CN106646323A - Coplanar waveguide probe transmission characteristic measuring apparatus and method - Google Patents
Coplanar waveguide probe transmission characteristic measuring apparatus and method Download PDFInfo
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- CN106646323A CN106646323A CN201611154288.3A CN201611154288A CN106646323A CN 106646323 A CN106646323 A CN 106646323A CN 201611154288 A CN201611154288 A CN 201611154288A CN 106646323 A CN106646323 A CN 106646323A
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- waveguide probe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/02—Testing or calibrating of apparatus covered by the other groups of this subclass of auxiliary devices, e.g. of instrument transformers according to prescribed transformation ratio, phase angle, or wattage rating
Abstract
The invention discloses a coplanar waveguide probe transmission characteristic measuring apparatus and method. The measuring device comprises an ultrafast laser generator, an excitation signal generator, an input converter, an output converter, an optical pulse delay, a measuring probe, and a matching load; the ultrafast laser generator generates an ultrafast laser pulse; the excitation signal generator generates an electrical pulse excitation signal; the optical pulse delay generates a detection laser pulse to emit into the measuring probe; the electric signal instantaneous values of the test ends of a first coplanar waveguide probe and a second coplanar waveguide probe are measured; the input converter receives the electrical pulse excitation signal and is coupled to the first coplanar waveguide probe test end; and the output converter is connected with the second coplanar waveguide probe test end and the matching load. The measurement method includes measuring the input signal and output signal time domain waveform; transforming to the frequency domain respectively and calculating the transmission characteristics of the coplanar waveguide probes according to the relation among the input and output signal frequency spectrum, coaxial cable transmission characteristics, and coplanar waveguide probe transmission characteristics.
Description
Technical field
The application is related to metering and technical field of measurement and test, more particularly to a kind of measurement apparatus and the measurement of co-planar waveguide probe
Method.
Background technology
With developing rapidly for Microwave and millimeter wave integrated circuits technology, the microwave device of coplanar waveguide structure is more come
Attention the more and concern, when testing the device of this type, it is necessary to carry out turning for signal using co-planar waveguide probe
Change, the planar transmission signal that co-planar waveguide device is produced is converted into coaxial transmission signal.
In the ideal situation, when planar transmission signal is converted to coaxial transmission signal by co-planar waveguide probe, will not produce
Raw distortion.But co-planar waveguide probe is not preferable interface unit in practical application, there is decay and dispersion, signal is turning
Change can be produced before and after changing, and then reduces the degree of accuracy of measurement result.To improve accuracy of measurement, it is necessary first to obtain coplanar ripple
Probe decay and dispersion characteristics, i.e. transmission characteristic are led, then measurement result is modified, obtain the true letter of measured signal
Breath.
Co-planar waveguide probe front directly cannot be connected with general measuring instrument, it is impossible to be obtained using conventional measuring method
Its transmission characteristic is taken, therefore, need a kind of measurement apparatus of co-planar waveguide probe transmission characteristic badly and exist solving co-planar waveguide probe
The accuracy of measurement reduction caused by decay and dispersion in signal conversion process and the problem of distorted signals.
The content of the invention
The present invention proposes a kind of co-planar waveguide probe transmission characteristic measuring device and method, solves co-planar waveguide probe in letter
The accuracy of measurement caused by decay and dispersion in number transfer process reduce and distorted signals problem.
The embodiment of the present application provides a kind of co-planar waveguide probe transmission characteristic measuring device, and the co-planar waveguide probe is included
Transmission characteristic identical the first co-planar waveguide probe, the second co-planar waveguide probe；First co-planar waveguide probe and the second coplanar ripple
The same shaft end for leading probe is connected by coaxial cable for high frequency.The measurement apparatus include that ultrafast laser generator, pumping signal are sent out
Raw device, input converter, output translator, optical pulse delay unit, measurement probe, matched load；The ultrafast laser generator,
For producing ultrashort pulse；The excitation signal generator, for receiving the ultrashort pulse triggering, produces electric arteries and veins
Rush pumping signal；The optical pulse delay unit, it is incident for the ultrashort pulse time delay, producing exploring laser light pulse
To the measurement probe；The measurement probe, when the exploring laser light pulse is incident, for measuring first co-planar waveguide
Probe and the electric signal instantaneous value at the second co-planar waveguide probe test end；The input converter, for receiving the electric pulse
Pumping signal, and it is coupled to the test lead of the first co-planar waveguide probe；The output translator, for connecting the second co-planar waveguide
The test lead of probe and the matched load.
Preferably, the input converter is included with shaft end and coplanar waveguide transmission line end, for transmitting the electric pulse
Pumping signal, and realize with the impedance matching between shaft end and coplanar waveguide transmission line end；The coplanar ripple of the input converter
Lead transmission line end to be connected with the test lead of the first co-planar waveguide probe.
Preferably, the output translator is included with shaft end and coplanar waveguide transmission line end, for transmission output signal, and
Realize with the impedance matching between shaft end and coplanar waveguide transmission line end；The coplanar waveguide transmission line end of the output translator with
The test lead of the second co-planar waveguide probe is connected；The same shaft end of the output translator is connected with the matched load
Connect.
Preferably, the measurement probe is comprising optical probe or electro-optical probes.
For the embodiment of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, it is preferable that described to swash
The pumping signal band for encouraging signal generator generation is wider than first co-planar waveguide, the bandwidth of operation of the second co-planar waveguide.
For the embodiment of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, it is preferable that described to prolong
When module delay precision be higher than 300fs.
For the embodiment of the further optimization of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, preferably
Ground, the ultrafast laser generator includes ultrafast laser, dispersion compensator, optical splitter；The ultrafast laser, for producing
Ultrashort pulse；The dispersion compensator is used to receive the ultrashort pulse, carries out dispersion pre-compensation, is sent to described
Optical splitter；The optical splitter, by the ultrashort pulse two-way is divided into, and is exported all the way to the excitation signal generator, separately
Export all the way to the optical pulse delay device.
The embodiment of the present application also provides a kind of co-planar waveguide probe transmission characteristic measurement method, using the application any one
Co-planar waveguide probe transmission characteristic measuring device, comprises the steps of described in embodiment：
In the input converter and the test lead junction of the first co-planar waveguide probe, surveyed with the measurement probe
Amount input signal time domain waveform；
In the output translator and the test lead junction of the second co-planar waveguide probe, surveyed with the measurement probe
Amount output signal time domain waveform；
The input signal time domain waveform and output signal time domain waveform are transformed into respectively frequency domain, input signal frequency is obtained
Spectrum and output signal spectrum；
According to output signal spectrum and input signal spectrum, the coaxial cable for high frequency transmission characteristic, the co-planar waveguide
Relation between probe transmission characteristic, calculates the transmission characteristic of co-planar waveguide probe.
Preferably, the co-planar waveguide probe transmission characteristic measurement method, during with the measurement probe measurement input signal
The step of domain waveform, specifically include：
The measurement probe is placed in into the test lead junction of the input converter and the first co-planar waveguide probe
Surface criterion position；
Excitation signal generator is triggered with ultrashort pulse, impulse excitation signal, input converter described in Jing is produced
It is coupled to the test lead of the first co-planar waveguide probe；
The measurement probe is input to after the ultrashort pulse is postponed, the measurement probe measurement and record postpone
The input signal instantaneous value at moment；
Change the ultrashort pulse amount of delay, the measurement probe measures again and record the input letter at delay moment
Number instantaneous value；Repeat above step, finally give input signal time domain waveform.
Preferably, the co-planar waveguide probe transmission characteristic measurement method, during with the measurement probe measurement output signal
The step of domain waveform, specifically include：
The measurement probe is placed in into the test lead junction of the output translator and the second co-planar waveguide probe
Surface criterion position；
Excitation signal generator is triggered with ultrashort pulse, impulse excitation signal, input converter described in Jing is produced
It is coupled to the test lead of the first co-planar waveguide probe；
The measurement probe is input to after the ultrashort pulse is postponed, the measurement probe measurement and record postpone
The output signal instantaneous value at moment；
Change the ultrashort pulse amount of delay, the measurement probe measures again and record the output letter at delay moment
Number instantaneous value；Repeat above step, finally give output signal time domain waveform.
Above-mentioned at least one technical scheme that the embodiment of the present application is adopted can reach following beneficial effect：The technical program
The measurement of co-planar waveguide probe transmission characteristic is solved the problems, such as, is directly determined the plane of reference of measurement using the method for electro optical measurement
In the plane input port of co-planar waveguide probe, can avoid introducing the impact of signal adapter in the measurement results and producing mistake
Difference, improves the degree of accuracy of measurement.
Description of the drawings
Accompanying drawing described herein is used for providing further understanding of the present application, constitutes the part of the application, this Shen
Schematic description and description please does not constitute the improper restriction to the application for explaining the application.In the accompanying drawings：
Fig. 1 is co-planar waveguide probe transmission characteristic measuring device schematic diagram；
Fig. 2 is another embodiment schematic diagram of co-planar waveguide probe transmission characteristic measuring device；
Fig. 3 is input converter of the present invention, output translator, the connection diagram of co-planar waveguide probe；
Fig. 4 is that optical probe measures electric signal principle schematic；
Fig. 5 is electro-optical probes measurement point signal principle schematic；
Fig. 6 is the time diagram of synchronized sampling measuring method；
Fig. 7 is co-planar waveguide probe transmission characteristic measurement method flow chart；
Fig. 8 is the concrete steps embodiment flow chart of measurement input time domain waveform；
Fig. 9 is the concrete steps embodiment flow chart for measuring output time-domain waveform.
Specific embodiment
To make purpose, technical scheme and the advantage of the application clearer, below in conjunction with the application specific embodiment and
Corresponding accompanying drawing is clearly and completely described to technical scheme.Obviously, described embodiment is only the application one
Section Example, rather than the embodiment of whole.Based on the embodiment in the application, those of ordinary skill in the art are not doing
Go out the every other embodiment obtained under the premise of creative work, belong to the scope of the application protection.
It should be noted that the co-planar waveguide probe transmission characteristic described in the embodiment of the present invention possesses following characteristics：
First, co-planar waveguide probe transmission characteristic HprobeF () is plural form, can be expressed as Hprobe(f)=α (f)+β
F () i, wherein α (f) represent signal attenuation characteristic, β (f) represents dispersion characteristics, and both combination define signal by co-planar waveguide
The distortion that probe is produced；
Second, co-planar waveguide probe port has reciprocity, when the impulse excitation signal is visited by the first co-planar waveguide
The test lead input of pin, and after test lead output of the high frequency cable by the second co-planar waveguide probe, due to the reciprocity of port
Property, the impact for receiving identical co-planar waveguide probe and a coaxial cable for high frequency twice is equivalent to, therefore can lead to
Cross and accurately measure input signal time domain waveform and output signal time domain waveform data, signal is calculated by Spectrum Conversion and is declined
Subtract and dispersion, remove the impact of known coaxial cable for high frequency, and then obtain the transmission characteristic of co-planar waveguide probe.
Below in conjunction with accompanying drawing, the technical scheme that each embodiment of the application is provided is described in detail.
Fig. 1 is co-planar waveguide probe transmission characteristic measuring device schematic diagram.The present embodiment provides a kind of co-planar waveguide probe
Transmission characteristics measurement device, the co-planar waveguide probe is coplanar comprising the first co-planar waveguide of transmission characteristic identical probe 1, second
Waveguide probe 2；The same shaft end of the first co-planar waveguide probe and the second co-planar waveguide probe is connected by coaxial cable for high frequency 3.Institute
State measurement apparatus, including ultrafast laser generator 7, excitation signal generator 8, input converter 4, output translator 5, light pulse
Delayer 9, measurement probe 10, matched load 6；The ultrafast laser generator, for producing ultrashort pulse P (t)；It is described
Excitation signal generator, for receiving the ultrashort pulse triggering, produces impulse excitation signal S (t)；The light pulse
Delayer, for the ultrashort pulse time delay, producing exploring laser light pulse PdT (), incides the measurement probe；Institute
Measurement probe is stated, when the exploring laser light pulse is incident, for measuring the first co-planar waveguide probe and the second coplanar ripple
Lead the electric signal instantaneous value at probe test end；The input converter, for receiving the impulse excitation signal, and is coupled to
The test lead I of the first co-planar waveguide probe；The output translator, for connect the second co-planar waveguide probe test lead O and
The matched load.
It should be noted that co-planar waveguide probe described in the embodiment of the present invention includes the first co-planar waveguide probe and second
Co-planar waveguide probe, the first co-planar waveguide probe transmission characteristic is Hprobe1(f), the second co-planar waveguide probe transmission
Characteristic is Hprobe2(f), and assume Hprobe1(f)=Hprobe2(f)=Hprobe(f).The first co-planar waveguide probe and described
Connected by coaxial cable for high frequency between two co-planar waveguide probe coaxial output line mouths, coaxial cable for high frequency transmission characteristic Hcable
F () can be obtained by universal measurement method.
For example, the ultrafast laser generator output signal is femtosecond pulse, and pulse width is less than 200 femtoseconds (2 × 10-13
Second), mean power (intensity) is more than 50mW, repetition rate 80MHz (the correspondence cycle was 12.5 nanoseconds).
The excitation signal generator functionally plays a part of opto-electronic conversion, it should be noted that described ultrafast sharp
The femtosecond pulse of photogenerator output has extremely wide bandwidth, and the excitation signal generator can only respond wherein low bandwidth model
Enclose interior information.Because bandwidth and pulse width are presented inverse relation, the electric pulse excitation of the excitation signal generator output
The width of signal is far longer than the ultrafast laser pulse width of ultrafast laser generator output.In 200 femto-second laser pulse
Under trigger condition, the impulse excitation signal width is about 10 psecs (1 × 10-11Second), frequency domain bandwidth is about 50GHz.
For example, the optical pulse delay unit can realize relative time delay by adjustment space distance, especially by with lower section
Formula determines relative time delay size：Δ t=Δ l/v, wherein, Δ t is time delay size, and Δ l is delayed synchronizer space movement
Distance, v is light in spatial velocity.
For the embodiment of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, it is preferable that described to swash
The pumping signal band for encouraging signal generator generation is wider than first co-planar waveguide, the bandwidth of operation of the second co-planar waveguide.
For the embodiment of any one co-planar waveguide probe transmission characteristic measuring device of the present invention, it is preferable that the light
The delay precision of pulse delay unit is higher than 300fs.Herein, delay precision represents the time delay order of accuarcy of optical time delay unit, and light prolongs
When device use 1ps-2ps as the size of each time delay, delay precision refers to the error of each time delay (1ps-2ps) not in scheme
Higher than 300fs, 100fs can also be better than under normal circumstances.
As the embodiment of the further optimization of co-planar waveguide probe transmission characteristic measuring device of the present invention, also comprising data at
Data for receiving the data of the measurement probe, and are carried out calculating process by reason module 15, obtain co-planar waveguide probe transmission
Characteristic.
Fig. 2 is another embodiment schematic diagram of co-planar waveguide probe transmission characteristic measuring device.It is any one as the present invention
The further optimal enforcement example of item co-planar waveguide probe transmission characteristic measuring device, the ultrafast laser generator includes ultrafast laser
Device 71, dispersion compensator 72, optical splitter 73；The ultrafast laser, for producing ultrashort pulse；The dispersion compensator
For receiving the ultrashort pulse, dispersion pre-compensation is carried out, be sent to the optical splitter；The optical splitter, will be described super
Fast laser pulse is divided into two-way, exports all the way to the excitation signal generator 8, and another road is exported to the optical pulse delay device
9.Wherein, the ultrafast laser is connected with the dispersion compensator by optical fiber, the dispersion compensator and the optical branching
Device is connected by optical fiber.
Fig. 3 is input converter of the present invention, output translator, the connection diagram of co-planar waveguide probe.The input turns
Parallel operation 4 is included with shaft end and coplanar waveguide transmission line end, for transmitting the impulse excitation signal, and realization with shaft end and altogether
Impedance matching between coplanar waveguide transmission line end；The coplanar waveguide transmission line end of the input converter and the described first coplanar ripple
The test lead I for leading probe 1 is connected；.The output translator 5 is included with shaft end and coplanar waveguide transmission line end, for transmitting
Output signal, and realize with the impedance matching between shaft end and coplanar waveguide transmission line end；The coplanar ripple of the output translator
Lead transmission line end to be connected with the test lead O of the second co-planar waveguide probe 2；The same shaft end of the output translator with it is described
Matched load is connected.The same shaft end 1C of the first co-planar waveguide probe and same shaft end 2C of the second co-planar waveguide probe
Connected by a coaxial cable for high frequency 3.
In the presence of the impulse excitation signal, due to the input converter, output translator and measured object (
The one coplanar waveguide probe+co-planar waveguide probe of coaxial cable for high frequency+the second) connection, in the survey of the first co-planar waveguide probe 1
Examination end I produces input signal winT (), in the test lead O of the second co-planar waveguide probe 2 output signal w is producedout(t)。
It should be noted that because tested co-planar waveguide probe is typically designed as 50 ohm characteristic impedances, in order to ensure resistance
Anti- matching, reduces signal reflex, and all micro-strip sections are required for using 50 ohm characteristic impedances with coax segments.Input, output conversion
With shaft end using the coaxial connector that specification is 1.85mm, its bandwidth highest can reach 67GHz to device, and characteristic impedance is 50 Europe
Nurse.Micro-strip end is coplanar waveguide structure, and characteristic impedance is 50 ohm, and in addition the spacing between coplanar waveguide electrode should be less than quilt
Survey the probe spacing (generally 25 microns -50 microns) of co-planar waveguide probe.
Fig. 4 is that optical probe measures electric signal principle schematic.In the embodiment shown in fig. 4, the measurement probe 10 is wrapped
Containing optical probe 11 and lock-in amplifier 12.Because the test department of optical probe is subject to tested electric signals radiation effect that conductance occurs
Rate changes, in exploring laser light pulse PdT during () incidence optical probe, reception response of the optical probe to exploring laser light pulse is subject to
The impact of tested electric signals and change, through opto-electronic conversion produce electric signal, then Jing lock-in amplifiers output.In the present invention
In, the measurement probe is that the optical probe 11 is placed in tested coplanar ripple with the concrete connected mode of tested co-planar waveguide probe
Probe and input, output translator contact point I are led, the position directly above of O, measurement obtains input signal win(t) or output signal
woutThe waveform of (t).
Fig. 5 is that electro-optical probes measure electric signal principle schematic.In the embodiment shown in fig. 5, the measurement probe is included
Electro-optical probes 13 and balance detection amplifier 14.Exploring laser light pulse PdT () is coupled in optical fiber, incide the electric light and visit
Pin, because the test department of light electric probe is subject to tested electric signals radiation effect that refraction index changing occurs, enters in exploring laser light pulse
When penetrating light electric probe, light electric probe is affected by tested electric signals to the reflex response of exploring laser light pulse and is changed,
Electric signal is converted to through balance detection amplifier and amplify output.In the present invention, the measurement probe and tested coplanar ripple
Leading the concrete connected mode of probe is, the smooth electric probe 13 is placed in tested co-planar waveguide probe and contacts with input, output translator
Point I, the position directly above of O, measurement obtains input signal win(t) or output signal woutThe waveform of (t).
Fig. 6 is the time diagram of synchronized sampling measuring method.Exploring laser light pulse is provided by optical pulse delay unit, it is real
The measurement collection of existing waveform.The exploring laser light pulse concentration of optical pulse delay unit output is to the measurement probe.The measurement is visited
Pin, in the exploring laser light pulse PdUnder (t) effect, visit for measuring the first co-planar waveguide probe and the second co-planar waveguide
Electric signal instantaneous value of the pin test lead when the measurement probe is incided in the exploring laser light pulse.For example, fly described 200
Under second laser pulse trigger condition, the impulse excitation signal width is about 10 psecs, will be using the exploring laser light pulse
PdT (t-i × Δ t) amounts to N=5000-10000 time delay point and the impulse excitation signal and its transmission is rung ()=P
Should measure, form sequence w of electric signal instantaneous valuein(i × Δ t) or wout(i × Δ t), in above expression formula, i=1-N,
For example, N=5000, constitutes time domain waveform.The time domain waveform measured in the test lead of the first co-planar waveguide probe is input signal
Time domain waveform；The time domain waveform measured in the test lead of the second co-planar waveguide probe is output signal time domain waveform.It is of the invention real
Apply and measure described in example probe, the sampling interval of the Wave data that its measurement is obtained is determined by the optical pulse delay unit, is spaced
Size is the relative time delay △ t；Preferably, sampling interval size is 1ps.
It should be noted that in practice the waveform of the impulse excitation signal, input signal, output signal is comprising abundant
Information, although be about 10ps referred to herein as electronic pulse width, but beyond pulse width (10ps) also comprising pulse ringing,
The shape informations such as overshoot, pre- punching, there is significantly contribution to frequency spectrum.Accurate measurement result is obtained necessary not only for measurement 10ps
Information in pulse width, in addition it is also necessary to measure outside 10ps pulsewidths, time window is sized such that 5ns-10ns in general measure,
Corresponding measurement points are exactly 5000-10000.Measurement delay point is more, and the degree of accuracy of measurement is higher.Fig. 7 is co-planar waveguide
Probe transmission characteristic measurement method flow chart. the embodiment of the present application also provides a kind of co-planar waveguide probe transmission feature measurement side
Method, using co-planar waveguide probe transmission characteristic measuring device described in the application any one embodiment, comprises the steps of：
Step 100, in the input converter and the test lead junction of the first co-planar waveguide probe, use the survey
Amount probe measurement input signal time domain waveform；
For example, the measurement probe is in the coplanar waveguide transmission line end of the input converter and first co-planar waveguide
Measurement at the test lead tie point of probe obtains input signal time domain waveform winT (), input signal time domain waveform data include taking
Sample time and amplitude information；
Step 200, in the output translator and the test lead junction of the second co-planar waveguide probe, use the survey
Amount probe measurement output signal time domain waveform；
For example, the measurement probe is in the coplanar waveguide transmission line end of the output translator and second co-planar waveguide
Measurement at the tie point of probe test end obtains output signal time domain waveform woutT (), output signal time domain waveform data include sampling
Time and amplitude information.
Step 300, the input signal time domain waveform and output signal time domain waveform are transformed into respectively frequency domain, obtain defeated
Enter signal spectrum and output signal spectrum；
For example, by input signal time domain waveform win(t) and output signal time domain waveform woutT () transforms to respectively frequency
Domain, obtains input signal spectrum Win(f) and output signal spectrum Wout(f)；
Step 400, according to output signal spectrum and input signal spectrum, the coaxial cable for high frequency transmission characteristic, described
Relation between co-planar waveguide probe transmission characteristic, calculates the transmission characteristic of co-planar waveguide probe.
For example, co-planar waveguide probe transmission characteristic is determined by following formula：
Wherein, f is signal frequency, WinF () is input signal time domain waveform data winT () Jing Spectrum Conversions are obtained defeated
Enter signal spectrum data, WoutF () is output signal time domain waveform data woutT output signal spectrum that () Jing Spectrum Conversions are obtained
Data, Hprobe(f) be the co-planar waveguide probe transmission characteristic, HcableF () is high frequency cable transmission characteristic.
Fig. 8 is the concrete steps embodiment flow chart of measurement input time domain waveform.With the measurement probe measurement input letter
The step of number time domain waveform, specifically include：
Step 101, the test that the measurement probe is placed in the input converter and the first co-planar waveguide probe
The criterion position of the surface of end junction；Most preferably, the measurement probe is positioned over the input converter and described
The test lead junction top 0.5mm positions of the first co-planar waveguide probe.
Step 102, excitation signal generator is triggered with ultrashort pulse, produce impulse excitation signal, it is defeated described in Jing
Enter the test lead that converter is coupled to the first co-planar waveguide probe；
Step 103, will the ultrashort pulse postpone after be input to the measurement probe, the measurement probe measurement and
Record postpones the input signal instantaneous value w at momentin(i×Δt)；
Step 104, the change ultrashort pulse amount of delay, the measurement probe measures again and records the delay moment
Input signal instantaneous value；Repeat above step, finally give input signal time domain waveform.
Fig. 9 is the concrete steps embodiment flow chart for measuring output time-domain waveform.The measurement probe measurement output signal
The step of time domain waveform, specifically include：
Step 201, the test that the measurement probe is placed in the output translator and the second co-planar waveguide probe
The criterion position of the surface of end junction；Most preferably, the measurement probe is positioned over the output translator and described
The test lead junction top 0.5mm positions of the second co-planar waveguide probe.
Step 202, excitation signal generator is triggered with ultrashort pulse, produce impulse excitation signal, it is defeated described in Jing
Enter the test lead that converter is coupled to the first co-planar waveguide probe；
Step 203, will the ultrashort pulse postpone after be input to the measurement probe, the measurement probe measurement and
Record postpones the output signal instantaneous value w at momentout(i×Δt)；
Not thick by 204, the change ultrashort pulse amount of delay, the measurement probe measures again and records the delay moment
Output signal instantaneous value；Repeat above step, finally give output signal time domain waveform.
Also, it should be noted that term " including ", "comprising" or its any other variant are intended to nonexcludability
Comprising so that a series of process, method, commodity or equipment including key elements not only includes those key elements, but also wrapping
Other key elements being not expressly set out are included, or also includes intrinsic for this process, method, commodity or equipment wanting
Element.In the absence of more restrictions, the key element for being limited by sentence "including a ...", it is not excluded that wanting including described
Also there is other identical element in process, method, commodity or the equipment of element.
Embodiments herein is the foregoing is only, the application is not limited to.For those skilled in the art
For, the application can have various modifications and variations.All any modification, equivalents made within spirit herein and principle
Replace, improve etc., within the scope of should be included in claims hereof.
Claims (10)
1. a kind of co-planar waveguide probe transmission characteristic measuring device, the co-planar waveguide probe includes transmission characteristic identical first
Co-planar waveguide probe, the second co-planar waveguide probe；The same shaft end of the first co-planar waveguide probe and the second co-planar waveguide probe passes through
Coaxial cable for high frequency connects；Characterized in that, the measurement apparatus include ultrafast laser generator, excitation signal generator, defeated
Enter converter, output translator, optical pulse delay unit, measurement probe, matched load；
The ultrafast laser generator, for producing ultrashort pulse；
The excitation signal generator, for receiving the ultrashort pulse triggering, produces impulse excitation signal；
The optical pulse delay unit, for the ultrashort pulse time delay, producing exploring laser light pulse, incides the survey
Amount probe；
The measurement probe, when the exploring laser light pulse is incident, for measuring the first co-planar waveguide probe and second
The electric signal instantaneous value at co-planar waveguide probe test end；
The input converter, for receiving the impulse excitation signal, and is coupled to the test of the first co-planar waveguide probe
End；
The output translator, for connecting the test lead and the matched load of the second co-planar waveguide probe.
2. co-planar waveguide probe transmission characteristic measuring device as claimed in claim 1, it is characterised in that
The input converter is included with shaft end and coplanar waveguide transmission line end, for transmitting the impulse excitation signal, and
Realize the impedance matching between the same shaft end and coplanar waveguide transmission line end；
The coplanar waveguide transmission line end of the input converter is connected with the test lead of the first co-planar waveguide probe.
3. co-planar waveguide probe transmission characteristic measuring device as claimed in claim 1, it is characterised in that
The output translator is included with shaft end and coplanar waveguide transmission line end, for transmission output signal, and realizes same shaft end
Impedance matching between coplanar waveguide transmission line end；
The coplanar waveguide transmission line end of the output translator is connected with the test lead of the second co-planar waveguide probe；
The same shaft end of the output translator is connected with the matched load.
4. co-planar waveguide probe transmission characteristic measuring device as claimed in claim 1, it is characterised in that the measurement probe is included
Optical probe or electro-optical probes.
5. the co-planar waveguide probe transmission characteristic measuring device as described in claim 1-4 any one, it is characterised in that described to swash
The pumping signal band for encouraging signal generator generation is wider than first co-planar waveguide, the bandwidth of operation of the second co-planar waveguide.
6. the co-planar waveguide probe transmission characteristic measuring device as described in claim 1-4 any one, it is characterised in that described to prolong
When module delay precision be higher than 300fs.
7. the co-planar waveguide probe transmission characteristic measuring device as described in claim 1-4 any one, it is characterised in that described super
Fast laser generator includes ultrafast laser, dispersion compensator, optical splitter；
The ultrafast laser, for producing ultrashort pulse；
The dispersion compensator is used to receive the ultrashort pulse, carries out dispersion pre-compensation, is sent to the optical splitter；
The optical splitter, by the ultrashort pulse two-way is divided into, and is exported all the way to the excitation signal generator, Ling Yilu
Export to the optical pulse delay device.
8. a kind of co-planar waveguide probe transmission characteristic measurement method, usage right requires that co-planar waveguide is visited described in 1-7 any one
Pin transmission characteristics measurement device, it is characterised in that comprise the steps of
It is defeated with the measurement probe measurement in the input converter and the test lead junction of the first co-planar waveguide probe
Enter time domain plethysmographic signal；
It is defeated with the measurement probe measurement in the output translator and the test lead junction of the second co-planar waveguide probe
Go out time domain plethysmographic signal；
The input signal time domain waveform and output signal time domain waveform are transformed into respectively frequency domain, obtain input signal spectrum and
Output signal spectrum；
According to output signal spectrum and input signal spectrum, the coaxial cable for high frequency transmission characteristic, the co-planar waveguide probe
Relation between transmission characteristic, calculates the transmission characteristic of co-planar waveguide probe.
9. co-planar waveguide probe transmission characteristic measurement method as claimed in claim 8, it is characterised in that surveyed with the measurement probe
The step of amount input signal time domain waveform, specifically include
The test lead junction that the measurement probe is placed in into the input converter and the first co-planar waveguide probe is just
The criterion position of top；
Excitation signal generator is triggered with ultrashort pulse, impulse excitation signal is produced, input converter coupling described in Jing
To the test lead of the first co-planar waveguide probe；
The measurement probe is input to after the ultrashort pulse is postponed, the measurement probe measurement and record postpone the moment
Input signal instantaneous value；
Change the ultrashort pulse amount of delay, the measurement probe measures again and record the input signal wink at delay moment
Duration；Repeat above step, finally give input signal time domain waveform.
10. co-planar waveguide probe transmission characteristic measurement method as claimed in claim 8, it is characterised in that with the measurement probe
The step of measurement output signal time domain waveform, specifically include
The test lead junction that the measurement probe is placed in into the output translator and the second co-planar waveguide probe is just
The criterion position of top；
Excitation signal generator is triggered with ultrashort pulse, impulse excitation signal is produced, input converter coupling described in Jing
To the test lead of the first co-planar waveguide probe；
The measurement probe is input to after the ultrashort pulse is postponed, the measurement probe measurement and record postpone the moment
Output signal instantaneous value；
Change the ultrashort pulse amount of delay, the measurement probe measures again and record the output signal wink at delay moment
Duration；Repeat above step, finally give output signal time domain waveform.
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