CN102474204B - 压电致动器以及具有压电致动器的光扫描装置 - Google Patents

压电致动器以及具有压电致动器的光扫描装置 Download PDF

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Publication number
CN102474204B
CN102474204B CN201080032814.3A CN201080032814A CN102474204B CN 102474204 B CN102474204 B CN 102474204B CN 201080032814 A CN201080032814 A CN 201080032814A CN 102474204 B CN102474204 B CN 102474204B
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China
Prior art keywords
piezoelectric actuator
axis
spring
driving
drive
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CN201080032814.3A
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Chinese (zh)
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CN102474204A (zh
Inventor
山田司
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Mitsumi Electric Co Ltd
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Mitsumi Electric Co Ltd
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Publication of CN102474204A publication Critical patent/CN102474204A/zh
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201080032814.3A 2009-09-04 2010-08-31 压电致动器以及具有压电致动器的光扫描装置 Active CN102474204B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009205313A JP5509742B2 (ja) 2009-09-04 2009-09-04 圧電アクチュエータ及びこれを用いた光走査装置
JP2009-205313 2009-09-04
PCT/JP2010/064794 WO2011027742A1 (ja) 2009-09-04 2010-08-31 圧電アクチュエータ及び圧電アクチュエータを備える光走査装置

Publications (2)

Publication Number Publication Date
CN102474204A CN102474204A (zh) 2012-05-23
CN102474204B true CN102474204B (zh) 2014-11-05

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Family Applications (1)

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CN201080032814.3A Active CN102474204B (zh) 2009-09-04 2010-08-31 压电致动器以及具有压电致动器的光扫描装置

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Country Link
JP (1) JP5509742B2 (enExample)
KR (1) KR101478205B1 (enExample)
CN (1) CN102474204B (enExample)
WO (1) WO2011027742A1 (enExample)

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* Cited by examiner, † Cited by third party
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JP5293668B2 (ja) * 2010-03-30 2013-09-18 パナソニック株式会社 光学反射素子
JP5323155B2 (ja) * 2011-09-08 2013-10-23 富士フイルム株式会社 ミラー駆動装置及びその駆動方法並びに製造方法
JP5790384B2 (ja) * 2011-09-30 2015-10-07 ミツミ電機株式会社 アクチュエータ及び光走査装置
WO2013185812A1 (en) * 2012-06-13 2013-12-19 Lemoptix Sa A mems device
JP6052100B2 (ja) * 2012-09-27 2016-12-27 ミツミ電機株式会社 圧電アクチュエータ及び光走査装置
JP2014126725A (ja) * 2012-12-27 2014-07-07 Funai Electric Co Ltd 走査ミラー装置
KR101449952B1 (ko) * 2013-10-18 2014-10-14 희성전자 주식회사 광 제공 모듈 및 이를 구비하는 디스플레이 장치
JP6289957B2 (ja) * 2014-03-25 2018-03-07 スタンレー電気株式会社 光偏向器
JP6287546B2 (ja) * 2014-04-25 2018-03-07 ミツミ電機株式会社 アクチュエータ及びエアポンプ、理美容機器及びレーザー走査機器
JP6310786B2 (ja) * 2014-06-24 2018-04-11 スタンレー電気株式会社 光偏向器
JP6648443B2 (ja) * 2014-10-15 2020-02-14 株式会社リコー 光偏向器、２次元画像表示装置、光走査装置及び画像形成装置
US9766450B2 (en) 2014-10-15 2017-09-19 Ricoh Company, Ltd. Light deflector, two-dimensional image display apparatus, optical scanner, and image forming apparatus
CN108604008B (zh) * 2016-02-17 2020-11-10 三菱电机株式会社 反射镜驱动装置、反射镜驱动装置的控制方法及反射镜驱动装置的制造方法
EP3640704B1 (en) * 2017-06-13 2023-08-09 Mitsubishi Electric Corporation Optical scanning device and method for adjusting optical scanning device
EP3608728B1 (fr) * 2018-08-08 2022-02-16 Nivarox-FAR S.A. Spiral thermocompensé coloré et son procédé de fabrication
EP3835846A4 (en) 2018-08-10 2022-04-27 Hamamatsu Photonics K.K. Actuator device and method for manufacturing actuator device
WO2020085063A1 (ja) * 2018-10-25 2020-04-30 富士フイルム株式会社 マイクロミラーデバイスおよびマイクロミラーデバイスの駆動方法
JP7247778B2 (ja) * 2019-06-20 2023-03-29 株式会社リコー 光偏向装置、レーザレーダ装置、及び画像形成装置
EP3825748A1 (en) 2019-11-21 2021-05-26 Ricoh Company, Ltd. Light reflection device and mobile object
JP7600030B2 (ja) 2021-05-14 2024-12-16 スタンレー電気株式会社 光偏向器
JP7667043B2 (ja) 2021-09-10 2025-04-22 スタンレー電気株式会社 光偏向器
US20230384581A1 (en) * 2022-05-26 2023-11-30 Microsoft Technology Licensing, Llc Piezoelectrically-actuated resonant scanning mirror

Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2005268074A (ja) * 2004-03-19 2005-09-29 Takeuchi Kogyo Kk フレキシブルフラットケーブル母材およびフレキシブルフラットケーブル
CN1786766A (zh) * 2005-12-07 2006-06-14 云南省煤炭供销总公司 闪耀光栅数字微镜显示系统
CN101478269A (zh) * 2009-02-12 2009-07-08 上海交通大学 带有延伸臂的u型柔性梁复合材料电热微驱动器

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JPH09159938A (ja) * 1995-12-11 1997-06-20 Fuji Electric Co Ltd マイクロミラー装置
JP4092283B2 (ja) * 2003-11-17 2008-05-28 スタンレー電気株式会社 ２次元光スキャナ及び光学装置
JP2005266074A (ja) * 2004-03-17 2005-09-29 Anritsu Corp 光スキャナ
JP4984117B2 (ja) * 2006-07-13 2012-07-25 スタンレー電気株式会社 ２次元光スキャナ、それを用いた光学装置および２次元光スキャナの製造方法
JP5239382B2 (ja) * 2008-02-19 2013-07-17 パナソニック株式会社 光学反射素子

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005268074A (ja) * 2004-03-19 2005-09-29 Takeuchi Kogyo Kk フレキシブルフラットケーブル母材およびフレキシブルフラットケーブル
CN1786766A (zh) * 2005-12-07 2006-06-14 云南省煤炭供销总公司 闪耀光栅数字微镜显示系统
CN101478269A (zh) * 2009-02-12 2009-07-08 上海交通大学 带有延伸臂的u型柔性梁复合材料电热微驱动器

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP特开2005-268074A 2005.09.29 *
JP特开2008-20701A 2008.01.31 *
JP特开平9-159938A 1997.06.20 *

Also Published As

Publication number Publication date
JP5509742B2 (ja) 2014-06-04
KR20120039662A (ko) 2012-04-25
CN102474204A (zh) 2012-05-23
KR101478205B1 (ko) 2014-12-31
JP2011061881A (ja) 2011-03-24
WO2011027742A1 (ja) 2011-03-10

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