CN102384841A - Spectral responsivity test method for plane array detector - Google Patents
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Abstract
The invention discloses a spectral responsivity test method for a plane array detector, which belongs to the field of optical test and metering. The method is characterized in that on the basis of the spectral responsivity test method for a unit detector, the spectral responsivity of an image element in the center of the plane array detector is tested, the measurement of the space uniformity of the plane array detector is combined, and the accurate measurement on the full-wave-band spectral responsivity of the plane array detector in the whole photosensitive surface is realized. The test method solves the difficult problem of the spectral responsivity measurement of the plane array detector, the blank of the spectral responsivity measurement field of the plane array detector is filled, and in addition, the method has the characteristics that the resources are shared, the cost is saved, and the measuring efficiency is high.
Description
Technical field
The invention belongs to optical metrology and field tests, relate generally to a kind of method of testing of detector spectral response degree, relate in particular to a kind of method of testing of planar array detector spectral responsivity.
Background technology
Photodetector is being brought into play important effect in optical technology and the optical engineering in modern times.Photodetector has a wide range of applications at aspects such as communication, weather satellite, Industry Control, research and production, military projects.The military applications of photodetector mainly contains ultraviolet monitoring and guidance, infrared imaging and guidance, military remote sensing, star tracker, target range measurement application etc.
Photodetector develops into the complex array detector from single-element detector in recent years; Planar array detector particularly; Compare with traditional single-element detector; But have highly sensitive, advantages such as the visual field is big, spatial resolution is high, the direct imaging far away of detection decipherment distance, therefore, be widely used in fields such as space flight, military project, national defence.Photodetector is a critical component of realizing opto-electronic conversion, and the quality of its performance will influence the performance of whole detection system.The main sign amount of photodetector performance has: the time response of the spectral responsivity of detector, responsiveness rectilinearity, detector and temperature characterisitic etc.; Wherein spectral responsivity is one of important technology parameter of detector, and it describes the relation between explorer response rate and the wavelength.The correct test of this parameter has great significance for global design of Analysis on Mechanism, process modification and the armament systems of detector etc.The spectral responsivity of photodetector was measured in 1997 is organized CCPC (luminosity radiation advisory committee) and BIPM (International Bureau of Wieghts and Measurements) to confirm as one of 6 international key property comparisons in optical metrology field by international metering.At present, Britain NPL and America NI ST all have the testing apparatus of detector spectral response degree, i.e. spectral responsivity measurement mechanism, and two tame breadboard measuring systems are closely similar, all are the measurements that is specifically designed to the detector spectral response degree; Domestic China metering institute has set up ultraviolet-visible-near-infrared spectrum responsiveness standard at present, and defense-related science, technology and industry optics one-level test satellite location has also been set up the spectral responsivity measurement mechanism.Yet these proving installations all are the tests to the single-element detector spectral responsivity, and they all adopt method of substitution to test basically; For example; " laser and infrared " the 33rd volume is on the 5th phase, in " ultraviolet and visible-light detector spectral response Development of Test System " literary composition; The method that adopts is exactly existing method of substitution (referring to Fig. 1), and this method is used for the spectral responsivity of single-element detector is tested.Yet because planar array detector has a lot of photosensitive units; Under illumination, can export the corresponding series of signals of unit photosensitive simultaneously, so the spectral responsivity of planar array detector is different from single-element detector, comprises that same photosensitive unit is to the responsiveness of position, space (being different photosensitive units) on the responsiveness of wavelength and the receiving plane to identical wavelength with it; The former spectral responsivity is the function of wavelength; The spectral responsivity of it and single-element detector is similar, and the latter's spectral responsivity is the function of locus, and the spatially uniform under the latter and certain wavelength points is similar; Therefore; For planar array detector, its spectral responsivity is the function of wavelength and locus, and the spectral responsivity of description planar array detector that be complete then need be described the variation of spectral responsivity with wavelength and locus; Need test the spectral responsivity of planar array detector all photosensitive units on whole photosurface, generally represent with the body spectral responsivity.At present, be that relevant report is not also seen in the test of body spectral responsivity to the method for testing of planar array detector spectral responsivity of all photosensitive units on whole photosurface.
Summary of the invention
The technical matters that the present invention will solve is to the difficult problem of present planar array detector body spectral responsivity test, a kind of method of testing of planar array detector spectral responsivity to be provided.
For solving the problems of the technologies described above, planar array detector spectral responsivity method of testing provided by the invention comprises following testing procedure:
The 1st step: open the integrating sphere light source; Under the control of computing machine; Make standard detector and tested surface array detector move into the measurement light path respectively one by one; So that the light that the integrating sphere light source sends is imaged on the photosurface center of standard detector or tested surface array detector after measuring light path, computing machine is with standard detector and the pairing mobile platform of tested surface array detector position are recorded as x1 and x2 respectively at this moment;
The 2nd step: computing machine is adjusted to the first wavelength points λ with monochromator
1, and the control mobile platform moves to x1 place, position, obtains the blended voltage signals V (λ that standard detector is exported respectively
1)
Mark mixesWith background voltage signal V (λ
1)
The mark back of the body, blended voltage signals background correction signal is obtained standard detector in first wavelength X
1First actual measurement voltage signal values V (λ at place
1)
Mark 1Repeat said process repeatedly, finally obtain the first wavelength points λ
1One group of actual measurement voltage signal values V (λ
1)
Mark n, n=1,2 ..., N, computing machine is to V (λ
1)
Mark nAverage back acquisition standard detector in first wavelength X
1Measured voltage values V (the λ at place
1)
Mark
The 3rd step: the computer control monochromator moves wavelength points λ according to step delta λ
mAnd m=2,3 ..., M, and according to the 2nd the step measuring process, obtain standard detector successively at the measured voltage values V of M-1 wavelength points (λ
m)
Mark, the value of Δ λ should be consistent with the step-length of standard detector spectral responsivity;
The 4th step: computing machine is adjusted to the first wavelength points λ with monochromator
1, and control mobile platform move to x2 place, position, obtain blended voltage signals V (i, j, the λ of each pixel of tested surface array detector focal beam spot place respectively
1)
MixedWith background voltage signal V (i, j, λ
1)
Carried on the back, i represents the line number and the i=1,2,3 of focal beam spot place pixel ..., I, j represents the columns and the j=1,2,3 of hot spot place pixel ..., J, with the actual measurement voltage signal background correction voltage signal of each pixel, obtain the tested surface array detector at the first wavelength points λ
1Actual measurement magnitude of voltage V (i, j, the λ of I * J that focal beam spot covers the pixel in place
1)
By 1, repeat said process repeatedly, finally obtain each pixel pairing one group of actual measurement voltage signal values V (i, j, λ
1)
By n, n=1,2 ..., N, to each group V (i, j, λ
1)
By nAverage, obtain measured voltage values V (i, j, the λ of I * J the pixel that focal beam spot covered on the tested surface array detector
1)
Quilt
The 5th step: the computer control monochromator moves wavelength points λ according to step delta λ
mAnd m=2,3 ..., M, and according to the measuring process in the 4th step, obtain I * J pixel that tested surface array detector focal beam spot place covers successively at the measured voltage values V of each wavelength points (i, j, λ
m)
Quilt
The 6th step: computing machine is according to measured voltage values V (i, j, λ
m)
Quilt, find out each wavelength points λ
mMeasured voltage values V (I/2, J/2, the λ of following tested surface array detector focal beam spot place center pixel
m), m=1,2,3 ..., M, and calculate the spectral responsivity S of tested surface array detector center pixel according to following formula
Quilt(I/2, J/2, λ
m) and preserve and should organize data:
In the following formula, S
Mark(λ
m) expression standard detector spectral responsivity and be known quantity;
The 7th step: computer control mobile platform motion; Make the tested surface array detector shift out the measurement light path; The integrating sphere light source is directly aimed at the tested surface array detector; The light that the integrating sphere light source is sent covers the whole photosurface of tested surface array detector, regulates the intensity of integrating sphere light source output signal, avoids the tested surface array detector saturated.Computing machine through digital voltmeter and data collecting card read successively the output of each pixel of the whole photosurface of tested surface array detector magnitude of voltage V (p, q) and storage should the group data, p represents the line number and the p=1 of the whole photosurface pixel of tested surface array detector; 23, ... P; Q represents the columns and the q=1 of the whole photosurface pixel of tested surface array detector; 2,3 ... Q;
The 8th step: computing machine according to following formula calculate spatially uniform U on the whole photosurface of tested surface array detector (p, q) and preserve this set of calculated data:
In the following formula, (P/2 Q/2) is the voltage output value of center pixel on the tested surface array detector photosurface to V;
The 9th step: computing machine calculates the spectral responsivity S of tested surface array detector according to following formula
Quilt:
S
Quilt=S
Quilt(I/2, J/2, λ
m) * U (p, q) m=1,2,3 ..., M.
Overall technology effect of the present invention is embodied in following two aspects.
1) the present invention selects homogeneity heavy caliber integrating sphere standard sources preferably for use on the basis of existing single-element detector spectral responsivity proving installation, at first the quick unit of planar array detector center light spectral responsivity is tested; Then with integrating sphere light source direct irradiation on the tested surface array detector, the spatially uniform of quick of planar array detector overall optical is tested; Spectral responsivity with the center photosensitive unit combines with the spatially uniform of whole photosurface at last, just can obtain planar array detector at the full wave spectral responsivity of whole photosurface.Therefore; The invention solves the test difficult problem of planar array detector at whole photosurface all band spectral responsivity; Realized the transmission of single-element detector, for planar array detector provides technical support as the calibration testing of the imaging spectrometer machine system spectral responsivity of receiving system to planar array detector.
2) planar array detector spectral responsivity method of testing of the present invention is to be based upon on the basis of original single-element detector spectral responsivity proving installation, need not set up new proving installation, so the present invention has resource sharing, the characteristics of saving cost; Simultaneously, the present invention also tests the homogeneity of planar array detector in the process of finished surface array detector spectral responsivity test, and therefore, the present invention can test two performance parameters of planar array detector simultaneously, has improved the efficient of measuring.
Description of drawings
Fig. 1 is the schematic diagram of single-element detector spectral responsivity method of testing.
Fig. 2 is the principle schematic of single-element detector spectral responsivity proving installation.
Fig. 3 is the schematic diagram of planar array detector spectral responsivity method of testing of the present invention.
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment the present invention is made further detailed description.
In order to realize the test of planar array detector spectral responsivity; General plotting of the present invention is; On the basis of existing single-element detector spectral responsivity proving installation; Propose a kind of method of testing of planar array detector spectral responsivity, this method is that the photosensitive unit light spectrum responsiveness test of planar array detector center is combined with the inhomogeneity test of the whole photosensitive space of planes of planar array detector, thereby realizes the test of planar array detector at whole photosurface all band spectral responsivity.
According to shown in Figure 2; Single-element detector spectral responsivity proving installation comprises canonical product bulb separation light source 1, fore optics system 2; The beam splitting system 3 that contains electronic shutter, filter set, chopper and monochromator; Optic system for outputting 4, standard detector 5, the mobile platform 7 and computing machine 8 of measuring control and data processing software bag is housed.During measurement, standard detector 5 is placed on the mobile platform 7 through corresponding adjustable support respectively with tested surface array detector 6.Be imaged on the entrance slit place of monochromator behind the center of electronic shutter, optical filter and the chopper of the heavy caliber incident ray that integrating sphere light source 1 sends in fore optics system 2, beam splitting system 3; Monochromator becomes to measure required monochromatic radiation signal with broadband continuous radiation conversion of signals; The monochromatic radiation signal is imaged on the photosurface of standard detector 5 or tested surface array detector 6 through optic system for outputting 4; Standard detector 5 or tested detector 6 are sent into computing machine and are handled after converting the light signal that receives to voltage signal.
The concrete steps that employing said units detector spectral response degree proving installation carries out the test of planar array detector spectral responsivity are following:
The 1st step: be contained in standard detector 5 and tested surface array detector 6 on the mobile platform 7 through the first optics support and the second optics support respectively; Open integrating sphere light source 1; Regulate the position and the height of each mirror in the fore optics system 2; The light that integrating sphere light source 1 is sent is full of the entrance slit of monochromator behind fore optics system 2, electronic shutter, filter set, chopper; Regulate the position and the height of each mirror in the optic system for outputting 4 then; 7 motions of computer control mobile platform drive standard detector 5 and move into the output terminal of measuring light path respectively with tested surface array detector 6, the height of the first optics support and the second optics support on the adjusting mobile platform 7; Make light from the monochromator outgoing behind optic system for outputting 4; Be imaged on the photosurface center of standard detector 5 and tested surface array detector 6 respectively, computing machine 8 is x1 with the location records that standard detector 5 is positioned at above-mentioned measurement light path time shift moving platform 7, and the location records that tested surface array detector 6 is positioned at above-mentioned measurement light path time shift moving platform 7 is x2.
The 2nd step: computer control mobile platform 7 moves to x1 place, position, makes standard detector 5 be positioned at the output terminal of measuring light path, and the computer control monochromator is adjusted to the first wavelength points λ
1, at the first wavelength points λ
1The place, the computer control shutter is opened, and reads the blended voltage signals V (λ of standard detector 5 outputs through digital voltmeter and data collecting card
1)
Mark mixes, close shutter then, read the background voltage signal V (λ of standard detector 5 outputs
1)
The mark back of the body, according to formula V (λ
1)
Mark 1=V (λ
1)
Mark mixes-V (λ
1)
The mark back of the body, computing machine calculates standard detector 5 automatically at the first wavelength points λ
1The actual measurement voltage signal values V (λ at place
1)
Mark 1Repeat said process repeatedly, finally obtain the first wavelength points λ
1One group of actual measurement voltage signal values V (λ
1)
Mark n, n=1,2 ..., N, computing machine is to V (λ
1)
Mark nAverage back acquisition standard detector 5 in first wavelength X
1Measured voltage values V (the λ at place
1)
Mark
The 3rd step: the computer control monochromator moves wavelength points λ according to step delta λ
mAnd m=2,3 ..., M, and according to the 2nd the step measuring process, obtain standard detector 5 successively at the measured voltage values V of each wavelength points (λ
m)
MarkThe value of Δ λ should be consistent with the step-length of standard detector 5 spectral responsivities.
The 4th step: computer control mobile platform 7 moves to x2 place, position, makes tested surface array detector 6 be positioned at the output terminal of measuring light path, and the computer control monochromator is adjusted to the first wavelength points λ
1At the first wavelength points λ
1The place, the computer control shutter is opened, and reads blended voltage signals V (i, j, the λ of tested surface array detector 6 each pixel of hot spot place successively through digital voltmeter and data collecting card
1)
Mixed, i represents the line number and the i=1,2,3 of focal beam spot place pixel ..., I, j represents the columns and the j=1,2,3 of focal beam spot place pixel ..., J, close shutter then, read background voltage signal V (i, j, the λ of tested surface array detector 6 output
1)
Carried on the back, computing machine obtains tested surface array detector 6 at the first wavelength points λ with the actual measurement voltage signal background correction voltage signal of each pixel
1Actual measurement magnitude of voltage V (i, j, the λ of I * J that focal beam spot covers the pixel in place
1)
By 1, repeat said process repeatedly, finally obtain each pixel pairing one group of actual measurement voltage signal values V (i, j, λ
1)
By n, n=1,2 ..., N, computing machine is organized V (i, j, λ to each
1)
By nAverage, obtain measured voltage values V (i, j, the λ of I * J pixel of tested surface array detector 6 focal beam spot places covering
1)
Quilt
Be difficult to accomplish area owing to measure the focal beam spot area of light path output less than each pixel of planar array detector; And focal beam spot often will cover I * J pixel; Therefore; The pairing voltage signal of focal beam spot is one group of discrete voltage signal, wherein the size of each discrete voltage signal corresponding the power of a pixel institute receiving light power.Computing machine can be gathered the voltage signal of these pixels according to the sequence of positions of pixel (by row or by row), and is that V (store by the form of i * j) with two-dimensional array.
The 5th step: the computer control monochromator moves wavelength points λ according to step delta λ
mAnd m=2,3 ..., M, and according to the measuring process in the 4th step, obtain I * J pixel that tested surface array detector 6 focal beam spot places cover successively at the measured voltage values V of each wavelength points (i, j, λ
m)
Quilt
The 6th step: computing machine is according to measured voltage values V (i, j, λ
m)
Quilt, find out each wavelength points λ
mMeasured voltage values V (I/2, J/2, the λ of following tested surface array detector 6 focal beam spot place center pixels
m), m=1,2,3 ..., M, and calculate the spectral responsivity S of tested surface array detector 6 center pixels according to following formula
Quilt(I/2, J/2, λ
m) and preserve and should organize data:
In the following formula, S
Mark(λ
m) expression standard detector 5 spectral responsivity and be known quantity.
The 7th step: computer control mobile platform 7 motions; Make tested surface array detector 6 shift out the measurement light path; Integrating sphere light source 1 is directly aimed at tested surface array detector 6; The light that integrating sphere light source 1 is sent covers the whole photosurface of tested surface array detector 6, regulates the intensity of integrating sphere light source output signal, avoids tested surface array detector 6 saturated.Computing machine through digital voltmeter and data collecting card read successively the output of each pixel of tested surface array detector 6 whole photosurfaces magnitude of voltage V (p, q) and storage should the group data, p represents the line number and the p=1 of tested surface array detector 6 whole photosurface pixels; 23; ... P, q represent the columns and the q=1 of tested surface array detector 6 whole photosurface pixels, 2; 3 ... Q.
The 8th step: computing machine according to following formula calculate spatially uniform U on the tested surface array detector 6 whole photosurfaces (p, q) and preserve this set of calculated data:
In the following formula, (P/2 Q/2) is the voltage output value of center pixel on tested surface array detector 6 photosurfaces to V.
The 9th step: computing machine calculates P * Q pixel at wavelength points λ according to following formula
mSpectral responsivity S
Tested:
S
Quilt(p, q)=S
Quilt(I/2, J/2, λ
m) * U (p, q) m=1,2,3 ..., M
So, S
Quilt(p; Q) the body spectral responsivity of this group spectral response degrees of data that is tested surface array detector 6; Computing machine gets off this group spectral response degrees of data with the stored in form of electrical form; And draw out the cube figure (with m, p, q are coordinate axis) of tested surface array detector 6 spectral responsivities according to these group data.
Adopt method of testing provided by the invention, can realize the test of all kinds planar array detector spectral responsivity.In addition; The present invention is not limited only to the test to the planar array detector spectral responsivity; Also can be used for adopting the test of array or planar array detector, so the present invention can be used for the calibration testing of imaging spectrometer machine system as the imaging spectrometer spectral responsivity of receiving system.
Claims (1)
1. planar array detector spectral responsivity method of testing, it is characterized in that: this method comprises following measuring process:
The 1st step: open the integrating sphere light source; Under the control of computing machine; Make standard detector and tested surface array detector move into the measurement light path respectively one by one; So that the light that the integrating sphere light source sends is imaged on the photosurface center of standard detector or tested surface array detector after measuring light path, computing machine is with standard detector and the pairing mobile platform of tested surface array detector position are recorded as x1 and x2 respectively at this moment;
The 2nd step: computing machine is adjusted to the first wavelength points λ with monochromator
1, and the control mobile platform moves to x1 place, position, obtains the blended voltage signals V (λ that standard detector is exported respectively
1)
Mark mixesWith background voltage signal V (λ
1)
The mark back of the body, blended voltage signals background correction signal is obtained standard detector in first wavelength X
1First actual measurement voltage signal values V (λ at place
1)
Mark 1Repeat said process repeatedly, finally obtain the first wavelength points λ
1One group of actual measurement voltage signal values V (λ
1)
Mark n, n=1,2 ..., N, computing machine is to V (λ
1)
Mark nAverage back acquisition standard detector in first wavelength X
1Measured voltage values V (the λ at place
1)
Mark
The 3rd step: the computer control monochromator moves wavelength points λ according to step delta λ
mAnd m=2,3 ..., M, and according to the 2nd the step measuring process, obtain standard detector successively at the measured voltage values V of M-1 wavelength points (λ
m)
Mark, the value of Δ λ should be consistent with the step-length of standard detector spectral responsivity;
The 4th step: computing machine is adjusted to the first wavelength points λ with monochromator
1, and control mobile platform move to x2 place, position, obtain blended voltage signals V (i, j, the λ of each pixel of tested surface array detector focal beam spot place respectively
1)
MixedWith background voltage signal V (i, j, λ
1)
Carried on the back, i represents the line number and the i=1,2,3 of focal beam spot place pixel ..., I, j represents the columns and the j=1,2,3 of hot spot place pixel ..., J, with the actual measurement voltage signal background correction voltage signal of each pixel, obtain the tested surface array detector at the first wavelength points λ
1Actual measurement magnitude of voltage V (i, j, the λ of I * J that focal beam spot covers the pixel in place
1)
By 1, repeat said process repeatedly, finally obtain each pixel pairing one group of actual measurement voltage signal values V (i, j, λ
1)
By n, n=1,2 ..., N, to each group V (i, j, λ
1)
By nAverage, obtain measured voltage values V (i, j, the λ of I * J the pixel that focal beam spot covered on the tested surface array detector
1)
Quilt
The 5th step: the computer control monochromator moves wavelength points λ according to step delta λ
mAnd m=2,3 ..., M, and according to the measuring process in the 4th step, obtain I * J pixel that tested surface array detector focal beam spot place covers successively at the measured voltage values V of each wavelength points (i, j, λ
m)
Quilt
The 6th step: computing machine is according to measured voltage values V (i, j, λ
m)
Quilt, find out each wavelength points λ
mMeasured voltage values V (I/2, J/2, the λ of following tested surface array detector focal beam spot place center pixel
m), m=1,2,3 ..., M, and calculate the spectral responsivity S of tested surface array detector center pixel according to following formula
Quilt(I/2, J/2, λ
m) and preserve and should organize data:
In the following formula, S
Mark(λ
m) expression standard detector spectral responsivity and be known quantity;
The 7th step: computer control mobile platform motion; Make the tested surface array detector shift out the measurement light path; The integrating sphere light source is directly aimed at the tested surface array detector; The light that the integrating sphere light source is sent covers the whole photosurface of tested surface array detector, regulates the intensity of integrating sphere light source output signal, avoids the tested surface array detector saturated.Computing machine through digital voltmeter and data collecting card read successively the output of each pixel of the whole photosurface of tested surface array detector magnitude of voltage V (p, q) and storage should the group data, p represents the line number and the p=1 of the whole photosurface pixel of tested surface array detector; 23, ... P; Q represents the columns and the q=1 of the whole photosurface pixel of tested surface array detector; 2,3 ... Q;
The 8th step: computing machine according to following formula calculate spatially uniform U on the whole photosurface of tested surface array detector (p, q) and preserve this set of calculated data:
In the following formula, (P/2 Q/2) is the voltage output value of center pixel on the tested surface array detector photosurface to V;
The 9th step: computing machine calculates the spectral responsivity S of tested surface array detector according to following formula
Quilt:
S
Quilt=S
Quilt(I/2, J/2, λ
m) * U (p, q) m=1,2,3 ..., M.
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