CN102345106A - 一种b-c-n三元薄膜的制备及热处理方法 - Google Patents
一种b-c-n三元薄膜的制备及热处理方法 Download PDFInfo
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CN102345106A true CN102345106A (zh) | 2012-02-08 |
CN102345106B CN102345106B (zh) | 2013-09-11 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111020573A (zh) * | 2019-12-05 | 2020-04-17 | 沈阳工业大学 | 基于铜表面的导热防腐蚀的复合膜层及制备方法 |
Citations (1)
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CN101525734A (zh) * | 2009-03-31 | 2009-09-09 | 西安交通大学 | 一种制备硼碳氮硬质涂层的方法 |
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CN101525734A (zh) * | 2009-03-31 | 2009-09-09 | 西安交通大学 | 一种制备硼碳氮硬质涂层的方法 |
Non-Patent Citations (2)
Title |
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FUCHAO JIA,ET AL.: "Preparation of B-C-N films by magnetron sputtering with different N2/Ar flow ratio", 《VACUUM》 * |
刘立华: "硼碳氮薄膜的制备及性质研究", 《中国博士学位论文全文数据库》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111020573A (zh) * | 2019-12-05 | 2020-04-17 | 沈阳工业大学 | 基于铜表面的导热防腐蚀的复合膜层及制备方法 |
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