bottom of the first installation frame is set on the machine tool table. When the first servo motor and the second servo motor are started, the first servo motor drives the first ball screw to rotate, and the second servo motor drives the second ball screw to rotate. Under the support limit of the first slider and the second slider, the first ball screw drives the first sliding pedestal to move along the first linear slide rail and the second ball screw drives the second sliding pedestal to move along the second straight line The direction of slide rail movement is opposite; due to the wedge-shaped right-angle relationship between the first wedge block and the second wedge block, the displacement movement of the first linear slide rail is divided into a component of horizontal displacement and a component of vertical displacement. The component of the horizontal displacement is fed back to the control system by measuring the horizontal displacement to build a closed-loop control system and compensate the horizontal movement of the first linear slide rail and the second linear slide rail to improve The movement amount of the worktable in the Z-axis direction is ensured, and the feeding accuracy reaches the micron level; when the workpiece is placed on the second wedge block for processing, the workpiece only shows the movement amount in the Z-axis direction. 2.根据权利要求1所述的一种基于楔形进给水平补偿的Z向微位移结构,其特征在于:第一滑块与第一楔形块、第一滑动台座与第一楔形块、第二安装框架与第一楔形块、第二滑块与第二楔形块以及第二滑动台座与第二楔形块之间均采用螺钉连接。2. A Z-direction micro-displacement structure based on wedge feed level compensation according to claim 1, characterized in that: the first slide block and the first wedge block, the first sliding pedestal and the first wedge block, the second The installation frame and the first wedge block, the second slide block and the second wedge block, and the second slide base and the second wedge block are all connected by screws.
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