CN102299049B - Petal-basket floating silicon chip automation separation mechanism - Google Patents

Petal-basket floating silicon chip automation separation mechanism Download PDF

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Publication number
CN102299049B
CN102299049B CN 201110216105 CN201110216105A CN102299049B CN 102299049 B CN102299049 B CN 102299049B CN 201110216105 CN201110216105 CN 201110216105 CN 201110216105 A CN201110216105 A CN 201110216105A CN 102299049 B CN102299049 B CN 102299049B
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China
Prior art keywords
silicon chip
basket
gaily decorated
font
decorated basket
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CN 201110216105
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CN102299049A (en
Inventor
李强
郑海红
李向东
魏海滨
赵建军
张素枝
任剑
朱跃红
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CETC Fenghua Information Equipment Co Ltd
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TAIYUAN FENGHUA INFORMATION EQUIPMENT CO Ltd
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Abstract

The invention discloses a petal-basket floating silicon chip automation separation mechanism. By using the mechanism, problems of a low separation speed of the silicon chip and a high fragment rate during transmitting the silicon chip can be solved. The mechanism comprises: a PLC, a petal basket guide rail (1) and a petal basket (2). Two sides of the petal basket (2) are respectively provided with floating silicon chip automation separation components (4). The floating silicon chip automation separation component (4) comprises: a column rack (6), an inverted T shaped connection rack (7), a T shaped connection rack (8) and a lying rack which is in a shape of a men character (9). The T shaped connection rack (8) can rise and fall. Two horizontal vertical beam guide rails (13) of the lying rack which is in the shape of the men character (9) are respectively arranged along a horizontal back and forth direction on a crossbeam of the T shaped connection rack (8). Transverse strip holes, which are in a horizontal direction, are arranged on the horizontal vertical beam guide rails (13) so as to realize back and forth movement in the horizontal direction of the lying rack which is in the shape of the men character (9). A rotatable floatation block (16) is flexibly arranged on a crossbeam ventilation shaft (15) of the lying rack which is in the shape of the men character (9) so as to realize high efficient automation work of silicon chip transmission.

Description

Petal-basket floating silicon chip automation separation mechanism
Technical field
The present invention relates to a kind of petal-basket floating silicon chip automation separation mechanism, the particularly single separating mechanism of a kind of gaily decorated basket inner stacks silicon chip, supporting silicon chip piece-rate system for silicon chip screen printer and silicon test separator.
Background technology
In silicon chip automated production process, the silicon chip that is stacked together in groups in the gaily decorated basket is taken out piecewise and transmits is an important procedure, and how stacked Electrostatic Absorption silicon chip quick nondestructive together being separated is the basis of realizing the automatic high-efficiency operation.At present, the separation process of silicon chip is mainly to be completed by manual, and feeding speed is low, simultaneously due to varying in size that hand clamping silicon chip is exerted oneself, causes fragment rate too high, thereby directly affects production efficiency and production capacity.
Summary of the invention
The invention provides a kind of petal-basket floating silicon chip automation separation mechanism, the separation process that has solved silicon chip is mainly to be completed by manual, and the silicon chip separating rate is low, simultaneously due to varying in size that hand clamping silicon chip is exerted oneself, causes the too high problem of fragment rate.
The present invention is by the above problem of following solution:
petal-basket floating silicon chip automation separation mechanism, comprise PLC and gaily decorated basket guide rail, be movably set with the gaily decorated basket on gaily decorated basket guide rail, the gaily decorated basket comprises gaily decorated basket base, four groups of flexible guiding Timing Belt parts, movable floor and fall the material Weight plate, gaily decorated basket below is provided with silicon chip up-down mechanism, be provided with negative pressure absorbing silicon chip mechanism above the gaily decorated basket, be respectively arranged with the automatic separating component of floating silicon chip in the both sides of the gaily decorated basket, the automatic separating component of floating silicon chip comprises the column support body, the inverted T-shape link, T font link and the door font frame that lies low, the inverted T-shape link is vertically set on the top of column support body along the vertical direction, be provided with vertical strip hole on the column of T font link, the first hold-down screw by vertical strip hole with T font link be vertically fixed on along the vertical direction the inverted T-shape link above, realize the rise of T font link and fall in the position of vertical strip hole by regulating the first hold-down screw, be respectively arranged with lie low two horizontal vertical beam guide rails of support body of a font along horizontal fore-and-aft direction on the crossbeam of T font link, be provided with the horizontal strip hole of horizontal direction on the vertical beam guide rail, by regulating the position of the second hold-down screw in horizontal strip hole, realize door font frame the moving forward and backward in the horizontal direction that lie low, on lying low the crossbeam ventilating shaft of frame, the door font is movably set with rotating air supporting piece, end at the crossbeam ventilating shaft is provided with air admission hole.
Be provided with the Fibre Optical Sensor mount pad on described inverted T-shape link.
The present invention efficiently solves that the speed of existing manual separation silicon chip feed is slow, the problem of high fragment rate, realizes the high-efficient automatic operation, can reduce production costs again, guarantee simultaneously operation continue, stable, reliable.
Description of drawings
Fig. 1 is general structure schematic diagram of the present invention
Fig. 2 is the structural representation of the automatic separating component 4 of floating silicon chip of the present invention.
Specific embodiment
petal-basket floating silicon chip automation separation mechanism, comprise PLC and gaily decorated basket guide rail 1, be movably set with the gaily decorated basket 2 on gaily decorated basket guide rail 1, the gaily decorated basket 2 belows are provided with silicon chip up-down mechanism 3, be provided with negative pressure absorbing silicon chip mechanism 5 above the gaily decorated basket 2, be respectively arranged with the automatic separating component 4 of floating silicon chip in the both sides of the gaily decorated basket 2, the automatic separating component 4 of floating silicon chip comprises column support body 6, inverted T-shape link 7, T font link 8 and the door font frame 9 that lies low, inverted T-shape link 7 is vertically set on the top of column support body 6 along the vertical direction, be provided with vertical strip hole 10 on the column of T font link 8, the first hold-down screw 11 by vertical strip hole 10 with T font link 8 be vertically fixed on along the vertical direction inverted T-shape link 7 above, realize the rise of T font link 8 and fall in the position of vertical strip hole 10 by regulating the first hold-down screw 11, be respectively arranged with lie low two horizontal vertical beam guide rails 13 of support body 9 of a font along horizontal fore-and-aft direction on the crossbeam of T font link 8, be provided with the horizontal strip hole of horizontal direction on vertical beam guide rail 13, by regulating the position of the second hold-down screw 14 in horizontal strip hole, realize door font frame 9 the moving forward and backward in the horizontal direction that lie low, on lying low the crossbeam ventilating shaft 15 of frame 9, the door font is movably set with rotating air supporting piece 16, be provided with air admission hole 17 in the end of crossbeam ventilating shaft 15.
Be provided with Fibre Optical Sensor mount pad 12 on described inverted T-shape link 7.
during work, gaily decorated basket assembly is transported to the floating silicon chip separation station, gaily decorated basket base is fixed, stacked silicon chip is positioned at falling on the material Weight plate of gaily decorated basket component internal, and be that the silicon chip group moves up and down time guiding by four flexible guiding Timing Belt parts, lifting jacking block in the rack-and-pinion elevating mechanism is under the rack-and-pinion transmission of driven by servomotor, the mobile base that promotes gaily decorated basket assembly rises and also namely promotes stacked silicon chip group and rise to single silicon chip transport disengaging height position, meanwhile the negative pressure lift cylinder in negative-pressure suction mechanism is down to suction position of silicon wafer near silicon chip group top layer silicon chip with the negative pressure suction nozzle, the moving silicon chip of air supporting begins, negative pressure generator in negative-pressure suction mechanism is opened, four suction nozzles wait for that air-flow holds up silicon chip, in order to draw, the air knife valve of the automatic separating component 4 of floating silicon chip starts simultaneously, two groups of symmetrical air blowing BOB(beginning of block)s carry out the air blast impact with fixed frequency to the silicon chip that is in the top and float separation, meanwhile, lifting jacking block in lifting silicon chip mechanism descends, the silicon chip group disengaging silicon chip Disengagement zone that drive separates, after the valve of negative pressure absorbing silicon chip mechanism will hold through the silicon chip that air-flow holds up, thereon under the driving of linear electric motors, silicon chip is sent on the transition connecting gear.A work period finishes.Lifting jacking block in lifting silicon chip mechanism continues to rise, and begins to carry out the next one work period.

Claims (2)

1. petal-basket floating silicon chip automation separation mechanism, comprise PLC and gaily decorated basket guide rail (1), be movably set with the gaily decorated basket (2) on gaily decorated basket guide rail (1), the gaily decorated basket (2) comprises gaily decorated basket base, four groups of flexible guiding Timing Belt parts, movable floor and fall the material Weight plate, the gaily decorated basket (2) below is provided with silicon chip up-down mechanism (3), be provided with negative pressure absorbing silicon chip mechanism (5) above the gaily decorated basket (2), it is characterized in that, be respectively arranged with the automatic separating component of floating silicon chip (4) in the both sides of the gaily decorated basket (2), the automatic separating component of floating silicon chip (4) comprises column support body (6), inverted T-shape link (7), T font link (8) and the door font frame (9) that lies low, inverted T-shape link (7) is vertically set on the top of column support body (6) along the vertical direction, be provided with vertical strip hole (10) on the column of T font link (8), the first hold-down screw (11) by vertical strip hole (10) with T font link (8) be vertically fixed on along the vertical direction inverted T-shape link (7) above, realize the rise of T font link (8) and fall in the position of vertical strip hole (10) by regulating the first hold-down screw (11), be respectively arranged with lie low two horizontal vertical beam guide rails (13) of support body (9) of a font along horizontal fore-and-aft direction on the crossbeam of T font link (8), be provided with the horizontal strip hole of horizontal direction on vertical beam guide rail (13), by regulating the position of the second hold-down screw (14) in horizontal strip hole, realize door font frame (9) the moving forward and backward in the horizontal direction that lie low, on lying low the crossbeam ventilating shaft (15) of frame (9), the door font is movably set with rotating air supporting piece (16), be provided with air admission hole (17) in the end of crossbeam ventilating shaft (15).
2. a kind of petal-basket floating silicon chip automation separation mechanism according to claim 1, is characterized in that, is provided with Fibre Optical Sensor mount pad (12) on described inverted T-shape link (7).
CN 201110216105 2011-07-30 2011-07-30 Petal-basket floating silicon chip automation separation mechanism Active CN102299049B (en)

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Application Number Priority Date Filing Date Title
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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102618848A (en) * 2012-05-04 2012-08-01 嘉兴科民电子设备技术有限公司 Vertical-type atomic layer deposition device
CN108946139B (en) * 2018-07-04 2023-04-28 中电科风华信息装备股份有限公司 Polarizer feeding and blowing mechanism

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009170643A (en) * 2008-01-16 2009-07-30 Mitsubishi Materials Techno Corp Separation device and inspecting apparatus of substrate
CN101950778A (en) * 2010-09-02 2011-01-19 董维来 Solar silicon water wet-process automatic separating method
CN202167466U (en) * 2011-07-30 2012-03-14 太原风华信息装备股份有限公司 Flower-basket-type automatic separating mechanism for air-floating silicon chip

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009170643A (en) * 2008-01-16 2009-07-30 Mitsubishi Materials Techno Corp Separation device and inspecting apparatus of substrate
CN101950778A (en) * 2010-09-02 2011-01-19 董维来 Solar silicon water wet-process automatic separating method
CN202167466U (en) * 2011-07-30 2012-03-14 太原风华信息装备股份有限公司 Flower-basket-type automatic separating mechanism for air-floating silicon chip

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Address after: 030024 Taiyuan, Shanxi Province, Berlin District, Heping Road, No. 115

Patentee after: CETC Fenghua information equipment Limited by Share Ltd

Address before: 030024 Taiyuan Heping Road, Shanxi, No. 115

Patentee before: Taiyuan Fenghua Information Equipment Co., Ltd.