CN106289725A - System and method for measuring spectral responsivity of infrared detector - Google Patents

System and method for measuring spectral responsivity of infrared detector Download PDF

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CN106289725A
CN106289725A CN 201510313510 CN201510313510A CN106289725A CN 106289725 A CN106289725 A CN 106289725A CN 201510313510 CN201510313510 CN 201510313510 CN 201510313510 A CN201510313510 A CN 201510313510A CN 106289725 A CN106289725 A CN 106289725A
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infrared
detector
sdut
infrared light
measuring
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CN 201510313510
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Chinese (zh)
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熊敏
董旭
周桃飞
时文华
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中国科学院苏州纳米技术与纳米仿生研究所
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Abstract

The invention discloses a system for measuring the spectral responsivity of an infrared detector. The system comprises an infrared spectrograph for providing wide spectrum infrared light and focusing the wide spectrum infrared light, a spectrometer for measuring the voltage signal SDUT (f) of an infrared detector to be measured arranged at a wide spectrum infrared light focus changing with a frequency f, wherein the response signal SDUT (w) changing with a wave number w of the infrared detector to be measured is obtained based on the voltage signal SDUT (f), and the spectral responsivity of the infrared detector to be measured is obtained according to the response signal SDUT (w). The invention discloses a method for measuring the spectral responsivity of an infrared detector. The micro table detector prepared by using a micro nano machining technique has a micron scale table size and high spatial resolution, and combined with the surface scanning method of a 3D platform, the light intensity distribution of an infrared light source at the focus can be accurately and directly measured.

Description

红外探测器的光谱响应度的测量系统和测量方法 Measurement system and method for measuring spectral responsivity of the infrared detector

技术领域 FIELD

[0001] 本发明涉及一种红外探测器的光谱响应度的测量系统和测量方法。 [0001] The present invention relates to a measurement system and measurement method of the spectral response of an infrared detector.

背景技术 Background technique

[0002] 红外探测器的光谱响应,即响应度随红外辐射波长的变化是红外探测器的一个重要指标。 Spectrum [0002] IR detector response, i.e. the response of the infrared radiation with a wavelength variation is an important indicator of the infrared detector. 相对光谱响应度只需要测量不同波长下响应度强弱的比例系数,而绝对光谱响应度的获得需要精确测量探测器光敏面上的光功率随波长的变化,即测量光源的光功率谱。 Only the relative spectral responsivity measurements at different wavelengths in response to the strength of the scale factor, and obtaining an absolute spectral responsivity requires accurate measurement of the optical power of the photosensitive surface of the detector changes with wavelength, i.e., the measurement light source power spectrum. 目前商用傅里叶红外光谱仪内置红外光源的功率谱大多为厂家非公开数据,限制了客户进行光功率的相关测试。 FTIR current commercial power spectrum of infrared light source built mostly private data for the factory, the relevant test limits optical power customers.

[0003]另外,光谱仪内置红外光源通过离轴非球面镜聚焦以后的焦点尺寸通常在毫米量级,对于光敏面积尺寸在几十到几百微米甚至更小的红外探测器器件,器件在测试中的光学对准以及功率估算都是常规测试方法难以解决的问题。 [0003] Further, the infrared light source spectrometer built by the subsequent off-axis aspheric focusing spot size is typically in the order of millimeters, for the photosensitive area size of tens to hundreds of microns or even smaller infrared detector devices, the device under test optical alignment and power estimation routine testing methods are difficult to solve the problem.

发明内容 SUMMARY

[0004] 为了解决上述现有技术存在的问题,本发明的目的在于提供一种红外探测器的光谱响应度的测量系统,其包括:红外光谱仪,用于提供宽谱红外光并对宽谱红外光进行聚焦;频谱仪,用于测量设置于宽谱红外光焦点位置处的待测红外探测器随频率f变化的电压信号SDUT(f);其中,基于所述电压信号Sdut(f)获取所述待测红外探测器随波数w变化的响应信号Sdut(W);根据响应信号Sdut(W)获得所述待测红外探测器的光谱响应度。 [0004] In order to solve the prior art problems, an object of the present invention is to provide an infrared detector spectral responsivity measurement system, comprising: an infrared spectrometer, to provide a broad spectrum of infrared light and a broad spectrum of infrared focusing light; spectrum analyzer for measuring the spectrum width provided at the focal position of the infrared light to be measured with the infrared detector the frequency f varying voltage signal SDUT (f); wherein the obtaining based on the voltage signal Sdut (f) test signal in response to said infrared detector Sdut wave number w change (w is); the response signal Sdut (w) to be measured to obtain the spectral responsivity of the infrared detector.

[0005] 进一步地,根据电压信号Sdut(f)和响应信号Sdut(W)利用下面的式子I计算出所述待测红外探测器的光谱响应度Rdut(W), [0005] Further, according to a voltage signal Sdut (f) and the response signal Sdut (W) is calculated using the following formula I of the measured spectral responsivity of the infrared detector Rdut (W),

[0006][式子 I] [0006] [formula I]

[0007] Rdut(W) = Sdut (w) / (SX PS (W)) [0007] Rdut (W) = Sdut (w) / (SX PS (W))

[0008] 其中,S表示所述待测红外探测器的光敏面积,PS(w)表示宽谱红外光在其焦点位置处的单位面积的光功率。 [0008] where, S represents the measured infrared detector has a photosensitive area, PS (w) indicates a broad spectrum of infrared light at a power per unit area in which the focal position.

[0009] 进一步地,所述测量装置还包括:扫描探测器,用于获取宽谱红外光的焦点位置以及宽谱红外光在其焦点位置处的光斑面积;其中,所述扫描探测器的光敏面积小于宽谱红外光在其焦点位置处的光斑面积。 [0009] Further, said measuring means further comprising: a scanning probe, configured to obtain a broad spectrum of infrared light and the focal position of a broad spectrum of infrared light spot size at the focal position thereof; wherein said scanning light-sensitive detector area smaller than the area of ​​a broad spectrum of infrared light at its focal spot position.

[0010] 进一步地,所述测量装置还包括:参考探测器,用于获取宽谱红外光在其焦点位置处的单位面积的光功率PS(W);其中,所述参考探测器的光敏面积大于宽谱红外光在其焦点位置处的光斑面积。 [0010] Further, said measuring means further comprising: a reference detector for obtaining a broad spectrum of infrared light per unit area at the focal position of its optical power PS (W); wherein the reference detector has a photosensitive area broad spectrum of infrared light is greater than the spot size at its focal position.

[0011 ] 进一步地,所述测量装置还包括:前置放大器,设置于所述频谱仪与所述待测红外探测器之间对所述电压信号SDUT(f)进行放大。 [0011] Further, said measuring means further comprises: a preamplifier, a voltage signal provided to the SDUT (f) amplifying the spectrometer between the measured infrared detector.

[0012] 进一步地,所述测量装置还包括:源表,用于向所述扫描探测器施加偏压并随着所述扫描探测器的移动测量回路中的电流值;其中,当所述源表测量的回路中的电流值最大时,所述扫描探测器位于宽谱红外光的焦点位置处。 [0012] Further, said measuring means further comprising: a source table, for applying a bias voltage to the scan detector and the current value of the movement measuring circuit as the scanning probe; wherein, when the source table maximum current measurement circuit, the scanning probe is located at a focal position of the broad spectrum of infrared light.

[0013] 进一步地,所述测量装置还包括:三维平台,用于挂载各探测器且带动各探测器在宽谱红外光的焦点位置处做三维移动。 [0013] Further, said measuring means further comprises: a three-dimensional platform for mounting each of the detectors and the detector driving each of three dimensions at the focal position is moved in a broad spectrum of infrared light.

[0014] 进一步地,所述测量装置还包括:电控系统,用于控制所述三维平台。 [0014] Further, said measuring means further comprising: an electrical control system for controlling the three-dimensional internet.

[0015] 本发明的另一目的还在于提供一种红外探测器的光谱响应度的测量方法,其包括:红外光谱仪产生宽谱红外光并对宽谱红外光进行聚焦;利用扫描探测器获取宽谱红外光的焦点位置以及宽谱红外光在其焦点位置处的光斑面积;将参考探测器放置于宽谱红外光的焦点位置处;利用频谱仪测量所述参考探测器随频率f变化的电压信号S(f);根据所述电压信号S(f)获取所述参考探测器随波数w变化的响应信号S(W);根据所述响应信号S(W)以及宽谱红外光在其焦点位置处的光斑面积获取宽谱红外光其焦点位置处的单位面积的光功率PS(W);将待测红外探测器放置于宽谱红外光的焦点位置处;利用所述频谱仪测量所述待测红外探测器随频率f变化的电压信号Sdut(f);根据所述电压信号SDUT(f)获取所述待测红外探测器随波数w变化的响应信号Sdut(W);根据响应信号Sdut(W)获得所述待测 [0015] Another object of the present invention is to provide an infrared detector to measure the spectral responsivity, comprising: an infrared spectrometer to produce a wide spectrum of broad-spectrum infrared and infrared light focusing; a scanning probe of wide focal position of the infrared light spectrum and a broad spectrum of infrared light spot size at the focal position thereof; reference detector placed at the focal position of the broad spectrum of infrared light; the spectrum was measured using the reference detector voltage variation with frequency f signal S (f); (f) acquired based on the voltage signal in response to the reference signal S S w wavenumber change detector (w is); according to the response signal S (w is) and a broad spectrum of infrared light at its focal point spot area at a position at which the focal position acquiring a broad spectrum of infrared light per unit area of ​​the optical power PS (W); infrared detector to be tested is placed at the focal position of the broad spectrum of infrared light; the spectrum measured using the infrared detector with test frequency f varying voltage signal Sdut (f); (f) based on the voltage signal acquired SDUT Sdut the response signal to be measured changes in wave number w infrared detector (w is); according to a response signal Sdut (W) of the obtained test 外探测器的光谱响应度。 Outside the spectral responsivity of the detector.

[0016] 进一步地,根据响应信号Sdut(W)利用下面的式子I计算出所述待测红外探测器的光谱响应度Rdut(w), [0016] Further, according to the response signal Sdut (W) is calculated using the following formula I spectral responsivity Rdut (w) out of the infrared detector to be tested,

[0017][式子 I] [0017] [formula I]

[0018] Rdut(W) = Sdut (w) / (SX PS (W)) [0018] Rdut (W) = Sdut (w) / (SX PS (W))

[0019] 其中,S表示所述待测红外探测器的光敏面积。 [0019] where, S represents the area of ​​the light-sensitive infrared detector under test.

[0020] 本发明的红外探测器的光谱响应度的测量系统和测量方法,红外探测器通过挂载的方式固定于三维平台下方,该三维平台可以固定大型的制冷机装置,提供更低的探测器制冷温度,悬挂固定的方式可使制冷装置的光学窗口更容易进入光谱仪样品仓,更方便进行光学对准与样品拆装。 [0020] System and method for measuring the spectral response of the measurement of the infrared detector of the present invention, by mounting infrared detector fixed manner below 3D platform, the platform can be fixed to the three-dimensional large refrigerator apparatus, provides a lower detection refrigeration temperature, suspended in a fixed manner the optical window can more easily enter the refrigeration apparatus spectrometer sample compartment, easier disassembly optically aligned with the sample. 此外,采用微纳加工技术制备的微台面探测器具有微米级的台面尺寸,空间分辨率高,结合三维平台的面扫描方法能更准确、直观的测量红外光源在焦点位置处的光强分布。 In addition, the use of nanofabrication technologies prepared micro probe micro-table having a mesa micron size, high spatial resolution, three-dimensional surface scanning method in conjunction with the platform more accurate and intuitive measuring the light intensity distribution of the infrared light source at the focal position.

附图说明 BRIEF DESCRIPTION

[0021] 通过结合附图进行的以下描述,本发明的实施例的上述和其它方面、特点和优点将变得更加清楚,附图中: [0021] the following description in conjunction with the accompanying drawings, the above and other aspects, features and advantages of embodiments of the present invention will become more apparent from the accompanying drawings in which:

[0022]图1是根据本发明的实施例的红外探测器的光谱响应度的测量系统的对焦示意图; [0022] FIG. 1 is a schematic diagram of the measurement system focusing the spectral responsivity of the infrared detector embodiment of the present invention;

[0023]图2是根据本发明的实施例的通过扫描探测器确定被调制的宽谱红外光在其焦点位置处的光斑区域的示意图; [0023] FIG. 2 is a broad-spectrum modulated infrared light in a schematic view at its focal spot region position is determined by a scanning probe according to an embodiment of the present invention;

[0024] 图3是根据本发明的实施例的通过参考探测器获取宽谱红外光在其焦点位置处的单位面积的光功率的示意图; [0024] FIG. 3 is a schematic diagram of the infrared light in a broad spectrum of optical power per unit area at the focal position acquired by the reference detector according to an embodiment of the present invention;

[0025] 图4是根据本发明的实施例的测量待测红外探测器的光谱响应度的示意图。 [0025] FIG. 4 is a schematic diagram of the spectral responsivity of the infrared detector to be measured based on the measurement of an embodiment of the present invention.

具体实施方式 detailed description

[0026] 以下,将参照附图来详细描述本发明的实施例。 [0026] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. 然而,可以以许多不同的形式来实施本发明,并且本发明不应该被解释为限制于这里阐述的具体实施例。 However, it is embodied in many different forms and embodiments of the present invention, and the present invention should not be construed as limited to the particular embodiments set forth herein. 相反,提供这些实施例是为了解释本发明的原理及其实际应用,从而使本领域的其他技术人员能够理解本发明的各种实施例和适合于特定预期应用的各种修改。 Rather, these embodiments in order to explain the principles of the invention and its practical application to thereby enable others skilled in the art to understand the invention for various embodiments and various modifications as suited to the particular use contemplated. 在附图中,相同的标号将始终被用于表示相同的元件。 In the drawings, like reference numerals will be used to refer to like elements.

[0027]图1是根据本发明的实施例的红外探测器的光谱响应度的测量系统的对焦示意图。 [0027] FIG. 1 is a schematic diagram of the measurement system focusing the spectral responsivity of the infrared detector embodiment of the present invention.

[0028] 参照图1,根据本发明的实施例的红外探测器的光谱响应度的测量系统包括:红外光谱仪1、扫描探测器2、三维平台3、PLC电控柜4、计算机5及源表6。 [0028] Referring to FIG. 1, the spectral responsivity of the infrared detector of the measuring system of the embodiment of the present invention comprises: an infrared spectrometer, the scanning probe 2, a three-dimensional platform 3, PLC cabinet 4, 5 and computer source table 6.

[0029] 红外光谱仪I产生被调制的宽谱红外光BI沿-X方向出射,宽谱红外光BI聚焦于红外光谱仪I的样品仓的中央位置。 [0029] I an infrared spectrometer to produce a wide spectrum of infrared light is modulated in the -X direction BI exit, BI broad spectrum of infrared light is focused on the central position of the sample compartment I of the infrared spectrometer. 固定有扫描探测器2的低温装置挂载于三维平台3上,其中,三维平台3在X方向、y方向与z方向上各有两根导轨(未示出),每根导轨上安装至少两个滑块(未示出),扫描探测器2的移动可通过滑块在导轨上的直线运动而实现。 Fixed scanning probes cryogenic apparatus 2 is mounted on a 3-dimensional platform, wherein the platform 3 in the three-dimensional X-direction, the y direction and z direction, each two guide rails (not shown), mounted on each rail at least two a slider (not shown), moving the scanning probe 2 can be achieved by linear movement of the slider on the rail. 三维平台在I方向的移动可手动粗调,运行间距可为500-1000mm ;底座在x方向、y方向与z方向可自动精调,在每个方向上的调节范围可为100-500mm,伺服电机驱动丝杆旋转实现滑块精确移动,由电机减速器调节的最小移动量可为100-200nm。 I 3D platform movement direction can be manually coarse, running pitch may be 500-1000mm; base in the x direction, y direction and z-direction can be automatically fine tuning adjustment range in each direction may be 100-500mm, servo screw rotation drive motor to achieve precise movement of the slider, the minimum movement amount adjustment by a motor-reducer may be 100-200nm. 三维平台3的移动通过由PLC电控柜4与计算机5组成的电控系统控制,其中,计算机5记录三维平台3上挂载点的位置。 3-dimensional movement of the platform by a PLC electronic control system cabinet 4 and 5 composed of a control computer, wherein the computer platform 5 recording a three-dimensional position of a point on the mount 3.

[0030] 源表6向扫描探测器2施加偏压并测量回路中的总电流。 [0030] Table 6 is applied to the source and measuring the total current bias circuit 2 to the scan detector. 例如,三维平台3带动扫描探测器2在红外光谱仪I样品仓内沿X方向移动,源表6测量扫描探测器2移动过程中回路电流的变化,回路电流值最大时扫描探测器2位于宽谱红外光BI的焦点位置处。 For example, internet 3-dimensional scanning probe 2 is moved in the driving direction X I in the sample compartment infrared spectroscopy, changes in the loop current source 2 in Table 6 measured during movement of the scanning probe, the maximum loop current value when the scanning probe 2 is located in a broad spectrum BI at the focal position of the infrared light. 在本发明的实施例中,扫描探测器2可例如为光子型探测器,其具有微台面结构,其中,微台面的尺寸小于100 μm,但本发明并不局限于此。 In an embodiment of the present invention, the scanning probe 2 may be, for example, a photon detector type, a mesa structure having a microstructure, in which the micro mesa size of less than 100 μm, but the present invention is not limited thereto.

[0031]图2是根据本发明的实施例的通过扫描探测器确定被调制的宽谱红外光在其焦点位置处的光斑区域的示意图。 [0031] FIG 2 is determined to be modulated in a broad spectrum of infrared light a schematic view at its focal spot region position of the scanning probe according to an embodiment of the present invention.

[0032] 参照图1和图2,三维平台3带动扫描探测器2在宽谱红外光BI的焦点位置处沿I方向与z方向移动,源表6测量到的回路电流值最大时扫描探测器2位于宽谱红外光BI的焦点位置处,记录该点的坐标(yM,z00)。 [0032] Referring to FIGS. 1 and 2, a three-dimensional scanning driving platform 3 moves the probe 2 at a position in the direction of the z direction I in a broad spectrum of infrared light BI focus of the source table 6 the measured value of the maximum scanning loop current detector 2 is located at the focal position of the broad spectrum of infrared light BI, recording coordinates of the point (yM, z00). 以该点为中心,三维平台3带动扫描探测器2在焦点平面内作步长小于100 μm的点阵扫描。 In this point as the center, 3-dimensional platform for driving the scanning probe 2 scan step size is smaller than the dot of 100 μm in the focal plane. 在焦点平面内保持z。 Z is in the focal plane remains. . 不变,扫描探测器2沿y方向作步进扫描,当回路电流值下降到设定值I。 Constant, the scanning step for scanning the probe 2 in the y direction, when the loop current falls to the set value I. 时记录此时的二维坐标(y ίο, z00)。 At this time, the recording of two-dimensional coordinates (y ίο, z00). 扫描探测器2沿-y方向继续作步进扫描,当回路电流值下降到设定值I。 The scanning probe 2 along the -y direction continues as step scanning, when the loop current falls to the set value I. 时记录此时的二维坐标(Υοΐ) ζοο)。 At this time, the recording of two-dimensional coordinates (Υοΐ) ζοο).

[0033] 扫描探测器2复位至焦点(y。。,z J,在焦点平面内保持y。。不变,沿z方向作步进扫描,当回路电流值下降到设定值I。时记录此时的二维坐标(y^Zi。)。扫描探测器2沿-Z方向继续作步进扫描,当回路电流值下降到设定值I。时记录此时的二维坐标(y 00, Z0i)。扫描探测器2在点(ylt),Zw)与点(YtmZtn)确定的矩形区域内作等步长的点阵扫描。 [0033] The scanning probe 2 returns to the focal point (y .., z J, held in the same focal plane Y .., z-direction for step scanning, the recording when the loop current falls to the set value when I. At this time, two-dimensional coordinates (y ^ Zi.). scanning probe 2 in the -Z direction continues as step scanning, when the loop current drops to record a two-dimensional coordinate value at that time the set value I. (y 00, Z0i). scanning probe 2 at point (ylt), a rectangular area Zw) and the point (YtmZtn) for determining the step size matrix scanning the like. 记录扫描过程中所有电流值为I11的阵点,这些阵点所围成的区域即为宽谱红外光BI在其焦点位置处的光斑区域(即宽谱红外光BI在其焦点位置处的光斑面积)。 Recording current value during the scan of all the lattice points I11, these lattice points is the region surrounded by the broad spectrum of infrared light at the spot region BI at its focal position (i.e. broad spectrum of infrared light at its focal spot BI position area).

[0034] 图3是根据本发明的实施例的通过参考探测器获取宽谱红外光在其焦点位置处的单位面积的光功率的示意图。 [0034] FIG. 3 is a schematic diagram of the infrared light in a broad spectrum of optical power per unit area at the focal position acquired by the reference detector according to an embodiment of the present invention.

[0035] 参照图3,根据本发明的实施例的红外探测器的光谱响应度的测量系统包括:参考探测器7。 [0035] Referring to FIG. 3, the measuring system according to the spectral responsivity of the infrared detector embodiment of the present invention comprises: a reference detector 7. 将扫描探测器2取下,将光敏面积大于宽谱红外光BI在其焦点位置处的光斑面积的参考探测器7挂载于三维平台3上,且参考探测器7连接到频谱仪8,三维平台3带动参考探测器7移动到宽谱红外光BI的焦点位置处,频谱仪8测量到参考探测器7随频率变化的电压信号S (f),利用傅里叶频率f与红外光谱仪I的动镜扫描速度V的关系f =VXw,以计算得到参考探测器7随波数变化的电压信号S(W),根据参考探测器7的响应度、响应度的频率响应曲线以及宽谱红外光BI在其焦点位置处的光斑面积计算得到宽谱红外光BI在其焦点位置处的单位面积的光功率PS (w)。 The scanning probe 2 is removed, the photosensitive area is greater than in a broad spectrum of infrared light BI spot area at the focal position of the reference detector 7 which is mounted on a 3-dimensional platform, and the reference detector 7 is connected to spectrum analyzer 8, D 3 platform 7 is moved to drive the reference detector at the focal position BI broad spectrum of infrared light, the analyzer 8 measures the voltage signal from the reference detector 7 S (f) varies with frequency, infrared Fourier spectrometer frequency f I, moving mirror scanning speed V relationship f = VXw, detector 7 so as to calculate the reference wave number changing voltage signal S (W), based on the response of the reference sensor 7, the frequency response of the response curve and the infrared spectrum width BI calculating the area of ​​the spot at the focal position thereof to obtain a broad spectrum of infrared light in a unit area of ​​BI at its focal position of the light power PS (w).

[0036] 图4是根据本发明的实施例的测量待测红外探测器的光谱响应度的示意图。 [0036] FIG. 4 is a schematic diagram of the spectral responsivity of the infrared detector to be measured based on the measurement of an embodiment of the present invention.

[0037] 参照图4,根据本发明的实施例的红外探测器的光谱响应度的测量系统包括:待测红外探测器9。 [0037] Referring to Figure 4, the spectral responsivity of the infrared detector of the measuring system of the embodiment of the present invention comprises: an infrared detector 9 measured. 将参考探测器7取下,将固定有待测红外探测器9的低温装置挂载于三维平台3上,待测红外探测器9连接到前置放大器10,三维平台3带动待测红外探测器9移动到宽谱红外光BI的焦点位置处的最大光强处,即(y。。,z J,待测红外探测器9的电信号通过前置放大器10放大后输出到频谱仪8,频谱仪8测量到待测红外探测器9随频率变化的电压信号Sdut(f),利用傅里叶频率f与红外光谱仪I的动镜扫描速度V的关系f = VXw,计算得到待测红外探测器9随波数变化的电压信号SFdut(W),通过前置放大器10设置的放大倍率计算待测红外探测器9的响应信号Sdut(W)。 The reference detector 7 is removed, the fixed cryogenic infrared detector device under test 9 is mounted on the platform 3 three-dimensional, infrared detector under test 9 is connected to a preamplifier 10, driven by the test platform 3-dimensional infrared detector 9 moves to the focal position of light BI broad spectrum of infrared light intensity at the maximum, i.e., (y .., z J, the measured infrared detector electrical signal amplified by the preamplifier 9 output to a spectrum analyzer 10 8, spectrum 8 meter measured voltage signal Sdut (f) measured infrared detector 9 varies with frequency, and using the relationship of Fourier infrared spectrometer frequency f I, the movable mirror scanning velocity V f = VXw, calculated measured infrared detector 9 with wave number changing voltage signal SFdut (W), the test signal in response to an infrared detector Sdut 9 (W) and a magnification is calculated by the preamplifier 10 is provided.

[0038] 进一步地,根据响应信号Sdut(W)利用下面的式子I计算出待测红外探测器9的光谱响应度Rdut(W)。 [0038] Further, I calculate the measured spectral responsivity of the infrared detector 9 Rdut (W) according to the response signal Sdut (W) using the following equation.

[0039][式子 I] [0039] [formula I]

[0040] Rdut (w) = Sdut (w) / (SX PS (W)) [0040] Rdut (w) = Sdut (w) / (SX PS (W))

[0041] 其中,S表示所述待测红外探测器的光敏面积。 [0041] where, S represents the area of ​​the light-sensitive infrared detector under test.

[0042] 综上,根据本发明的实施例的红外探测器的光谱响应度的测量系统和测量方法,红外探测器通过挂载的方式固定于三维平台下方,该三维平台可以固定大型的制冷机装置,提供更低的探测器制冷温度,悬挂固定的方式可使制冷装置的光学窗口更容易进入光谱仪样品仓,更方便进行光学对准与样品拆装。 [0042] In summary, according to the spectral responsivity measurement system of an embodiment of the infrared detector and the measurement method of the present invention, by mounting infrared detector is fixed below 3D platform, the platform can be fixed to the three-dimensional large refrigerator means for providing a lower refrigerating temperature probe, suspended in a fixed manner the optical window can more easily enter the refrigeration apparatus spectrometer sample compartment, easier disassembly optically aligned with the sample. 此外,采用微纳加工技术制备的微台面探测器具有微米级的台面尺寸,空间分辨率高,结合三维平台的面扫描方法能更准确、直观的测量红外光源在焦点处的光强分布。 In addition, the use of nanofabrication technologies prepared micro probe micro-table having a mesa micron size, high spatial resolution, three-dimensional surface scanning method in conjunction with the platform more accurate and intuitive measure infrared light source of the light intensity distribution at the focus.

[0043] 虽然已经参照特定实施例示出并描述了本发明,但是本领域的技术人员将理解:在不脱离由权利要求及其等同物限定的本发明的精神和范围的情况下,可在此进行形式和细节上的各种变化。 [0043] While shown already with reference to specific embodiments and described in the present invention, those skilled in the art will appreciate that: without departing from the spirit and scope of the invention being indicated by the claims and their equivalents are available in this various changes in form and detail.

Claims (10)

  1. 1.一种红外探测器的光谱响应度的测量系统,其特征在于,包括: 红外光谱仪,用于提供宽谱红外光并对宽谱红外光进行聚焦; 频谱仪,用于测量设置于宽谱红外光焦点位置处的待测红外探测器随频率f变化的电压信号Sdut (f); 其中,基于所述电压信号SDUT(f)获取所述待测红外探测器随波数w变化的响应信号Sdut(W); 根据响应信号Sdut(W)获得所述待测红外探测器的光谱响应度。 A system of measuring spectral responsivity of the infrared detector, characterized by comprising: infrared spectrometer, for providing a broad spectrum of infrared light and infrared light to focus a broad spectrum; spectrum analyzer for measuring a broad spectrum is provided in measured at the infrared detector the infrared light with the frequency f of the focal position varying voltage signal Sdut (f); wherein, (f) obtaining the measured wave number w infrared detector based on a change of the voltage signal response signal Sdut SDUT (W); (W) to be measured to obtain the spectral responsivity of the infrared detector in accordance with the response signal Sdut.
  2. 2.根据权利要求1所述的测量系统,其特征在于,根据电压信号S DUT(f)和响应信号Sdut(W)利用下面的式子I计算出所述待测红外探测器的光谱响应度Rdut(W), [式子I] Rdut (w) = Sdut (w) /(SXPS (W)) 其中,S表示所述待测红外探测器的光敏面积,PS(W)表示宽谱红外光在其焦点位置处的单位面积的光功率。 The measuring system according to claim 1, characterized by the following formula I calculated spectral responsivity of the infrared detector according to the voltage measured signal S DUT (f) and the response signal Sdut (W) Rdut (W), [formula I] Rdut (w) = Sdut (w) / (SXPS (W)) where, S represents the measured infrared detector has a photosensitive area, PS (W) indicates a broad spectrum of infrared light optical power per unit area at its focal position.
  3. 3.根据权利要求1所述的测量系统,其特征在于,所述测量装置还包括:扫描探测器,用于获取宽谱红外光的焦点位置以及宽谱红外光在其焦点位置处的光斑面积;其中,所述扫描探测器的光敏面积小于宽谱红外光在其焦点位置处的光斑面积。 The measuring system according to claim 1, wherein said measuring means further comprising: a scanning probe, configured to obtain a broad spectrum of infrared light and the focal position of a broad spectrum of infrared light spot size at the focal position of its ; wherein the scanning probe has a photosensitive area smaller than the area of ​​the broad spectrum of infrared light at its focal spot position.
  4. 4.根据权利要求3所述的测量系统,其特征在于,所述测量装置还包括:参考探测器,用于获取宽谱红外光在其焦点位置处的单位面积的光功率PS(W);其中,所述参考探测器的光敏面积大于宽谱红外光在其焦点位置处的光斑面积。 4. The measuring system according to claim 3, characterized in that said measuring means further comprising: a reference detector for obtaining light in a broad spectrum of infrared optical power per unit area at which the focal position PS (W); wherein, said reference photosensitive detector area is larger than the area of ​​a broad spectrum of infrared light at its focal spot position.
  5. 5.根据权利要求1所述的测量系统,其特征在于,所述测量装置还包括:前置放大器,设置于所述频谱仪与所述待测红外探测器之间对所述电压信号SDUT(f)进行放大。 The measuring system according to claim 1, wherein said measuring means further comprises: a preamplifier, a signal is provided to the voltage between the SDUT spectrometer measured the infrared detector ( f) is amplified.
  6. 6.根据权利要求3所述的测量系统,其特征在于,所述测量装置还包括:源表,用于向所述扫描探测器施加偏压并随着所述扫描探测器的移动测量回路中的电流值;其中,当所述源表测量的回路中的电流值最大时,所述扫描探测器位于宽谱红外光的焦点位置处。 6. A measuring system according to claim 3, wherein said measuring means further comprising: a source table, for applying a bias voltage to the scan detector and the measuring circuit with the movement of the scanning probe current value; wherein, when the maximum value of the current source circuit of the measuring table, the scanning probe is located at the focal position of the broad spectrum of infrared light.
  7. 7.根据权利要求4所述的测量系统,其特征在于,所述测量装置还包括:三维平台,用于挂载各探测器且带动各探测器在宽谱红外光的焦点位置处做三维移动。 7. A measuring system according to claim 4, wherein said measuring means further comprises: a three-dimensional platform for mounting each of the detectors and the detector driving each of three dimensions at the focal position is moved in a broad spectrum of infrared light .
  8. 8.根据权利要求6或7所述的测量系统,其特征在于,所述测量装置还包括:电控系统,用于控制所述三维平台。 The measuring system of claim 6 or claim 7, wherein said measuring means further comprising: an electrical control system for controlling the three-dimensional internet.
  9. 9.一种红外探测器的光谱响应度的测量方法,其特征在于,包括: 红外光谱仪产生宽谱红外光并对宽谱红外光进行聚焦; 利用扫描探测器获取宽谱红外光的焦点位置以及宽谱红外光在其焦点位置处的光斑面积; 将参考探测器放置于宽谱红外光的焦点位置处; 利用频谱仪测量所述参考探测器随频率f变化的电压信号S(f); 根据所述电压信号S (f)获取所述参考探测器随波数w变化的响应信号S(W); 根据所述响应信号S(W)以及宽谱红外光在其焦点位置处的光斑面积获取宽谱红外光其焦点位置处的单位面积的光功率PS (w); 将待测红外探测器放置于宽谱红外光的焦点位置处; 利用所述频谱仪测量所述待测红外探测器随频率f变化的电压信号SDUT(f); 根据所述电压信号SDUT(f)获取所述待测红外探测器随波数W变化的响应信号Sdut(W); 根据响应信号Sdut(W)获得所述待测红外探测器的 A method of measuring spectral responsivity of the infrared detector, characterized by comprising: infrared spectrometer to produce a wide spectrum of broad-spectrum infrared and infrared light focusing; broad spectrum acquired by scanning probe infrared light and the focal position broad-spectrum infrared light spot size at the focal position thereof; reference detector placed at the focal position of the broad spectrum of infrared light; spectrum measured using the reference voltage signal S (f) with the frequency f change detector; according the voltage signal S (f) obtaining a reference wave number in response to the detector signal S w change (w is); signal S (w is), and a broad spectrum of infrared light of wide area of ​​the light spot at the focal position thereof according to the response spectrum of infrared light at a focal position of the optical power per unit area PS (w); infrared detector to be tested is placed at the focal position of the broad spectrum of infrared light; using the measured spectrum with the frequency of the measured infrared detector f varying voltage signal SDUT (f); be obtained according to the response signal Sdut (W); said voltage signal SDUT (f) acquisition response to the test signal Sdut infrared detector wave number change W (W) according to measuring the infrared detector 光谱响应度。 Spectral response.
  10. 10.根据权利要求9所述的测量方法,其特征在于,根据响应信号Sdut(W)利用下面的式子I计算出所述待测红外探测器的光谱响应度Rdut(W), [式子I] Rdut (w) = Sdut (w) /(SXPS (W)) 其中,S表示所述待测红外探测器的光敏面积。 10. The measuring method according to claim 9, characterized by the following formula I calculate the measured spectral responsivity of the infrared detector Rdut (W) according to the response signal Sdut (W), [formula I] Rdut (w) = Sdut (w) / (SXPS (W)) where, S represents the area of ​​the light-sensitive infrared detector under test.
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