CN110864717B - Terahertz unit detector rotating support and detection device - Google Patents
Terahertz unit detector rotating support and detection device Download PDFInfo
- Publication number
- CN110864717B CN110864717B CN201911179490.5A CN201911179490A CN110864717B CN 110864717 B CN110864717 B CN 110864717B CN 201911179490 A CN201911179490 A CN 201911179490A CN 110864717 B CN110864717 B CN 110864717B
- Authority
- CN
- China
- Prior art keywords
- rotating
- unit
- fixed
- terahertz
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The application discloses a terahertz unit detector rotating support, a detection device, a system and a method, which comprise a fixed seat, a supporting frame and a rotating mechanism; the fixed seat is used as a fixed part of the rotating mechanism and is connected with the rotating mechanism through the support frame; the connecting end of the support frame on the rotating support is positioned on the rotating center of the rotating mechanism; in the embodiment of the application, by the structure of the device, the accurate data detection is realized by using the unit detector and the data is more intuitively presented in the display.
Description
Technical Field
The application relates to the technical field of detector detection, in particular to a terahertz unit detector rotating support and a detection device.
Background
Terahertz is a new radiation source with many unique advantages; the terahertz technology is a very important cross frontier field, and provides a very attractive opportunity for technical innovation, national economic development and national safety to possibly cause revolutionary development of science and technology.
The unique performance of terahertz brings profound influences to the fields of communication (broadband communication), radar, electronic countermeasure, electromagnetic weapons, astronomy, medical imaging (unmarked genetic examination, imaging at the cellular level), nondestructive testing, safety inspection (biochemical inspection) and the like. The terahertz has high spatial resolution due to high frequency; and has a high temporal resolution due to its short pulses (on the order of picoseconds).
However, due to the relatively late period of terahertz research, the current research in this respect is limited to theory, and few devices utilizing terahertz are available.
Disclosure of Invention
In order to solve the above technical problem, embodiments of the present application provide a rotating support of a terahertz unit detector, a detection device, a system and a method.
A first aspect of the embodiments of the present application provides a terahertz unit detector rotating support, which may include:
the device comprises a fixed seat, a support frame and a rotating mechanism;
the fixed seat is used as a fixed part of the rotating mechanism and is connected with the rotating mechanism through the support frame;
the connecting end of the support frame on the rotating support is positioned on the rotating center of the rotating mechanism;
wherein, rotary mechanism includes:
the locking bracket is connected with the supporting frame;
the fixed disc is movably connected with the other end of the locking bracket; the fixed disc rotates on the locking bracket along a plane vertical to the locking bracket;
the rotating plate is positioned right below the fixed disk and is connected with the fixed disk through a connecting column; the rotating plate is parallel to the fixed plate;
the bottom of the detection plate fixing support is arranged on the rotating plate; the side surface of the detection plate fixing support is fixed with the side surface of the fixing disc; the detection plate fixing support is internally used for placing a unit detector;
and the power supply mechanism is positioned on the rotating plate and supplies electric energy to the unit detectors.
Furthermore, the bottom of the fixed seat is provided with a movable slide rail, and the rotary support reciprocates on the movable slide rail.
Further, the support bracket includes:
the main support frame is vertically fixed on the fixed seat;
and the connecting bracket is connected with the top of the main supporting frame and the locking bracket.
Further, the main supporting frame is positioned on the side face of the rotating mechanism; the rotating mechanism does not interfere with the main support frame in the self-rotating process.
A second aspect of the embodiments of the present application provides a terahertz unit detector detection apparatus, including:
the objective table is internally provided with a unit detector;
the optical signal transmission mechanism reflects a field or a wave beam of the measured piece to the objective table and is connected with a data output interface of the objective table through a data line;
the data processing mechanism is used for acquiring the data of the optical signal transmission mechanism and comprises a data acquisition card, a driver and a display module; the data acquisition card is used for acquiring data, is driven by the driver and displays the data on the display module.
Further, the object stage adopts the terahertz unit detector rotating support as described above.
A third aspect of the embodiments of the present application provides a terahertz unit detector detection system, including:
a measured unit for emitting a field or beam;
the object carrying unit is used for receiving the radiation signal sent by the unit to be detected and converting the terahertz waves into an electric signal;
the optical signal transmission unit is used for acquiring the electric signal converted by the carrying unit;
and the data processing unit is used for acquiring the electric signals, processing the data and displaying the images.
Further, the optical signal transmission unit includes:
the light path conversion unit is positioned above the carrying unit and reflects the radiation signal sent by the unit to be detected onto the carrying unit;
and the signal transmission unit is connected with the data output interface of the carrying unit and is used for transmitting the electric signal to the data processing unit.
Further, the carrier unit includes:
the translation unit controls the carrying unit to do reciprocating motion;
the rotating unit is positioned on the translation unit and controls the carrying unit to do autorotation motion;
and the unit detection unit is positioned on the rotating unit and used for receiving the radiation signal of the unit to be detected.
A fourth aspect of the embodiments of the present application provides a method for detecting a terahertz unit detector, including:
the unit detector receives a radiation signal transmitted by a tested device, converts terahertz waves into an electric signal and transmits the electric signal to the optical signal transmission mechanism;
the synchronous control module is connected with a servo driver and a data acquisition card in the signal acquisition processing module and is used for synchronously controlling and acquiring signals;
and the upper computer image display module displays the information acquired by the signal acquisition and processing module in an image form.
In the embodiment of the application, by the structure of the device, the accurate data detection is realized by using the unit detector and the data is more intuitively presented in the display.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of a rotary support of a unit detector provided in the present embodiment;
FIG. 2 is a block diagram of the detection system of the unit detector provided in the present embodiment;
FIG. 3 is a schematic top view of the rotary and translation stages;
FIG. 4 is a two-dimensional scanning scattergram of the present application;
fig. 5 is an archimedes spiral scan trajectory diagram.
The figures in the drawings compare the meaning:
100-a fixed seat, 200-a support frame, 201-a main support frame, 202-a connecting bracket, 300-a rotating mechanism, 301-a locking bracket, 302-a fixed plate, 303-a rotating plate, 304-a connecting column, 305-a detection plate fixing bracket, 306-a unit detector and 307-a power supply mechanism.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the present application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the specification of the present application and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It should be further understood that the term "and/or" as used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.
As used in this specification and the appended claims, the term "if" may be interpreted contextually as "when", "upon" or "in response to a determination" or "in response to a detection". Similarly, the phrase "if it is determined" or "if a [ described condition or event ] is detected" may be interpreted contextually to mean "upon determining" or "in response to determining" or "upon detecting [ described condition or event ]" or "in response to detecting [ described condition or event ]".
As shown in fig. 1, the terahertz unit detector rotating bracket comprises a fixed base 100, a supporting frame and a rotating mechanism 300,
in this embodiment, in order to improve the stability of the entire support during the movement process, the fixed base 100, the fixed plate 302 and the rotating plate 303 are all horizontal surfaces.
Since the rotation plate 303 is rotated at a high speed during its rotation, the power supply mechanism and the detection plate fixing bracket 305 including the detector are respectively disposed at both sides of the rotation plate 303, and the center of gravity of the entire rotation mechanism 300 is overlapped with the center thereof, thereby ensuring stability during the rotation.
The rotary joint is fixed on a rotary joint fixing disc 302, the fixing disc 302 is fixed on a rotary disc through a support, and a power supply is fixed on the rotary disc through a pressure plate. The rotary joint is fixed on the rotary joint locking bracket 301 by a fastening screw and a locking pressure plate, so that the lower end input part of the rotary joint is ensured to do circular motion, and the upper end output part only does reciprocating horizontal motion. The locking bracket 301 is connected to both the support bracket, which is fixed to the base plate and finally to the displacement rotary platform, to achieve the intended motion state.
In order to improve the simplicity of the whole illustration content, some necessary connecting lines are hidden.
The application still relates to a terahertz unit detector detection device includes:
the objective table is equipped with the unit detector in, and whole objective table adopts above-mentioned terahertz unit detector runing rest.
The optical signal transmission mechanism reflects a field or a wave beam of the measured piece to the objective table and is connected with a data output interface of the objective table through a data line;
the data processing mechanism is used for acquiring the data of the optical signal transmission mechanism and comprises a data acquisition card, a driver and a display module; the data acquisition card is used for acquiring data, is driven by the driver and displays the data on the display module.
As shown in fig. 2, the present application also relates to a terahertz unit detector detection system, and the entire system includes a unit under test 401, an object carrying unit 402, a light signal transmission unit 403 and a data processing unit 404.
The above-mentioned unit 401 to be tested is used for emitting field or beam.
The object carrying unit 402 is configured to receive a radiation signal emitted by the unit to be measured, and convert the terahertz wave into an electrical signal. The carrier unit 402 includes: the translation unit controls the carrying unit to do reciprocating motion; the rotating unit is positioned on the translation unit and controls the carrying unit to do autorotation motion; and the unit detection unit is positioned on the rotating unit and used for receiving the radiation signal of the unit to be detected.
The optical signal transmission unit 403 is used for acquiring the electrical signal converted by the carrier unit. The optical signal transmission unit 403 specifically includes an optical path conversion unit, which is located above the object carrying unit and reflects the radiation signal emitted by the detected unit onto the object carrying unit; and the signal transmission unit is connected with the data output interface of the carrying unit and is used for transmitting the electric signal to the data processing unit.
The data processing unit 404 is configured to obtain the electrical signal, perform data processing, and perform image display.
The system mainly aims to detect a target by using a detector and remit field energy distribution of the target object, and an application system which is initially built is shown in figure 2. The application system takes a radiation source as a tested part (namely a field or a beam to be tested), adopts a self-designed rotating table and a self-designed translation table as an object stage, a signal transmission-convergence light path system and a synchronous control and signal acquisition processing system of the detector, and adopts the unit detector 306 or the array detector to respectively complete the application demonstration of field analysis or beam analysis, so that the scanning imaging analysis time is obviously shortened.
The device to be detected radiates signals outwards, the signals are converged and transmitted by the transmission optical path system, and terahertz waves are irradiated on the rotating table and the translation table serving as the object stage of the detector in parallel; the unit detector 306/array detector receives the radiation signal transmitted by the device to be tested, converts the terahertz waves into an electric signal and transmits the electric signal to the signal acquisition and processing module; the synchronous control module is connected with a servo driver and a data acquisition card in the signal acquisition processing module to ensure the synchronous control and acquisition of signals; and finally, the upper computer image display module displays the information acquired by the signal acquisition and processing module in an image form.
A top view of the rotation and translation stages is shown in fig. 3, where the rotation stage serves as both the detector stage.
In this embodiment, the stage is preferably a rotary stage and a translation stage controlled by a servo drive. The detector is located at a centrifugal position of a certain radius of the rotating platform, the rotating platform rotates at the speed of 8 revolutions per second, the translation platform translates at the speed of 1cm/s, position information is recorded once in 1ms, the scanning time is 5s, 5000 points are recorded in total, the position information is restored, and a two-dimensional scanning scatter diagram shown in the following figure can be obtained, wherein the imaging range is a circular area with the radius of 5 cm.
According to the coupled motion of the linear motor and the rotary motor designed by the system, the scanning track curve of the Archimedes spiral can be formed, as shown in figure 5.
After completing a movement period, intensity can be drawn according to an Archimedes spiral curve equation, wherein a polar coordinate formula of the Archimedes spiral curve is as follows: r ═ a + b θ, where a and b are both real numbers.
When θ is 0, a is the distance from the starting point to the origin of polar coordinates.
b is the angular velocity of the helix rotation. The variation parameter a corresponds to the rotation of the spiral, while the parameter b controls the distance between two adjacent curves. The archimedes spiral is based on a cartesian coordinate system, and the conversion between the cartesian coordinate system and a rectangular coordinate system is required, wherein the conversion formula is x ═ r cos (theta), and y ═ sin (theta). Through the specific method, the acquired data information can be directly converted into data under the rectangular coordinate system and displayed in the display module, so that more visual embodiment is realized.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other ways. For example, the division of the unit is only one logical function division, and other division may be implemented in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. The shown or discussed mutual coupling, direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some interfaces, and may be in an electrical, mechanical or other form.
Units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In the above embodiments, the implementation may be wholly or partially realized by software, hardware, firmware, or any combination thereof. When implemented in software, may be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. The procedures or functions according to the embodiments of the present application are wholly or partially generated when the computer program instructions are loaded and executed on a computer. The computer may be a general purpose computer, a special purpose computer, a network of computers, or other programmable device. The computer instructions may be stored on or transmitted over a computer-readable storage medium. The computer instructions may be transmitted from one website, computer, server, or data center to another website, computer, server, or data center by wire (e.g., coaxial cable, fiber optic, Digital Subscriber Line (DSL)), or wirelessly (e.g., infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device, such as a server, a data center, etc., that includes one or more of the available media. The usable medium may be a read-only memory (ROM), or a Random Access Memory (RAM), or a magnetic medium, such as a floppy disk, a hard disk, a magnetic tape, a magnetic disk, or an optical medium, such as a Digital Versatile Disk (DVD), or a semiconductor medium, such as a Solid State Disk (SSD).
Although the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the details of the foregoing embodiments, and various equivalent changes (such as number, shape, position, etc.) may be made to the technical solution of the present invention within the technical spirit of the present invention, and the equivalents are protected by the present invention.
Claims (5)
1. A terahertz unit detector rotating support is characterized by comprising a fixed seat, a supporting frame and a rotating mechanism;
the fixed seat is used as a fixed part of the rotating mechanism and is connected with the rotating mechanism through the support frame;
the connecting end of the support frame on the rotating support is positioned on the rotating center of the rotating mechanism;
wherein, rotary mechanism includes:
the locking bracket is connected with the supporting frame;
the fixed disc is movably connected with the other end of the locking bracket; the fixed disc rotates on the locking bracket along a plane vertical to the locking bracket;
the rotating plate is positioned right below the fixed disk and is connected with the fixed disk through a connecting column; the rotating plate is parallel to the fixed plate;
the bottom of the detection plate fixing support is arranged on the rotating plate; the side surface of the detection plate fixing support is fixed with the side surface of the fixing disc; the detection plate fixing support is internally used for placing a unit detector;
and the power supply mechanism is positioned on the rotating plate and supplies electric energy to the unit detectors.
2. The terahertz unit detector rotating holder of claim 1,
the bottom of the fixed seat is provided with a movable slide rail, and the rotary bracket reciprocates on the movable slide rail.
3. The terahertz unit detector rotating holder of claim 1,
the support frame includes:
the main support frame is vertically fixed on the fixed seat;
and the connecting bracket is connected with the top of the main supporting frame and the locking bracket.
4. The terahertz unit detector rotating mount of claim 3, wherein,
the main supporting frame is positioned on the side face of the rotating mechanism; the rotating mechanism does not interfere with the main support frame in the self-rotating process.
5. A terahertz element detector detection apparatus, comprising:
the objective table is internally provided with a unit detector;
the optical signal transmission mechanism reflects a field or a wave beam of the measured piece to the objective table and is connected with a data output interface of the objective table through a data line;
the data processing mechanism is used for acquiring the data of the optical signal transmission mechanism and comprises a data acquisition card, a driver and a display module; the data acquisition card is used for acquiring data, is driven by the driver and is displayed on the display module; the object stage adopts the terahertz unit detector rotating support as claimed in any one of claims 1 to 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911179490.5A CN110864717B (en) | 2019-11-27 | 2019-11-27 | Terahertz unit detector rotating support and detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911179490.5A CN110864717B (en) | 2019-11-27 | 2019-11-27 | Terahertz unit detector rotating support and detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110864717A CN110864717A (en) | 2020-03-06 |
| CN110864717B true CN110864717B (en) | 2021-11-05 |
Family
ID=69656521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911179490.5A Active CN110864717B (en) | 2019-11-27 | 2019-11-27 | Terahertz unit detector rotating support and detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110864717B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111505629B (en) * | 2020-05-08 | 2021-02-02 | 中国科学院国家空间科学中心 | Terahertz security inspection imaging system and method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288299A (en) * | 2011-07-25 | 2011-12-21 | 中国科学院上海微系统与信息技术研究所 | Terahertz quantum well photodetector (THzQWP)-based passive thermal imaging detection system and method thereof |
| CN104048814A (en) * | 2014-06-25 | 2014-09-17 | 首都师范大学 | Terahertz waveguide test system |
| CN105534481A (en) * | 2016-01-21 | 2016-05-04 | 华中科技大学 | Frequency domain optical coherence tomograghy device and method |
| CN105607140A (en) * | 2015-12-17 | 2016-05-25 | 中国科学院上海微系统与信息技术研究所 | Terahertz wave rapid rotation scanning imaging system and method |
| CN105973481A (en) * | 2016-07-07 | 2016-09-28 | 西安应用光学研究所 | Terahertz source wavelength measuring apparatus and method |
| CN109507146A (en) * | 2018-11-30 | 2019-03-22 | 深圳市华讯方舟太赫兹科技有限公司 | A kind of terahertz time-domain spectroscopy detection device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103616333B (en) * | 2013-12-18 | 2015-11-18 | 中国科学院重庆绿色智能技术研究院 | For the fluid sample pool device of tera-hertz spectra continuous detecting |
| US10863895B2 (en) * | 2015-05-27 | 2020-12-15 | The Regents Of The University Of California | Terahertz endoscopy through laser-driven terahertz sources and detectors |
| CN208847225U (en) * | 2018-07-03 | 2019-05-10 | 全耐塑料公司 | Fixed system and its component for fixed obstacle detection sensor |
-
2019
- 2019-11-27 CN CN201911179490.5A patent/CN110864717B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288299A (en) * | 2011-07-25 | 2011-12-21 | 中国科学院上海微系统与信息技术研究所 | Terahertz quantum well photodetector (THzQWP)-based passive thermal imaging detection system and method thereof |
| CN104048814A (en) * | 2014-06-25 | 2014-09-17 | 首都师范大学 | Terahertz waveguide test system |
| CN105607140A (en) * | 2015-12-17 | 2016-05-25 | 中国科学院上海微系统与信息技术研究所 | Terahertz wave rapid rotation scanning imaging system and method |
| CN105534481A (en) * | 2016-01-21 | 2016-05-04 | 华中科技大学 | Frequency domain optical coherence tomograghy device and method |
| CN105973481A (en) * | 2016-07-07 | 2016-09-28 | 西安应用光学研究所 | Terahertz source wavelength measuring apparatus and method |
| CN109507146A (en) * | 2018-11-30 | 2019-03-22 | 深圳市华讯方舟太赫兹科技有限公司 | A kind of terahertz time-domain spectroscopy detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110864717A (en) | 2020-03-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8422626B2 (en) | Computed tomography apparatus for geological resource core analysis | |
| CN105842690B (en) | Trailing type scanning imaging system | |
| CN104132639B (en) | A kind of micro-optical scanning range unit and method | |
| US10188371B2 (en) | Ultrasound phantom having a curved surface | |
| CN108535550B (en) | Terahertz substance dielectric constant measuring system based on Brewster angle measurement | |
| CN104076089A (en) | Automatic ultrasonic C scanning detection system for annular forging | |
| JP2000028589A (en) | Three-dimensional ultrasonic imaging device | |
| CN101011243A (en) | Foreign body detecting method using thermoacoustic imaging and device thereof | |
| CN110864717B (en) | Terahertz unit detector rotating support and detection device | |
| CN207231962U (en) | A kind of bulk goods Coal Yard dust particle automated watch-keeping facility | |
| CN105974401B (en) | A kind of radar system and its detection method of multi-panel detection simultaneously | |
| CN103837472B (en) | Micro-cantilever deflection and scanning system and the scan method of the micro-cantilever array sensor based on multi-angle plane transmission mirror | |
| CN109870707A (en) | Pyramid laser synchronization scanned imagery device for submarine navigation device | |
| CN112105937A (en) | Antenna directional pattern testing method, device and storage medium | |
| CN103720459A (en) | Fluorescent molecular tomography device and method based on single slip ring and wireless control exciting light scanning | |
| CN103822651A (en) | Plane mirror reflection based micro-cantilever deflection detecting system of micro-cantilever array sensor and detecting method | |
| CN109171616A (en) | Obtain the system and method for 3D shape inside measured object | |
| US20190307429A1 (en) | Ultrasound diagnostic apparatus and control method of ultrasound diagnostic apparatus | |
| CN104323797B (en) | A kind of Portable medical supersonic equipment supersonic detection device | |
| EP2901146B1 (en) | Systems and methods for viewing data generated by rotational scanning | |
| CN107728021A (en) | The partial discharge number of photons detection means compensated based on inclination angle and supersonic sounding | |
| KR102660559B1 (en) | Ultrasound probe, ultrasound imaging apparatus, ultrasound imaging system, and method for controlling thereof | |
| CN115166758A (en) | Object space position detection device using infrared technology and laser radar | |
| CN111272096B (en) | Three-dimensional scanning device and security inspection equipment | |
| CN203745360U (en) | Micro-cantilever deflection scanning system of micro-cantilever array sensor based on multi-angle planar transmission mirrors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |