CN102459914A - 用于预测真空泵的转子旋转时的故障的方法及相关的抽吸装置 - Google Patents

用于预测真空泵的转子旋转时的故障的方法及相关的抽吸装置 Download PDF

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Publication number
CN102459914A
CN102459914A CN2010800286297A CN201080028629A CN102459914A CN 102459914 A CN102459914 A CN 102459914A CN 2010800286297 A CN2010800286297 A CN 2010800286297A CN 201080028629 A CN201080028629 A CN 201080028629A CN 102459914 A CN102459914 A CN 102459914A
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CN
China
Prior art keywords
vacuum pump
pump
events
rotor
sequence
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Pending
Application number
CN2010800286297A
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English (en)
Chinese (zh)
Inventor
N·贝古
F·马丁
C·帕里赛
S·加利谢
N·莫格尔
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Alcatel Lucent SAS
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Alcatel Lucent SAS
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=41435463&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN102459914(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of CN102459914A publication Critical patent/CN102459914A/zh
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/003—Measuring characteristics of vibrations in solids by using direct conduction to the detector of rotating machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/12—Measuring characteristics of vibrations in solids by using direct conduction to the detector of longitudinal or not specified vibrations
    • G01H1/14—Frequency
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
    • G05B19/4065—Monitoring tool breakage, life or condition
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0243—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults model based detection method, e.g. first-principles knowledge model
    • G05B23/0245—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults model based detection method, e.g. first-principles knowledge model based on a qualitative model, e.g. rule based; if-then decisions
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0283—Predictive maintenance, e.g. involving the monitoring of a system and, based on the monitoring results, taking decisions on the maintenance schedule of the monitored system; Estimating remaining useful life [RUL]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/12—Vibration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/80—Diagnostics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
CN2010800286297A 2009-06-26 2010-06-24 用于预测真空泵的转子旋转时的故障的方法及相关的抽吸装置 Pending CN102459914A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0903125A FR2947309A1 (fr) 2009-06-26 2009-06-26 Procede de prediction d'une defaillance de la rotation du rotor d'une pompe a vide et dispositif de pompage associe
FR09/03125 2009-06-26
PCT/EP2010/058994 WO2010149738A1 (fr) 2009-06-26 2010-06-24 Procede de prediction d'une defaillance de la rotation du rotor d'une pompe a vide et dispositif de pompage associe

Publications (1)

Publication Number Publication Date
CN102459914A true CN102459914A (zh) 2012-05-16

Family

ID=41435463

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010800286297A Pending CN102459914A (zh) 2009-06-26 2010-06-24 用于预测真空泵的转子旋转时的故障的方法及相关的抽吸装置

Country Status (9)

Country Link
US (1) US9534609B2 (fr)
EP (1) EP2446147B2 (fr)
JP (1) JP2012530875A (fr)
KR (1) KR101758211B1 (fr)
CN (1) CN102459914A (fr)
FR (1) FR2947309A1 (fr)
SG (1) SG176928A1 (fr)
TW (1) TWI475159B (fr)
WO (1) WO2010149738A1 (fr)

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CN110709607A (zh) * 2017-06-06 2020-01-17 普发真空公司 用于监视泵送装置的运转状态的方法
CN110926588A (zh) * 2018-09-19 2020-03-27 长鑫存储技术有限公司 一种半导体设备振动元件性能监测方法及系统
CN114151343A (zh) * 2017-03-17 2022-03-08 株式会社荏原制作所 信息处理装置、信息处理系统、信息处理方法
US11946470B2 (en) 2017-03-17 2024-04-02 Ebara Corporation Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method

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US10638295B2 (en) 2015-01-17 2020-04-28 Machinesense, Llc System and method for turbomachinery preventive maintenance and root cause failure determination
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US10613046B2 (en) 2015-02-23 2020-04-07 Machinesense, Llc Method for accurately measuring real-time dew-point value and total moisture content of a material
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US10481195B2 (en) 2015-12-02 2019-11-19 Machinesense, Llc Distributed IoT based sensor analytics for power line diagnosis
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US10648735B2 (en) 2015-08-23 2020-05-12 Machinesense, Llc Machine learning based predictive maintenance of a dryer
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EP3281081B1 (fr) 2015-09-04 2020-08-05 Hewlett-Packard Enterprise Development LP Prédictions de défaillance de soupape
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US10497185B2 (en) * 2017-11-28 2019-12-03 The Boeing Company Apparatus and method for vehicle maintenance scheduling and fault monitoring
US10921792B2 (en) 2017-12-21 2021-02-16 Machinesense Llc Edge cloud-based resin material drying system and method
CN108415789B (zh) * 2018-01-24 2020-05-22 西安交通大学 面向大规模混合异构存储系统的节点故障预测系统及方法
JP7006520B2 (ja) * 2018-06-14 2022-01-24 株式会社島津製作所 真空ポンプおよび診断システム
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DE112020003006T5 (de) * 2019-06-21 2022-03-10 Watlow Electric Manufacturing Company System und Verfahren für das Vorhersagen und Kontrollieren der Leistungsfähigkeit von Gasleitungen
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US11681284B2 (en) * 2021-08-04 2023-06-20 Sap Se Learning method and system for determining prediction horizon for machinery

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114151343A (zh) * 2017-03-17 2022-03-08 株式会社荏原制作所 信息处理装置、信息处理系统、信息处理方法
US11946470B2 (en) 2017-03-17 2024-04-02 Ebara Corporation Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method
CN110709607A (zh) * 2017-06-06 2020-01-17 普发真空公司 用于监视泵送装置的运转状态的方法
CN110926588A (zh) * 2018-09-19 2020-03-27 长鑫存储技术有限公司 一种半导体设备振动元件性能监测方法及系统

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Publication number Publication date
SG176928A1 (en) 2012-01-30
FR2947309A1 (fr) 2010-12-31
TW201115027A (en) 2011-05-01
KR20120106934A (ko) 2012-09-27
US20120209569A1 (en) 2012-08-16
EP2446147B1 (fr) 2016-02-10
EP2446147A1 (fr) 2012-05-02
US9534609B2 (en) 2017-01-03
WO2010149738A1 (fr) 2010-12-29
KR101758211B1 (ko) 2017-07-14
EP2446147B2 (fr) 2022-09-07
TWI475159B (zh) 2015-03-01
JP2012530875A (ja) 2012-12-06

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