CN102502109A - Substrate box and adjustable sensing device thereof - Google Patents
Substrate box and adjustable sensing device thereof Download PDFInfo
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- CN102502109A CN102502109A CN2011103963483A CN201110396348A CN102502109A CN 102502109 A CN102502109 A CN 102502109A CN 2011103963483 A CN2011103963483 A CN 2011103963483A CN 201110396348 A CN201110396348 A CN 201110396348A CN 102502109 A CN102502109 A CN 102502109A
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- sensing device
- base portion
- location division
- adjustable sensing
- location
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- 239000000758 substrate Substances 0.000 title claims abstract description 74
- 238000005452 bending Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 21
- 238000005516 engineering process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000004308 accommodation Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Measurement Of Radiation (AREA)
Abstract
A kind of base plate casket and its adjustable sensing device, the adjustable sensing device is installed in the base plate casket, the adjustable sensing device includes: a base, a sensing element; wherein, a part of the base is positioned in the positioning part of the substrate box; the sensing element is positioned on the base part and used for detecting the substrate accommodated in the substrate box; and the substrate box is provided with a plurality of adjustable sensing devices, and the base part of each adjustable sensing device is adjusted to be positioned at different positions in the positioning part according to the bending degree of each substrate, so that the sensing element of each adjustable sensing device is kept equidistant to the corresponding substrate.
Description
Technical field
The present invention relates to a kind of basal plate box and sensing device thereof, particularly a kind of basal plate box and adjustable sensing device thereof.
Background technology
In the technology of Liquid Crystal Display (LCD); Because glass substrate needs via the multiple tracks work programme; Therefore each glass substrate is to be loaded within the basal plate box; Making things convenient for personnel operation mechanical arm (robot arm) carrying glass substrate, and be transported to and carry out processing technology on the technology board, and then avoid each glass substrate in handling process, to sustain damage.
Existing basal plate box (cassette) is the rectangle support body, is provided with a plurality of strut members in both sides, and it is the marginal portion that is used for supporting each glass substrate, and each glass substrate in the basal plate box is separated.Because each glass substrate all has weight, lie against in the basal plate box so work as each glass substrate, glass substrate can produce crooked situation (bending) because of receiving gravity.In addition, and increasing, thickness is also more and more thinner simultaneously along with development of science and technology and evolution for the size of glass substrate, thus basal plate box if the supports support glass substrate of mat both sides only, the crooked situation that glass substrate is produced in the middle part is gradually serious.
In addition; Be provided with a plurality of position sensor (mapping sensor) in the basal plate box; Position sensor can emit light into glass substrate, and in the reflected light induction basal plate box of reception glass substrate whether glass substrate is arranged, and mechanical arm just can take out glass substrate according to the measured result of position sensor.Yet; Thickness of glass substrate thin excessively (for example thickness is less than 0.5mm) in the basal plate box; Can reduce the sensing function of position sensor, and, when the amount of bow of glass substrate excessive; But will cause the marginal portion of glass substrate and the scope that the distance between the position sensor surpasses the position sensor sensing; Cause the position sensor erroneous judgement of each technology board easily, cause personnel must stop ray examination or mechanical arm knocks the glass substrate in the basal plate box, and make breaking glass panel and reduce the technology yield.
Summary of the invention
In view of this; The present invention proposes a kind of embodiment of adjustable sensing device; Be installed in basal plate box, basal plate box comprise top board, base plate and be connected in top board and base plate between a plurality of side plates, a plurality of side plates include a plurality of support portions and a plurality of location division; The support portion is in order to support a plurality of substrates, and adjustable sensing device comprises: base portion, sensing element; Wherein, the part of base portion is positioned one of them location division; Sensing element is positioned on the base portion, in order to detect the support portion institute substrate supported corresponding to the location division; And; Basal plate box is provided with a plurality of adjustable sensing device; According to the degree of crook of each plate base, the base portion of adjusting each adjustable sensing device is positioned at the diverse location place of location division, makes the sensing element of each adjustable sensing device and cooresponding substrate keep equidistance.
Above-mentioned adjustable sensing device; Wherein, The length direction of these a plurality of location divisions is parallel to the length direction of these a plurality of side plates, and each this location division comprises one first end and one second end, this first end than this second end near this top board; The spacing of this base portion and this first end, and the distance between this location division, this top board is proportional.
Above-mentioned adjustable sensing device; Wherein, Also comprise: a body, be positioned on one of them this side plate, this body comprises and corresponding a plurality of adjustment parts, these a plurality of location divisions; In order to these a plurality of base portions of these a plurality of adjustable sensing device to be set, adjust the distance between these a plurality of adjustable sensing device and this a plurality of substrates via mobile this body.
Above-mentioned adjustable sensing device, wherein, it is whole and be positioned at a plurality of auxiliary adjustment part of two whole sides of this homophony that each this adjustment part comprises a homophony, in order to this base portion to be set.
The present invention also proposes a kind of embodiment of basal plate box, comprises: top board, base plate, a plurality of side plate and a plurality of adjustable sensing device; Wherein, a plurality of side plates are connected in top board and base plate, and include a plurality of support portions and a plurality of location division, and a plurality of support portion is in order to support a plurality of substrates; The corresponding a plurality of location divisions of a plurality of adjustable sensing device are provided with, and each adjustable sensing device comprises: base portion, sensing element, and wherein, the part of base portion is positioned in the cooresponding location division; Sensing element is positioned on the base portion, in order to detect the support portion institute substrate supported corresponding to the location division; And; Basal plate box is provided with a plurality of adjustable sensing device; According to the degree of crook of each plate base, the base portion of adjusting each adjustable sensing device is positioned at the diverse location place of location division, makes the sensing element of each adjustable sensing device and cooresponding substrate keep equidistance.
Above-mentioned basal plate box, wherein, this base portion comprises a connecting element, in order to locate this base portion in this location division.
Above-mentioned basal plate box; Wherein, The length direction of these a plurality of location divisions is parallel to the length direction of these a plurality of side plates, and each this location division comprises one first end and one second end, this first end than this second end near this top board; The spacing of this base portion and this first end, and the distance between this location division, this top board is proportional.
Above-mentioned basal plate box; Wherein, Also comprise: a body, be positioned on one of them this side plate, this body comprises and corresponding a plurality of adjustment parts, these a plurality of location divisions; In order to these a plurality of adjustable sensing device to be set, adjust the distance between these a plurality of adjustable sensing device and this a plurality of substrates via mobile this body.
Above-mentioned basal plate box, wherein, it is whole and be positioned at a plurality of auxiliary adjustment part of two whole sides of this homophony that each this adjustment part comprises a homophony, in order to this base portion to be set.
Above-mentioned basal plate box, wherein, each this location division comprises a main location division and is positioned at a plurality of assist location portion of two sides of this main location division, in order to this base portion to be set.
Above-mentioned basal plate box, wherein, these a plurality of adjustable sensing device can have different spacings.
At above-mentioned each inventive embodiment, in the cargo-carring a plurality of substrates of basal plate box institute, the position is at the substrate of getting over the upper strata; Its degree of crook is big more, otherwise the position is at the substrate of getting over lower floor; Its degree of crook is more little, therefore, and according to the degree of crook of each plate base; Adjust the sense position of the base portion of each adjustable sensing device; Make the sensing element and the cooresponding substrate of each adjustable sensing device keep equidistance, but the marginal portion of substrate and the distance between the sensing element are maintained in the scope of sensing element sensing, the degree of crook of avoiding substrate is excessive and cause the sensing element erroneous judgement; Effectively avoid stopping ray examination, also can avoid mechanical arm thereby knock the substrate in the basal plate box and cause the problem of substrate breakage because of the inefficient manufacturing line that erroneous judgement causes.
Describe the present invention below in conjunction with accompanying drawing and specific embodiment, but not as to qualification of the present invention.
Description of drawings
Fig. 1 is the schematic appearance of the first embodiment of the present invention;
Fig. 2 is the schematic side view of the first embodiment of the present invention;
Fig. 3 is the local appearance scheme drawing of the first embodiment of the present invention;
Fig. 4 is the front-view schematic diagram of the first embodiment of the present invention;
Fig. 4 A is the partial enlarged drawing of A part among Fig. 4;
Fig. 4 B is the partial enlarged drawing of B part among Fig. 4;
Fig. 5 is the schematic appearance of the second embodiment of the present invention;
Fig. 6 is the schematic side view of the second embodiment of the present invention;
Fig. 7 is the local appearance scheme drawing of the second embodiment of the present invention;
Fig. 8 is the front-view schematic diagram of the second embodiment of the present invention;
Fig. 8 A is the partial enlarged drawing of A part among Fig. 8;
Fig. 8 B is the partial enlarged drawing of B part among Fig. 8.
Wherein, Reference numeral
1.......... basal plate box
3.......... housing
7.......... substrate
30.......... accommodation space
31.......... top board
32.......... base plate
33.......... side plate
34.......... support portion
35.......... location division
351......... main location division
352......... assist location portion
35a......... first end
35b......... second end
5.......... adjustable sensing device
50.......... body
51.......... adjustment part
511......... homophony is whole
512......... auxiliary adjustment part
54.......... base portion
55.......... sensing element
58.......... connecting element
The specific embodiment
Below in conjunction with accompanying drawing structural principle of the present invention and principle of work are done concrete description:
Fig. 1, Fig. 2, Fig. 3 and Fig. 4 are first embodiment that illustrates basal plate box of the present invention.Fig. 1 is a schematic appearance, and Fig. 2 is a schematic side view, and Fig. 3 is the local appearance scheme drawing, and Fig. 4 is a front-view schematic diagram.
As shown in the figure, basal plate box 1 comprises in instance of the present invention: housing 3, a plurality of adjustable sensing device 5.
As shown in Figure 2, housing 3 mainly can be made up of top board 31, base plate 32 and 33 of a plurality of side plates, wherein; The both sides of a plurality of side plates 33 between top board 31 and base plate 32, and connect top board 31 and base plate 32, whole sight; Housing 3 generally is a cuboid, has accommodation space 30 in it to take in substrate 7.And housing 3 is provided with a plurality of support portions 34 and a plurality of location division 35, and wherein, a plurality of support portions 34 are for being positioned at accommodation space 30 and being laid on a plurality of side plates 33 at interval, in order to support a plurality of substrates 7.A plurality of location division 35 is positioned on a plurality of side plates 33 for generally to be microscler slotted eye, and is provided with corresponding to a plurality of support portions 34; In addition; The length direction of a plurality of location divisions 35 is parallel to the length direction of a plurality of side plates 33, and each location division has the first relative end 35a and the second end 35b, and; The first end 35a than the second end 35b near top board 31, the second end 35b then than the first end 35a near base plate 32.
A plurality of adjustable sensing device 5 are arranged on the body 50; Wherein, Body 50 is for generally to be microscler plate body, is positioned on the housing 3 and is arranged at the outside wall surface of side plate 33, and be provided with the 35 corresponding a plurality of adjustment parts 51, a plurality of location divisions with side plate 33; And each adjustment part 51 can comprise homophony whole 511 and be positioned at a plurality of auxiliary adjustment part 512 (as shown in Figure 3) of two sides of homophony whole 511; Each adjustable sensing device 5 mainly can be made up of base portion 54,55 of sensing elements, and wherein, base portion 54 is general rectangular pedestal, and sensing element 55 can be arranged at the body center place of base portion 54.
When assembling; A plurality of adjustable sensing device 5 are installed in respectively on the body 50; Wherein, it is whole 511 that the body place of the base portion 54 of adjustable sensing device 5 is positioned at homophony, and two sides of base portion 54 lay respectively in the auxiliary adjustment part 512; In addition, and can be in the auxiliary adjustment part 512 of adjustment part 51 via connecting element 58 location base portions 54.
When body 50 is installed in the outside wall surface of side plate 33, be positioned at a plurality of location divisions 35 that a plurality of adjustable sensing device 5 on the body 50 embeds side plate 33 respectively.Therefore; When housing 3 is taken in the substrate 7 of different size, size; Operating personal only need move body 50; Can drive a plurality of adjustable sensing device 5 displacements simultaneously, use the position of a plurality of adjustable sensing device 5 of change in a plurality of location divisions 35, but the marginal portion of substrate 7 and the distance between the sensing element 55 are maintained in the scope of sensing element 55 sensings.
When housing 3 is taken in a plurality of substrates 7, the position is at the substrate 7 on upper strata more, and its degree of crook is big more; Otherwise the position is at the substrate 7 of getting over lower floor, its degree of crook more little (as shown in Figure 4); Therefore; But, must adjust the position of each adjustable sensing device 5 according to the degree of crook of each plate base 7 in order to make each sensing element 55 its cooresponding substrate 7 of equal sensing.So; Operating personal only need move each adjustable sensing device 5; Adjust the position of the adjustment part 51 of its base portion 54 on body 50, can change each adjustable sensing device 5 in the position in the location division 35 (shown in Fig. 4 A and Fig. 4 B), in other words; Can have different spacings between the adjustable sensing device 5, but the marginal portion of each plate base 7 and the distance between its cooresponding sensing element 55 are maintained in the scope of sensing element 55 sensings.
At this, the base portion 54 of each adjustable sensing device 5 and the spacing of the first end 35a, and the distance between the location division 35, top board 31 is proportional; In other words, the distance between location division 35 and top board 31 is more little, and the position of representing location division 35 is the closer to top board 31; 7 of its cooresponding substrates are on upper strata more and its degree of crook is big more, and therefore, the position of the base portion 54 of adjustable sensing device 5 is more near the first end 35a; Otherwise; Distance between location division 35 and the top board 31 is big more, and 7 of its cooresponding substrates are in lower floor more and its degree of crook is more little, and the position of the base portion 54 of adjustable sensing device 5 is more near the second end 35b.By this, the base portion 54 that operating personal can be adjusted each adjustable sensing device 5 is positioned at the diverse location place of location division 35, makes the sensing element 55 of each adjustable sensing device 5 keep equidistance with cooresponding substrate 7.
Fig. 5, Fig. 6, Fig. 7 and Fig. 8 are second embodiment that illustrates basal plate box of the present invention.Fig. 5 is a schematic appearance, and Fig. 6 is a schematic side view, and Fig. 7 is the local appearance scheme drawing, and Fig. 8 is a front-view schematic diagram.The present embodiment and the first embodiment difference exist: first embodiment is provided with body 50 in the outside wall surface of side plate 33, and present embodiment then is to omit body 50.
In the present embodiment, housing 3 is a plurality of location divisions 35 on side plate 33, are provided with corresponding to many support portions 34, and wherein, each location division 35 can comprise main location division 351 and be positioned at a plurality of assist location portion 352 of two sides of main location division 351.When assembling; A plurality of adjustable sensing device 5 are installed in a plurality of location divisions 35 respectively; Wherein, the body place of the base portion 54 of adjustable sensing device 5 is positioned at main location division 351, and two sides of base portion 54 lay respectively in the assist location portion 352; In addition, and can be in the assist location portion 352 of location division 35 (as shown in Figure 7) via connecting element 58 location base portions 54.
When housing 3 is taken in a plurality of substrates 7, the position is at the substrate 7 on upper strata more, and its degree of crook is big more; Otherwise the position is at the substrate 7 of getting over lower floor, its degree of crook more little (as shown in Figure 8); Therefore; But, must adjust the position (shown in Fig. 8 A and Fig. 8 B) of each adjustable sensing device 5 according to the degree of crook of each plate base 7 in order to make each sensing element 55 its cooresponding substrate 7 of equal sensing.So; Operating personal only need move each adjustable sensing device 5; Adjust the position that its base portion 54 is main location division 351 and assist location portion 352; Can change each adjustable sensing device 5 position in location division 35, but the marginal portion of each plate base 7 and the distance between its cooresponding sensing element 55 are maintained in the scope of sensing element 55 sensings.
The present invention can adjust the position of each adjustable sensing device respectively; Or can adjust the position of a plurality of adjustable sensing device simultaneously; Therefore, the sensing element of each adjustable sensing device all can independently be adjusted by corresponding each substrate thickness, makes the sensing element of each adjustable sensing device and cooresponding substrate keep equidistance; But using the marginal portion and the distance between the sensing element that make substrate maintains in the scope of sensing element sensing; Reduce sensing element erroneous judgement occurrence frequency, effectively avoid stopping ray examination, also can avoid mechanical arm thereby knock the substrate in the basal plate box and cause the problem of substrate breakage because of the inefficient manufacturing line that erroneous judgement causes.
Certainly; The present invention also can have other various embodiments; Under the situation that does not deviate from spirit of the present invention and essence thereof; Those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (11)
1. adjustable sensing device; Be installed in a basal plate box; This basal plate box comprise a top board, a base plate and be connected in this top board and this base plate between a plurality of side plates, these a plurality of side plates include a plurality of support portions and a plurality of location division, these a plurality of support portions are in order to support a plurality of substrates; It is characterized in that this adjustable sensing device comprises:
One base portion, the part of this base portion are positioned one of them this location division; And
One sensing element is positioned on this base portion, in order to detect this substrate that supports corresponding to this support portion of this location division;
Wherein, This basal plate box is provided with a plurality of these adjustable sensing device; Degree of crook according to each this substrate of sheet; This base portion of adjusting each this adjustable sensing device is positioned at the diverse location place of this location division, makes this sensing element of each this adjustable sensing device and cooresponding this substrate keep equidistance.
2. adjustable sensing device according to claim 1; It is characterized in that; The length direction of these a plurality of location divisions is parallel to the length direction of these a plurality of side plates, and each this location division comprises one first end and one second end, this first end than this second end near this top board; The spacing of this base portion and this first end, and the distance between this location division, this top board is proportional.
3. adjustable sensing device according to claim 1; It is characterized in that; Also comprise: a body, be positioned on one of them this side plate, this body comprises and corresponding a plurality of adjustment parts, these a plurality of location divisions; In order to these a plurality of base portions of these a plurality of adjustable sensing device to be set, adjust the distance between these a plurality of adjustable sensing device and this a plurality of substrates via mobile this body.
4. adjustable sensing device according to claim 3 is characterized in that, it is whole and be positioned at a plurality of auxiliary adjustment part of two whole sides of this homophony that each this adjustment part comprises a homophony, in order to this base portion to be set.
5. a basal plate box is characterized in that, comprises:
One top board;
One base plate;
Many side plates are connected in this top board and this base plate, include a plurality of support portions and a plurality of location division, and these a plurality of support portions are in order to support a plurality of substrates; And
A plurality of adjustable sensing device, to being provided with a plurality of location divisions, each this adjustable sensing device comprises:
One base portion, the part of this base portion are positioned in cooresponding this location division; And
One sensing element is positioned on this base portion, in order to detect this substrate that supports corresponding to this support portion of this location division;
Wherein, according to the degree of crook of each this substrate of sheet, this base portion of adjusting each this adjustable sensing device is positioned at the diverse location place of this location division, makes this sensing element of each this adjustable sensing device and cooresponding this substrate keep equidistance.
6. basal plate box according to claim 5 is characterized in that this base portion comprises a connecting element, in order to locate this base portion in this location division.
7. basal plate box according to claim 5; It is characterized in that; The length direction of these a plurality of location divisions is parallel to the length direction of these a plurality of side plates, and each this location division comprises one first end and one second end, this first end than this second end near this top board; The spacing of this base portion and this first end, and the distance between this location division, this top board is proportional.
8. basal plate box according to claim 5; It is characterized in that; Also comprise: a body, be positioned on one of them this side plate, this body comprises and corresponding a plurality of adjustment parts, these a plurality of location divisions; In order to these a plurality of adjustable sensing device to be set, adjust the distance between these a plurality of adjustable sensing device and this a plurality of substrates via mobile this body.
9. basal plate box according to claim 8 is characterized in that, it is whole and be positioned at a plurality of auxiliary adjustment part of two whole sides of this homophony that each this adjustment part comprises a homophony, in order to this base portion to be set.
10. basal plate box according to claim 5 is characterized in that, each this location division comprises a main location division and is positioned at a plurality of assist location portion of two sides of this main location division, in order to this base portion to be set.
11. basal plate box according to claim 5 is characterized in that, these a plurality of adjustable sensing device can have different spacings.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100142294 | 2011-11-18 | ||
TW100142294A TW201321286A (en) | 2011-11-18 | 2011-11-18 | Cassette and adjustable detect device thereof |
Publications (2)
Publication Number | Publication Date |
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CN102502109A true CN102502109A (en) | 2012-06-20 |
CN102502109B CN102502109B (en) | 2013-12-25 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201110396348 Expired - Fee Related CN102502109B (en) | 2011-11-18 | 2011-11-29 | Substrate box and adjustable sensing device thereof |
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CN (1) | CN102502109B (en) |
TW (1) | TW201321286A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113401685A (en) * | 2021-06-03 | 2021-09-17 | 河北光兴半导体技术有限公司 | Inserting frame system for glass plates |
Citations (6)
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JP2000012670A (en) * | 1998-06-19 | 2000-01-14 | Nikon Corp | Substrate cassette |
JP2002164417A (en) * | 2001-09-25 | 2002-06-07 | Dainippon Screen Mfg Co Ltd | Method for detecting substrate and its apparatus |
CN2707677Y (en) * | 2004-06-07 | 2005-07-06 | 东捷科技股份有限公司 | Glass base plate detecting device |
KR20060132166A (en) * | 2005-06-17 | 2006-12-21 | 엘지.필립스 엘시디 주식회사 | Cassette mapping device which can adjust position of sensor unit |
CN101258437A (en) * | 2005-08-08 | 2008-09-03 | 金锺信 | Apparatus for sensing substrate |
KR20110094805A (en) * | 2010-02-18 | 2011-08-24 | 엘지디스플레이 주식회사 | Cassette having substrate detecting appratus |
-
2011
- 2011-11-18 TW TW100142294A patent/TW201321286A/en unknown
- 2011-11-29 CN CN 201110396348 patent/CN102502109B/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000012670A (en) * | 1998-06-19 | 2000-01-14 | Nikon Corp | Substrate cassette |
JP2002164417A (en) * | 2001-09-25 | 2002-06-07 | Dainippon Screen Mfg Co Ltd | Method for detecting substrate and its apparatus |
CN2707677Y (en) * | 2004-06-07 | 2005-07-06 | 东捷科技股份有限公司 | Glass base plate detecting device |
KR20060132166A (en) * | 2005-06-17 | 2006-12-21 | 엘지.필립스 엘시디 주식회사 | Cassette mapping device which can adjust position of sensor unit |
CN101258437A (en) * | 2005-08-08 | 2008-09-03 | 金锺信 | Apparatus for sensing substrate |
KR20110094805A (en) * | 2010-02-18 | 2011-08-24 | 엘지디스플레이 주식회사 | Cassette having substrate detecting appratus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113401685A (en) * | 2021-06-03 | 2021-09-17 | 河北光兴半导体技术有限公司 | Inserting frame system for glass plates |
Also Published As
Publication number | Publication date |
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CN102502109B (en) | 2013-12-25 |
TW201321286A (en) | 2013-06-01 |
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Granted publication date: 20131225 Termination date: 20201129 |