CN106624951A - Z-direction micro displacement structure based on wedge feeding horizontal compensation - Google Patents
Z-direction micro displacement structure based on wedge feeding horizontal compensation Download PDFInfo
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- CN106624951A CN106624951A CN201710031879.XA CN201710031879A CN106624951A CN 106624951 A CN106624951 A CN 106624951A CN 201710031879 A CN201710031879 A CN 201710031879A CN 106624951 A CN106624951 A CN 106624951A
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- wedge
- ball
- straight line
- slide rail
- screw
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
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Abstract
The invention discloses a Z-direction micro displacement structure based on wedge feeding horizontal compensation. The structure mainly comprises two servo motors, linear sliding rails, a sliding table base, a ball screw, a supporting base, a polished rod guide rail and wedge blocks. One linear sliding rail is fixed to a platform, and the sliding table base is connected with one wedge block; the other linear sliding rail is fixed to the first wedge, a linear table base is connected with the second wedge block, and the polished guide rail is connected with the outer bottom of the linear sliding rail. Besides, by means of the wedge blocks, an included angle can be formed between displacement in the horizontal direction and displacement in the vertical direction. The structure can meet the Z-direction micro-feeding requirement during large-load precise and ultra-precise processing, a closed-loop control system can be built through a horizontal displacement measurement method by means of the wedge right-angle relation, the displacement amount in the horizontal direction is compensated for, feeding at the precision of the micron level is achieved, and the problems that an existing micro displacement mechanism is low in loading capacity and the feeding amount in the Z-axis direction is small are solved.
Description
Technical field
The invention belongs to precise and ultraprecise machining technical field, more particularly to a kind of level compensating is fed based on wedge shape
Z-direction micrometric displacement structure.
Background technology
Recently as the development of the subjects such as microelectric technique, aerospace, bioengineering, as precision optical machinery and precision instrument
The Micro-displacement Technique of one of key technology also develop rapidly.In precision instrument, either big voyage is accurate fixed
Position or the optical alignment of small range, all be unable to do without Micro-displacement Technique.The own Jing of Micro-displacement Technique becomes modern precision instrumentation industry
Common base, be the important symbol for weighing a national science and technology level, represent the height of a national process technology level,
The level of shift technique also reflects the mixed economy and technical merit of a country, be the important mark of national manufacturing technology level
Will, is the mainstay of advanced manufacturing technology.
Although microfeed structure technology has been achieved with developing on a large scale very much, high accuracy, big stroke, performance are really developed
, also there are many problem demanding prompt solutions in excellent microfeed structure but not a duck soup.In microfeed structure, big stroke
This conflict is yet suffered from high accuracy, and at present the microfeed structure of exploitation often can only be met first, and can not meet
It two.Although such as piezoelectric ceramics microfeed structure positioning precision is very high（Less than 0.01 μm）, but its impulse stroke is too little, and machine
Tool transmission microfeed structure can reach very big impulse stroke, but its positioning precision is not high.Existing micro-displacement mechanism is deposited
Loading low, Z-direction（Short transverse）The amount of feeding is few, and multiplicity is little, the drawbacks of precision is not high.Up to the present not yet solve ripe
Method and product come out.
The content of the invention
The present invention is in order to solve weak point of the prior art, there is provided a kind of Z-direction that level compensating is fed based on wedge shape
Micrometric displacement structure, the structure can meet the precision under relatively large load, the Z-direction Fine Feed needs in Ultra-precision Turning, and grasp
Make easy, simple structure.
To solve above-mentioned technical problem, the present invention is adopted the following technical scheme that：A kind of Z that level compensating is fed based on wedge shape
To micrometric displacement structure, including the first installation frame, the second installation frame, first straight line slide rail, second straight line slide rail, the first servo
Motor, the second servomotor, the first wedge, the second wedge, the first ball-screw, the second ball-screw, the first sliding stand
Seat, the second slip pedestal, the first smooth rod guide, the second smooth rod guide, the first support base and the second support base；
First straight line slide rail is horizontally set in left-right direction on the first installation frame, the first installation frame left upper portion and right side
Top is respectively equipped with a first support, and the first smooth rod guide, the first ball-screw and first straight line slide rail be arranged in parallel, and first
Light rod guide two ends are fixed in two first supports, and the first support base is provided with two, and two the first support bases are fixedly installed
Top left side and right side in first straight line slide rail, the first ball-screw two ends are rotated by bearing and are located at two the first support bases
On, the right-hand member of the first ball-screw is connected by first shaft coupling with the spindle drive of the first servomotor, the first slip pedestal
Wear and be threaded on the first ball-screw, the first wedge is arranged on the first slip pedestal top, the first smooth rod guide
Upper slip is provided with the first slide block, and the first slider top is fixedly connected with the first wedge bottom；The thickness of the first wedge by
From left to right gradually increases, and the lower surface of the first wedge is horizontally disposed with, and the left low right high dip in upper surface of the first wedge is arranged；
Second installation frame bottom is fixedly installed on the first wedge top, and second straight line slide rail is arranged in left-right direction second
On installation frame, the second installation frame left upper portion and right upper portion are respectively equipped with a second support, the second smooth rod guide,
Two ball-screws and second straight line slide rail be arranged in parallel, and the second smooth rod guide two ends are fixed in two second supports, second
Support seat is provided with two, and two the second support bases are fixedly installed on top left side and the right side of second straight line slide rail, the second ball
Leading screw two ends are rotated by bearing and are located on two the second support bases, and the left end of the second ball-screw is by second shaft coupling and the
The spindle drive connection of two servomotors, the second slip pedestal wears and is threaded on the second ball-screw, the second wedge shape
Block is arranged on the second slip pedestal top, and sliding in the second smooth rod guide is provided with the second slide block, the second slider top and second
Wedge bottom is fixedly connected；And the thickness of wedge is gradually reduced from left to right, the thickness upper surface water of the second wedge
It is flat to arrange, the lower surface of the upper surface of the first wedge parallel to the second wedge；
First installation frame bottom is arranged on platen, when the first servomotor and the second servomotor is started, the
One servomotor drives the first ball screw turns, the second servomotor to drive the second ball screw turns, in the first slide block and
Under the support limit of the second slide block, the first ball-screw drives the direction that the first slip pedestal move along first straight line slide rail and the
Two ball-screws drive the second slip pedestal along second straight line slide rail move it is in opposite direction；Due to the first wedge and the second wedge
The wedge shape right-angle relationship of shape block, by the displacement amount of movement of first straight line slide rail the component and vertical direction of horizontal direction displacement are divided into
The component of displacement, by the component for driving horizontal direction displacement, by measuring the method for horizontal displacement by horizontal direction displacement
Component feeds back to and build in control system closed-loop control system and to first straight line slide rail and second straight line slide rail horizontal direction
Amount of movement is compensated, and improves amount of movement of the workbench in Z-direction, realizes the feeding that precision reaches micron level；When
Workpiece is placed on when being processed on the second wedge, and workpiece only shows the amount of movement of Z-direction.
First slide block and the first wedge, the first slip pedestal and the first wedge, the second installation frame and the first wedge shape
Mode connects for screw is adopted between block, the second slide block and the second wedge and the second slip pedestal and the second wedge.
Above-mentioned technical proposal is adopted, the invention has the advantages that:The present invention first will in experiment or work experiment
The present invention is placed on the long 401 millimeters, workbench of wide 356 millimeters of fine turning lathe, by adjusting the first servomotor and the
The rotation of two servomotors, level side can be divided into using the right-angle relationship of the first wedge by the amount of movement of second straight line slide rail
To the component and the component of vertical direction displacement of displacement, and then the component of driving horizontal direction displacement, by measuring horizontal displacement
Method by the component of horizontal direction displacement feed back in control system build closed-loop control system and to wherein first straight line slide
The amount of movement of rail and second straight line slide rail horizontal direction is compensated, and improves workbench in Z-direction（Vertical direction）Shifting
Momentum, realizes the feeding that precision reaches micron level.
Compared with prior art, the present invention feeds the Z-direction micrometric displacement structure of level compensating, wedge shape in the present invention based on wedge shape
Block can carry larger workpiece, and line slide rail has larger stroke, and servomotor has higher precision.The present invention is realized
, in the amount of feeding of Z-direction, so as to improve conventional workpiece, in the Z-axis direction the amount of feeding is few, and multiplicity is little, and precision is or not workbench
High the drawbacks of, in the prior art stroke is short also to solve micro-displacement mechanism, and precision is low, the few difficulty of mechanism's Z-direction amount of feeding
Topic.Development to Micro-displacement Technique also has very great significance.
The present invention is low for micro-displacement mechanism precision, and stroke is short, the few situation of mechanism's Z axis amount of feeding, by servomotor
Ball-screw is driven, intelligent micrometric displacement control system is built, with the Fine Feed needs in meeting precision, Ultra-precision Turning, can be with
The machining accuracy of workpiece is further improved, operating efficiency during work pieces process is improved, the load capacity of workbench is improved.
Description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the top view of Fig. 1.
Specific embodiment
As depicted in figs. 1 and 2, a kind of Z-direction micrometric displacement structure that level compensating is fed based on wedge shape of the invention, including the
One installation frame 1, the second installation frame 2, first straight line slide rail 3, second straight line slide rail 4, the first servomotor 5, the second servo
Motor 6, the first wedge 7, the second wedge 8, the first ball-screw 9, the second ball-screw 10, the first slip pedestal 11,
Two slip pedestals 12, the first smooth rod guide 13, the second smooth rod guide 14, the first support base 15 and the second support base 16；
First straight line slide rail 3 is horizontally set in left-right direction on the first installation frame 1, the left upper portion of the first installation frame 1 and
Right upper portion is respectively equipped with a first support 17, and the first smooth rod guide 13, the first ball-screw 9 and first straight line slide rail 3 are flat
Row is arranged, and the two ends of the first smooth rod guide 13 are fixed in two first supports 17, and the first support base 15 is provided with two, two the
One support base 15 is fixedly installed on top left side and the right side of first straight line slide rail 3, and the two ends of the first ball-screw 9 are turned by bearing
Dynamic to be located on two the first support bases 15, the right-hand member of the first ball-screw 9 is by the servomotor 5 of first shaft coupling 18 and first
Spindle drive connects, and the first slip pedestal 11 wears and is threaded on the first ball-screw 9, and the first wedge 7 is arranged on
The top of first slip pedestal 11, slides in the first smooth rod guide 13 and is provided with the first slide block 19, the top of the first slide block 19 and first
The bottom of wedge 7 is fixedly connected；The thickness of the first wedge 7 gradually increases from left to right, the lower surface level of the first wedge 7
Arrange, the left low right high dip in upper surface of the first wedge 7 is arranged；
The bottom of second installation frame 2 is fixedly installed on the top of the first wedge 7, and second straight line slide rail 4 is arranged in left-right direction
On second installation frame 2, the left upper portion of the second installation frame 2 and right upper portion are respectively equipped with a second support 20, the second light
Rod guide 14, the second ball-screw 10 and second straight line slide rail 4 be arranged in parallel, and the two ends of the second smooth rod guide 14 are fixed on two
On two supports 20, the second support base 16 is provided with two, and two the second support bases 16 are fixedly installed on the top of second straight line slide rail 4
Portion left side and right side, the two ends of the second ball-screw 10 are rotated by bearing and are located on two the second support bases 16, the second ball wire
The left end of thick stick 10 is connected by second shaft coupling 21 with the spindle drive of the second servomotor 6, and the second slip pedestal 12 wears simultaneously
It is threaded on the second ball-screw 10, the second wedge 8 is arranged on the top of the second slip pedestal 12, the second smooth rod guide 14
Upper slip is provided with the second slide block, and the second slider top is fixedly connected with the bottom of the second wedge 8；And the thickness of wedge by
From left to right is gradually reduced, and the thickness upper surface of the second wedge 8 is horizontally disposed with, and the upper surface of the first wedge 7 is parallel to second
The lower surface of wedge 8；
The bottom of first installation frame 1 is arranged on platen, when the first servomotor 5 and the second servomotor 6 is started,
First servomotor 5 drives the first ball-screw 9 to rotate, and the second servomotor 6 drives the second ball-screw 10 to rotate, first
Under the support limit of the slide block of slide block 19 and second, the first ball-screw 9 drives the first slip pedestal 11 to move along first straight line slide rail 3
Dynamic direction and the second ball-screw 10 drive the second slip pedestal 12 along second straight line slide rail 4 move it is in opposite direction；Due to
The wedge shape right-angle relationship of the first wedge 7 and the second wedge 8, by the displacement amount of movement of first straight line slide rail 3 level side is divided into
To the component and the component of vertical direction displacement of displacement, by the component for driving horizontal direction displacement, by measuring horizontal displacement
Method the component of horizontal direction displacement is fed back to build in control system closed-loop control system and to the He of first straight line slide rail 3
The amount of movement of the horizontal direction of second straight line slide rail 4 is compensated, and improves amount of movement of the workbench in Z-direction, realizes essence
Degree reaches the feeding of micron level；When workpiece is placed on to be processed on the second wedge 8, workpiece only shows the shifting of Z-direction
Momentum.
First slide block 19 and the first wedge 7, the first slip pedestal 11 and the first wedge 7, the second installation frame 2 and
Screw is adopted between one wedge 7, the second slide block and the second wedge 8 and the second slip pedestal 12 and the second wedge 8
Connection, is so easy to the installation and removal of each component.
The present embodiment not makees any pro forma restriction to shape, material, structure of the invention etc., every according to this
Any simple modification, equivalent variations and modification that bright technical spirit is made to above example, belong to the technology of the present invention side
The protection domain of case.
Claims (2)
1. it is a kind of based on wedge shape feed level compensating Z-direction micrometric displacement structure, it is characterised in that：Including the first installation frame,
Two installation frames, first straight line slide rail, second straight line slide rail, the first servomotor, the second servomotor, the first wedge,
Two wedges, the first ball-screw, the second ball-screw, the first slip pedestal, the second slip pedestal, the first smooth rod guide,
Two smooth rod guides, the first support base and the second support base；
First straight line slide rail is horizontally set in left-right direction on the first installation frame, the first installation frame left upper portion and right side
Top is respectively equipped with a first support, and the first smooth rod guide, the first ball-screw and first straight line slide rail be arranged in parallel, and first
Light rod guide two ends are fixed in two first supports, and the first support base is provided with two, and two the first support bases are fixedly installed
Top left side and right side in first straight line slide rail, the first ball-screw two ends are rotated by bearing and are located at two the first support bases
On, the right-hand member of the first ball-screw is connected by first shaft coupling with the spindle drive of the first servomotor, the first slip pedestal
Wear and be threaded on the first ball-screw, the first wedge is arranged on the first slip pedestal top, the first smooth rod guide
Upper slip is provided with the first slide block, and the first slider top is fixedly connected with the first wedge bottom；The thickness of the first wedge by
From left to right gradually increases, and the lower surface of the first wedge is horizontally disposed with, and the left low right high dip in upper surface of the first wedge is arranged；
Second installation frame bottom is fixedly installed on the first wedge top, and second straight line slide rail is arranged in left-right direction second
On installation frame, the second installation frame left upper portion and right upper portion are respectively equipped with a second support, the second smooth rod guide,
Two ball-screws and second straight line slide rail be arranged in parallel, and the second smooth rod guide two ends are fixed in two second supports, second
Support seat is provided with two, and two the second support bases are fixedly installed on top left side and the right side of second straight line slide rail, the second ball
Leading screw two ends are rotated by bearing and are located on two the second support bases, and the left end of the second ball-screw is by second shaft coupling and the
The spindle drive connection of two servomotors, the second slip pedestal wears and is threaded on the second ball-screw, the second wedge shape
Block is arranged on the second slip pedestal top, and sliding in the second smooth rod guide is provided with the second slide block, the second slider top and second
Wedge bottom is fixedly connected；And the thickness of wedge is gradually reduced from left to right, the thickness upper surface water of the second wedge
It is flat to arrange, the lower surface of the upper surface of the first wedge parallel to the second wedge；
First installation frame bottom is arranged on platen, when the first servomotor and the second servomotor is started, the
One servomotor drives the first ball screw turns, the second servomotor to drive the second ball screw turns, in the first slide block and
Under the support limit of the second slide block, the first ball-screw drives the direction that the first slip pedestal move along first straight line slide rail and the
Two ball-screws drive the second slip pedestal along second straight line slide rail move it is in opposite direction；Due to the first wedge and the second wedge
The wedge shape right-angle relationship of shape block, by the displacement amount of movement of first straight line slide rail the component and vertical direction of horizontal direction displacement are divided into
The component of displacement, by the component for driving horizontal direction displacement, by measuring the method for horizontal displacement by horizontal direction displacement
Component feeds back to and build in control system closed-loop control system and to first straight line slide rail and second straight line slide rail horizontal direction
Amount of movement is compensated, and improves amount of movement of the workbench in Z-direction, realizes the feeding that precision reaches micron level；When
Workpiece is placed on when being processed on the second wedge, and workpiece only shows the amount of movement of Z-direction.
2. it is according to claim 1 it is a kind of based on wedge shape feed level compensating Z-direction micrometric displacement structure, it is characterised in that：
First slide block and the first wedge, the first slip pedestal and the first wedge, the second installation frame and the first wedge, the second cunning
Mode connects for screw is adopted between block and the second wedge and the second slip pedestal and the second wedge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710031879.XA CN106624951B (en) | 2017-01-17 | 2017-01-17 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710031879.XA CN106624951B (en) | 2017-01-17 | 2017-01-17 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106624951A true CN106624951A (en) | 2017-05-10 |
| CN106624951B CN106624951B (en) | 2018-07-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710031879.XA Expired - Fee Related CN106624951B (en) | 2017-01-17 | 2017-01-17 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106624951B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016097447A (en) * | 2014-11-26 | 2016-05-30 | トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフトTrumpf Werkzeugmaschinen GmbH + Co. KG | Drive device for machine tool, and machine tool equipped with the drive device |
| CN111099520A (en) * | 2019-12-10 | 2020-05-05 | 上海建工四建集团有限公司 | Device for adjusting vertical position of object and using method thereof |
| CN118372177A (en) * | 2024-06-21 | 2024-07-23 | 江苏永欣玻璃科技有限公司 | Automatic polishing wheel repairing mechanism for polishing wheel for glass polishing |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2180406Y (en) * | 1993-06-25 | 1994-10-26 | 华中理工大学 | Precision mini-feeding working table |
| CN202562431U (en) * | 2012-05-24 | 2012-11-28 | 曹玉 | Micrometric displacement measurement device |
| CN203037993U (en) * | 2012-12-04 | 2013-07-03 | 彩虹（佛山）平板显示有限公司 | Micro displacement mechanism for stepping photoetching device |
| KR20140086046A (en) * | 2012-12-28 | 2014-07-08 | 현대위아 주식회사 | Thermal displacement correction device of machine tools ball screw using cylinderical capacitor displacement sensor and method thereof |
| CN104329543A (en) * | 2014-10-09 | 2015-02-04 | 保定标正机床有限责任公司 | Machine tool fine adjustment sizing block |
| CN205363558U (en) * | 2015-11-28 | 2016-07-06 | 重庆市健隆家具有限公司 | Glass edging clamping device |
| CN206436040U (en) * | 2017-01-17 | 2017-08-25 | 河南理工大学 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
-
2017
- 2017-01-17 CN CN201710031879.XA patent/CN106624951B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2180406Y (en) * | 1993-06-25 | 1994-10-26 | 华中理工大学 | Precision mini-feeding working table |
| CN202562431U (en) * | 2012-05-24 | 2012-11-28 | 曹玉 | Micrometric displacement measurement device |
| CN203037993U (en) * | 2012-12-04 | 2013-07-03 | 彩虹（佛山）平板显示有限公司 | Micro displacement mechanism for stepping photoetching device |
| KR20140086046A (en) * | 2012-12-28 | 2014-07-08 | 현대위아 주식회사 | Thermal displacement correction device of machine tools ball screw using cylinderical capacitor displacement sensor and method thereof |
| CN104329543A (en) * | 2014-10-09 | 2015-02-04 | 保定标正机床有限责任公司 | Machine tool fine adjustment sizing block |
| CN205363558U (en) * | 2015-11-28 | 2016-07-06 | 重庆市健隆家具有限公司 | Glass edging clamping device |
| CN206436040U (en) * | 2017-01-17 | 2017-08-25 | 河南理工大学 | A kind of Z-direction micro-displacement structure based on wedge shape feeding level compensating |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016097447A (en) * | 2014-11-26 | 2016-05-30 | トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフトTrumpf Werkzeugmaschinen GmbH + Co. KG | Drive device for machine tool, and machine tool equipped with the drive device |
| CN111099520A (en) * | 2019-12-10 | 2020-05-05 | 上海建工四建集团有限公司 | Device for adjusting vertical position of object and using method thereof |
| CN118372177A (en) * | 2024-06-21 | 2024-07-23 | 江苏永欣玻璃科技有限公司 | Automatic polishing wheel repairing mechanism for polishing wheel for glass polishing |
| CN118372177B (en) * | 2024-06-21 | 2024-09-20 | 江苏永欣玻璃科技有限公司 | Automatic polishing wheel repairing mechanism for polishing wheel for glass polishing |
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| Publication number | Publication date |
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| CN106624951B (en) | 2018-07-03 |
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Granted publication date: 20180703 Termination date: 20220117 |