CN104048814A - Terahertz waveguide test system - Google Patents
Terahertz waveguide test system Download PDFInfo
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- CN104048814A CN104048814A CN201410290290.8A CN201410290290A CN104048814A CN 104048814 A CN104048814 A CN 104048814A CN 201410290290 A CN201410290290 A CN 201410290290A CN 104048814 A CN104048814 A CN 104048814A
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Abstract
The invention discloses a terahertz waveguide test system which comprises a femtosecond laser device, a half wave plate and a polarization beam splitter. The half wave plate and the polarization beam splitter are arranged at the output end of the femtosecond laser device, the polarization beam splitter divides a light beam into pump light and detection light, the pump light is gathered on a terahertz emitter through a pump light path, the generated terahertz radiation waves pass through a waveguide test module and then are gathered on a terahertz detector, and the terahertz radiation waves and the detection light beam are coupled to the terahertz detector for testing in a collinear mode. The system is further provided with three delay table systems which can be used for compensating and changing the optical path difference in the process of wave guide measuring. The system has the advantages of being strong in generality, simple in erecting, capable of being repeatedly used many times and wide in spectral measuring range in the terahertz waveguide test and application.
Description
Technical field
The present invention relates to a kind of terahertz waveguide test macro, is a kind of system that the optical properties such as all kinds of terahertz waveguide energy, wave spectrum are carried out to test experiments of being applicable to.
Background technology
Terahertz refers to that frequency band arrives the electromagnetic radiation as waves of 10THz at 0.1THz.THz wave, owing to having the peculiar properties such as transient state, low energy and coherence, has great scientific value and wide application prospect in various fields such as Non-Destructive Testing, satellite communication, military radar, health cares.This wherein, terahertz waveguide is as the effective means of transmission THz wave, is research material tera-hertz spectra, the Primary Component that carries out material detection and detection.
At present, the domestic and international research for the wide spectral transmissions performance of terahertz waveguide mainly adopts terahertz time-domain spectroscopy system.In the people's such as Ja-Yu Lu in 2011 article, introduced a kind of commonplace waveguide test macro at present.Its tested waveguide is placed in terahertz time-domain spectroscopy system two between the gold-plated throwing face mirror of axle, utilizes tygon lens that THz wave is converged and enters tested waveguide [Ja-Yu-Lu, OE, Vol.19No.1,2011].This system building is complicated, when the waveguide of test different length type, need to repeat to build; Owing to adopting tygon lens in system, the THz wave at free-space propagation is converged, and then be coupled into the mode of tested waveguide, this mode makes Terahertz coupling efficiency low, and THz wave loss is larger.
Summary of the invention
In order to solve the defect existing in above-mentioned prior art, the object of the present invention is to provide a kind ofly to there is high-level efficiency waveguide coupler, and general strong, without repeating to build the terahertz waveguide test macro that just can realize optical path compensation.
To achieve these goals, the present invention adopts following technical scheme:
A kind of terahertz waveguide test macro, it is characterized in that, comprise a cover body and be arranged on the femtosecond pulse laser of sequentially laying by light path in cover body, 1/2 wave plate, polarization beam apparatus, the pumping light path device of apportion and detection light path device, silicon chip, terahertz detector and data acquisition unit, also comprise the data handling machine being placed in outside cover body, wherein, in detection light path device, be provided with the 3rd and postpone platform module, pumping light path device includes terahertz transmitter and waveguide test cell, in waveguide test cell, be provided with the second delay platform module, by the 3rd, postponing platform module and second postpones platform module adjustment pumping light path and surveys light path equivalent optical path.
Described terahertz waveguide test macro, pumping light path device comprises the first flat mirror reflects mirror (4) that is sequentially placed in pumping light path, the second plane mirror (5), first postpones platform module (6), the first quartzy plano-convex lens (7), terahertz transmitter (8) and waveguide test cell (9), tested waveguide is placed in waveguide test cell, pumping light path device receives the pump light of polarization beam apparatus (3) outgoing, transfer pump light to THz wave by tested waveguide, and final outgoing converges for converging light path L3 and focuses on terahertz detector (16) with the light of surveying light path through silicon chip (15).
Described waveguide test cell (9) includes terahertz waveguide coupling mechanism (9-1), two terahertz waveguide clampers (9-2,9-3), second postpones platform module (9-4), the first silver-plated plane mirror (9-5) and first gold-plated from axle throwing face mirror (9-6); Terahertz waveguide coupling mechanism (9-1) is connected with terahertz transmitter (8), and is arranged on emitting facet one side of terahertz transmitter (8), and terahertz emission ripple is converged to collection; Tested waveguide by two waveguide clampers (9-2,9-3), be fixed and with terahertz waveguide coupling mechanism (9-1) exit end horizontal alignment, the second Postponement module (9-4) is positioned at the other end of tested waveguide.
The second Postponement module (9-4) is fixed on second on the second delay platform (941) by the second delay platform (941), location and gold-platedly from axle, throws face mirror (942) and the second silver-plated plane mirror (943) forms; Wherein, the second delay platform (941) is provided with slide rail to realize the displacement at tested waveguide axial direction.
Second gold-platedly throws face mirror (942) from axle and is positioned at distance tested waveguide outgoing end face 153mm place, the second silver-plated plane mirror (943) is positioned at second and gold-platedly from axle, throws 50mm place after face mirror (942), and the second gold-plated parallel terahertz emission ripple with certain width of throwing face mirror (942) outgoing from axle is changed to 90 degree ejaculations to the first silver-plated plane mirror (9-5).
Described waveguide coupler (9-1) has a conical input (911), a coupling output terminal (912) changing according to the different end surface shape of tested waveguide, and one for the fixing transmitter fixed mount of terahertz transmitter (8), input end (911) is conical through-hole, heavy caliber end is towards terahertz transmitter (8), small-caliber end butt coupling output terminal (912), coupling output terminal (912) towards tested waveguide and with tested waveguide horizontal alignment; Described coupling output terminal (912) is a hollow cylinder, two parallel dull and stereotyped or hollow rectangle bodies, and cylinder diameter or upper and lower plates spacing are less than the sectional dimension of tested waveguide.
Described first postpones platform module (6) is comprised of the first delay platform (6-1), two block compensation plane mirrors (6-2), 6-3; Two block compensation plane mirrors (6-2,6-3) contraposition is fixed on the first delay platform (6-1) and is positioned at wherein portion, intersect two plane mirror one end, the other end is opening-like, angle between two crossing plane mirrors is 90 degree, one block compensation plane mirror (6-2) is reflected into another block compensation plane mirror (6-3) by the femtosecond laser beam of the second plane mirror (5) outgoing, and direction of beam propagation is changed to 90 degree, by another compensation plane mirror (6-3), again femtosecond laser beam is changed to 90 degree and reflex to quartzy plano-convex lens (7); First postpones platform (6-1) is provided with slide rail, can carry out linear reciprocal movement along incident femtosecond direction of beam propagation.
Survey light path device and be included in the 3rd plane mirror (10), the 3rd delay platform module (11), the 4th plane mirror (12), polaroid (13) and the second quartzy plano-convex lens (14) sequentially arranging in detection light path; Survey light path device and receive the detection light L2 of polarization beam apparatus (3) outgoing and change the final outgoing of beam direction to silicon chip (15), converge for converging light L3 and focus on terahertz detector (16) with the terahertz emission ripple that sees through silicon chip (15).
The 3rd postpone platform module (11) by the 3rd postponing platform (11-1), be fixed on the 3rd compensation plane mirror (11-2,11-3) that postpones to be positioned on platform (11-1) wherein two contrapositions of portion and form, intersect two plane mirror one end, the other end is opening-like, and the angle between two crossing plane mirrors is 90 degree; The 3rd postpones platform (11-1) is provided with slide rail, carries out linear reciprocal movement change detection light path light path along the incident beam direction of propagation.
Femto-second laser 1 sends light source, and 1/2 wave plate (2) and polarization beam apparatus (3) sequentially keep at a certain distance away and be placed in the transmitting terminal of femto-second laser (1); Terahertz detector (16) receives the light that converges of detecting light beam and the coupling of terahertz emission ripple conllinear, export data acquisition and processing unit (17) to and carry out photosignal conversion, and then carry out data processing to obtain the various optical performance parameters of tested waveguide by computing machine.
Owing to having adopted technical scheme as above, beneficial effect of the present invention is as follows: the waveguide coupler that 1, adopts conical design, THz wave has more effectively been converged in waveguide to be measured, its coupling efficiency can reach more than 95%, and can adapt to the terahertz waveguide of different end faces, promoted the kind of test waveguide.2, three electronic delay platform designs have been adopted, wherein second, third delay platform and affiliated element thereof can be realized the test for different length waveguide, carry out effective optical path compensation, its compensation range is from 0 to 1500mm, greatly improved the length restriction of test waveguide, avoided to system repeat build.3, adopting photoconduction antenna terahertz transmitter radiation THz wave, make Terahertz spectrum width reach 3.0THz, is the guarantee that provides the foundation of the wide spectral transmissions performance of test waveguide.4, at whole system of the present invention dress cover body, leave air intake opening, system can inflated with nitrogen or dry air, thereby can avoid the absorption of water in air to Terahertz, further improves measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the inner structure schematic block diagram of terahertz waveguide example test system of the present invention
Fig. 2 is the assembling assumption diagram of waveguide test module of the present invention
Fig. 3 is the assembling assumption diagram of the present invention's the first delay system
Fig. 4 is the assembling assumption diagram of the present invention's the 3rd delay system
Fig. 5 A is Terahertz coupling mechanism perspective view in invention
Fig. 5 B be in Fig. 5 A A-A to cross-sectional view
Fig. 5 C is the left side view of Fig. 5 A
Embodiment
By example and accompanying drawing, technical scheme of the present invention is described in further detail below.For ease of understanding, in the present invention, position of components contextual definition light path incident direction is " front ", and exit direction is " afterwards ".
As shown in Figure 1, terahertz waveguide test macro of the present invention comprises a cover body (not shown) and is arranged on the femtosecond pulse laser 1 in cover body, 1/2 wave plate 2, polarization beam apparatus 3, the pumping light path device that includes the first delay platform module 6, the terahertz transmitter based on photoconduction antenna 8, waveguide test cell 9, includes the 3rd detection light path device that postpones platform module 11, silicon chip 15, terahertz detector 16 and data acquisition unit 17, also comprise data handling machine 18.Wherein:
Cover body can be used for closed system, leaves air intake opening on cover body, and system can inflated with nitrogen or dry air, thereby can avoid the absorption of water in air to Terahertz, further improves measuring accuracy.In addition, cover body is also convenient to the fixed installation of miscellaneous part.
By femtosecond pulse laser 1, be titanium sapphire femto-second laser, it sends light source, and the femtosecond pulse repetition frequency of output is 80MHz, pulse width 120fs, wavelength 800nm, output power 150mW; 1/2 wave plate 2 and polarization beam apparatus 3 sequentially keep at a certain distance away and are placed in the transmitting terminal of femtosecond pulse laser 1, Femtosecond Optical Pulses enters polarization beam apparatus 3 through 1/2 wave plate 2, femtosecond light is divided into two bundles through polarization beam apparatus 3: a branch of for pump light L1, (Fig. 1 shows a branch of left, this bundle light trend is called pumping light path L1), account for 80% of laser output power, in order to survey light L2, (Fig. 1 shows upwards a branch of another bundle, this bundle light trend is called surveys light path L2), account for 20% of laser output power;
By pumping light path device, realize the transmission of pump light L1 and the generation of THz wave and transmission.Pump light L1 from polarization beam apparatus 3 postpones after platform module the 6, first quartzy plano-convex lens 7 through the first flat mirror reflects mirror 4, the second plane mirror 5, first, converge in the terahertz transmitter 8 based on photoconduction antenna, utilize photoconduction aerial radiation THz wave; The terahertz emission ripple producing enters waveguide test cell 9, then focuses on terahertz detector 16 through the final terahertz emission ripple of silicon chip 15.Here, the first flat mirror reflects mirror 4 is positioned at polarization beam apparatus 3 outgoing pump light L1 horizontal levels, horizontal pump light L1 is changed to 90 and spend into vertical pump light (Fig. 1 is shown as downwards), the second plane mirror 5 is positioned at the first plane mirror 4 bottoms, downward pump light L1 change 90 is spent into horizontal pump light (Fig. 1 is shown as to the right) and inject the first delay platform module 6, first postpones the plane mirror (referring to Fig. 3 and associated description) that platform module 6 comprises two contraposition displacements in the horizontal direction, can pass through adjustment of displacement light path length, and pump light L1 reverse (Fig. 1 is shown as left) is injected to first quartzy plano-convex lens 7 and the terahertz transmitter 8 of sequentially putting in light path, the terahertz emission ripple being produced by terahertz transmitter 8 enters the tested waveguide of horizontal positioned in waveguide test cell 9, pass through again a plurality of devices (referring to Fig. 2 and associated description) in waveguide test cell 9, the silicon chip 15 that terahertz emission ripple is finally placed through oblique (being miter angle with terahertz emission ripple) focuses on and is placed in (the present invention thereafter, definition light path incident direction is " front ", exit direction is " afterwards ") terahertz detector 16 on.
By surveying light path device, realize the transmission of surveying light L2.Detection light L2 from polarization beam apparatus 3 postpones platform module 11, the 4th plane mirror 12, polaroid 13 and the second quartzy plano-convex lens 14 via the 3rd plane mirror the 10, the 3rd, through silicon chip 15, formed detection light path L2 again, this detecting light beam finally converges and focuses on terahertz detector 16 with the terahertz emission ripple that sees through silicon chip 15 from pumping light path L1.Here, the 3rd flat mirror reflects mirror 10 is positioned at polarization beam apparatus 3 outgoing and surveys light L2 (Fig. 1 is shown as upwards position), the detection light L2 making progress is changed to 90 and spend into level detection light (Fig. 1 is shown as to the right), inject the 3rd and postpone platform module 11, the 3rd postpones the plane mirror (referring to Fig. 5 and associated description) that platform module 11 comprises two contraposition displacements in the horizontal direction, can pass through adjustment of displacement light path length, and will survey light L2 reverse (Fig. 1 is shown as left) and inject the 4th plane mirror 12 in light path, to survey light L2, again to change 90 degree downward, and inject the polaroid 13 of sequentially putting in light path, the second quartzy plano-convex lens 14 and silicon chip 15, silicon chip 15 is placed in and the position of surveying light L2 and terahertz emission ripple and be 45 degree, finally converge to focus on the terahertz emission ripple that sees through silicon chip 15 and be placed on the terahertz detector 16 converging on light path L3.
Detecting light beam and terahertz emission ripple conllinear are coupled on terahertz detector 16, utilize optical rectification effect to carry out optical sampling to the time domain electric field of Terahertz, the terahertz time-domain light signal detecting exports by terahertz detector 16 data acquisition and the processing unit 17 that are positioned at thereafter to and carries out photosignal conversion, (terahertz detector 16 is nonlinear crystals to obtain the various optical performance parameters of tested waveguide by computing machine, to carry out data processing, by the mode of optical rectification, the signal of THz wave is transformed into and is surveyed on light L2, and then the light signal of L2 is received by data acquisition below and processing unit 17, by opto-electronic conversion, obtain electrical signal data, utilize lock-in amplifier to improve the signal to noise ratio (S/N ratio) of signal, afterwards these information are passed to computing machine).
Data acquisition unit 17 used is existing design, by input end, in light path, be provided with successively quarter wave plate 17-1, the 3rd quartzy plano-convex lens 17-2, wollaston prism 17-3 and differential detector 17-4, by differential detector 17-4, receive detecting light beam and terahertz emission ripple conllinear coupling light and be converted into electric signal, be electrically connected to lock-in amplifier 17-5, detection data exports computing machine 18 to the most at last, by its computing and show.
In above-mentioned terahertz waveguide test macro, tested waveguide is placed in waveguide test cell 9 and realizes test.As shown in Figure 2, in the present invention, waveguide test cell 9 used includes terahertz waveguide coupling mechanism 9-1, two terahertz waveguide clamper 9-2,9-3, and second postpones platform module 9-4, the first silver-plated plane mirror 9-5, and first gold-platedly throw face mirror 9-6 from axle.Terahertz waveguide coupling mechanism 9-1 is connected with terahertz transmitter 8, and is arranged on emitting facet one side of terahertz transmitter 8, and terahertz emission ripple is converged to collection; Tested waveguide is fixed by two waveguide clamper 9-2,9-3, the position of two waveguide clamper 9-2,9-3 can be adjusted with the length of tested waveguide, tested waveguide and terahertz waveguide coupling mechanism 9-1 exit end horizontal alignment, terahertz waveguide coupling mechanism 9-1 enters the terahertz emission ripple of collecting and being coupled in tested waveguide, and the terahertz emission ripple after tested waveguide outgoing is propagated along incident direction; So, the terahertz emission ripple of the tested waveguide outgoing of above-mentioned process enters the second Postponement module 9-4.
Shown in Fig. 3, the second Postponement module 9-4 forms from axle throwing face mirror the 942, second silver-plated plane mirror 943 by the second delay platform 941, second is gold-plated.Wherein, on the second Postponement module 9-4 second gold-platedly throws the 942 distance tested waveguide outgoing end face 153mm places settings of face mirror from axle, its terahertz emission ripple by tested waveguide outgoing is collected, and produces the parallel beam with certain width, and direction of beam propagation is changed to 90 degree; Second gold-plated from axle, throw face mirror 942 after (light beam exit direction) 50mm places the second silver-plated plane mirror 943 is set, it changes 90 degree ejaculations to the first silver-plated plane mirror 9-5 by the second gold-plated parallel terahertz emission ripple with certain width of throwing 942 outgoing of face mirror from axle; Second gold-platedly throws face mirror the 942 and second silver-plated plane mirror 943 from axle and all locates and be fixed on the second delay platform 941, this the second delay platform 941 is provided with slide rail, can carry out linear reciprocal movement along the terahertz emission direction of wave travel by tested waveguide incident, and gold-platedly from axle, throw face mirror 942, silver-plated plane mirror 943 the terahertz emission direction of wave travel of incident is changed to the silver-plated plane mirror 9-5 of outgoing to the first after 180 degree by what carry above.In reality detects, because the length of tested waveguide is not identical, by the displacement of the second delay platform 941, can change the light path of (being generally prolongation) pumping light path L1.
The first silvered mirror 9-5 is arranged on the rear 500mm of above-mentioned the second silver-plated plane mirror 942, and the parallel terahertz emission ripple with certain width by the second Postponement module 9-4 outgoing is changed to 90 degree is reflected into and is positioned at first gold-platedly throwing on face mirror 9-6 from axle thereafter; First is gold-plated from axle throwing face mirror 9-6 50mm place setting after distance the first silvered mirror 9-5, and light beam is changed to 90 degree in the direction of propagation, the parallel terahertz emission ripple with certain width is seen through to silicon chip 15 and together converge on the terahertz detector 16 being positioned at thereafter with the light beam of surveying light path.
Here, silicon chip 15 is actually the light beam of surveying road L2 in reflection, and the detection light being reflected by catoptron 12, by polaroid 13, after lens 14, then enters on terahertz detector 16 through the reflection of silicon chip 15.The propagation that just overlaps with Terahertz conllinear of light beam by the rear detection of silicon chip 15 road, and enter together on terahertz detector 16.
In the present invention, the formation of waveguide coupler 9-1 used is as shown in Fig. 5 A, Fig. 5 B and Fig. 5 C.This terahertz waveguide coupling mechanism 9-1 integral body is processed by rectangular parallelepiped alloy or metal (aluminium, iron, copper) piece, there is a taper THz wave input end 911, a THz wave coupling output terminal 912 that can change according to the different end surface shape of tested waveguide, and one for the fixing transmitter fixed station 913 of terahertz transmitter 8.Wherein, for convenience of fixing terahertz transmitter 8, transmitter fixed station 913 is designed to step-like, and terahertz transmitter 8 can be placed on to get out of a predicament or an embarrassing situation and go up, and the correspondence position of getting out of a predicament or an embarrassing situation can be established threaded hole 914, on screw, terahertz transmitter 8 being fixed on and being got out of a predicament or an embarrassing situation.Input end 911 is for being located at the conical through-hole in topping bar, heavy caliber end is its input end face towards terahertz transmitter 8, its diameter maximum can be 20mm, conical through-hole length is 15mm-30mm, cone angle is 10 °～40 °, small-caliber end butt coupling output terminal 912, towards tested waveguide and with tested waveguide horizontal alignment, this coupling output terminal 912 can be a hollow cylinder, also can be two parallel flat boards or hollow rectangle body, length is 4mm, cylinder diameter or upper and lower plates spacing are less than the sectional dimension of tested waveguide, be for example 2mm (can set according to actual needs), coupling output terminal 912 is inserted in tested waveguide.In use, the conical input 911 that the terahertz radiation being produced by terahertz transmitter 8 enters waveguide coupler 9-1 converges collection by the design of its conical through-hole, coupling output terminal 912 is inserted in tested waveguide outward, and terahertz emission ripple enters tested waveguide through waveguide coupler 9-1 output terminal.
Waveguide clamper 9-2,9-3 used selects and produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., and model is GCM-5702 product; Gold-platedly from axle, throw face mirror 942,9-6 and select and produced by Newport (U.S. Advanced LCD Technologies Dev Co Ltd), the product that model is 50331AU; Second postpones platform 941 selects and is produced by Newport (U.S. Advanced LCD Technologies Dev Co Ltd), the product that model is M-ILS150PP; Silver-plated plane mirror 943,9-5 be by the plane at a 50mm * 50mm evenly the silver of evaporation thick layer 200nm form, it can reach 95% to terahertz emission wave reflection efficiency.
In terahertz waveguide test macro of the present invention, for adjusting the light path of pump light L1 and detection light L2, in light path, be respectively equipped with light path compensation system, be located at second in pump light L1 light path and postpone platform module 9-4 (referring to the description to the second Postponement module 9-4 in Fig. 3 above) and be located at the 3rd delay platform module 11 of surveying in light L2 light path.The device first of the spectral scan while in addition, also having designed actual measurement postpones platform module 6.
As shown in Figure 3, the first delay platform module 6 is comprised of the first delay platform 6-1, two block compensation plane mirror 6-2,6-3.Two block compensation plane mirror 6-2,6-3 contraposition are fixed on the first delay platform 6-1 and are positioned at wherein portion, intersect two plane mirror one end, the other end is opening-like, angle between two crossing plane mirrors is 90 degree, one block compensation plane mirror 6-2 is reflected into another block compensation plane mirror 6-3 by the femtosecond laser beam of the second plane mirror 5 outgoing, and direction of beam propagation is changed to 90 degree, by another compensation plane mirror 6-3, again femtosecond laser beam is changed to 90 degree and reflex to quartzy plano-convex lens 7; First postpones platform 6-1 is provided with slide rail, can carry out linear reciprocal movement along incident femtosecond direction of beam propagation, and by the two block compensation plane mirror 6-2, the 6-3 that carry, the direction of propagation of the femtosecond light beam of incident is changed to outgoing after 180 degree above, the spectral scan of the displacement by the first delay platform 6-1 during for actual measurement.
As shown in Figure 4, similar with the first delay platform module 6 formations, the 3rd postpones platform module 11 is comprised of the 3rd delay platform 11-1, two block compensation plane mirror 11-2,11-3.Two block compensation plane mirror 11-2,11-3 are fixed on the 3rd to postpone to be positioned at wherein portion on platform 11-1, intersect two plane mirror one end, the other end is opening-like, angle between two crossing plane mirrors is 90 degree, one block compensation plane mirror 11-2 is reflected into another block compensation plane mirror 11-3 by the femtosecond laser beam of the 3rd plane mirror 10 outgoing, and direction of beam propagation is changed to 90 degree, by another compensation plane mirror 11-3, again femtosecond laser beam is changed to 90 degree and reflex to the 4th plane mirror 12; The 3rd postpones platform 11-1 is provided with slide rail, can carry out linear reciprocal movement along incident femtosecond direction of beam propagation, and by two block compensation plane mirror 11-2, the 11-3 carrying, the direction of propagation of the femtosecond light beam of incident being changed to the rear outgoing of 180 degree above, the light path of surveying light path by the 3rd displacement that postpones platform 11-1 to realize changes.The 3rd effect that postpones platform 11-1 is the pumping light path and detection light path optical path difference extending because of the second delay platform 941 in order to compensate, and makes pumping light path and detection light path equivalent optical path.
Here, used first postpones platform 6-1, the 3rd and postpones 11-1 and select and produced by Newport (U.S. Advanced LCD Technologies Dev Co Ltd), the product that model is M-ILS150PP; Compensation plane mirror 6-2,6-3,11-2,11-3 select and are produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCC-101112.
In the present invention, titanium sapphire femto-second laser 1 used is selected and is produced by Spectra-Physics (Spectra-Physics), and model is MaiTai titanium sapphire femto-second laser; 1/2 wave plate 2 is selected and is produced by Newport (U.S. Advanced LCD Technologies Dev Co Ltd), the product that model is 10PR52-2; Polarization beam apparatus 3 is selected and is produced by Newport (U.S. Advanced LCD Technologies Dev Co Ltd), the product that model is 05FC16PB.5; Form pumping light path plane mirror 4,5 used and select and produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCC-101112; Quartzy plano-convex lens 7 is selected and is produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCL-010810; Terahertz transmitter 8 based on photoconduction antenna is selected and is produced by Zomega (U.S. Zuo meter Jia company), the product that model is LT-GaAs.
Terahertz detector 16 is selected and is produced by Zomega (U.S. Zuo meter Jia company), the terahertz detector that model is ZnTe (terahertz detector based on zinc antimonide crystal); Form to survey light path silicon chip 15 used and select and produced by Zomega (U.S. Zuo meter Jia company), model is Silicon Lens silicon chip; Quartzy plano-convex lens 14 is selected and is produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCL-010810; Polaroid 13 is selected and is produced by Newport (U.S. Advanced LCD Technologies Dev Co Ltd), and model is 05P109AR.16 polaroid; Plane mirror 13,12 is selected and is produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCC-101112.
In data acquisition and processing unit 17, quarter wave plate 17-1 used selects and is produced by Newport (U.S. Advanced LCD Technologies Dev Co Ltd), the product that model is 10RP54-2; Quartzy plano-convex lens 17-2 selects and is produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCL-010810; Wollaston prism 17-3 selects Throlab (U.S.'s Soret is won company) to produce, the product that model is WP10; Lock-in amplifier 17-5 selects and is produced by Stanford (U.S. Stamford company), the product that model is SR830.Differential detector 17-4 used can be used existing commercial product (a set of quarter wave plate that is integrated with of Zomega company for example, the terahertz time-domain spectroscopy detecting module of Wollaston prism and differential detector), for cost consideration, also can use the self-control detector of the photodiode that is provided with two series connection, its input end receives the two mutually perpendicular light intensity signals in bundle polarization direction of being exported by wollaston prism 17-3, be irradiated to respectively on two photodiodes, by photodiode, light intensity signal is converted into electric signal, electric signal inputs on the differential input end mouth of lock-in amplifier 17-5 by a coaxial wire, after signal amplifies, input to and in computing machine 18, carry out data processing.Computing machine 18 can be selected and be produced by Computer Company of association, and model is the product of Thinkpad s230u.
Utilize the above-mentioned terahertz waveguide test macro of the present invention to test tested waveguide, by following operating process:
Step 1: system reference signal scanning.Open laser instrument 1, the second delay platform 942 and the 3rd and postpone platform 11-1 initial position and be set to 0mm, now need not place tested waveguide, utilize computer control first to postpone platform 6-1 and lock-in amplifier 17-5 carries out reference spectra scanning.
Step 2: put into tested waveguide.By the output terminal of tested waveguide access waveguide coupler 9-1, and utilize waveguide clamper 9-2,9-3 to be fixed it.According to the length of tested waveguide, by the second delay platform 941 (left side in Fig. 1) movement backward in the second delay platform module 9-4, guarantee that tested waveguide left side and the second gold-plated distance from axle throwing face mirror 942 are 153mm, record second postpones the displacement of platform 942.
Step 3: the 3rd the 3rd delay platform 11-1 postponing in platform module 11 is moved right, and displacement is consistent with the second delay platform 941 displacements in step 2.
Step 4, utilizes computer control first to postpone platform 6-1 and lock-in amplifier 17-5 carries out spectral scan.Compare the terahertz light spectral property that can obtain tested waveguide with the reference spectra in step 1.
Illustrate: the waveguide as need are measured other length, only needs repeating step two, three, four.
More than operation is visible, the very convenient use of the present invention, when for different length, waveguide is tested, only need to adjust second, third delay platform and can carry out effective optical path compensation (the longest 1500mm of reaching of its compensation range), greatly improved the length restriction of test waveguide, avoided to system repeat build.
In addition, the present invention, owing to having adopted the waveguide coupler of exquisite design, can more effectively converge to THz wave in waveguide to be measured, and coupling efficiency can reach more than 95%; And because this waveguide coupler output terminal cross section, form can change, can adapt to the terahertz waveguide test of different end faces, promote the kind of test waveguide.
Claims (10)
1. a terahertz waveguide test macro, it is characterized in that, comprise a cover body and be arranged on the femtosecond pulse laser (1) of sequentially laying by light path in cover body, 1/2 wave plate (2), polarization beam apparatus (3), the pumping light path device of apportion and detection light path device, silicon chip (15), terahertz detector (16) and data acquisition unit (17), also comprise the data handling machine (18) being placed in outside cover body, wherein, in detection light path device, be provided with the 3rd and postpone platform module (11), pumping light path device includes terahertz transmitter (8) and waveguide test cell (9), in waveguide test cell (9), be provided with the second delay platform module (9-4), by the 3rd, postponing platform module (11) and second postpones platform module (9-4) adjustment pumping light path and surveys light path equivalent optical path.
2. terahertz waveguide test macro according to claim 1, it is characterized in that, pumping light path device comprises the first flat mirror reflects mirror (4) that is sequentially placed in pumping light path, the second plane mirror (5), first postpones platform module (6), the first quartzy plano-convex lens (7), terahertz transmitter (8) and waveguide test cell (9), tested waveguide is placed in waveguide test cell, pumping light path device receives the pump light of polarization beam apparatus (3) outgoing, transfer pump light to THz wave by tested waveguide, and final outgoing converges for converging light path L3 and focuses on terahertz detector (16) with the light of surveying light path through silicon chip (15).
3. terahertz waveguide test macro according to claim 2, it is characterized in that, described waveguide test cell (9) includes terahertz waveguide coupling mechanism (9-1), two terahertz waveguide clampers (9-2,9-3), second postpones platform module (9-4), the first silver-plated plane mirror (9-5) and first gold-plated from axle throwing face mirror (9-6); Terahertz waveguide coupling mechanism (9-1) is connected with terahertz transmitter (8), and is arranged on emitting facet one side of terahertz transmitter (8), and terahertz emission ripple is converged to collection; Tested waveguide by two waveguide clampers (9-2,9-3), be fixed and with terahertz waveguide coupling mechanism (9-1) exit end horizontal alignment, the second Postponement module (9-4) is positioned at the other end of tested waveguide.
4. terahertz waveguide test macro according to claim 3, it is characterized in that, the second Postponement module (9-4) is fixed on second on the second delay platform (941) by the second delay platform (941), location and gold-platedly from axle, throws face mirror (942) and the second silver-plated plane mirror (943) forms; Wherein, the second delay platform (941) is provided with slide rail to realize the displacement at tested waveguide axial direction.
5. terahertz waveguide test macro according to claim 4, it is characterized in that, second gold-platedly throws face mirror (942) from axle and is positioned at distance tested waveguide outgoing end face 153mm place, the second silver-plated plane mirror (943) is positioned at second and gold-platedly from axle, throws 50mm place after face mirror (942), and the second gold-plated parallel terahertz emission ripple with certain width of throwing face mirror (942) outgoing from axle is changed to 90 degree ejaculations to the first silver-plated plane mirror (9-5).
6. according to terahertz waveguide test macro described in claim 3 or 4 or 5, it is characterized in that, described waveguide coupler (9-1) has a conical input (911), a coupling output terminal (912) changing according to the different end surface shape of tested waveguide, and one for the fixing transmitter fixed mount of terahertz transmitter (8), input end (911) is conical through-hole, heavy caliber end is towards terahertz transmitter (8), small-caliber end butt coupling output terminal (912), coupling output terminal (912) towards tested waveguide and with tested waveguide horizontal alignment; Described coupling output terminal (912) is a hollow cylinder, two parallel dull and stereotyped or hollow rectangle bodies, and cylinder diameter or upper and lower plates spacing are less than the sectional dimension of tested waveguide.
7. according to the arbitrary described terahertz waveguide test macro of claim 2 to 6, it is characterized in that, described first postpones platform module (6) is comprised of the first delay platform (6-1), two block compensation plane mirrors (6-2,6-3); Two block compensation plane mirrors (6-2,6-3) contraposition is fixed on the first delay platform (6-1) and is positioned at wherein portion, intersect two plane mirror one end, the other end is opening-like, angle between two crossing plane mirrors is 90 degree, one block compensation plane mirror (6-2) is reflected into another block compensation plane mirror (6-3) by the femtosecond laser beam of the second plane mirror (5) outgoing, and direction of beam propagation is changed to 90 degree, by another compensation plane mirror (6-3), again femtosecond laser beam is changed to 90 degree and reflex to quartzy plano-convex lens (7); First postpones platform (6-1) is provided with slide rail, can carry out linear reciprocal movement along incident femtosecond direction of beam propagation.
8. terahertz waveguide test macro according to claim 1, it is characterized in that, survey light path device and be included in the 3rd plane mirror (10), the 3rd delay platform module (11), the 4th plane mirror (12), polaroid (13) and the second quartzy plano-convex lens (14) sequentially arranging in detection light path; Survey light path device and receive the detection light L2 of polarization beam apparatus (3) outgoing and change the final outgoing of beam direction to silicon chip (15), converge for converging light L3 and focus on terahertz detector (16) with the terahertz emission ripple that sees through silicon chip (15).
9. terahertz waveguide test macro according to claim 8, it is characterized in that, the 3rd postpone platform module (11) by the 3rd postponing platform (11-1), be fixed on the 3rd compensation plane mirror (11-2,11-3) that postpones to be positioned on platform (11-1) wherein two contrapositions of portion and form, intersect two plane mirror one end, the other end is opening-like, and the angle between two crossing plane mirrors is 90 degree; The 3rd postpones platform (11-1) is provided with slide rail, carries out linear reciprocal movement change detection light path light path along the incident beam direction of propagation.
10. according to the arbitrary described terahertz waveguide test macro of claim 1 to 9, it is characterized in that, femto-second laser (1) sends light source, and 1/2 wave plate (2) and polarization beam apparatus (3) sequentially keep at a certain distance away and be placed in the transmitting terminal of femto-second laser (1); Terahertz detector (16) receives the light that converges of detecting light beam and the coupling of terahertz emission ripple conllinear, export data acquisition and processing unit (17) to and carry out photosignal conversion, and then carry out data processing to obtain the various optical performance parameters of tested waveguide by computing machine.
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