CN102288299B - Terahertz quantum well photodetector (THzQWP)-based passive thermal imaging detection system and method thereof - Google Patents
Terahertz quantum well photodetector (THzQWP)-based passive thermal imaging detection system and method thereof Download PDFInfo
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Abstract
The invention discloses a terahertz quantum well photodetector (THzQWP)-based passive thermal imaging detection system and a method thereof. A photoconduction THzQWP is taken as a photodetector, a self-designed radiation signal denoising modulation method, a synchronous control module and a signal transmission-convergence light path are adopted, and THzQWP-based passive thermal imaging detection is finished; a thermal radiation signal is modulated by an adjustable aperture diaphragm and a wave chopper at an acquisition end of the thermal radiation signal, and the modulation frequency is set by the wave chopper; a photoconduction mode is adopted at a signal detection circuit end of the THzQWP, the THzQWP receives the radiation signal through an off-axis parabolic mirror group convergence light path and extracts a THz signal, stable bias voltage is applied, THzQWP photocurrent is converted into voltage by a transimpedance amplifier, the voltage is amplified by a low noise amplifier, and data is read by a phase-locked amplifier; and the read signal is recorded and processed by the synchronous control module, and thermal image information is acquired finally.
Description
Technical field
The present invention relates to a kind of system and method that utilizes Terahertz (THz) quantum well detector (QWP, Quantum Well Photodetector) to carry out the passive heat imaging detection.Belong to the semiconductor photoelectric device applied technical field.
Background technology
The passive type thermal imaging is the thermal imagery detection instrument through the heat radiation that receives object and converts it into electric signal and be reflected on the thermal map, extracts the technology of target signature information according to thermal map.This techniques make use detection instrument just can obtain different heat radiation images, i.e. thermal map through the heat radiation ray difference of measuring between the target and background.What the thermal map of target reflected is the distributed image of target surface temperature.The size of object heat radiation energy is relevant with the body surface temperature; Thermal-radiating these characteristics make people can utilize it to come object is carried out contactless temperature survey and hot state analysis, thereby are that aspects such as medical diagnosis, commercial production, energy savings, protection environment provide an important detection means and diagnostic tool.
At present, the passive heat imaging mainly concentrates on infrared band, and imaging technique is comparatively ripe; But because the restriction of mixed and disorderly background signal; The precision of its detection and accuracy are still not high, some particular surroundings (dense fog, dust etc.) down infrared band thermal imaging in addition can't realize.Terahertz (THz) radiation is meant the electromagnetic radiation of frequency in the 0.1-10THz scope; Has littler scattering extinction coefficient owing to the THz Bob is infrared; Simultaneously, infrared band is for plastics, and the penetrance of materials such as paper is almost nil; And the THz ripple has certain transmitance, therefore is fit to very much imaging applications.Just can make thermal imaging be widely used in fields such as security against fire and hidden objects safety check if the THz ripple is used for the passive heat imaging technique, have very high actual value.The researchist that the great potential of terahertz imaging is being ordered about various countries gos deep into and extensive studies it; But at present the research to THz ripple passive heat imaging technique also is in the exploratory stage, and the analysis of Terahertz image information and treatment technology are also remained further practicability.
Terahertz quantum well detector (THzQWP; THz Quantum Well Photodetector) is a kind of important arrowband detector; Compare with other wideband detectors and to have good spectrally resolved ability and very fast response speed, survey especially at focal plane arrays (FPA) in high sensitivity and high resolving power and have special advantages aspect preparing.At present, mainly contain two kinds of photoconduction type and photovoltaic types based on the quantum well detector of GaAs/AlGaAs material system, the quantum well detector of the THz wave band of having reported belongs to photoconduction type more.
Inventor of the present invention is through long-term research to THz ripple thermal imaging and various terahertz detectors; A kind of system and method that utilizes the Terahertz quantum well detector to carry out the passive heat imaging detection has been proposed; Thereby can realize the practical application of THz ripple passive heat imaging technique, help the popularization and the development of this technology.
Summary of the invention
The technical matters that the present invention will solve is to provide a kind of passive type thermal imaging detection system and method based on Terahertz quantum well detector (THzQWP).
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of passive type thermal imaging detection system based on the Terahertz quantum well detector comprises:
Be positioned at radiation source, denoising modulation module, Transmission Convergence light path system, Terahertz quantum well detector, signal processing module, synchronization control module and display module on the objective table;
Saidly be positioned at radiation source on the objective table to said denoising modulation module radiation signal;
Said denoising modulation module receives the radiation signal of said radiation source, and with the radiation signal denoising, the modulation that receive, is sent to said Transmission Convergence light path system then;
Radiation signal transmission after said Transmission Convergence light path system is modulated denoising is also converged, and is sent to said Terahertz quantum well detector then;
Said Terahertz quantum well detector converts the THz wave in the radiation signal that receives electric signal into and is sent to said signal processing module;
Said synchronization control module links to each other with said objective table, denoising modulation module, signal processing module respectively, and the said objective table of synchro control, denoising modulation module and signal processing module obtain the heat picture information of radiation source;
Said synchronization control module links to each other with said display module, the heat picture information of radiation source is sent to said display module shows.
As preferred version of the present invention, said objective table is the two-dimension translational platform by stepper motor control.
As preferred version of the present invention, said denoising modulation module comprises adjustable aperture diaphragm and the chopper that cooperates with it.
As preferred version of the present invention, said Transmission Convergence light path system comprise first from axle throw the face mirror with cooperate with it second from an axle throwing face mirror.
As preferred version of the present invention, said Terahertz quantum well detector is a photoconduction type Terahertz quantum well detector.Further preferably, the THzQWP working temperature is 3.4K, and the peak response rate at the 3.2THz place is 0.5A/W.
As preferred version of the present invention, said signal processing module comprises trans-impedance amplifier, low noise amplifier and the lock-in amplifier that connects successively, and by power supply stable bias voltage is provided.
A kind of detection method that utilizes above-mentioned passive type thermal imaging detection system based on the Terahertz quantum well detector comprises the steps:
Step 1, said denoising modulation module receive and are positioned at the radiation signal of the radiation source on the objective table, and with the radiation signal denoising, the modulation that receive, are sent to said Transmission Convergence light path system then;
Radiation signal transmission after step 2, said Transmission Convergence light path system are modulated denoising is also converged, and is sent to said Terahertz quantum well detector then;
Step 3, said Terahertz quantum well detector convert the THz wave in the radiation signal that receives into electric signal and are sent to said signal processing module and handle;
Step 4, the said objective table of said synchronization control module synchro control, denoising modulation module and signal processing module; Read and write down the signal after said signal processing module is handled; Finally obtain the heat picture information of radiation source, and show through display module.
As preferred version of the present invention; Step 1, said denoising modulation module comprise adjustable aperture diaphragm and the chopper that cooperates with it; Relative distance through regulating adjustable aperture diaphragm and radiation source and the clear aperature of this diaphragm size; Make radiation signal constitute the fan-beam irradiation mode, thereby realize denoising, and adopt chopper to carry out frequency modulation (PFM).
Further preferably, adopt chopper can modulating frequency be set at 25Hz, 100Hz or 200Hz.
Further preferably, adopting said denoising modulation module to carry out the signal to noise ratio (S/N ratio) of denoising modulation should be more than or equal to 32.
As preferred version of the present invention; In the step 2; Said Transmission Convergence light path system adopts first to throw a face mirror from axle radiation signal is changed into the parallel beam transmission by divergent beams, adopts second to throw a face mirror from axle parallel beam is converged to said Terahertz quantum well detector again.
As preferred version of the present invention, in the step 3, said Terahertz quantum well detector converts THz wave into photocurrent; Said signal processing module converts said photocurrent into voltage signal through applying stable bias voltage through trans-impedance amplifier, and amplifies this voltage signal through low noise amplifier, reads the voltage signal data by lock-in amplifier then.
As preferred version of the present invention; In the step 4; Said synchronization control module makes the translation of said objective table step-by-step movement to realize the transmission scan to radiation source, adjusts the denoising modulation module synchronously, and reads and write down the signal after said signal processing module is handled synchronously; Through gathering the intensity in transmission of THz ripple, thereby obtain the heat picture information of radiation source.
Beneficial effect of the present invention is:
Passive type thermal imaging detection system and method that the present invention proposes based on Terahertz quantum well detector (THzQWP); Utilize photoconduction type Terahertz (THz) quantum well detector (Quantum Well Photodetector; QWP) as detector; Adopt the radiation signal denoising modulator approach of design voluntarily, synchronization control module and signal transmit-converge light path, have accomplished based on the passive type thermal imaging of THzQWP and have surveyed.At the collection terminal of thermal radiation signal, utilize adjustable aperture diaphragm and chopper that thermal radiation signal is modulated, modulating frequency is set by chopper.The signal deteching circuit end of THzQWP adopts photoconductive pattern; THzQWP converges light path received radiation signal and extracts the THz signal through throw face mirror group from axle; Through adding stable bias voltage; Convert the THzQWP photocurrent to voltage through trans-impedance amplifier, amplify through low noise amplifier, by the lock-in amplifier read data.The signal of reading by synchronization control module record and processing, finally obtains heat picture information again.
The present invention is based on the passive type thermal imaging detection system of THzQWP and the practical application that method has realized THz ripple passive heat imaging technique, to the development of THz imaging technique with promote significant.
Description of drawings
For further specifying content of the present invention, below in conjunction with synoptic diagram the present invention is done further description, wherein:
Fig. 1 is a system architecture synoptic diagram of the present invention;
Fig. 2 is a thermal-radiating denoising modulation module synoptic diagram among the embodiment;
Fig. 3 is for being THzQWP passive type thermal imaging detection method principle schematic among the embodiment.
Embodiment
Further specify the preferred embodiments of the present invention and practical implementation step below in conjunction with accompanying drawing, for the accompanying drawing that makes things convenient for that illustrates is not proportionally drawn.
Consult Fig. 1; The passive type thermal imaging detection system based on the Terahertz quantum well detector that the present invention proposes comprises: be positioned at radiation source, denoising modulation module 20, Transmission Convergence light path system 30, Terahertz quantum well detector 40, signal processing module 50, synchronization control module 60 and display module 70 on the objective table 10.
Saidly be positioned at radiation source on the objective table 10 to said denoising modulation module 20 radiation signals; Said denoising modulation module 20 receives the radiation signal of said radiation source, and with the radiation signal denoising, the modulation that receive, is sent to said Transmission Convergence light path system 30 then; Radiation signal transmission after said Transmission Convergence light path system 30 is modulated denoising is also converged, and is sent to said Terahertz quantum well detector 40 then; Said Terahertz quantum well detector 40 converts the THz wave in the radiation signal that receives into electric signal and is sent to said signal processing module 50; Said synchronization control module 60 links to each other with said objective table 10, denoising modulation module 20, signal processing module 50 respectively, and the said objective table of synchro control 10, denoising modulation module 20 and signal processing module 50 obtain the heat picture information of radiation source; Said synchronization control module 60 links to each other with said display module 70, the heat picture information of radiation source is sent to said display module 70 shows.
Wherein, said objective table 10 present embodiments are preferably the two-dimension translational platform by stepper motor control.Said denoising modulation module 20 comprises adjustable aperture diaphragm and the chopper that cooperates with it.Said Transmission Convergence light path system 30 comprise first from axle throw face mirror PM1 with cooperate with it second from an axle throwing face mirror PM2.As shown in Figure 2.Denoising to the background radiation signal is mainly big or small through relative distance and this diaphragm clear aperature of regulating adjustable aperture diaphragm and measured object (measured object places first from axle throwing face mirror PM1 along); Make it constitute the fan-beam irradiation mode; Reduce the neighbourhood noise influence, modulating frequency is mainly set by chopper.
Said Terahertz quantum well detector 40 is preferably photoconduction type Terahertz quantum well detector.Further preferably, the THzQWP working temperature is 3.4K, and the peak response rate at the 3.2THz place is 0.5A/W.Said signal processing module 50 can comprise trans-impedance amplifier, low noise amplifier and the lock-in amplifier that connects successively, and by power supply stable bias voltage is provided.
Fig. 3 is the principle schematic of THzQWP passive type thermal imaging detection method in the present embodiment, and this detection method specifically comprises the steps:
Step 1, denoising modulation module receive and are positioned at the radiation signal of the radiation source on the objective table, and with the radiation signal denoising, the modulation that receive, are sent to the Transmission Convergence light path system then.
Wherein, the denoising modulation module, as shown in Figure 2; Relative distance through regulating adjustable aperture diaphragm and radiation source and the clear aperature of this diaphragm size are limit bundle, make radiation signal constitute the fan-beam irradiation mode; Thereby the realization denoising, and adopt chopper to carry out frequency modulation (PFM).Modulating frequency is set to 25Hz respectively, and 100Hz, 200Hz all can carry out thermal imaging.Through imaging effect contrast under the different signal to noise ratio (S/N ratio)s, the threshold signal-to-noise ratio of confirming the thermal imaging of THzQWP passive type is 32, can have The better resolution at the image that is not less than gained under the situation of this signal to noise ratio (S/N ratio), is about 1.5mm.Imaging pattern adopts the transmission scan pattern.
Radiation signal transmission after step 2, Transmission Convergence light path system are modulated denoising is also converged, and is sent to the Terahertz quantum well detector then.
Wherein, said Transmission Convergence light path system adopts first to throw the radiation signal of a face mirror PM1 after will modulate from axle and collect, and changes into the parallel beam transmission by divergent beams, adopts second from an axle throwing face mirror PM2 parallel beam to be converged to THzQWP again.Modulating frequency is 25Hz, and transmission range is 2m.
Step 3, Terahertz quantum well detector convert the THz wave in the radiation signal that receives electric signal into and are sent to signal processing module and handle.
Wherein, the Terahertz quantum well detector converts THz wave into photocurrent.Signal processing module converts said photocurrent into voltage signal through applying stable bias voltage through trans-impedance amplifier, and amplifies this voltage signal through low noise amplifier, reads the voltage signal data by lock-in amplifier then.The THzQWP signal deteching circuit adopts 1 joint dry cell power supply in the present embodiment, and supply voltage is 1.67V.The bias voltage that offers the Bias-Volt end is about-25mV.The THzQWP working temperature is 3.4K, and the peak response rate at the 3.2THz place is 0.5A/W, and detectivity can reach 10
11CmHz
1/2/ W.
Step 4, the said objective table of synchronization control module synchro control, denoising modulation module and signal processing module read and write down the signal after said signal processing module is handled, and finally obtain the heat picture information of radiation source, and show through display module.
Wherein, Said synchronization control module makes the translation of said objective table step-by-step movement to realize the transmission scan to radiation source; The modulation module of adjustment denoising synchronously; And read and write down the signal after said signal processing module is handled synchronously, through gathering THz ripple information, thereby obtain the heat picture information of radiation source.In the present embodiment, object under test is placed on the two-dimension translational platform, adopts the transmission scan pattern, the data of being gathered are the intensity in transmission of THz ripple, utilize the synchro control program that the lock-in amplifier of stepper motor and test data is carried out synchro control.
Need to prove; In this article; Relational terms such as first and second grades only is used for an entity or operation are made a distinction with another entity or operation, and not necessarily requires or hint relation or the order that has any this reality between these entities or the operation.And; Term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability; Thereby make and comprise that process, method, article or the equipment of a series of key elements not only comprise those key elements; But also comprise other key elements of clearly not listing, or also be included as this process, method, article or equipment intrinsic key element.Under the situation that do not having much more more restrictions, the key element that limits by statement " comprising ... ", and be not precluded within process, method, article or the equipment that comprises said key element and also have other identical element.
The foregoing description is just listed expressivity principle of the present invention and effect is described, but not is used to limit the present invention.Any personnel that are familiar with this technology all can make amendment to the foregoing description under spirit of the present invention and scope.Therefore, rights protection scope of the present invention should be listed like claims.
Claims (12)
1. passive type thermal imaging detection system based on the Terahertz quantum well detector; It is characterized in that, comprising: be positioned at radiation source, denoising modulation module, Transmission Convergence light path system, Terahertz quantum well detector, signal processing module, synchronization control module and display module on the objective table;
Saidly be positioned at radiation source on the objective table to said denoising modulation module radiation signal;
Said denoising modulation module receives the radiation signal of said radiation source, and with the radiation signal denoising, the modulation that receive, is sent to said Transmission Convergence light path system then;
Radiation signal transmission after said Transmission Convergence light path system is modulated denoising is also converged, and is sent to said Terahertz quantum well detector then;
Said Terahertz quantum well detector converts the THz wave in the radiation signal that receives electric signal into and is sent to said signal processing module;
Said synchronization control module links to each other with said objective table, denoising modulation module, signal processing module respectively, and the said objective table of synchro control, denoising modulation module and signal processing module obtain the heat picture information of radiation source;
Said synchronization control module links to each other with said display module, the heat picture information of radiation source is sent to said display module shows;
Said denoising modulation module comprises adjustable aperture diaphragm and the chopper that cooperates with it.
2. the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 1 is characterized in that: said Transmission Convergence light path system comprise first from axle throw the face mirror with cooperate with it second from an axle throwing face mirror.
3. the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 1 is characterized in that: said Terahertz quantum well detector is a photoconduction type Terahertz quantum well detector.
4. according to claim 1 or 3 described passive type thermal imaging detection systems based on the Terahertz quantum well detector, it is characterized in that: the working temperature of said Terahertz quantum well detector is 3.4K, and the peak response rate at the 3.2THz place is 0.5A/W.
5. the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 1; It is characterized in that: said signal processing module comprises trans-impedance amplifier, low noise amplifier and the lock-in amplifier that connects successively, and by power supply stable bias voltage is provided.
6. the detection method like each described passive type thermal imaging detection system based on the Terahertz quantum well detector of claim 1-5 is characterized in that, comprises the steps:
Step 1, said denoising modulation module receive and are positioned at the radiation signal of the radiation source on the objective table, and with the radiation signal denoising, the modulation that receive, are sent to said Transmission Convergence light path system then;
Radiation signal transmission after step 2, said Transmission Convergence light path system are modulated denoising is also converged, and is sent to said Terahertz quantum well detector then;
Step 3, said Terahertz quantum well detector convert the THz wave in the radiation signal that receives into electric signal and are sent to said signal processing module and handle;
Step 4, the said objective table of said synchronization control module synchro control, denoising modulation module and signal processing module; Read and write down the signal after said signal processing module is handled; Finally obtain the heat picture information of radiation source, and show through display module.
7. the detection method of the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 6; It is characterized in that: step 1, said denoising modulation module comprise adjustable aperture diaphragm and the chopper that cooperates with it; Relative distance through regulating adjustable aperture diaphragm and radiation source and the clear aperature of this diaphragm size; Make radiation signal constitute the fan-beam irradiation mode, thereby realize denoising, and adopt chopper to carry out frequency modulation (PFM).
8. the detection method of the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 7 is characterized in that: adopt chopper can modulating frequency be set at 25Hz, 100Hz or 200Hz.
9. the detection method of the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 7 is characterized in that: adopting said denoising modulation module to carry out the signal to noise ratio (S/N ratio) of denoising modulation should be more than or equal to 32.
10. the detection method of the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 6; It is characterized in that: in the step 2; Said Transmission Convergence light path system adopts first to throw a face mirror from axle radiation signal is changed into the parallel beam transmission by divergent beams, adopts second to throw a face mirror from axle parallel beam is converged to said Terahertz quantum well detector again.
11. the detection method of the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 6, it is characterized in that: in the step 3, said Terahertz quantum well detector converts THz wave into photocurrent; Said signal processing module converts said photocurrent into voltage signal through applying stable bias voltage through trans-impedance amplifier, and amplifies this voltage signal through low noise amplifier, reads the voltage signal data by lock-in amplifier then.
12. the detection method of the passive type thermal imaging detection system based on the Terahertz quantum well detector according to claim 6; It is characterized in that: in the step 4; Said synchronization control module makes the translation of said objective table step-by-step movement to realize the transmission scan to radiation source, adjusts the denoising modulation module synchronously, and reads and write down the signal after said signal processing module is handled synchronously; Through gathering the intensity in transmission of THz ripple, thereby obtain the heat picture information of radiation source.
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| CN102590095A (en) * | 2012-01-20 | 2012-07-18 | 中国科学院上海技术物理研究所 | Two-dimensional oscillating mirror scanned terahertz passive imaging system |
| CN102636269A (en) * | 2012-05-15 | 2012-08-15 | 中国科学院上海微系统与信息技术研究所 | Measurement device and method of pulse tera-hertz radiation source output wave beam field form |
| CN102749341A (en) * | 2012-07-11 | 2012-10-24 | 中国科学院上海微系统与信息技术研究所 | Tomography imaging system and method based on terahertz quantum device |
| CN103901498B (en) * | 2012-12-26 | 2016-09-14 | 中国电子科技集团公司第五十研究所 | Strengthen the system of passive terahertz imaging effect |
| JP6195052B2 (en) * | 2013-03-08 | 2017-09-13 | セイコーエプソン株式会社 | Specimen inspection equipment |
| CN103196567A (en) * | 2013-04-15 | 2013-07-10 | 江苏物联网研究发展中心 | Diode infrared detector and reading circuit thereof |
| CN105607140A (en) * | 2015-12-17 | 2016-05-25 | 中国科学院上海微系统与信息技术研究所 | Terahertz wave rapid rotation scanning imaging system and method |
| CN106918742B (en) * | 2017-03-01 | 2019-03-19 | 中国科学院上海微系统与信息技术研究所 | A kind of Terahertz quantum cascaded laser optical beat signal detection system and method |
| CN108254071A (en) * | 2018-01-08 | 2018-07-06 | 华东师范大学 | A kind of direct detecting system of highly sensitive Terahertz of room temperature |
| CN108445487A (en) * | 2018-03-17 | 2018-08-24 | 广东容祺智能科技有限公司 | A kind of intelligent detecting system |
| CN108917929B (en) * | 2018-05-24 | 2024-04-19 | 中国科学院上海微系统与信息技术研究所 | Terahertz confocal microscopic imaging system and imaging method thereof |
| CN110864717B (en) * | 2019-11-27 | 2021-11-05 | 上海明垒实业有限公司 | Terahertz unit detector rotating support and detection device |
| CN112985609B (en) * | 2021-02-07 | 2022-03-29 | 中南大学 | THz passive radiation temperature measurement method |
| CN112985611B (en) * | 2021-02-07 | 2022-03-29 | 中南大学 | THz passive radiation temperature measuring device |
| CN116519626B (en) * | 2023-06-25 | 2023-09-19 | 中国工程物理研究院流体物理研究所 | Signal detection circuit and system for terahertz spectrum and imaging measurement system |
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| CN100444419C (en) * | 2006-04-14 | 2008-12-17 | 中国科学院上海技术物理研究所 | Detecting wavelength adjustable terahertz photoelectric detector |
| CN101834227B (en) * | 2010-04-27 | 2011-11-30 | 中国科学院上海微系统与信息技术研究所 | Optimization method of response ratio of one-dimensional T-Hz quantum well photoelectric detector |
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