CN102500573B - 一种α-Al2O3单晶的清洗方法 - Google Patents
一种α-Al2O3单晶的清洗方法 Download PDFInfo
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- CN102500573B CN102500573B CN 201110350729 CN201110350729A CN102500573B CN 102500573 B CN102500573 B CN 102500573B CN 201110350729 CN201110350729 CN 201110350729 CN 201110350729 A CN201110350729 A CN 201110350729A CN 102500573 B CN102500573 B CN 102500573B
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CN102500573A CN102500573A (zh) | 2012-06-20 |
CN102500573B true CN102500573B (zh) | 2013-08-07 |
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Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103014875B (zh) * | 2012-11-30 | 2015-10-21 | 甘肃虹光电子有限责任公司 | 一种人造蓝宝石薄片的处理方法 |
CN103949429A (zh) * | 2014-04-25 | 2014-07-30 | 哈尔滨工业大学 | 碳化硅单晶的清洗方法 |
CN107282525B (zh) * | 2017-06-30 | 2019-09-13 | 芜湖通潮精密机械股份有限公司 | 适用于陶瓷产品的清洗工艺 |
CN109065458A (zh) * | 2018-07-13 | 2018-12-21 | 无锡天杨电子有限公司 | 一种轨道交通芯片封装用氮化铝陶瓷基板的黑边清洗方法 |
CN109457229A (zh) * | 2018-12-24 | 2019-03-12 | 东华大学 | 一种硅基二氧化钒薄膜及其制备和应用 |
CN111468462A (zh) * | 2019-01-23 | 2020-07-31 | 山东浪潮华光光电子股份有限公司 | 一种led减薄贴片用陶瓷盘碳化层的去除方法 |
CN111097748A (zh) * | 2019-12-27 | 2020-05-05 | 北京理工大学 | 一种大尺寸蓝宝石窗口抛光后的多元复合清洗方法 |
CN111393189B (zh) * | 2019-12-30 | 2022-04-01 | 杭州大和江东新材料科技有限公司 | 一种用于去除陶瓷产品表面颗粒的方法 |
CN111375592A (zh) * | 2020-03-05 | 2020-07-07 | 锐捷光电科技(江苏)有限公司 | 一种清洗蓝宝石晶片表面的方法 |
CN112160032A (zh) * | 2020-09-03 | 2021-01-01 | 深圳第三代半导体研究院 | 晶体处理方法 |
CN113894097B (zh) * | 2021-09-29 | 2022-08-16 | 广东先导微电子科技有限公司 | 化学机械抛光后的碲锌镉单晶晶片的清洗工艺 |
CN114653666A (zh) * | 2022-03-17 | 2022-06-24 | 安徽光智科技有限公司 | 砷化铟多晶的清洗方法 |
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KR100663781B1 (ko) * | 2003-01-31 | 2007-01-02 | 히다치 가세고교 가부시끼가이샤 | Cμρ연마제 및 연마방법 |
CN1833816A (zh) * | 2005-11-23 | 2006-09-20 | 周海 | 蓝宝石晶片纳米级超光滑加工工艺 |
US20080289650A1 (en) * | 2007-05-24 | 2008-11-27 | Asm America, Inc. | Low-temperature cleaning of native oxide |
CN101912855B (zh) * | 2010-07-21 | 2012-09-05 | 河北工业大学 | 蓝宝石衬底材料抛光后表面洁净方法 |
CN101974785A (zh) * | 2010-11-03 | 2011-02-16 | 天津市环欧半导体材料技术有限公司 | 一种硅多晶原料的清洗方法 |
CN102218410A (zh) * | 2011-04-19 | 2011-10-19 | 浙江露笑光电有限公司 | 蓝宝石抛光后的清洗方法 |
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