CN203981375U - Terahertz waveguide test macro - Google Patents
Terahertz waveguide test macro Download PDFInfo
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- CN203981375U CN203981375U CN201420343603.7U CN201420343603U CN203981375U CN 203981375 U CN203981375 U CN 203981375U CN 201420343603 U CN201420343603 U CN 201420343603U CN 203981375 U CN203981375 U CN 203981375U
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- 238000012360 testing method Methods 0.000 title claims abstract description 58
- 230000010287 polarization Effects 0.000 claims abstract description 22
- 238000005086 pumping Methods 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 230000008878 coupling Effects 0.000 claims description 31
- 238000010168 coupling process Methods 0.000 claims description 31
- 238000005859 coupling reaction Methods 0.000 claims description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 24
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 239000010703 silicon Substances 0.000 claims description 24
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 230000011514 reflex Effects 0.000 claims description 4
- 230000008859 change Effects 0.000 abstract description 8
- 238000001228 spectrum Methods 0.000 abstract description 6
- 239000000047 product Substances 0.000 description 17
- 238000005516 engineering process Methods 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- HGAZMNJKRQFZKS-UHFFFAOYSA-N chloroethene;ethenyl acetate Chemical compound ClC=C.CC(=O)OC=C HGAZMNJKRQFZKS-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910007709 ZnTe Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- CZJCMXPZSYNVLP-UHFFFAOYSA-N antimony zinc Chemical compound [Zn].[Sb] CZJCMXPZSYNVLP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
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Abstract
The utility model discloses a kind of terahertz waveguide test macro, it comprises femto-second laser, be arranged on 1/2 wave plate and the polarization beam apparatus of femtosecond pulse laser output terminal, light beam is divided into pump light by polarization beam apparatus, with detection light, pump light converges in terahertz transmitter through pumping light path, and the terahertz emission ripple of generation after waveguide test module, is gathered in terahertz detector by terahertz emission ripple again; Terahertz emission ripple and detecting light beam conllinear be coupled on terahertz detector and and then test; The utility model also configures three delay platform systems and can be used for compensation and change the optical path difference while measuring waveguide.Native system has highly versatile in terahertz waveguide test and application aspect, builds simply, can be repeatedly used the feature of measure spectrum wide ranges.
Description
Technical field
The utility model relates to a kind of terahertz waveguide test macro, is a kind of system that the optical properties such as all kinds of terahertz waveguide energy, wave spectrum are carried out to test experiments of being applicable to.
Background technology
Terahertz refers to that frequency band arrives the electromagnetic radiation as waves of 10THz at 0.1THz.THz wave, owing to having the peculiar properties such as transient state, low energy and coherence, has great scientific value and wide application prospect in various fields such as Non-Destructive Testing, satellite communication, military radar, health cares.This wherein, terahertz waveguide is as the effective means of transmission THz wave, is research material tera-hertz spectra, the Primary Component that carries out material detection and detection.
At present, mainly adopt terahertz time-domain spectroscopy system for the research of the wide spectral transmissions performance of terahertz waveguide both at home and abroad.In the people's such as Ja-Yu Lu in 2011 article, introduce a kind of commonplace waveguide test macro at present.Its tested waveguide is placed in terahertz time-domain spectroscopy system two between the gold-plated throwing face mirror of axle, utilizes tygon lens that THz wave is converged and enters tested waveguide [Ja-Yu-Lu, OE, Vol.19No.1,2011].This system building complexity need to repeat to build in the time of the waveguide of test different length type; Owing to adopting tygon lens in system, the THz wave at free-space propagation is converged, and then be coupled into the mode of tested waveguide, this mode makes Terahertz coupling efficiency low, and THz wave loss is larger.
Utility model content
In order to solve the defect existing in above-mentioned prior art, the purpose of this utility model is to provide one to have high-level efficiency waveguide coupler, and general strong, without repeating to build the terahertz waveguide test macro that just can realize optical path compensation.
To achieve these goals, the utility model adopts following technical scheme:
A kind of terahertz waveguide test macro, it is characterized in that, comprise a cover body and be arranged on the femtosecond pulse laser of sequentially laying by light path in cover body, 1/2 wave plate, polarization beam apparatus, the pumping light path device of apportion and detection light path device, silicon chip, terahertz detector and data acquisition unit, also comprise the data handling machine being placed in outside cover body, wherein, in detection light path device, be provided with the 3rd and postpone platform module, pumping light path device includes terahertz transmitter and waveguide test cell, in waveguide test cell, be provided with the second delay platform module, postponing platform module and second by the 3rd postpones platform module adjustment pumping light path and surveys light path equivalent optical path.
Described terahertz waveguide test macro, pumping light path device comprises the first flat mirror reflects mirror (4) that is sequentially placed in pumping light path, the second plane mirror (5), first postpones platform module (6), the first quartzy plano-convex lens (7), terahertz transmitter (8) and waveguide test cell (9), tested waveguide is placed in waveguide test cell, the contraposition of pumping light path device receiving end and polarization beam apparatus (3) pump light exit end, the THz wave exit end of terahertz transmitter (8) is connected with the receiving end of waveguide test cell (9), the exit end of waveguide test cell (9) and silicon chip (15) and terahertz detector thereafter (16) contraposition, so pumping light path device receives the pump light of polarization beam apparatus (3) outgoing, transfer pump light to THz wave by tested waveguide, and final outgoing converges for converging light path L3 and focuses on terahertz detector (16) with the light of surveying light path through silicon chip (15).
Described waveguide test cell (9) includes terahertz waveguide coupling mechanism (9-1), two terahertz waveguide clampers (9-2,9-3), second postpones platform module (9-4), the first silver-plated plane mirror (9-5) and first gold-plated from axle throwing face mirror (9-6); Terahertz waveguide coupling mechanism (9-1) is connected with terahertz transmitter (8), and is arranged on emitting facet one side of terahertz transmitter (8), and terahertz emission ripple is converged to collection; Tested waveguide be fixed by two waveguide clampers (9-2,9-3) and with terahertz waveguide coupling mechanism (9-1) exit end horizontal alignment, the second Postponement module (9-4) is positioned at the other end of tested waveguide.
The second Postponement module (9-4) by the second delay platform (941), location be fixed on the second delay platform (941) second gold-plated from axle throw face mirror (942) and the second silver-plated plane mirror (943) form; Wherein, the second delay platform (941) is provided with slide rail to realize the displacement at tested waveguide axial direction.
Second gold-plated from axle throw face mirror (942) be positioned at distance tested waveguide outgoing end face 153mm place, the second silver-plated plane mirror (943) is positioned at second and gold-platedly throws 50mm place after face mirror (942) from axle, and the second gold-plated parallel terahertz emission ripple with certain width of throwing face mirror (942) outgoing from axle is changed to 90 degree ejaculations to the first silver-plated plane mirror (9-5).
Described waveguide coupler (9-1) has a conical input (911), a coupling output terminal (912) changing according to the different end surface shape of tested waveguide, an and transmitter fixed mount for fixing terahertz transmitter (8), input end (911) is conical through-hole, heavy caliber end is towards terahertz transmitter (8), small-caliber end butt coupling output terminal (912), coupling output terminal (912) towards tested waveguide and with tested waveguide horizontal alignment; Described coupling output terminal (912) is a hollow cylinder, two parallel dull and stereotyped or hollow rectangle bodies, and cylinder diameter or upper and lower plates spacing are less than the sectional dimension of tested waveguide.
Described first postpones platform module (6) is made up of the first delay platform (6-1), two block compensation plane mirrors (6-2), 6-3, two block compensation plane mirror (6-2, 6-3) contraposition is fixed on the first delay platform (6-1) and is positioned at wherein portion, intersect two plane mirror one end, the other end is opening-like, angle between two crossing plane mirrors is 90 degree, the femtosecond laser beam of the second plane mirror (5) outgoing is reflected into another block compensation plane mirror (6-3) by one block compensation plane mirror (6-2), and direction of beam propagation is changed to 90 degree, again femtosecond laser beam is changed to 90 degree by another compensation plane mirror (6-3) and reflex to quartzy plano-convex lens (7), first postpones platform (6-1) is provided with slide rail, can carry out linear reciprocal movement along incident femtosecond direction of beam propagation.
Survey light path device and be included in the 3rd plane mirror (10), the 3rd delay platform module (11), the 4th plane mirror (12), polaroid (13) and the second quartzy plano-convex lens (14) that in detection light path, sequentially arrange; Survey light path device receiving end and polarization beam apparatus (3) and survey light exit side contraposition, its exit end and silicon chip (15) contraposition, so survey light path device and receive the detection light L2 of polarization beam apparatus (3) outgoing and change the final outgoing of beam direction to silicon chip (15), converge for converging light L3 and focus on terahertz detector (16) with the terahertz emission ripple that sees through silicon chip (15).
The 3rd postpone platform module (11) by the 3rd postponing platform (11-1), be fixed on the 3rd compensation plane mirror (11-2,11-3) that postpones to be positioned on platform (11-1) wherein two contrapositions of portion and form, intersect two plane mirror one end, the other end is opening-like, and the angle between two crossing plane mirrors is 90 degree; The 3rd postpones platform (11-1) is provided with slide rail, carries out linear reciprocal movement change detection light path light path along the incident beam direction of propagation.
Femto-second laser 1 sends light source, and 1/2 wave plate (2) and polarization beam apparatus (3) sequentially keep at a certain distance away and be placed in the transmitting terminal of femto-second laser (1); Terahertz detector (16) receives the light that converges of detecting light beam and the coupling of terahertz emission ripple conllinear, export data acquisition unit (17) to and carry out photosignal conversion, computing machine is electrically connected with data acquisition unit (17), carries out data processing to obtain the various optical performance parameters of tested waveguide by computing machine.
Owing to having adopted technical scheme as above, the beneficial effects of the utility model are as follows: the waveguide coupler that 1, adopts conical design, THz wave has more effectively been converged in waveguide to be measured, its coupling efficiency can reach more than 95%, and can adapt to the terahertz waveguide of different end faces, promote the kind of test waveguide.2, three electronic delay platform designs have been adopted, wherein second, third delay platform and affiliated element thereof can be realized the test for different length waveguide, carry out effective optical path compensation, its compensation range is from 0 to 1500mm, greatly improved the length restriction of test waveguide, avoided to system repeat build.3, adopting photoconduction antenna terahertz transmitter radiation THz wave, make Terahertz spectrum width reach 3.0THz, is the guarantee that provides the foundation of the wide spectral transmissions performance of test waveguide.4, at whole system of the present utility model dress cover body, leave air intake opening, system can inflated with nitrogen or dry air, thereby can avoid the absorption of water in air to Terahertz, further improves measuring accuracy.
Brief description of the drawings
Fig. 1 is the inner structure schematic block diagram of the utility model terahertz waveguide example test system
Fig. 2 is the assembling assumption diagram of the utility model waveguide test module
Fig. 3 is the assembling assumption diagram of the utility model the first delay system
Fig. 4 is the assembling assumption diagram of the utility model the 3rd delay system
Fig. 5 A is Terahertz coupling mechanism perspective view in utility model
Fig. 5 B be in Fig. 5 A A-A to cross-sectional view
Fig. 5 C is the left side view of Fig. 5 A
Embodiment
By example and accompanying drawing, the technical solution of the utility model is described in further detail below.For ease of understanding, in the utility model, position of components contextual definition light path incident direction is " front ", and exit direction is " afterwards ".
As shown in Figure 1, terahertz waveguide test macro of the present utility model comprises a cover body (not shown) and is arranged on the femtosecond pulse laser 1 in cover body, 1/2 wave plate 2, polarization beam apparatus 3, include the first delay platform module 6, the terahertz transmitter 8 based on photoconduction antenna, the pumping light path device of waveguide test cell 9, include the 3rd detection light path device that postpones platform module 11, silicon chip 15, terahertz detector 16 and data acquisition unit 17, also comprise data handling machine 18.Wherein:
Cover body can be used for closed system, leaves air intake opening on cover body, and system can inflated with nitrogen or dry air, thereby can avoid the absorption of water in air to Terahertz, further improves measuring accuracy.In addition, cover body is also convenient to the fixed installation of miscellaneous part.
Be titanium sapphire femto-second laser by femtosecond pulse laser 1, it sends light source, and the femtosecond pulse repetition frequency of output is 80MHz, pulse width 120fs, wavelength 800nm, output power 150mW; 1/2 wave plate 2 and polarization beam apparatus 3 sequentially keep at a certain distance away and are placed in the transmitting terminal of femtosecond pulse laser 1, Femtosecond Optical Pulses enters polarization beam apparatus 3 through 1/2 wave plate 2, femtosecond light is divided into two bundles through polarization beam apparatus 3: a branch of for pump light L1, (Fig. 1 shows a branch of left, this bundle light trend is called pumping light path L1), account for 80% of laser output power, in order to survey light L2, (Fig. 1 shows upwards a branch of another bundle, this bundle light trend is called surveys light path L2), account for 20% of laser output power;
Realize the transmission of pump light L1 and the generation of THz wave and transmission by pumping light path device.Postpone after platform module 6, the first quartzy plano-convex lens 7 through the first flat mirror reflects mirror 4, the second plane mirror 5, first from the pump light L1 of polarization beam apparatus 3, converge in the terahertz transmitter 8 based on photoconduction antenna, utilize photoconduction aerial radiation THz wave; The terahertz emission ripple producing enters waveguide test cell 9, then focuses on terahertz detector 16 through the final terahertz emission ripple of silicon chip 15.Here, the first flat mirror reflects mirror 4 is positioned at polarization beam apparatus 3 outgoing pump light L1 horizontal levels, horizontal pump light L1 is changed to 90 and spend into vertical pump light (Fig. 1 is shown as downwards), the second plane mirror 5 is positioned at the first plane mirror 4 bottoms, downward pump light L1 change 90 is spent into horizontal pump light (Fig. 1 is shown as to the right) and inject the first delay platform module 6, first postpones the plane mirror (referring to Fig. 3 and associated description) that platform module 6 comprises two contraposition displacements in the horizontal direction, can pass through adjustment of displacement light path length, and pump light L1 reverse (Fig. 1 is shown as left) is injected to first quartzy plano-convex lens 7 and the terahertz transmitter 8 of sequentially putting in light path, the terahertz emission ripple being produced by terahertz transmitter 8 enters the tested waveguide of horizontal positioned in waveguide test cell 9, pass through again the multiple devices (referring to Fig. 2 and associated description) in waveguide test cell 9, the silicon chip 15 that terahertz emission ripple is finally placed through oblique (being miter angle with terahertz emission ripple) focuses on and is placed in (the utility model thereafter, definition light path incident direction is " front ", exit direction is " afterwards ") terahertz detector 16 on.
Realize by surveying light path device the transmission of surveying light L2.Postpone platform module 11, the 4th plane mirror 12, polaroid 13 and the second quartzy plano-convex lens 14 from the detection light L2 of polarization beam apparatus 3 via the 3rd plane mirror 10, the 3rd, formed detection light path L2 through silicon chip 15 again, this detecting light beam is final to be converged and focuses on terahertz detector 16 with the terahertz emission ripple that sees through silicon chip 15 from pumping light path L1.Here, the 3rd flat mirror reflects mirror 10 is positioned at polarization beam apparatus 3 outgoing and surveys light L2 (Fig. 1 is shown as upwards position), detection light L2 is upwards changed to 90 and spend into level detection light (Fig. 1 is shown as to the right), inject the 3rd and postpone platform module 11, the 3rd postpones the plane mirror (referring to Fig. 5 and associated description) that platform module 11 comprises two contraposition displacements in the horizontal direction, can pass through adjustment of displacement light path length, and will survey light L2 reverse (Fig. 1 is shown as left) and inject the 4th plane mirror 12 in light path, to survey light L2, again to change 90 degree downward, and inject the polaroid 13 of sequentially putting in light path, the second quartzy plano-convex lens 14 and silicon chip 15, silicon chip 15 is placed in and the position of surveying light L2 and terahertz emission ripple and be 45 degree, finally converge to focus on the terahertz emission ripple that sees through silicon chip 15 and be placed on the terahertz detector 16 converging on light path L3.
Detecting light beam and terahertz emission ripple conllinear are coupled on terahertz detector 16, utilize optical rectification effect to carry out optical sampling to the time domain electric field of Terahertz, the terahertz time-domain light signal detecting exports by terahertz detector 16 data acquisition unit 17 being positioned at thereafter to and carries out photosignal conversion, (terahertz detector 16 is nonlinear crystals to obtain the various optical performance parameters of tested waveguide to carry out data processing by computing machine, by the mode of optical rectification, the signal of THz wave is transformed into and is surveyed on light L2, and then the light signal of L2 is received by data acquisition unit 17 below, obtain electrical signal data by opto-electronic conversion, utilize lock-in amplifier to improve the signal to noise ratio (S/N ratio) of signal, afterwards these information are passed to computing machine).
Data acquisition unit 17 used is existing design, in light path, be provided with successively quarter wave plate 17-1, the 3rd quartzy plano-convex lens 17-2, wollaston prism 17-3 and differential detector 17-4 by input end, receive detecting light beam and terahertz emission ripple conllinear coupling light and be converted into electric signal by differential detector 17-4, electrical connection lock-in amplifier 17-5, detection data exports computing machine 18 to the most at last, by its computing and show.
In above-mentioned terahertz waveguide test macro, tested waveguide is placed in waveguide test cell 9 and realizes test.As shown in Figure 2, in the utility model, waveguide test cell 9 used includes terahertz waveguide coupling mechanism 9-1, two terahertz waveguide clamper 9-2,9-3, and second postpones platform module 9-4, the first silver-plated plane mirror 9-5, and first gold-platedly throw face mirror 9-6 from axle.Terahertz waveguide coupling mechanism 9-1 is connected with terahertz transmitter 8, and is arranged on emitting facet one side of terahertz transmitter 8, and terahertz emission ripple is converged to collection; Tested waveguide is fixed by two waveguide clamper 9-2,9-3, the position of two waveguide clamper 9-2,9-3 can be adjusted with the length of tested waveguide, tested waveguide and terahertz waveguide coupling mechanism 9-1 exit end horizontal alignment, terahertz waveguide coupling mechanism 9-1 enters the terahertz emission ripple of collecting and be coupled in tested waveguide, and the terahertz emission ripple after tested waveguide outgoing is propagated along incident direction; So, the terahertz emission ripple of the tested waveguide outgoing of above-mentioned process enters the second Postponement module 9-4.
Shown in Fig. 3, the second Postponement module 9-4 by the second delay platform 941, second gold-plated from axle throw face mirror 942, the second silver-plated plane mirror 943 forms.Wherein, on the second Postponement module 9-4 second gold-platedly throws the 942 distance tested waveguide outgoing end face 153mm places settings of face mirror from axle, its terahertz emission ripple by tested waveguide outgoing is collected, and produces the parallel beam with certain width, and direction of beam propagation is changed to 90 degree; Second gold-plated throw face mirror 942 from axle after (light beam exit direction) 50mm places the second silver-plated plane mirror 943 is set, it changes 90 degree ejaculations to the first silver-plated plane mirror 9-5 by the second gold-plated parallel terahertz emission ripple with certain width of throwing 942 outgoing of face mirror from axle; Second gold-platedly throws face mirror 942 and the second silver-plated plane mirror 943 from axle and all locates and be fixed on the second delay platform 941, this the second delay platform 941 is provided with slide rail, can carry out linear reciprocal movement along the terahertz emission direction of wave travel by tested waveguide incident, and gold-platedly throw face mirror 942, silver-plated plane mirror 943 from axle the terahertz emission direction of wave travel of incident is changed to the silver-plated plane mirror 9-5 of outgoing to the first after 180 degree by what carry above.In reality detects, because the length of tested waveguide is not identical, can change the light path of (being generally prolongation) pumping light path L1 by the displacement of the second delay platform 941.
The first silvered mirror 9-5 is arranged on the rear 500mm of above-mentioned the second silver-plated plane mirror 942, and is reflected into and is positioned at first gold-platedly throwing on face mirror 9-6 from axle thereafter changed 90 degree by the parallel terahertz emission ripple with certain width of the second Postponement module 9-4 outgoing; First is gold-plated from axle throwing face mirror 9-6 50mm place setting after distance the first silvered mirror 9-5, and light beam is changed to 90 degree in the direction of propagation, the parallel terahertz emission ripple with certain width is seen through to silicon chip 15 and together converge on the terahertz detector 16 being positioned at thereafter with the light beam of surveying light path.
Here, silicon chip 15 is actually the light beam of surveying road L2 in reflection, and the detection light being reflected by catoptron 12, by polaroid 13, after lens 14, then enters on terahertz detector 16 through the reflection of silicon chip 15.By the propagation that just overlaps with Terahertz conllinear of the light beam on the rear detection of silicon chip 15 road, and enter together on terahertz detector 16.
In the utility model, the formation of waveguide coupler 9-1 used is as shown in Fig. 5 A, Fig. 5 B and Fig. 5 C.This terahertz waveguide coupling mechanism 9-1 entirety is processed by rectangular parallelepiped alloy or metal (aluminium, iron, copper) piece, there is a taper THz wave input end 911, a THz wave coupling output terminal 912 that can change according to the different end surface shape of tested waveguide, and a transmitter fixed station 913 for fixing terahertz transmitter 8.Wherein, for convenience of fixing terahertz transmitter 8, transmitter fixed station 913 is designed to step-like, and terahertz transmitter 8 can be placed on gets out of a predicament or an embarrassing situation above, and the correspondence position of getting out of a predicament or an embarrassing situation can be established threaded hole 914, on screw, terahertz transmitter 8 being fixed on and being got out of a predicament or an embarrassing situation.Input end 911 is for being located at the conical through-hole in topping bar, heavy caliber end is its input end face towards terahertz transmitter 8, its diameter maximum can be 20mm, conical through-hole length is 15mm-30mm, cone angle is 10 °～40 °, small-caliber end butt coupling output terminal 912, towards tested waveguide and with tested waveguide horizontal alignment, this coupling output terminal 912 can be a hollow cylinder, also can be two parallel flat boards or hollow rectangle body, length is 4mm, cylinder diameter or upper and lower plates spacing are less than the sectional dimension of tested waveguide, be for example 2mm (can set according to actual needs), coupling output terminal 912 is inserted in tested waveguide.In use, the conical input 911 that the terahertz radiation being produced by terahertz transmitter 8 enters waveguide coupler 9-1 converges collection by the design of its conical through-hole, coupling output terminal 912 is inserted in tested waveguide outward, and terahertz emission ripple enters tested waveguide through waveguide coupler 9-1 output terminal.
Waveguide clamper 9-2,9-3 used selects and produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., and model is GCM-5702 product; Gold-platedly throw face mirror 942,9-6 from axle and select and produced by Newport (Advanced LCD Technologies Dev Co Ltd of the U.S.), the product that model is 50331AU; Second postpone platform 941 select by Newport (Advanced LCD Technologies Dev Co Ltd of the U.S.) produce, the product that model is M-ILS150PP; Silver-plated plane mirror 943,9-5 are formed by the silver of even evaporation thick layer 200nm in the plane at a 50mm × 50mm, and it can reach 95% to terahertz emission wave reflection efficiency.
In terahertz waveguide test macro of the present utility model, for adjusting the light path of pump light L1 and detection light L2, in light path, be respectively equipped with light path compensation system, be located at second in pump light L1 light path and postpone platform module 9-4 (referring to the description to the second Postponement module 9-4 in Fig. 3 above) and be located at the 3rd delay platform module 11 of surveying in light L2 light path.The device of the spectral scan while in addition, also having designed actual measurement first postpones platform module 6.
As shown in Figure 3, the first delay platform module 6 is made up of the first delay platform 6-1, two block compensation plane mirror 6-2,6-3.Two block compensation plane mirror 6-2,6-3 contraposition are fixed on the first delay platform 6-1 and are positioned at wherein portion, intersect two plane mirror one end, the other end is opening-like, angle between two crossing plane mirrors is 90 degree, the femtosecond laser beam of the second plane mirror 5 outgoing is reflected into another block compensation plane mirror 6-3 by one block compensation plane mirror 6-2, and direction of beam propagation is changed to 90 degree, again femtosecond laser beam is changed to 90 degree by another compensation plane mirror 6-3 and reflex to quartzy plano-convex lens 7; First postpones platform 6-1 is provided with slide rail, can carry out linear reciprocal movement along incident femtosecond direction of beam propagation, and by the two block compensation plane mirror 6-2, the 6-3 that carry, the direction of propagation of the femtosecond light beam of incident is changed to the rear outgoing of 180 degree, the spectral scan while being used for actual measurement by the displacement of the first delay platform 6-1 above.
As shown in Figure 4, with the first delay platform module 6 form similar, the 3rd postpone platform module 11 by the 3rd postponing platform 11-1, two block compensation plane mirror 11-2,11-3 form.Two block compensation plane mirror 11-2,11-3 are fixed on the 3rd to postpone to be positioned at wherein portion on platform 11-1, intersect two plane mirror one end, the other end is opening-like, angle between two crossing plane mirrors is 90 degree, the femtosecond laser beam of the 3rd plane mirror 10 outgoing is reflected into another block compensation plane mirror 11-3 by one block compensation plane mirror 11-2, and direction of beam propagation is changed to 90 degree, again femtosecond laser beam is changed to 90 degree by another compensation plane mirror 11-3 and reflex to the 4th plane mirror 12; The 3rd postpones platform 11-1 is provided with slide rail, can carry out linear reciprocal movement along incident femtosecond direction of beam propagation, and by the two block compensation plane mirror 11-2, the 11-3 that carry, the direction of propagation of the femtosecond light beam of incident being changed to the rear outgoing of 180 degree above, the light path of surveying light path by the 3rd displacement that postpones platform 11-1 to realize changes.The 3rd effect that postpones platform 11-1 is the pumping light path and detection light path optical path difference extending because of the second delay platform 941 in order to compensate, and makes pumping light path and surveys light path equivalent optical path.
Here, used first postpones platform 6-1, the 3rd and postpones 11-1 and select and produced by Newport (Advanced LCD Technologies Dev Co Ltd of the U.S.), the product that model is M-ILS150PP; Compensation plane mirror 6-2,6-3,11-2,11-3 select and are produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCC-101112.
In the utility model, titanium sapphire femto-second laser 1 used select by Spectra-Physics (Spectra-Physics) produce, model is MaiTai titanium sapphire femto-second laser; 1/2 wave plate 2 select by Newport (Advanced LCD Technologies Dev Co Ltd of the U.S.) produce, the product that model is 10PR52-2; Polarization beam apparatus 3 select by Newport (Advanced LCD Technologies Dev Co Ltd of the U.S.) produce, the product that model is 05FC16PB.5; Form pumping light path plane mirror 4,5 used and select and produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCC-101112; Quartz plano-convex lens 7 is selected and is produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., product that model is GCL-010810; Terahertz transmitter 8 based on photoconduction antenna select by Zomega (Zuo meter Jia company of the U.S.) produce, the product that model is LT-GaAs.
Terahertz detector 16 select by Zomega (Zuo meter Jia company of the U.S.) produce, the terahertz detector (based on the terahertz detector of zinc antimonide crystal) that model is ZnTe; Form and survey light path silicon chip 15 used and select and produced by Zomega (Zuo meter Jia company of the U.S.), model is Silicon Lens silicon chip; Quartz plano-convex lens 14 is selected and is produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., product that model is GCL-010810; Polaroid 13 select by Newport (Advanced LCD Technologies Dev Co Ltd of the U.S.) produce, model is 05P109AR.16 polaroid; Plane mirror 13,12 is selected and is produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCC-101112.
In data acquisition unit 17 quarter wave plate 17-1 used select by Newport (Advanced LCD Technologies Dev Co Ltd of the U.S.) produce, the product that model is 10RP54-2; Quartz plano-convex lens 17-2 selects and is produced by Daheng Xinshijiyuan Science & Technology Co., Ltd., the product that model is GCL-010810; Wollaston prism 17-3 selects Throlab (U.S.'s Soret is won company) to produce, the product that model is WP10; Lock-in amplifier 17-5 select by Stanford (Stamford company of the U.S.) produce, the product that model is SR830.Differential detector 17-4 used can use existing commercial product (a set of quarter wave plate that is integrated with of for example Zomega company, the terahertz time-domain spectroscopy detecting module of Wollaston prism and differential detector), for cost consideration, also can use the self-control detector of the photodiode that is provided with two series connection, its input end receives the two mutually perpendicular light intensity signals in bundle polarization direction of being exported by wollaston prism 17-3, be irradiated to respectively on two photodiodes, by photodiode, light intensity signal is converted into electric signal, electric signal inputs to by a coaxial wire on the differential input end mouth of lock-in amplifier 17-5, signal inputs to and in computing machine 18, carries out data processing after amplifying.Computing machine 18 can be selected and be produced by Computer Company of association, and model is the product of Thinkpad s230u.
Utilize the above-mentioned terahertz waveguide test macro of the utility model to test tested waveguide, by following operating process:
Step 1: system reference signal scanning.Open laser instrument 1, the second delay platform 942 and the 3rd and postpone platform 11-1 initial position and be set to 0mm, now need not place tested waveguide, utilize computer control first to postpone platform 6-1 and lock-in amplifier 17-5 carries out reference spectra scanning.
Step 2: put into tested waveguide.By the output terminal of tested waveguide access waveguide coupler 9-1, and utilize waveguide clamper 9-2,9-3 to be fixed it.According to the length of tested waveguide, by the second delay platform 941 (left side in Fig. 1) movement backward in the second delay platform module 9-4, ensure that tested waveguide left side and the second gold-plated distance from axle throwing face mirror 942 are 153mm, record second postpones the displacement of platform 942.
Step 3: the 3rd the 3rd delay platform 11-1 postponing in platform module 11 is moved right, and displacement is consistent with the second delay platform 941 displacements in step 2.
Step 4, utilizes computer control first to postpone platform 6-1 and lock-in amplifier 17-5 carries out spectral scan.Compare the terahertz light spectral property that can obtain tested waveguide with the reference spectra in step 1.
Illustrate: as the waveguide that need are measured other length, only need repeating step two, three, four.
More than operation is visible, the very convenient use of the utility model, in the time that for different length, waveguide is tested, only need to adjust second, third delay platform and can carry out effective optical path compensation (the longest 1500mm of reaching of its compensation range), greatly improved the length restriction of test waveguide, avoided to system repeat build.
In addition, the utility model, owing to having adopted the waveguide coupler of exquisite design, can more effectively converge to THz wave in waveguide to be measured, and coupling efficiency can reach more than 95%; And because this waveguide coupler output terminal cross section, form can change, can adapt to the terahertz waveguide test of different end faces, promote the kind of test waveguide.
Claims (10)
1. a terahertz waveguide test macro, it is characterized in that, comprise a cover body and be arranged on the femtosecond pulse laser (1) of sequentially laying by light path in cover body, 1/2 wave plate (2), polarization beam apparatus (3), the pumping light path device of apportion and detection light path device, silicon chip (15), terahertz detector (16) and data acquisition unit (17), also comprise the data handling machine (18) being placed in outside cover body, wherein, in detection light path device, be provided with the 3rd and postpone platform module (11), pumping light path device includes terahertz transmitter (8) and waveguide test cell (9), in waveguide test cell (9), be provided with the second delay platform module (9-4), the 3rd postpones platform module (11) and second postpones to be respectively used to adjust pumping light path and to survey light path so that the removable delay platform of two light path equivalent optical paths in platform module (9-4).
2. terahertz waveguide test macro according to claim 1, it is characterized in that, pumping light path device comprises the first flat mirror reflects mirror (4) that is sequentially placed in pumping light path, the second plane mirror (5), first postpones platform module (6), the first quartzy plano-convex lens (7), terahertz transmitter (8) and waveguide test cell (9), tested waveguide is placed in waveguide test cell, the contraposition of pumping light path device receiving end and polarization beam apparatus (3) pump light exit end, the THz wave exit end of terahertz transmitter (8) is connected with the receiving end of waveguide test cell (9), the exit end of waveguide test cell (9) and silicon chip (15) and terahertz detector thereafter (16) contraposition.
3. terahertz waveguide test macro according to claim 2, it is characterized in that, described waveguide test cell (9) includes terahertz waveguide coupling mechanism (9-1), two terahertz waveguide clampers (9-2,9-3), second postpones platform module (9-4), the first silver-plated plane mirror (9-5) and first gold-plated from axle throwing face mirror (9-6); Terahertz waveguide coupling mechanism (9-1) is connected with terahertz transmitter (8), and is arranged on emitting facet one side of terahertz transmitter (8); Tested waveguide be fixed by two waveguide clampers (9-2,9-3) and with terahertz waveguide coupling mechanism (9-1) exit end horizontal alignment, the second Postponement module (9-4) is positioned at the other end of tested waveguide.
4. terahertz waveguide test macro according to claim 3, it is characterized in that, the second Postponement module (9-4) by the second delay platform (941), location be fixed on the second delay platform (941) second gold-plated from axle throw face mirror (942) and the second silver-plated plane mirror (943) form; Wherein, second postpones platform (941) be provided with can be along the slide rail of tested waveguide axial direction displacement.
5. terahertz waveguide test macro according to claim 4, it is characterized in that, second gold-plated from axle throw face mirror (942) be positioned at distance tested waveguide outgoing end face 153mm place, the second silver-plated plane mirror (943) is positioned at the second gold-plated positions that the second gold-plated parallel terahertz emission ripple with certain width from the outgoing of axle throwing face mirror (942) can be changed to 90 degree from the rear 50mm of axle throwing face mirror (942) place, and the first silver-plated plane mirror (9-5) is arranged in the second silver-plated plane mirror (943) emitting light path.
6. terahertz waveguide test macro according to claim 3, it is characterized in that, described waveguide coupler (9-1) has a conical input (911), a coupling output terminal (912) changing according to the different end surface shape of tested waveguide, an and transmitter fixed mount for fixing terahertz transmitter (8), input end (911) is conical through-hole, heavy caliber end is towards terahertz transmitter (8), small-caliber end butt coupling output terminal (912), coupling output terminal (912) towards tested waveguide and with tested waveguide horizontal alignment, described coupling output terminal (912) is a hollow cylinder, two parallel dull and stereotyped or hollow rectangle bodies, and cylinder diameter or upper and lower plates spacing are less than the sectional dimension of tested waveguide.
7. according to the arbitrary described terahertz waveguide test macro of claim 2 to 6, it is characterized in that, described first postpones platform module (6) is made up of the first delay platform (6-1), two block compensation plane mirrors (6-2,6-3), two block compensation plane mirror (6-2, 6-3) contraposition is fixed on the first delay platform (6-1) and is positioned at wherein portion, intersect two plane mirror one end, the other end is opening-like, angle between two crossing plane mirrors is 90 degree, the femtosecond laser beam of the second plane mirror (5) outgoing is reflected into another block compensation plane mirror (6-3) by one block compensation plane mirror (6-2), and direction of beam propagation is changed to 90 degree, again femtosecond laser beam is changed to 90 degree by another compensation plane mirror (6-3) and reflex to quartzy plano-convex lens (7), first postpones platform (6-1) is provided with the slide rail that carries out linear reciprocal movement along incident femtosecond direction of beam propagation.
8. terahertz waveguide test macro according to claim 1, it is characterized in that, survey light path device and be included in the 3rd plane mirror (10), the 3rd delay platform module (11), the 4th plane mirror (12), polaroid (13) and the second quartzy plano-convex lens (14) that in detection light path, sequentially arrange; Survey light path device receiving end and polarization beam apparatus (3) and survey light exit side contraposition, its exit end and silicon chip (15) contraposition.
9. terahertz waveguide test macro according to claim 8, it is characterized in that, the 3rd postpone platform module (11) by the 3rd postponing platform (11-1), be fixed on the 3rd compensation plane mirror (11-2,11-3) that postpones to be positioned on platform (11-1) wherein two contrapositions of portion and form, intersect two plane mirror one end, the other end is opening-like, and the angle between two crossing plane mirrors is 90 degree; The 3rd postpones platform (11-1) is provided with the slide rail that carries out linear reciprocal movement along the incident beam direction of propagation.
10. terahertz waveguide test macro according to claim 1, it is characterized in that, femto-second laser (1) is for sending light source, and 1/2 wave plate (2) and polarization beam apparatus (3) sequentially interval are placed in the transmitting terminal of femto-second laser (1); Terahertz detector (16) is for receiving the light that converges of detecting light beam and the coupling of terahertz emission ripple conllinear, and export data acquisition unit (17) to and carry out photosignal conversion, computing machine is electrically connected with data acquisition unit (17).
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| CN104503078A (en) * | 2014-12-30 | 2015-04-08 | 华东师范大学 | Rapid precise short-range optical time delay system and method |
| CN105181627A (en) * | 2015-05-13 | 2015-12-23 | 河南工业大学 | Terahertz wave detection system and application thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104503078A (en) * | 2014-12-30 | 2015-04-08 | 华东师范大学 | Rapid precise short-range optical time delay system and method |
| CN105181627A (en) * | 2015-05-13 | 2015-12-23 | 河南工业大学 | Terahertz wave detection system and application thereof |
| CN106323465A (en) * | 2016-09-26 | 2017-01-11 | 深圳市太赫兹科技创新研究院 | Delay line device and terahertz time-domain spectrograph system |
| WO2018059233A1 (en) * | 2016-09-27 | 2018-04-05 | 深圳市太赫兹科技创新研究院 | Terahertz full-polarization-state detection spectrograph |
| US10983048B2 (en) | 2016-09-27 | 2021-04-20 | Shenzhen Terahertz System Equipment Co., Ltd. | Terahertz full-polarization-state detection spectrograph |
| CN106384704A (en) * | 2016-10-31 | 2017-02-08 | 中国科学院西安光学精密机械研究所 | Terahertz-driven electronic pulse accelerating femtosecond electron diffraction device |
| CN108931495A (en) * | 2018-06-28 | 2018-12-04 | 首都师范大学 | Terahertz time-domain spectroscopy synchronized measurement system and method |
| CN111769870A (en) * | 2020-05-20 | 2020-10-13 | 中国科学院西安光学精密机械研究所 | Detection device and detection method for relay light path assembly of space laser communication terminal |
| CN111769870B (en) * | 2020-05-20 | 2021-07-27 | 中国科学院西安光学精密机械研究所 | Detection device and detection method for relay light path assembly of space laser communication terminal |
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Effective date of registration: 20190708 Address after: Room 02C-066, Block B, No. 28, Information Road, Haidian District, Beijing 100085 Patentee after: BEIJING YUANDA HENGTONG TECHNOLOGY DEVELOPMENT Co.,Ltd. Address before: 100048 No. 105 North Road, West Third Ring Road, Haidian District, Beijing. Patentee before: Capital Normal University |
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Effective date of registration: 20191031 Address after: 233000 building 106, No.10 Caiyuan Road, Bengbu Economic Development Zone, Anhui Province Patentee after: Anhui Taijian Linfeng Photoelectric Technology Co.,Ltd. Address before: Room 02C-066, Block B, No. 28, Information Road, Haidian District, Beijing 100085 Patentee before: BEIJING YUANDA HENGTONG TECHNOLOGY DEVELOPMENT Co.,Ltd. |
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