CN100582742C - High-accuracy multifunctional wide-spectrum radiation comparison system - Google Patents
High-accuracy multifunctional wide-spectrum radiation comparison system Download PDFInfo
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- CN100582742C CN100582742C CN200610166443A CN200610166443A CN100582742C CN 100582742 C CN100582742 C CN 100582742C CN 200610166443 A CN200610166443 A CN 200610166443A CN 200610166443 A CN200610166443 A CN 200610166443A CN 100582742 C CN100582742 C CN 100582742C
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Abstract
The high precision multifunctional wide spectrum radiation comparison system comprises the light source, incoming light path, monochrometer, spectral response ratio inspection module and spectral transmission ratio inspection module. It combines detector spectral response ratio, material spectral feature, using grating double monochromator DK242 and standard detector based on low temperature radiometer delivered information, realizing optical sensor and material high precision spectral feature inspection using special light path design. It solves the analytical contradiction well, effectively improves the inspection precision. It finds that the uncertainty level of the system is 10-3-10-4. It provides convincing theoretical reference and testing instrument for all kinds of sensor calibration and material spectral feature analysis.
Description
Technical field
The invention belongs to optical radiation calibration, surveying instrument research and design, specifically is system and device research and design that a kind of high precision relative spectral response rate calibration, material spectral transmittance are measured.
Background technology
Two kinds of methods of the general employing of the calibration of light radiation sensor at present, be based upon respectively on calibrated radiation source and the standard detector, their something in common is: at first need to set up high-precision grade standard just, set up with the standard of different accuracy grade afterwards and transmit chain, until user sensor, in fact calibration is exactly the process that compares step by step.
The black matrix of temperature accuracy control is often used as elementary calibrated radiation source, and its absolute radiation degree can be determined according to Planck's law of radiation and international temperature scale, but its transmitting accuracy is lower.Uncertainty when being delivered to the application instrument by calibrated radiation source (black matrix) often is higher than 5%.
Low temperature radiometer be grow up over past ten years, the present the highest standard detector of precision, it utilizes electrical heating to substitute the measuring light thermal effect under the condition of low-temperature superconducting, the absolute measurement of realization optical radiation.Because precision is higher, and combines with range detector easily, therefore the novel calibrating method based on detector is used widely.International Standards Organization and developed country have set up novel high-precision optical radiation just grade standard with it as the basis since the nineties, and having adopted standard transfer chain to replace traditional standard transfer chain based on radiation source based on detector, it transmits uncertainty of standard and reaches 0.01%～0.03%.
A lot of at present countries adopt the radiation calibration method based on monochromator, to carry out the spectrum comparison with the application detector through the standard detector of low temperature radiometer transmission, draw the relative spectral response rate of using detector, make the absolute spectral response rate by the discrete wavelength laser instrument again.But now a lot of detectors are channel-type detectors, its light-splitting device mainly adopts optical filter, measure its absolute spectral response if directly adopt said method, because laser coherence is better, its measuring error is very big, so optical filter measures to separate with the spectral responsivity measurement and carry out, and must cause increasing of surveying instrument like this, the measurement cost strengthens, even causes the wasting of resources.
A lot of at present countries adopt halogen tungsten lamp to add the method calibration range detector of monochromator, and its calibration precision has satisfied measurement requirement.But occurred a lot of detectors now are channel-type detectors, if improve whole calibration precision, the calibration of light-splitting device is vital, therefore various countries design the characteristic (for example spectral transmittance, reflectivity etc.) of the various light-splitting devices of a variety of apparatus measures, cause apparatus involved in the channel-type detector calibration a lot, the measurement cost strengthens, and these install often complicated operation, the uncertainty source disperses, and intricate, be difficult to the whole uncertainty of accurate evaluating system.
Summary of the invention
Based on the present this state of the art, the present invention proposes to adopt novel high-accuracy multifunctional wide-spectrum radiation comparison system, substitute traditional a series of single-measurement devices, characteristics, principle and the method for the various different measuring objects of serious analysis, detector spectral response rate, material spectral characteristic or the like measuring object is combined, invent novel measurement scaling system, well solved the contradiction of uncertainty analysis difficulty for a long time, effectively raised measuring accuracy.
Technical scheme of the present invention is as follows:
High-accuracy multifunctional wide-spectrum radiation comparison system, include light source, input path, monochromator, the spectral responsivity measurement module, the spectral transmittance measurement module, it is characterized in that: described input path comprises two catoptrons and two off-axis paraboloidal mirrors, the outgoing beam that its light path trend is a light source is through catoptron, off-axis paraboloidal mirror, catoptron, off-axis paraboloidal mirror reflects successively, finally be coupled into monochromator, prism or polaroid are installed in the light path between catoptron and off-axis paraboloidal mirror, reflex in the light path of monochromator, optical chopper is installed at off-axis paraboloidal mirror; The monochromatic light that comes out from the monochromator exit slit enters spectral responsivity measurement module or spectral transmittance measurement module; Described spectral responsivity measurement module is staggered by lucifuge case and subtend and is installed in two off-axis paraboloidal mirrors in the lucifuge case, uses detector and standard and transmit detector and form, use detector and standard transmission detector and be installed on the motorized precision translation stage, the standard that makes is transmitted detector or is used detector and all can receive through the monochromatic light after two off-axis paraboloidal mirrors reflections; The spectral transmittance measurement module is made up of a plane mirror, two off-axis paraboloidal mirrors, sample wheel, detector cells, detector cells is made of integrating sphere and single piece of silicon photodetector, enter the spectral transmittance measurement module monochromatic light reflex to the light inlet of integrating sphere successively through off-axis paraboloidal mirror, level crossing, sample wheel, off-axis paraboloidal mirror, light-emitting window from integrating sphere is received by silicon photodetector at last, described sample wheel is to be made of the rotor wheel that loads optical filter to be measured, is rotated by step motor drive.
It is silicon photoelectricity trap detector that described standard is transmitted detector, and described light source is a Halogen lamp LED.
The input path major function is the energy of coupling light source to greatest extent, one of following principle adopts off-axis paraboloidal mirror to become with the plane reflector group, adopting off-axis paraboloidal mirror mainly is to consider ideal image, plane mirror mainly is the expansion light path, so that add subsidiary element (as polaroid etc.) evaluating system characteristic in light path.The light path design of this uniqueness satisfies all needs of measuring process fully, is the innovative point of input path design.In addition light source is placed input path module outside, adopted the heat dissipating method of chimney pattern separately, its heat that effectively looses, the unlikely monochromator wavelength stability that influences, this also is an other innovative point.
The emitting light path structure adopts different measurement light path modules according to different measuring objects, and every kind of module has different measurement light path and method.Two off-axis paraboloidal mirrors of spectral responsivity measurement module employing as the aberrationless detector that is imaged onto, accurately switch the monochromator exit slit by the mobile realization of motorized precision translation stage, finish spectrum and substitute calibration.
Description of drawings
Fig. 1 is based on double grating monochromator high-accuracy multifunctional wide-spectrum radiation comparison system structured flowchart.
Fig. 2 is the input path structural representation.
Fig. 3 is spectral responsivity measurement module light channel structure figure.
Fig. 4 is material spectral transmittance measurement module light channel structure figure.
Fig. 5 is the detector cells structural drawing.
Embodiment
Referring to Fig. 1-Fig. 5.
High-accuracy multifunctional wide-spectrum radiation comparison system, include light source, input path, monochromator, the spectral responsivity measurement module, the spectral transmittance measurement module, it is characterized in that: described input path comprises two catoptrons and two off-axis paraboloidal mirrors, the outgoing beam that its light path trend is a light source is through catoptron, off-axis paraboloidal mirror, catoptron, off-axis paraboloidal mirror reflects successively, finally be coupled into monochromator, prism or polaroid are installed in the light path between catoptron and off-axis paraboloidal mirror, reflex in the light path of monochromator, optical chopper is installed at off-axis paraboloidal mirror; The monochromatic light that comes out from the monochromator exit slit enters spectral responsivity measurement module or spectral transmittance measurement module; Described spectral responsivity measurement module is staggered by lucifuge case and subtend and is installed in two off-axis paraboloidal mirrors in the lucifuge case, uses detector and standard and transmit detector and form, use detector and standard transmission detector and be installed on the motorized precision translation stage, the standard that makes is transmitted detector or is used detector and all can receive through the monochromatic light after two off-axis paraboloidal mirrors reflections; The spectral transmittance measurement module is made up of a plane mirror, two off-axis paraboloidal mirrors, sample wheel, detector cells, detector cells is made of integrating sphere and single piece of silicon photodetector, enter the spectral transmittance measurement module monochromatic light reflex to the light inlet of integrating sphere successively through off-axis paraboloidal mirror, level crossing, sample wheel, off-axis paraboloidal mirror, light-emitting window from integrating sphere is received by silicon photodetector at last, described sample wheel is to be made of the rotor wheel that loads optical filter to be measured, is rotated by step motor drive.
Monochromator system and input path are public module.
Optical chopper; The monochromatic light that comes out from the monochromator exit slit enters spectral responsivity measurement module or spectral transmittance measurement module; Described spectral responsivity measurement module is staggered by lucifuge case and subtend and is installed in two off-axis paraboloidal mirrors in the lucifuge case, uses detector and standard and transmit detector and form, use detector and standard transmission detector and be installed on the motorized precision translation stage, the standard that makes is transmitted detector or is used detector and all can receive through the monochromatic light after two off-axis paraboloidal mirrors reflections; The spectral transmittance measurement module is made up of a plane mirror, two off-axis paraboloidal mirrors, sample wheel, detector cells, detector cells is made of integrating sphere and single piece of silicon photodetector, enter the spectral transmittance measurement module monochromatic light reflex to the light inlet of integrating sphere successively through off-axis paraboloidal mirror, level crossing, sample wheel, off-axis paraboloidal mirror, light-emitting window from integrating sphere is received by silicon photodetector at last, described sample wheel is to be made of the rotor wheel that loads optical filter to be measured, is rotated by step motor drive.
Monochromator system and input path are public module.
Utilize the efficient coupling ability of input path, the radiation flux of most of light source is coupled among the double grating monochromator DK242, by monochromator is provided with parameter, for example bandwidth, step-length, fixed wave length or the like make the monochromatic light that monochromator output is desirable, utilize the monochromatic light of each wavelength can measure the spectral characteristic of detector and various materials respectively.It should be noted that each module the F number must and monochromator be complementary, otherwise the efficiency of light energy utilization can be very low, so each module optical design must be very rigorous.
Fig. 4 is a material spectral transmittance measurement module fundamental diagram, and the Far Left of figure is a material spectral transmittance measurement module.Off-axis paraboloidal mirror in the measurement module mainly produces the quasi-parallel light beam and produces convergent beam and incides detector cells.The sample wheel mainly is to load sample to be tested, can measure 4 samples simultaneously, effectively improves efficiency of measurement, and realize robotization fully by Single-chip Controlling in measuring process, does not need artificial participation.The maximum innovative point of this measurement module is the detector cells that has adopted integrating sphere and detector composition, and it efficiently solves inhomogeneous or the like the measuring error of bringing of the light beam displacement, internal reflection, the light beam that occur in the measuring process, effectively improves measuring accuracy.By the directional light of off-axis paraboloidal mirror generation, its angle of divergence is little in addition, can carry out the light path expansion, realizes planar array detector is carried out spectral calibration, realizes the multi-purpose function of a kind of light path, effectively raises measuring accuracy, has saved resource simultaneously.
This system not only is easy to realize expanding on function, and the expansion on wave band is also very convenient, specifically is to change light source, changes detector cells, and light path only needs seldom part change in addition, to adapt to infrared acquisition.Native system can expand to the 3500nm wave band, and therefore total wavelength band measured is 350～3500nm.
Claims (2)
1, high-accuracy multifunctional wide-spectrum radiation comparison system, include light source, input path, monochromator, the spectral responsivity measurement module, the spectral transmittance measurement module, it is characterized in that: described input path comprises two catoptrons and two off-axis paraboloidal mirrors, the outgoing beam that its light path trend is a light source is through catoptron, off-axis paraboloidal mirror, catoptron, off-axis paraboloidal mirror reflects successively, finally be coupled into monochromator, prism or polaroid are installed in the light path between catoptron and off-axis paraboloidal mirror, reflex in the light path of monochromator, optical chopper is installed at off-axis paraboloidal mirror; The monochromatic light that comes out from the monochromator exit slit enters spectral responsivity measurement module or spectral transmittance measurement module; Described spectral responsivity measurement module is staggered by lucifuge case and subtend and is installed in two off-axis paraboloidal mirrors in the lucifuge case, uses detector and standard and transmit detector and form, use detector and standard transmission detector and be installed on the motorized precision translation stage, the standard that makes is transmitted detector or is used detector and all can receive through the monochromatic light after two off-axis paraboloidal mirrors reflections; The spectral transmittance measurement module is made up of a plane mirror, two off-axis paraboloidal mirrors, sample wheel, detector cells, detector cells is made of integrating sphere and single piece of silicon photodetector, enter the monochromatic light of spectral transmittance measurement module, reflex to the light inlet of integrating sphere successively through off-axis paraboloidal mirror, level crossing, sample wheel, off-axis paraboloidal mirror, light-emitting window from integrating sphere is received by silicon photodetector at last, described sample wheel is to be made of the rotor wheel that loads optical filter to be measured, is rotated by step motor drive.
2, system according to claim 1 is characterized in that it is silicon photoelectricity trap detector that described standard is transmitted detector, and described light source is a Halogen lamp LED.
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| CN100590350C (en) * | 2008-03-05 | 2010-02-17 | 中国科学院安徽光学精密机械研究所 | LED based spectrum distribution adjustable illuminating source system |
| CN103017912B (en) * | 2012-12-10 | 2015-03-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Device and method for measuring infrared detector |
| CN103256976B (en) * | 2013-03-20 | 2015-03-11 | 中国科学院安徽光学精密机械研究所 | Low-temperature absolute radiometer absolute spectral responsivity calibration method and experimental apparatus |
| CN103940766B (en) * | 2014-05-06 | 2016-03-30 | 浙江大学 | Farm product tissue optical characteristics pick-up unit |
| CN104864977B (en) * | 2014-12-17 | 2018-02-06 | 西北工业大学 | A kind of rocket engine fuel gas temperature method of testing for considering multi-wavelength spectrum radiation |
| CN104483104B (en) * | 2014-12-25 | 2018-01-12 | 中国科学院半导体研究所 | A kind of photo detector spectral response analysis system |
| CN105738295A (en) * | 2015-12-10 | 2016-07-06 | 中国航空工业集团公司北京长城计量测试技术研究所 | Emissivity measuring device based on tri-off-axis parabolic mirrors and double reference black bodies |
| CN105699333B (en) * | 2016-03-15 | 2018-08-21 | 中国科学技术大学 | The measurement method that environment surface reflectivity is composed in a kind of visible light diffusion communication |
| CN107508126B (en) * | 2016-06-14 | 2020-05-05 | 中国科学院上海光学精密机械研究所 | Laser path adjusting method with off-axis parabolic mirror |
| CN109506774A (en) * | 2018-12-29 | 2019-03-22 | 中国电子科技集团公司第四十研究所 | A kind of low temperature radiometer blackbody chamber beam directing mechanisms and alignment methods |
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| CN2643297Y (en) * | 2003-02-22 | 2004-09-22 | 中国科学院安徽光学精密机械研究所 | High precision spectral radiance luminance meter |
| CN1804591A (en) * | 2006-01-06 | 2006-07-19 | 中国科学院上海技术物理研究所 | Infrared-modulated photoluminescence spectrum measuring method and apparatus based on step scan |
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| CN2643297Y (en) * | 2003-02-22 | 2004-09-22 | 中国科学院安徽光学精密机械研究所 | High precision spectral radiance luminance meter |
| CN1804591A (en) * | 2006-01-06 | 2006-07-19 | 中国科学院上海技术物理研究所 | Infrared-modulated photoluminescence spectrum measuring method and apparatus based on step scan |
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