CN102528950A - Debugging device of scribing machine material transmission system - Google Patents
Debugging device of scribing machine material transmission system Download PDFInfo
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- CN102528950A CN102528950A CN2010105927114A CN201010592711A CN102528950A CN 102528950 A CN102528950 A CN 102528950A CN 2010105927114 A CN2010105927114 A CN 2010105927114A CN 201010592711 A CN201010592711 A CN 201010592711A CN 102528950 A CN102528950 A CN 102528950A
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- workbench
- transmission system
- debugging apparatus
- sliding bar
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Abstract
The invention provides a debugging device of a scribing machine material transmission system, which is used for solving the problems of great difficulty in ensuring the coplanarity of the centers of all parts in the scribing machine material transmission system as well as poorer detectability of the center of each part in the prior art. The debugging device comprises a manipulator connecting piece, a sliding rod and a workbench connecting piece, wherein a sliding clamping groove is formed on the manipulator connecting piece; the manipulator connecting piece is fixedly connected with a scale parallel to the sliding clamping groove; one end of the sliding rod is clamped in the sliding clamping groove in a sliding way while the other end of the sliding rod is fixedly connected with an inserting head; the sliding rod is fixedly connected with a pointer in parallel; the pointer points to scale marks on the scale; the workbench connecting piece is of cylindrical shape; and an inserting hole capable of matching with the inserting head is formed at the center of the top end of the workbench connecting piece. The debugging device provided by the invention can be used for debugging the center of each part in the scribing machine material transmission system; convenience, simplicity and rapidness in the debugging process are obtained; the center of each part can be positioned on the same plane so that the coplanarity of the center of each part is ensured; and detectability also is obtained for the center of each part in the scribing machine material transmission system.
Description
Technical field
The present invention relates to integrated circuit sealed in unit manufacturing technology field, particularly a kind of debugging apparatus of scribing machine material transmission system.
Background technology
Scribing machine is the equipment that a kind of wafer with element circuit or element is divided into set junior unit.The working mechanism of scribing machine comprises automatic loading/unloading, automatic aligning, automatic cleaning, automatic cutting-up etc.
Material transmission system is the leading portion execution unit of full-automatic scribing machine, relates generally to feeding system, prealignment system, arm-and-hand system, θ platform system, purging system etc.During the work of scribing machine material transmission system; Up and down manipulator center, prealignment system centre, θ workbench center, cleaning the wafer-supporting platform center must be in same plane; As long as the offset of manipulator sucker on the paster ring will be caused in this plane of misalignment of some wherein, make the sucker vacuum leak; Automatically bust this, so the adjustment at each several part center is the emphasis of whole system assembling in the material transmission system.Owing to receive the restriction of locus, the installation base surface of each several part is distributed in the different parts, and common assembly method is difficult to guarantee the coplanarity at each several part center, and the detectability at each several part center is relatively poor.
It is thus clear that prior art has the coplanarity that is difficult to guarantee each several part center in the scribing machine material transmission system, the relatively poor problem of detectability at each several part center.
Summary of the invention
The embodiment of the invention provides a kind of debugging apparatus of scribing machine material transmission system, in order to solve the very difficult coplanarity at each several part center in the scribing machine material transmission system, the relatively poor problem of detectability at each several part center of guaranteeing of prior art.
The embodiment of the invention provides a kind of debugging apparatus of scribing machine material transmission system, comprising:
The manipulator connector is provided with the slip draw-in groove, is fixedly connected with and the parallel scale of said slip draw-in groove;
Sliding bar, an end card is located in the said slip draw-in groove, and the other end is fixedly connected with a plug, and said sliding bar secured in parallel is connected with a pointer, the graduation mark on the said scale of said pointed;
The workbench connector is cylindric, and the center, top has the jack that can cooperate with said plug.
Said slip draw-in groove is: cross section is the T type slip draw-in groove of T type.
A said end of said sliding bar is: the ring flange that is slidingly matched with said T type slip draw-in groove.
Said sliding bar is connected said pointer through first nut with the screw secured in parallel.
Said workbench connector is: first cylinder that can cooperate with the seam hole of θ workbench.
Said workbench connector comprises second cylinder and the three cylindrical body of fixed connection, wherein:
The dead in line of said second cylinder and said three cylindrical body;
Center, the said second cylindrical top has the jack that can cooperate with said plug;
Said three cylindrical physical efficiency cooperates with the seam hole of θ workbench.
Described debugging apparatus also comprises:
Fixture is used for said sliding bar is fixed in and stops slip place.
Said fixture comprises:
Be enclosed within second nut and pad on the said sliding bar.
The debugging apparatus of the scribing machine material transmission system that the embodiment of the invention provides; Can be used to debug each several part center in the scribing machine material transmission system; Debug process is convenient simple and direct; Can make the each several part center at grade, guarantee the coplanarity at each several part center, improve the assembling and the debugging efficiency of scribing machine material transmission system; Can make the scribing machine material transmission system can keep stable material transfer function at work, can not cause the phenomenon that sheet occurs falling or can not inhale slice, thin piece because of the sucker vacuum leak because of off-centring; In addition, this debugging apparatus also makes that the each several part center has detectability in the scribing machine material transmission system.
Description of drawings
Fig. 1 is the decomposition plan view of the debugging apparatus of scribing machine material transmission system in the embodiment of the invention;
Fig. 2 is the whole vertical view of debugging apparatus among Fig. 1;
Fig. 3 is the cross-sectional view of debugging apparatus among Fig. 2;
Fig. 4 is the whole vertical view of the debugging apparatus of scribing machine material transmission system in another embodiment of the present invention.
The specific embodiment
For technical problem, technical scheme and advantage that the embodiment of the invention will be solved is clearer, will combine accompanying drawing and specific embodiment to be described in detail below.
The decomposition plan view of the debugging apparatus of the scribing machine material transmission system that Fig. 1 provides for the embodiment of the invention; Fig. 2 is the whole vertical view of debugging apparatus among Fig. 1; Fig. 3 is the cross-sectional view of debugging apparatus among Fig. 2.
Like Fig. 1,2 and 3, the debugging apparatus of the scribing machine material transmission system that the embodiment of the invention provides comprises:
Workbench connector 6 is cylindric, and the center, top has the jack that can cooperate with plug 4.
Exemplarily, the slip draw-in groove is: cross section is the T type slip draw-in groove of T type.At this moment, an above-mentioned end of sliding bar 3 can be: the ring flange that is slidingly matched with T type slip draw-in groove.
Exemplarily, the slip draw-in groove also can be: cross section is the L type slip draw-in groove of L type.At this moment, an above-mentioned end of sliding bar 3 can be: the L type termination that is slidingly matched with L type slip draw-in groove.
An above-mentioned end of slip draw-in groove and sliding bar 3 also can be embodied as other pattern neatly, does not break away from the slip draw-in groove as long as can guarantee that an above-mentioned end of sliding bar 3 can slide in the slip draw-in groove.
The whole vertical view of the debugging apparatus of the scribing machine material transmission system that Fig. 4 provides for another embodiment of the present invention.
Exemplarily, like Fig. 4, the concrete mode of sliding bar 3 secured in parallel concatenation pointers 5 is:
Exemplarily, like Fig. 4, the workbench connector comprises second cylinder 61 and the three cylindrical body 62 of fixed connection, wherein:
The dead in line of second cylinder 61 and three cylindrical body 62;
The center, top of second cylinder 61 has the jack that can cooperate with plug 4;
Three cylindrical body 62 can cooperate with the seam hole of θ workbench.
Also can be like Fig. 1,2 and 3, the workbench connector is: first cylinder that can cooperate with the seam hole of θ workbench.
The workbench connector also can be embodied as other pattern neatly.
Preferably, above-mentioned debugging apparatus can also comprise:
Fixture is used for sliding bar 3 is fixed in and stops slip place.
Exemplarily, like Fig. 4, fixture comprises:
Be enclosed within second nut 9 and pad 10 on the sliding bar 3.
Explanation utilizes the process at each several part center in the above-mentioned debugging apparatus adjustment scribing machine material transmission system below.
(1), utilize debugging apparatus make manipulator center and θ workbench the center at grade.
Before the Installation and Debugging, be connected the manipulator connector with the connecting plate of last manipulator with screw or other device, the bottom of workbench connector is connected with the seam hole of θ workbench, and the center line of workbench connector should overlap with the center line in seam hole.
The θ workbench is transferred near the prealignment frame center of just installing through the X workbench, will go up manipulator and move to θ workbench top, and last manipulator moves down.
In the slip draw-in groove of manipulator connector, move sliding bar, the plug of sliding bar is inserted in the jack on workbench connector top, stable sliding bar makes sliding bar stop to slide, and sliding bar is stabilized in current slip place that stops.Wherein, When on the sliding bar fixture being arranged, can utilize fixture that sliding bar is stabilized in current slip place that stops, when when fixture being first nut and the pad that is enclosed within on the sliding bar; Towards the direction of slip draw-in groove first nut of screwing, sliding bar is stabilized in current slip place that stops.
Read the distance value at the graduation range scale center that pointer indicates on scale, this distance value is the deviate at sliding bar and workbench connector center, and this deviate is similarly the deviate at center of center and the θ workbench of manipulator; Regulate according to this deviate and to go up position of manipulator, make manipulator center and θ workbench the center at grade.
Usually, the deviate at the center of the center of last manipulator and θ workbench is the difficult bulk of measuring, and above-mentioned debugging apparatus is converted into the visualization plane size with this deviate, and it is very convenient simple and direct that the process that needs are constantly repeated to debug becomes.
(2), utilize debugging apparatus make down manipulator center and θ workbench the center at grade.
Method is with described in (1).
(3), adjustment prealignment frame center, make the prealignment framework open when closed, prealignment frame center line overlaps with the center of θ workbench.
(4), according to the center of adjusted prealignment frame center line adjustment purging system workbench, the center of purging system workbench is overlapped with prealignment frame center line.
(5), move to go up the top of manipulator to the purging system workbench, adjust spacing buffer and put down the paster ring, the center of adjusting the purging system workbench overlaps with the center of paster ring.
(6), according to the center line of adjusted prealignment frame center line adjustment material loading workbench magazine, the center line of material loading workbench magazine is overlapped with prealignment frame center line.
(7), the center line of the center according to the purging system workbench, prealignment frame center line and magazine, confirm each operating position of manipulator down.
It is thus clear that; The debugging apparatus of the scribing machine material transmission system that the embodiment of the invention provides; Can be used to debug each several part center in the scribing machine material transmission system, debug process is convenient simple and direct, can make the each several part center at grade; Guarantee the coplanarity at each several part center; Improved the assembling and the debugging efficiency of scribing machine material transmission system, can make the scribing machine material transmission system can keep stable material transfer function at work, can not cause the phenomenon that sheet occurs falling or can not inhale slice, thin piece because of the sucker vacuum leak because of off-centring; In addition, this debugging apparatus also makes that the each several part center has detectability in the scribing machine material transmission system.
The above is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from principle according to the invention; Can also make some improvement and retouching, these improvement and retouching also should be regarded as protection scope of the present invention.
Claims (8)
1. the debugging apparatus of a scribing machine material transmission system is characterized in that, comprising:
The manipulator connector is provided with the slip draw-in groove, is fixedly connected with and the parallel scale of said slip draw-in groove;
Sliding bar, an end card is located in the said slip draw-in groove, and the other end is fixedly connected with a plug, and said sliding bar secured in parallel is connected with a pointer, the graduation mark on the said scale of said pointed;
The workbench connector is cylindric, and the center, top has the jack that can cooperate with said plug.
2. debugging apparatus as claimed in claim 1 is characterized in that,
Said slip draw-in groove is: cross section is the T type slip draw-in groove of T type.
3. debugging apparatus as claimed in claim 2 is characterized in that,
A said end of said sliding bar is: the ring flange that is slidingly matched with said T type slip draw-in groove.
4. debugging apparatus as claimed in claim 1 is characterized in that,
Said sliding bar is connected said pointer through first nut with the screw secured in parallel.
5. debugging apparatus as claimed in claim 1 is characterized in that,
Said workbench connector is: first cylinder that can cooperate with the seam hole of θ workbench.
6. debugging apparatus as claimed in claim 1 is characterized in that,
Said workbench connector comprises second cylinder and the three cylindrical body of fixed connection, wherein:
The dead in line of said second cylinder and said three cylindrical body;
Center, the said second cylindrical top has the jack that can cooperate with said plug;
Said three cylindrical physical efficiency cooperates with the seam hole of θ workbench.
7. like arbitrary described debugging apparatus in the claim 1 to 6, it is characterized in that, also comprise:
Fixture is used for said sliding bar is fixed in and stops slip place.
8. debugging apparatus as claimed in claim 7 is characterized in that, said fixture comprises:
Be enclosed within second nut and pad on the said sliding bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010592711.4A CN102528950B (en) | 2010-12-08 | 2010-12-08 | Debugging device of scribing machine material transmission system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010592711.4A CN102528950B (en) | 2010-12-08 | 2010-12-08 | Debugging device of scribing machine material transmission system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102528950A true CN102528950A (en) | 2012-07-04 |
| CN102528950B CN102528950B (en) | 2014-12-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010592711.4A Expired - Fee Related CN102528950B (en) | 2010-12-08 | 2010-12-08 | Debugging device of scribing machine material transmission system |
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| Country | Link |
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| CN (1) | CN102528950B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106808318A (en) * | 2015-12-01 | 2017-06-09 | 安徽鸿远机电科技有限公司 | A kind of drilling and milling machine workbench scale |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328553A (en) * | 1976-12-07 | 1982-05-04 | Computervision Corporation | Method and apparatus for targetless wafer alignment |
| JPH02102559A (en) * | 1988-10-11 | 1990-04-16 | Rohm Co Ltd | Semiconductor manufacturing device |
| CN1787201A (en) * | 2005-10-24 | 2006-06-14 | 中国电子科技集团公司第四十五研究所 | Apparatus for automatically distinguishing and aligning wafer of wafer cutter and method thereof |
| CN1887520A (en) * | 2006-07-14 | 2007-01-03 | 沈阳仪表科学研究院 | Automatic aligning device for scribing machine platform datum |
| US7165331B1 (en) * | 2005-05-24 | 2007-01-23 | Micro Processing Technology, Inc. | Apparatus and method for scribing a semiconductor wafer while controlling scribing forces |
-
2010
- 2010-12-08 CN CN201010592711.4A patent/CN102528950B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328553A (en) * | 1976-12-07 | 1982-05-04 | Computervision Corporation | Method and apparatus for targetless wafer alignment |
| JPH02102559A (en) * | 1988-10-11 | 1990-04-16 | Rohm Co Ltd | Semiconductor manufacturing device |
| US7165331B1 (en) * | 2005-05-24 | 2007-01-23 | Micro Processing Technology, Inc. | Apparatus and method for scribing a semiconductor wafer while controlling scribing forces |
| CN1787201A (en) * | 2005-10-24 | 2006-06-14 | 中国电子科技集团公司第四十五研究所 | Apparatus for automatically distinguishing and aligning wafer of wafer cutter and method thereof |
| CN1887520A (en) * | 2006-07-14 | 2007-01-03 | 沈阳仪表科学研究院 | Automatic aligning device for scribing machine platform datum |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106808318A (en) * | 2015-12-01 | 2017-06-09 | 安徽鸿远机电科技有限公司 | A kind of drilling and milling machine workbench scale |
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| Publication number | Publication date |
|---|---|
| CN102528950B (en) | 2014-12-10 |
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Granted publication date: 20141210 Termination date: 20181208 |