CN201173822Y - Ultraviolet-vacuum ultraviolet spectroscopy radiation transfer characteristic test device - Google Patents

Ultraviolet-vacuum ultraviolet spectroscopy radiation transfer characteristic test device Download PDF

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Publication number
CN201173822Y
CN201173822Y CNU2008200716666U CN200820071666U CN201173822Y CN 201173822 Y CN201173822 Y CN 201173822Y CN U2008200716666 U CNU2008200716666 U CN U2008200716666U CN 200820071666 U CN200820071666 U CN 200820071666U CN 201173822 Y CN201173822 Y CN 201173822Y
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China
Prior art keywords
ultraviolet
vacuum tank
spectral
vacuum
communicated
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Expired - Fee Related
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CNU2008200716666U
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Chinese (zh)
Inventor
王淑荣
李福田
王立朋
林冠宇
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CNU2008200716666U priority Critical patent/CN201173822Y/en
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Publication of CN201173822Y publication Critical patent/CN201173822Y/en
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Abstract

The utility model relates to a test technology of spectral radiance transmission characteristic, in particular to a testing device for ultraviolet-vacuum ultraviolet spectral radiance transmission characteristic. The testing device comprises a monochrometer, a standard light source, a vacuum tank, a photoelectric multiplier tube fixed at one side of the rotating table in the vacuum tank, a cold pump and a molecular pump respectively communicated with the vacuum tank cavity through two gate valves, a dry pump communicated with a pipeline of the vacuum tank cavity, and a low temperature unit communicated with the vacuum tank cavity through a pipeline. One end of the vacuum tank is provided with a flange type interface through which the monochrometer or the standard light source can be connected in a replaceable way; a displacement platform translating and sliding in the direction perpendicular to the interface axes relatively is arranged in the vacuum tank, and the rotating table is arranged on the displacement platform. The testing device can achieve the spectral responsibility test of high precision spectral radiation brightness and spectral irradiance responsibility calibration of the whole ultraviolet spectral remote sensing instrument, the spectral responsivity test of the ultraviolet detector as well as the spectral transmission characteristic test of ultraviolet optical element.

Description

Ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test device
Technical field
The utility model relates to spectral radiance test transmission technology, particularly relates to a kind of proving installation that is used for ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic.
Technical background
Spectroscopy radiation transfer characteristic is meant that the spectral responsivity calibration of spectral instrument and this responsiveness are with environmental factor variation characteristics such as temperature and vacuum tightnesss, it is the important step in all kinds of remote optical sensing instrument developments, is used to set up the corresponding relation between remote optical sensing instrument input radiation amount and the instrument readout.The seventies in last century, under the promotion of space optical remote and plasma physics research, industry advanced country research on standard mechanism as: German physical technique research institute (PTB), Britain's National Physical Laboratory (NPL), USA National Institute of Standard and Technology (NIST) etc. have carried out the spectral radiance Study on standards based on steady argon arc of high-power wall and synchrotron radiation in succession, set up the covering ultraviolet, vacuum ultraviolet and even grenz ray wave band the spectral radiance transmission standard.For accurately obtaining space ultraviolet optics remote sensing instrument spectroscopic data, the eighties is domestic on short-wave band spectral radiance quantitative study basis, has set up brightness of ultraviolet spectrum spoke and UV and VUV spectral irradiance robot scaling equipment.
Along with deepening continuously of ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic testing research work, the ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test needs many proving installations to finish, UV and VUV wave band optics remote sensing instrument and optical element are to the oil contamination problem of proving installation place vacuum system simultaneously, had a strong impact on the precision of vacuum ultraviolet band spectrum radiation delivery characteristic test, restricted of the research of spectral instrument spectral responsivity with environmental factor variation characteristics such as temperature and vacuum tightnesss.
Summary of the invention
The purpose of this utility model provides a kind of multi-functional ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test device, to overcome the shortcoming complicated at present, on this proving installation, can realize the test of the calibration of ultraviolet spectrum remote sensing instrument complete machine high precision spectral radiance and spectral irradiance responsiveness and test of ultraviolet detector spectral responsivity and ultraviolet optics element spectral transmissions characteristic to the means of testing of ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic.
The utility model ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test device, comprise monochromator, standard sources, vacuum tank, be arranged on the cryopump that is fixed on photomultiplier on turntable one side, is communicated with the vacuum tank cavity respectively by two push-pull valves in the vacuum tank and molecular pump, the dried pump that is communicated with vacuum tank cavity official road, the low temperature unit that is communicated with the vacuum tank cavity by pipeline, one flange form interface is set, by described monochromator of the replaceable connection of this interface or standard sources on one end of described vacuum tank; One displacement platform with respect to the translation gliding of interface axis normal direction is set in vacuum tank, and described turntable is arranged on this displacement platform.
On described molecular pump, also be connected with cold-trap,, thereby obtain a vacuum environment of not having oil with the pollutant that exists in the absorption vacuum system.
The utility model ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test device can be realized two kinds of test functions: ultraviolet spectrum remote sensing instrument complete machine high precision spectral radiance and the calibration of spectral irradiance responsiveness; Test of ultraviolet detector spectral responsivity and the characteristic test of ultraviolet optics element spectral transmissions, when carrying out different test event, described flange form interface can be connected with monochromator or standard sources.
Description of drawings
Fig. 1 is the utility model ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test device structural representation;
Fig. 2 is the utility model vacuum system part-structure synoptic diagram;
Fig. 3 is the structural representation of standard sources in the utility model (7).
Embodiment
The embodiment that provides below in conjunction with accompanying drawing describes in further detail the utility model structure.
Referring to figs. 1 through Fig. 3, a kind of ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test device, comprise monochromator 6, standard sources 7, vacuum tank 1, be arranged on the photomultiplier 4 on turntable 2 one sides of being fixed in the vacuum tank 1, the cryopump 1.4 and the molecular pump 1.5 that are communicated with vacuum tank 1 cavity respectively by two push-pull valves 1.1, the dried pump 1.7 that is communicated with vacuum tank 1 cavity official road, the low temperature unit 1.8 that is communicated with vacuum tank 1 cavity by pipeline, one flange form interface 5 is set, by this described monochromator 6 of interface 5 replaceable connections or standard sources 7 on one end of described vacuum tank 1; One displacement platform 3 with respect to interface 5 axis normal direction translation glidings is set in vacuum tank 1, and described turntable 2 is arranged on this displacement platform 3.
On described molecular pump 1.5, also be connected with cold-trap 1.6,, thereby obtain a vacuum environment of not having oil with the pollutant that exists in the absorption vacuum system.Molecular pump 1.5 and dried pump 1.7 link together through pipeline and control cryopump 1.4 respectively, and electrical control cubicles 1.2 is by cable control cryopump slide valve 1.1, cryopump switch board 1.3, cryopump 1.4, molecular pump 1.5, dried pump 1.7 and low temperature unit 1.8.
Be furnished with temperature control on the control desk of electrical control cubicles 1.2 and show intelligence instrument, vacuum measurement Displaying Meter, flow process Displaying Meter and control power supply Displaying Meter etc.; outage arranged, cut off the water supply, overtemperature prote and warning, the interlocking that the control circuit of equipment working state flow process is necessary.When vacuumizing, at first molecular pump 1.5 and dried pump 1.7 are as forepump, most of gas in the vacuum chamber is taken out, when the vacuum tightness in the vacuum chamber reaches below the 10Pa, closure molecule pump 1.5 and dried pump 1.7 are opened cryopump push-pull valve 1.1, by low temperature unit 1.8 and cryopump switch board 1.3, control cryopump 1.4 further vacuumizes vacuum chamber and keeps a high vacuum, the pollutant that cold-trap 1.6 exists in can adsorption system, thus obtain a vacuum environment of not having oil.
When carrying out the calibration of ultraviolet spectrum remote sensing instrument complete machine high precision spectral radiance and spectral irradiance responsiveness with the utility model, interface 5 is connected with standard sources 7, the light of standard sources 7 by interface 5 direct irradiations in ultraviolet remote sensing instrument to be measured 8 porch that are placed on the turntable 2, ultraviolet remote sensing instrument 8 is followed turntable 2 motion, and the signals collecting function by ultraviolet remote sensing instrument 8 self realizes spectral radiance and the calibration of spectral irradiance responsiveness.
When carrying out test of ultraviolet detector spectral responsivity and the characteristic test of ultraviolet optics element spectral transmissions with the utility model, monochromator 6 is connected with interface 5, optical element 9 to be tested (mainly comprises: the ultravioplet photomultiplier detector, ultraviolet enhancement area array CCD detector and ultraviolet imaging enhancer profile battle array ccd detector) be placed on the displacement platform 3, the different monochromatic light that monochromator 6 sends, monochromatic light shines directly on optical element 9 to be tested and the photomultiplier 4, adjust optical element 9 to be tested by displacement platform 3, the spectral characteristic test to detector and optical element is realized at monochromatic light irradiation optical element 9 centers to be tested that monochromator 6 is sent.

Claims (2)

1. ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test device, comprise monochromator (6), standard sources (7), vacuum tank (1), be arranged on the photomultiplier (4) on turntable (2) one sides of being fixed in the vacuum tank (1), the cryopump (1.4) and the molecular pump (1.5) that are communicated with vacuum tank (1) cavity respectively by two push-pull valves (1.1), the dried pump (1.7) that is communicated with vacuum tank (1) cavity official road, the low temperature unit (1.8) that is communicated with vacuum tank (1) cavity by pipeline, it is characterized in that, one flange form interface (5) is set, by described monochromator of the replaceable connection of this interface (5) (6) or standard sources (7) on one end of described vacuum tank (1); One displacement platform (3) with respect to the translation gliding of interface (5) axis normal direction is set in vacuum tank (1), and described turntable 2 is arranged on this displacement platform (3).
2. ultraviolet vacuum ultraviolet spectroscopy radiation transfer characteristic test device according to claim 1 is characterized in that, also is connected with cold-trap (1.6) on described molecular pump (1.5).
CNU2008200716666U 2008-04-10 2008-04-10 Ultraviolet-vacuum ultraviolet spectroscopy radiation transfer characteristic test device Expired - Fee Related CN201173822Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CNU2008200716666U CN201173822Y (en) 2008-04-10 2008-04-10 Ultraviolet-vacuum ultraviolet spectroscopy radiation transfer characteristic test device

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102175605A (en) * 2010-12-30 2011-09-07 中国科学院长春光学精密机械与物理研究所 Filter type two-waveband small ultraviolet omnidirectional imager system
CN101566559B (en) * 2009-05-27 2011-10-19 烟台东方分析仪器有限公司 Vibration-proof device in vacuum system of spectrometer
CN102384841A (en) * 2011-09-23 2012-03-21 中国兵器工业第二〇五研究所 Spectral responsivity test method for plane array detector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101566559B (en) * 2009-05-27 2011-10-19 烟台东方分析仪器有限公司 Vibration-proof device in vacuum system of spectrometer
CN102175605A (en) * 2010-12-30 2011-09-07 中国科学院长春光学精密机械与物理研究所 Filter type two-waveband small ultraviolet omnidirectional imager system
CN102175605B (en) * 2010-12-30 2012-09-19 中国科学院长春光学精密机械与物理研究所 Filter type two-waveband small ultraviolet omnidirectional imager system
CN102384841A (en) * 2011-09-23 2012-03-21 中国兵器工业第二〇五研究所 Spectral responsivity test method for plane array detector

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C17 Cessation of patent right
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Granted publication date: 20081231

Termination date: 20100410