KR20110094805A - Cassette having substrate detecting appratus - Google Patents

Cassette having substrate detecting appratus Download PDF

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Publication number
KR20110094805A
KR20110094805A KR1020100014428A KR20100014428A KR20110094805A KR 20110094805 A KR20110094805 A KR 20110094805A KR 1020100014428 A KR1020100014428 A KR 1020100014428A KR 20100014428 A KR20100014428 A KR 20100014428A KR 20110094805 A KR20110094805 A KR 20110094805A
Authority
KR
South Korea
Prior art keywords
cassette
substrate
disposed
sensors
sensor
Prior art date
Application number
KR1020100014428A
Other languages
Korean (ko)
Inventor
공인배
Original Assignee
엘지디스플레이 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지디스플레이 주식회사 filed Critical 엘지디스플레이 주식회사
Priority to KR1020100014428A priority Critical patent/KR20110094805A/en
Publication of KR20110094805A publication Critical patent/KR20110094805A/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets

Abstract

The present invention relates to a cassette having a substrate sensing device, and the cassette provided with the substrate sensing device according to the present invention is disposed between the upper and lower plates horizontally spaced by a predetermined distance, and is located between the upper and lower plates to support them. However, a plurality of side bars formed on both sides, the plurality of support bars formed on one surface in contact with the inside of the cassette in each side bar, and located between the upper plate and the lower plate to support them, a plurality of formed on the rear A cassette comprising a back stopper and a plurality of back stopper bars formed on one surface of the back stopper in contact with the inside of the cassette, the cassette comprising: sensing a distance between a back stopper formed on a rear surface of the cassette and side bars formed on both sides and a substrate; A substrate sensing device including first, second, and third sensors is included.

Description

Cassette with substrate sensing device {CASSETTE HAVING SUBSTRATE DETECTING APPRATUS}

The present invention relates to a cassette having a substrate sensing device for sensing a position of a substrate used in a liquid crystal display.

Currently, the liquid crystal display device (TFT-LCD), which is the flagship product of flat panel displays, has rapidly developed in size and high resolution due to the mass production technology and the result of research and development. As it gradually replaces conventional cathode ray tube (CRT) products, its proportion in the display device industry is gradually increasing. In today's information society, the display device is more and more important as a visual information transmission medium. In particular, with the trend of light, thin, short, and small in all electronic products, the importance of low power consumption, thinness, light weight, high definition, and portability is increasing.

Since the liquid crystal display device is a display device having not only performance that can satisfy these conditions of a flat panel display but also mass production, various kinds of new products are rapidly created, which has a ripple effect over semiconductors in the electronic industry.

The manufacturing process of the liquid crystal display device as described above comprises a series of processes for forming a liquid crystal cell between a TFT array substrate and a color filter substrate completed through different manufacturing processes.

The flow of the liquid crystal cell process starts with an alignment film coating and rubbing process for arranging liquid crystal molecules in a predetermined direction with respect to the TFT array substrate and the color filter substrate, respectively.

In the TFT array substrate, a short pattern is formed for printing a seal pattern for injecting liquid crystal and for connecting a common electrode terminal of the color filter substrate to a bonding pad of the TFT array substrate. Spacers are disposed on the color filter substrate to maintain a constant cell gap. The two substrates are then aligned and bonded to each other and then cut and separated into their respective panels. After the liquid crystal is injected into each panel, the injection hole is sealed, and after the simple on-off test of the liquid crystal cell, only the good product is selected and the polarizing plate is attached to the manufacturing process.

As described above, in the process of manufacturing the liquid crystal display device, since the unit processes are performed in different unit processes, the cassette for accommodating the substrate to transport the substrate of the liquid crystal display device is different. It is necessary.

In a cassette transported into such process equipment, a substrate is loaded by a substrate transfer device, and it is necessary to detect whether each glass substrate is accurately positioned at each position in the cassette. Made by the naked eye

However, when the correct position of the glass substrate is detected by the human eye, it takes a long time, and a safety accident may occur due to the collision between the person who detects it and the cassette moving device. If a person detects the substrate located in the, there is a problem that the fall of the substrate may occur.

SUMMARY OF THE INVENTION An object of the present invention for solving the above problems is to provide a cassette with a substrate sensing device for detecting whether each substrate is correctly positioned at each position in the cassette.

Cassettes provided with a substrate sensing device according to the present invention as described above is located between the top and bottom plates horizontally spaced apart a predetermined distance, and between the top and bottom plates to support them, a plurality of side bars formed on both sides And a plurality of support bars formed on one side of the side bar in contact with the inside of the cassette, and positioned between the upper and lower plates to support them, and a plurality of back stoppers formed on a rear surface of the cassette; In the cassette including the plurality of back stopper bars formed on one surface in contact with the inside of the cassette, the first, second and third sensors for sensing the distance between the back stopper formed on the rear surface of the cassette and the side bar formed on both sides and the substrate Included substrate sensing device.

The substrate detecting apparatus further includes a sensor support substrate accommodated in each support bar positioned at the lowermost end of the cassette and to which the first, second and third sensors are attached.

Each of the first, second and third sensors consists of two or more sensors.

The first sensor is attached to an upper portion of the sensor support substrate so as to correspond to each of the side bars disposed at the outermost side of the plurality of side bars disposed on one side of the cassette, and the third sensor is disposed on the other side of the cassette. Among the plurality of side bars, the upper side of the sensor supporting substrate is attached to correspond to each of the side bars disposed at the outermost side, and the second sensor is attached to correspond to each of the back stoppers of the cassette.

As described above, the cassette having the substrate sensing device according to the present invention can more easily detect whether or not each substrate is accurately positioned at each position in the cassette, so that the working time can be easily detected. It is possible to shorten, and to detect the exact position of the substrate inside the cassette, it is possible to prevent a safety accident due to the collision with the cassette moving device, and to prevent the fall of the substrate located on the top of the cassette There is.

1 is a perspective view showing a cassette provided with a substrate sensing device according to the present invention.
2 is a view showing the inside of the cassette according to the present invention.
3 is a diagram illustrating a distance display device attached to a substrate sensing device according to the present invention.

Hereinafter, a cassette provided with a substrate sensing apparatus according to the present invention will be described with reference to the accompanying drawings.

1 is a view schematically showing a cassette provided with a substrate sensing device according to the present invention.

As shown in FIG. 1, the upper plate 110 and the lower plate 120 of the cassette 100 are horizontally disposed with a predetermined distance spaced apart in the vertical direction.

In addition, both side surfaces of the upper plate 110 and the lower plate 120 are vertically connected to the upper plate 110 and the lower plate 120 to support the plurality of side bars 130. The front of the cassette 100 is open, the rear of the at least one or more back stopper 140 is arranged to connect the upper plate 110 and the lower plate 120, in the embodiment of the present invention the back stopper 140 is Two are placed.

On one surface of each side bar 130, that is, one surface in contact with the inside of the cassette 100, a plurality of support bars 131 are disposed at equal intervals along the vertical direction. The space provided between the support bars 131 is a slot 135 in which a substrate (not shown) is inserted and accommodated.

On the other hand, when the substrate is inserted into the slot 135 of the cassette 100 having the structure as described above, both sides of the substrate is supported with the support bar 131 is caught. However, since the substrate is thin in thickness, the substrate is sag down in the state in which the substrate is accommodated in the slot 135.

Therefore, the cassette 100 may be provided with a structure capable of supporting the intermediate portion of the substrate which is liable to sag. For example, a plurality of back stopper bars 141 extending to the front of the cassette 100 on one surface of the back stopper 140 disposed on the rear side of the cassette 100, that is, the surface contacting the inner surface of the cassette 100. Are provided.

When the support bar 131 and the back stopper bar 141 are provided in the cassette 100 as described above, an intermediate portion of the substrates accommodated in the slot 135 is supported by the back stopper bar 141. Therefore, it is possible to effectively prevent the intermediate part of each substrate accommodated in the slot 135 from sagging down.

In the cassette 100 having the structure as described above, a plurality of substrates to be transferred through the substrate transfer apparatus are accommodated.

As shown in FIG. 2, the cassette is provided with a substrate detecting apparatus 200 including a plurality of sensors for measuring the distance between the substrate and the cassette to detect the exact position of the substrate.

The substrate detecting apparatus 200 may include first, second and third sensors 212a, 212b, and 212c sensing the sides of the cassette 100 in which the substrate is accommodated, and the lowermost slot 135 of the cassette 100. The sensor support substrate 210 is accommodated in and attached to the plurality of sensors 212a, 212b, and 212c.

The first, second, and third sensors 212a, 212b, and 212c are connected to a distance display device (FIG. 3) to transmit the measured distance between the side of the substrate and the cassette to the user.

The first, second and third sensors 212a, 212b, and 212c may be formed of two or more sensors. In the embodiment of the present invention, the first, second and third sensors 212a, 212b, and 212c may include two sensors. In other words, a distance measuring sensor for measuring the distance between the side bar 130 and the back stopper 140 is used.

The first sensor 212a is attached to an upper portion of the sensor support substrate 210 so as to correspond to each of the side bars 130 disposed at the outermost side of the side bars 130 disposed on one side of the cassette, and a third sensor. 212c is attached to an upper portion of the sensor support substrate 210 so as to correspond to each of the side bars 130 disposed at the outermost side of the side bars 130 disposed on the other side of the cassette, and the second sensor 212b is Attached to correspond to each of the back stoppers 140 of the cassette.

At this time, the robot arm 301 of the substrate transfer device 300 between the first sensor 212a and the second sensor 212b disposed to correspond to the back stopper 140 of the cassette among the two first sensors 212a. The robot arm 301 of the transfer device 300 of the substrate is disposed between the two second sensors, and is arranged to correspond to the back stopper 140 of the cassette among the two third sensors 212c. The robot arm 301 of the substrate transfer device 300 is also disposed between the third sensor 212c and the second sensor 212b. That is, the sensors are not disposed at the corresponding positions of the robot arm 301 of the substrate transfer device 300, and the sensors are not disposed at the front of the cassette.

As such, when the substrate is housed in the cassette, the sensors located on the three sides of the cassette measure the distance between the substrate and the cassette and transmit it to the user so that the user can recognize whether the cassette and the substrate are seated in place. Will be.

Therefore, the cassette equipped with a substrate sensing device according to the present invention measures the distance between the substrate and the cassette due to the sensors located on three sides of the cassette and transmits it to the user to determine whether the cassette and the substrate are seated in place. By recognizing the distance, the distance between the substrate and the cassette can be detected more easily than when the human eye detects it, thereby shortening the distance sensing measurement time, and detecting the position of the substrate inside the cassette. As a result, it is possible to prevent a safety accident due to a collision with the cassette moving device, and to prevent the fall of the substrate located on the top of the cassette.

100: cassette 110: top plate
120: bottom 130: sidebar
131: support bar 140: back support
141: white support bar 200: substrate detection device
210: sensor support substrate
212a, 212b, 212c: first, second and third sensors
300: substrate transfer device 301: robot arm

Claims (4)

The upper plate and the lower plate disposed horizontally spaced apart from a predetermined distance, and positioned between the upper plate and the lower plate to support them, a plurality of side bars formed on both sides, the side bars formed on one surface in contact with the inside of the cassette A plurality of support bars, a plurality of back stoppers disposed between and supported by the upper and lower plates, and a plurality of back stoppers formed on a rear surface thereof, and the plurality of back stopper bars formed on one surface of the cassette in contact with the inside of the cassette. In the cassette,
And a substrate sensing device including a back stopper formed on a rear surface of the cassette and a substrate sensing device having first, second and third sensors sensing distances between side bars formed on both sides of the cassette. The method of claim 1. The substrate sensing device
And a sensor support substrate accommodated in each of the support bars positioned at the lowermost end of the cassette, to which the first, second, and third sensors are attached. The method of claim 1, wherein each of the first, second and third sensors
Cassette provided with a substrate sensing device, characterized in that consisting of two or more sensors. The method according to claim 1,
The first sensor is attached to an upper portion of the sensor support substrate so as to correspond to each of the side bars disposed at the outermost side of the plurality of side bars disposed on one side of the cassette, and the third sensor is disposed on the other side of the cassette. The substrate sensing apparatus is attached to an upper portion of the sensor support substrate so as to correspond to each of the side bars disposed at the outermost side of the plurality of side bars, and the second sensor is attached to correspond to each of the back stoppers of the cassette. Cassette provided.

KR1020100014428A 2010-02-18 2010-02-18 Cassette having substrate detecting appratus KR20110094805A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020100014428A KR20110094805A (en) 2010-02-18 2010-02-18 Cassette having substrate detecting appratus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100014428A KR20110094805A (en) 2010-02-18 2010-02-18 Cassette having substrate detecting appratus

Publications (1)

Publication Number Publication Date
KR20110094805A true KR20110094805A (en) 2011-08-24

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KR1020100014428A KR20110094805A (en) 2010-02-18 2010-02-18 Cassette having substrate detecting appratus

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102502109A (en) * 2011-11-18 2012-06-20 友达光电股份有限公司 Substrate box and adjustable sensing device thereof
CN103412347A (en) * 2013-07-23 2013-11-27 合肥京东方光电科技有限公司 Cartridge and detecting method thereof
WO2017041490A1 (en) * 2015-09-10 2017-03-16 京东方科技集团股份有限公司 Substrate cassette

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102502109A (en) * 2011-11-18 2012-06-20 友达光电股份有限公司 Substrate box and adjustable sensing device thereof
CN102502109B (en) * 2011-11-18 2013-12-25 友达光电股份有限公司 Substrate box and adjustable sensing device thereof
CN103412347A (en) * 2013-07-23 2013-11-27 合肥京东方光电科技有限公司 Cartridge and detecting method thereof
CN103412347B (en) * 2013-07-23 2016-02-24 合肥京东方光电科技有限公司 The detection method of card casket and card casket
US10386181B2 (en) 2013-07-23 2019-08-20 Boe Technology Group Co., Ltd. Cartridge and detection method for the same
WO2017041490A1 (en) * 2015-09-10 2017-03-16 京东方科技集团股份有限公司 Substrate cassette

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