CN102487050B - 功率半导体器件及其制造方法 - Google Patents
功率半导体器件及其制造方法 Download PDFInfo
- Publication number
- CN102487050B CN102487050B CN201010589790.3A CN201010589790A CN102487050B CN 102487050 B CN102487050 B CN 102487050B CN 201010589790 A CN201010589790 A CN 201010589790A CN 102487050 B CN102487050 B CN 102487050B
- Authority
- CN
- China
- Prior art keywords
- layer
- region
- separator
- grid
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010589790.3A CN102487050B (zh) | 2010-12-03 | 2010-12-03 | 功率半导体器件及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010589790.3A CN102487050B (zh) | 2010-12-03 | 2010-12-03 | 功率半导体器件及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102487050A CN102487050A (zh) | 2012-06-06 |
CN102487050B true CN102487050B (zh) | 2015-11-25 |
Family
ID=46152524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010589790.3A Active CN102487050B (zh) | 2010-12-03 | 2010-12-03 | 功率半导体器件及其制造方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102487050B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103811545B (zh) * | 2012-11-06 | 2017-09-29 | 比亚迪股份有限公司 | 一种改善扩散区域形貌的功率器件及其制造方法 |
CN104810350A (zh) * | 2014-01-26 | 2015-07-29 | 北大方正集团有限公司 | 一种功率集成器件 |
CN107068569B (zh) * | 2017-03-16 | 2020-02-14 | 重庆中科渝芯电子有限公司 | 一种带背面腐蚀氧化层工艺的功率mosfet制造方法 |
CN110942992B (zh) * | 2018-09-21 | 2021-08-17 | 无锡华润上华科技有限公司 | 垂直双扩散半导体元器件及其制造方法 |
CN112825301B (zh) * | 2019-11-21 | 2022-08-12 | 东南大学 | 绝缘栅双极型晶体管器件及其制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4396934A (en) * | 1980-01-31 | 1983-08-02 | Sanyo Electric Co., Ltd. | Corrosion resistant structure for conductor and PSG layered semiconductor device |
US5179034A (en) * | 1987-08-24 | 1993-01-12 | Hitachi, Ltd. | Method for fabricating insulated gate semiconductor device |
CN101452950A (zh) * | 2007-12-04 | 2009-06-10 | 科达半导体有限公司 | 一种采用氮化硅(Si3N4)和掺磷氧化硅(PSG)复合薄膜隔离技术的IGBT功率器件及其制造工艺 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58169976A (ja) * | 1982-03-30 | 1983-10-06 | Fujitsu Ltd | 半導体装置の製造方法 |
JP2002246310A (ja) * | 2001-02-14 | 2002-08-30 | Sony Corp | 半導体薄膜の形成方法及び半導体装置の製造方法、これらの方法の実施に使用する装置、並びに電気光学装置 |
-
2010
- 2010-12-03 CN CN201010589790.3A patent/CN102487050B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4396934A (en) * | 1980-01-31 | 1983-08-02 | Sanyo Electric Co., Ltd. | Corrosion resistant structure for conductor and PSG layered semiconductor device |
US5179034A (en) * | 1987-08-24 | 1993-01-12 | Hitachi, Ltd. | Method for fabricating insulated gate semiconductor device |
CN101452950A (zh) * | 2007-12-04 | 2009-06-10 | 科达半导体有限公司 | 一种采用氮化硅(Si3N4)和掺磷氧化硅(PSG)复合薄膜隔离技术的IGBT功率器件及其制造工艺 |
Also Published As
Publication number | Publication date |
---|---|
CN102487050A (zh) | 2012-06-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102487050B (zh) | 功率半导体器件及其制造方法 | |
CN202534649U (zh) | 提高截止效果的沟槽型功率mos器件 | |
US9859395B2 (en) | Semiconductor device with a passivation layer | |
CN101866923B (zh) | 三层光罩沟槽mos器件及制造方法 | |
CN103579343A (zh) | 一种超结沟槽金属氧化物半导体场效应管及其制造方法 | |
CN104183644A (zh) | 一种超结沟槽金属氧化物半导体场效应管及其制造方法 | |
CN102214691B (zh) | 一种沟槽金属氧化物半导体场效应管及其制造方法 | |
CN101707210A (zh) | 一种抗辐照的场效应晶体管、cmos集成电路及其制备 | |
TWI496300B (zh) | 異質接面太陽能電池及其製造方法 | |
CN108198855A (zh) | 半导体元件、半导体基底及其形成方法 | |
CN102097433A (zh) | 一种沟槽金属氧化物半导体场效应管及其制造方法 | |
CN102737970B (zh) | 半导体器件及其栅介质层制造方法 | |
CN102403353B (zh) | 一种沟槽金属氧化物半导体场效应管及其制造方法 | |
CN102637581A (zh) | 一种防止硼掺杂层释气的方法 | |
CN103377944B (zh) | 半导体器件制造方法 | |
TWI487112B (zh) | 半導體裝置及其製造方法 | |
CN201725795U (zh) | 三层光罩沟槽mos器件 | |
CN103515245A (zh) | 基于高能离子注入方式的通道分压场效应管及生产方法 | |
CN105633171A (zh) | 一种薄膜晶体管及其制作方法、显示装置 | |
JP2019083230A5 (zh) | ||
CN203521427U (zh) | 基于高能离子注入方式的通道分压场效应管 | |
CN102214560A (zh) | 电阻器结构及其制造方法 | |
CN102064193B (zh) | Dddmos及其制造方法 | |
CN104867974A (zh) | Ldmos器件及其制作方法 | |
CN202153520U (zh) | 一种igbt栅源侧台保护功率器件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191204 Address after: 518119 1 Yanan Road, Kwai Chung street, Dapeng New District, Shenzhen, Guangdong Patentee after: SHENZHEN BYD MICROELECTRONICS Co.,Ltd. Address before: 518118 Pingshan Road, Pingshan Town, Shenzhen, Guangdong, No. 3001, No. Patentee before: BYD Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 518119 No.1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee after: BYD Semiconductor Co.,Ltd. Address before: 518119 No.1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee before: BYD Semiconductor Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 518119 No.1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee after: BYD Semiconductor Co.,Ltd. Address before: 518119 No.1 Yan'an Road, Kwai Chung street, Dapeng New District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN BYD MICROELECTRONICS Co.,Ltd. |