CN102345112B - 一种半导体处理设备及其气体喷淋头冷却板 - Google Patents
一种半导体处理设备及其气体喷淋头冷却板 Download PDFInfo
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- CN102345112B CN102345112B CN 201110282861 CN201110282861A CN102345112B CN 102345112 B CN102345112 B CN 102345112B CN 201110282861 CN201110282861 CN 201110282861 CN 201110282861 A CN201110282861 A CN 201110282861A CN 102345112 B CN102345112 B CN 102345112B
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- cooling
- cooling fluid
- gas spray
- spray header
- separating device
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- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201110282861 CN102345112B (zh) | 2011-09-22 | 2011-09-22 | 一种半导体处理设备及其气体喷淋头冷却板 |
TW101129379A TW201316435A (zh) | 2011-09-22 | 2012-08-14 | 一種半導體處理設備及其氣體噴淋頭冷卻板 |
Applications Claiming Priority (1)
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CN 201110282861 CN102345112B (zh) | 2011-09-22 | 2011-09-22 | 一种半导体处理设备及其气体喷淋头冷却板 |
Publications (2)
Publication Number | Publication Date |
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CN102345112A CN102345112A (zh) | 2012-02-08 |
CN102345112B true CN102345112B (zh) | 2013-08-21 |
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Family Applications (1)
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CN 201110282861 Active CN102345112B (zh) | 2011-09-22 | 2011-09-22 | 一种半导体处理设备及其气体喷淋头冷却板 |
Country Status (2)
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CN (1) | CN102345112B (zh) |
TW (1) | TW201316435A (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103367510A (zh) * | 2012-03-30 | 2013-10-23 | 生阳新材料科技有限公司 | 冷却板 |
CN103276371B (zh) * | 2013-03-26 | 2015-12-09 | 中晟光电设备(上海)有限公司 | Cvd设备的进气装置、冷却装置及冷却方法 |
TW201623681A (zh) * | 2014-12-26 | 2016-07-01 | Advanced Micro Fab Equip Inc | 氣體噴淋頭及沉積裝置 |
JP6675272B2 (ja) * | 2016-06-07 | 2020-04-01 | 日本発條株式会社 | 冷却ユニットおよび冷却ユニットの製造方法 |
CN108054245A (zh) * | 2018-01-11 | 2018-05-18 | 常州比太黑硅科技有限公司 | 一种干法制绒设备工艺反应腔 |
CN207987325U (zh) * | 2018-02-28 | 2018-10-19 | 北京铂阳顶荣光伏科技有限公司 | 一种冷却系统 |
SG11201904091XA (en) * | 2018-04-05 | 2019-11-28 | Lam Res Corp | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns |
CN110310909B (zh) * | 2019-07-15 | 2021-12-17 | 北京北方华创微电子装备有限公司 | 冷却装置及热处理装置 |
CN112665261A (zh) * | 2020-12-17 | 2021-04-16 | 湖南新中意食品有限公司 | 一种用于果冻生产的杀菌装置 |
CN114171437A (zh) * | 2021-12-01 | 2022-03-11 | 北京北方华创微电子装备有限公司 | 半导体工艺腔室的冷却装置及半导体工艺腔室 |
CN114043302B (zh) * | 2021-12-06 | 2022-07-01 | 东莞市巨冈机械工业有限公司 | 一种具有减震结构的五轴机床转台 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08218171A (ja) * | 1995-02-08 | 1996-08-27 | Nippon Sanso Kk | シャワーヘッド式cvd装置 |
JP5231117B2 (ja) * | 2008-07-24 | 2013-07-10 | 株式会社ニューフレアテクノロジー | 成膜装置および成膜方法 |
KR101062462B1 (ko) * | 2009-07-28 | 2011-09-05 | 엘아이지에이디피 주식회사 | 샤워헤드 및 이를 포함하는 화학기상증착장치 |
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2011
- 2011-09-22 CN CN 201110282861 patent/CN102345112B/zh active Active
-
2012
- 2012-08-14 TW TW101129379A patent/TW201316435A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
TW201316435A (zh) | 2013-04-16 |
CN102345112A (zh) | 2012-02-08 |
TWI488249B (zh) | 2015-06-11 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20120208 Assignee: Nanchang Medium and Micro Semiconductor Equipment Co., Ltd. Assignor: Advanced Micro-Fabrication Equipment (Shanghai) Inc. Contract record no.: 2018990000345 Denomination of invention: Semiconductor processing device and gas spray head cooling plate thereof Granted publication date: 20130821 License type: Exclusive License Record date: 20181217 |
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EE01 | Entry into force of recordation of patent licensing contract | ||
CP01 | Change in the name or title of a patent holder |
Address after: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee after: Medium and Micro Semiconductor Equipment (Shanghai) Co., Ltd. Address before: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee before: Advanced Micro-Fabrication Equipment (Shanghai) Inc. |
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CP01 | Change in the name or title of a patent holder |