CN102338662B - 包含相位元件的斜入射宽带偏振光谱仪和光学测量系统 - Google Patents
包含相位元件的斜入射宽带偏振光谱仪和光学测量系统 Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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CN2011101474745A CN102338662B (zh) | 2010-06-02 | 2011-06-02 | 包含相位元件的斜入射宽带偏振光谱仪和光学测量系统 |
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CN2011101474745A CN102338662B (zh) | 2010-06-02 | 2011-06-02 | 包含相位元件的斜入射宽带偏振光谱仪和光学测量系统 |
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CN2010102704542A Active CN102269622B (zh) | 2010-06-02 | 2010-09-02 | 垂直入射宽带光谱仪 |
CN2010105318370A Pending CN102269859A (zh) | 2010-06-02 | 2010-11-04 | 聚焦系统、聚焦方法和光学测量设备 |
CN2011100327448A Active CN102269623B (zh) | 2010-06-02 | 2011-01-30 | 垂直入射宽带偏振光谱仪和光学测量系统 |
CN2011101332142A Active CN102297721B (zh) | 2010-06-02 | 2011-05-23 | 斜入射宽带偏振光谱仪和光学测量系统 |
CN2011101474745A Active CN102338662B (zh) | 2010-06-02 | 2011-06-02 | 包含相位元件的斜入射宽带偏振光谱仪和光学测量系统 |
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CN2010102704542A Active CN102269622B (zh) | 2010-06-02 | 2010-09-02 | 垂直入射宽带光谱仪 |
CN2010105318370A Pending CN102269859A (zh) | 2010-06-02 | 2010-11-04 | 聚焦系统、聚焦方法和光学测量设备 |
CN2011100327448A Active CN102269623B (zh) | 2010-06-02 | 2011-01-30 | 垂直入射宽带偏振光谱仪和光学测量系统 |
CN2011101332142A Active CN102297721B (zh) | 2010-06-02 | 2011-05-23 | 斜入射宽带偏振光谱仪和光学测量系统 |
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CN103162832B (zh) * | 2011-12-19 | 2014-12-10 | 中国科学院微电子研究所 | 包含参考光束的垂直入射宽带偏振光谱仪及光学测量系统 |
US9419711B2 (en) * | 2012-09-17 | 2016-08-16 | Ofs Fitel, Llc | Measuring in-band optical signal-to-noise ratio (OSNR) |
CN103018175B (zh) * | 2012-11-30 | 2014-10-15 | 中国科学院上海技术物理研究所 | 一种用于光谱设备的光束精确校准辅助装置 |
CN103063412B (zh) * | 2012-12-18 | 2015-05-06 | 华中科技大学 | 一种用于光学测量仪器样品台校准的系统及其方法 |
CN103234637A (zh) * | 2013-04-04 | 2013-08-07 | 大连理工大学 | 一种大气辐射光谱偏振信息测量系统 |
CN104215187A (zh) * | 2013-05-31 | 2014-12-17 | 昆山胜泽光电科技有限公司 | 测量ar减反膜厚度和折射率的装置 |
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