CN106918742B - A kind of Terahertz quantum cascaded laser optical beat signal detection system and method - Google Patents
A kind of Terahertz quantum cascaded laser optical beat signal detection system and method Download PDFInfo
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Abstract
The present invention provides a kind of Terahertz quantum cascaded laser optical beat signal detection system and method, wherein, detection system includes: Terahertz quantum well detector, for detecting the Terahertz multi-mode laser and optical beat signal of Terahertz quantum cascaded laser transmitting, and is converted to electric signal；It is off-axis to throw face microscope group, for converging the Terahertz multi-mode laser of laser generation and directing it to Terahertz quantum well detector；Detector DC source, for exporting direct current to Terahertz quantum well detector；T-type bias device, the direct current biasing for exporting the detector DC source is supplied to the Terahertz quantum well detector, and is coupled out the optical beat signal that detector detects；With amplifier, the optical beat signal for being coupled out to T-type bias device is amplified；And high-frequency detection device, for obtaining the spectral characteristic of optical beat signal.The present invention can effectively characterize the spectral characteristic of Terahertz quantum cascaded laser optical beat signal.
Description
Technical field
The invention belongs to semiconductor photoelectric device applied technical fields, are visited more particularly to one kind based on Terahertz quantum trap
Survey the Terahertz quantum cascaded laser optical beat signal detection system and method for device.
Background technique
Terahertz (THz) wave refers to frequency from 100GHz to 10THz, and respective wavelength is from 3mm to 3um in range, between milli
Electromagnetic wave between metric wave and infrared light.In terms of physics, THz wave is in transition region of the electronics to photonics；From frequency domain
It sees, THz wave covers the rotation and vibrational energy of each characteristic energy of semiconductor and plasma, organic and large biological molecule etc.
Amount, about 50% cosmic space photon energy etc.；In terms of application angle, the bandwidth of THz wave, measurement signal-to-noise ratio is high, is suitable for
Data transmission, the radio astronomy of high spatial and the temporal resolution imaging of message area and signal processing, large capacity and high secrecy
Detection, atmosphere and environmental monitoring, in real time with the biology of safety and medical diagnosis etc..Therefore, THz wave is in national economy and country
Safety etc. has great application value.
THz radiation source is the Primary Component of THz frequency range application, in numerous THz radiation producing methods, based on semiconductor
Full solid T Hz quantum cascade laser (THz QCL), is a kind of unipolar lasers that only electronics participates in, and electronics passes through subband
Between transition radiation THz wave.As a kind of important terahertz radiation source, THz QCL due to its energy conversion efficiency is high,
The advantages that small in size, light and easy of integration, becomes the research hotspot of this field.
Terahertz quantum cascaded laser zlasing mode is codetermined by the gain spectral resonant cavity of active area materials.It is most simple
Single resonant cavity is the FP chamber formed by the end face of two cleavage, and FP chamber Terahertz quantum cascaded laser often shows as indulging more
Mould.It interacts between more longitudinal modes, generates a beat signal for being in microwave frequency band.More longitudinal modes be present in THz QCL it is intracavitary and from
By space, intracavitary longitudinal mode interaction generates electricity beat signal, can directly detect from QCL driving circuit.Free space
Laser longitudinal module interaction generate optical beat signal, however, in the prior art there are no it is a kind of can Efficient Characterization THz QCL
The method of optical beat signal.
In consideration of it, it is necessary to provide a kind of Terahertz quantum cascaded laser optics based on Terahertz quantum well detector
Beat signal detection system and method are to solve the problems, such as this.
Summary of the invention
In view of the foregoing deficiencies of prior art, the purpose of the present invention is to provide one kind is visited based on Terahertz quantum trap
The Terahertz quantum cascaded laser optical beat signal detection system and method for surveying device, for solving to have in the prior art
The problem of effect characterization Terahertz quantum cascaded laser optical beat signal.
In order to achieve the above objects and other related objects, one aspect of the present invention provides a kind of Terahertz quantum cascaded laser
Optical beat signal detection system, it is special for obtaining the frequency spectrum of optical beat signal of Terahertz quantum cascaded laser generation
Property, which includes:
Terahertz quantum well detector, the Terahertz multimode for detecting the Terahertz quantum cascaded laser transmitting swash
Interact the optical beat signal of generation between light and the Terahertz multi-mode laser, and by the Terahertz multi-mode laser
And the optical beat signal is converted to electric signal；
Off-axis throwing face between the Terahertz quantum cascaded laser and the Terahertz quantum well detector is set
Microscope group, for converging the Terahertz multi-mode laser of the Terahertz quantum cascaded laser generation and directing it to the terahertz
Hereby quantum well detector；
Detector DC source, for exporting direct current to the Terahertz quantum well detector；
The T-type bias device being connected between the detector DC source and the Terahertz quantum well detector, being used for will
The direct current biasing of the detector DC source output is supplied to the Terahertz quantum well detector, and is coupled out the Terahertz
The optical beat signal that quantum well detector detects；
The amplifier being connect with the T-type bias device, optical beat signal for being coupled out to the T-type bias device into
Row amplification；And
The high-frequency detection device being connect with the amplifier, for obtaining the spectral characteristic of the optical beat signal.
Preferably, it is connected between each device being connected in the system using high frequency transmission line.
Preferably, the Terahertz quantum well detector is encapsulated using high speed packaging method.
Preferably, the high-frequency detection device is spectrum analyzer.
Preferably, the Terahertz quantum cascaded laser includes:
Half-insulating GaAs substrate；
Positioned at the lower contact layer of the upper surface of substrate；
GaAs/AlGaAs multi-quantum well active region positioned at the lower contact layer upper surface；
Upper contact layer positioned at the active area upper surface；
Upper electrode metal layer positioned at the upper contact layer upper surface；And
Lower electrode metal layer positioned at the part lower contact layer upper surface.
Preferably, the Terahertz quantum well detector includes:
Half-insulating GaAs substrate；
Positioned at the lower contact layer of the upper surface of substrate；
GaAs/AlGaAs multiple quantum wells positioned at the lower contact layer upper surface；
Upper contact layer positioned at the multiple quantum wells upper surface；
Upper electrode metal layer positioned at the upper contact layer upper surface；And
Lower electrode metal layer positioned at the part lower contact layer upper surface.
Preferably, the Terahertz quantum cascaded laser and the Terahertz quantum well detector freezed using liquid helium or
Compressor refrigeration.
Preferably, the Terahertz quantum cascaded laser is powered by a laser DC source, wherein the laser
DC source is DC voltage source or DC current source.
Preferably, the detector DC source is DC voltage source.
Preferably, the lasing frequency of the Terahertz quantum cascaded laser is 1~5THz.
Preferably, the spectral response range of the Terahertz quantum well detector covers the Terahertz quantum cascaded laser
The lasing spectral limit of device.
Preferably, the longitudinal mode spacing of the Terahertz quantum cascaded laser is 1~20GHz.
Preferably, the longitudinal mode spacing phase of the frequency of the optical beat signal and the Terahertz quantum cascaded laser
Deng.
Preferably, the T-type bias device includes being connected to the Terahertz quantum well detector and the detector direct current
Resistance between source and the capacitor being connected between the Terahertz quantum well detector and the amplifier.
Another aspect of the present invention provides a kind of Terahertz quantum cascaded laser optical beat signal detection method, this method
It is realized based on aforementioned Terahertz quantum cascaded laser optical beat signal detection system, comprising the following steps:
Direct current is exported by the detector DC source, and by the T-type bias device that the detector DC source is defeated
Direct current biasing out is supplied to the Terahertz quantum well detector；
The Terahertz multi-mode laser of the Terahertz quantum cascaded laser transmitting is converged by the off-axis throwing face microscope group
And direct it to the Terahertz quantum well detector；
The Terahertz multi-mode laser is detected by the Terahertz quantum well detector and the Terahertz multimode swashs
The optical beat signal that light interaction generates, and the Terahertz multi-mode laser and the optical beat signal are converted to electricity
Signal；
The optical beat signal that the Terahertz quantum well detector detects is coupled out by the T-type bias device；
It is amplified by the optical beat signal that the amplifier is coupled out the T-type bias device；And
The spectral characteristic of the optical beat signal is obtained by the high-frequency detection device.
By using above-mentioned technical proposal, the invention has the following beneficial effects: systems of the present invention can be by too
Hertz quantum well detector directly detects the optics between the Terahertz multi-mode laser of Terahertz quantum cascaded laser transmitting and claps
Frequency signal, and high frequency electrical signal is converted it into convenient for electricity analysis, to effectively characterize the optics of Terahertz multi-mode laser
Beat signal spectral characteristic.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of Terahertz quantum cascaded laser optical beat signal detection system of the present invention；
Fig. 2 is the curve of the emission spectra of Terahertz quantum cascaded laser and the response spectra of Terahertz quantum well detector
Figure.
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification
Other advantages and efficacy of the present invention can be easily understood for disclosed content.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints and application, without departing from
Various modifications or alterations are carried out under spirit of the invention.
The present invention is discussed in detail below with reference to Fig. 1 to Fig. 2.It should be noted that diagram provided in the present embodiment is only
The basic conception that the invention is illustrated in a schematic way is only shown in schema with related component in the present invention rather than according to reality then
Component count, shape when implementation and size are drawn, when actual implementation each component kenel, quantity and ratio can for it is a kind of with
The change of meaning, and its assembly layout kenel may also be increasingly complex.
As shown in Figure 1, the present invention provides a kind of Terahertz quantum cascaded laser optical beat signal detection system, with inspection
Survey the optical beat signal of a Terahertz quantum cascaded laser 11 generation.In the present invention, Terahertz quantum cascaded laser
11 be multimode laser, when its direct current biasing is higher than threshold value, will emit Terahertz multi-mode laser 10, between multi-mode laser mutually
Effect generates optical beat signal.
Said detecting system is as shown in Figure 1, comprising: Terahertz quantum well detector 21, for detecting Terahertz quantum grade
Join the Terahertz multi-mode laser 10 that laser 11 emits and the optics by the generation that interacts between Terahertz multi-mode laser 10
Beat signal, and the Terahertz multi-mode laser 10 and optical beat signal that detect are converted to corresponding electric signal, wherein too
The spectral response range of hertz quantum well detector 21 should cover the lasing spectral limit of Terahertz quantum cascaded laser 11；Off axis
Throwing face microscope group 22 is arranged between Terahertz quantum cascaded laser 11 and Terahertz quantum well detector 21, for converging
The Terahertz multi-mode laser 10 of the generation of Terahertz quantum cascaded laser 11 simultaneously directs it to Terahertz quantum well detector 21；
Detector DC source 23, for exporting direct current to Terahertz quantum well detector 21；T-type bias device 24, is connected to detector
Between DC source 23 and detector 21, the direct current biasing for providing DC source 23 is supplied to detector 21, and is coupled out spy
Survey the optical beat signal that device 21 detects；The amplifier 25 being connect with T-type bias device 24, for amplifying 24 coupling of T-type bias device
The optical beat signal closed out；The high-frequency detection device 26 connecting with amplifier 25 exports after amplifying for paraphase amplifier 25
Optical beat signal spectral characteristic.
Wherein, above-mentioned T-type bias device 24 is as shown in Figure 1, include being connected to Terahertz quantum well detector 21 and detector
Inductance L between the DC source 23 and capacitor C being connected between Terahertz quantum well detector 21 and amplifier 25.
In a preferred embodiment, it is connected between each component being connected in system using high frequency transmission line, and too
Hertz quantum well detector 21 is encapsulated using high speed packaging method, can be had with the high frequency optical beat signal for guaranteeing that it is detected
It is transferred to high-frequency detection device 26 to effect.
In another preferred embodiment, high-frequency detection device 26 is spectrum analyzer.
In another preferred embodiment, detector DC source 23 is DC voltage source.
In another preferred embodiment, Terahertz quantum cascaded laser 11 is supplied by a laser DC source 12
Electricity, the laser DC source 12 can be DC voltage source or DC current source.
In another preferred embodiment, Terahertz quantum cascaded laser 11 includes: half-insulating GaAs substrate；It is located at
The lower contact layer of upper surface of substrate；GaAs/AlGaAs multi-quantum well active region positioned at lower contact layer upper surface；Positioned at active area
The upper contact layer of upper surface；Upper electrode metal layer positioned at upper contact layer upper surface；And it is located at the lower contact layer upper surface in part
Lower electrode metal layer.Wherein, which uses semi-insulating surface plasma waveguide technique system
Make, the structure that active area is combined using bound state to continuous state transition and resonance phonon transition.
It should be noted that the Terahertz quantum cascaded laser 11 other than above-mentioned preferred structure, in the present invention
It can be using any one Terahertz quantum cascaded laser structure in the prior art.
In another preferred embodiment, Terahertz quantum well detector 21 includes: half-insulating GaAs substrate；Positioned at lining
The lower contact layer of bottom upper surface；GaAs/AlGaAs multiple quantum wells positioned at lower contact layer upper surface；Positioned at multiple quantum wells upper surface
Upper contact layer；Upper electrode metal layer positioned at upper contact layer upper surface；And the lower electricity positioned at the lower contact layer upper surface in part
Pole metal layer.Wherein, Terahertz Terahertz quantum well detector 21 is detected using 45 ° of oblique incidence modes, and substrate is ground below
And polish out the inclined-plane of 45 ° of inclination.
It should be noted that the Terahertz quantum well detector 21 in the present invention can other than above-mentioned preferred structure
Using any one 21 structure of Terahertz quantum well detector in the prior art.
In another preferred embodiment, Terahertz quantum cascaded laser 11 and Terahertz quantum well detector 21 are adopted
With liquid helium refrigeration or compressor refrigeration, so that the operating temperature of laser 11 is about maintained at 10~15K, make the operating temperature of detector
About it is maintained at about 5K.
In another preferred embodiment, the lasing frequency of Terahertz quantum cascaded laser 11 is 1~5THz, longitudinal mode
Spacing is 1~20GHz.In the specific embodiment of Fig. 2, the duct width of the Terahertz quantum cascaded laser 11 used for
150um, cleavage length is 6mm, and when driving current is 1A, laser 11 generates multimode lasing, and lasing frequency is about from 4.1THz
To 4.3THz, longitudinal mode spacing about 6GHz, as shown in Figure 2.
In another preferred embodiment, 21 size of Terahertz quantum well detector is about 400 × 400um2, biased electrical
When pressing 150mV, there is stronger response to 4~5THz light, as shown in Figure 2.
Based on 11 optical beat signal detection system of Terahertz quantum cascaded laser above-mentioned, the present invention provides one kind too
Hertz 11 optical beat signal detection method of quantum cascade laser, comprising the following steps:
By detector DC source 23 export direct current, and by T-type bias device 24 detector DC source 23 is exported it is straight
Stream biasing is supplied to Terahertz quantum well detector 21；
When Terahertz quantum cascaded laser 11 emits Terahertz multi-mode laser 10, converged by throwing face microscope group 22 off axis
The Terahertz multi-mode laser 10 of the laser 11 transmitting simultaneously directs it to Terahertz quantum well detector 21；
It is detected between Terahertz multi-mode laser 10 and Terahertz multi-mode laser 10 by Terahertz quantum well detector 21
Interact the optical beat signal generated, and Terahertz multi-mode laser 10 and optical beat signal are converted to corresponding telecommunications
Number；
The optical beat signal that Terahertz quantum well detector 21 detects is coupled out by T-type bias device 24；
It is amplified by the optical beat signal that amplifier 25 is coupled out T-type bias device 24；And
The spectral characteristic of the optical beat signal exported after amplifier 25 amplifies, the bat are obtained by high-frequency detection device 26
The frequency of frequency signal is coincide under entire driving current with the laser spectrum longitudinal mode spacing measured.
In conclusion the shortcomings that present invention effectively overcomes in the prior art and have high industrial utilization value.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should be covered by the claims of the present invention.
Claims (15)
1. a kind of Terahertz quantum cascaded laser optical beat signal detection system, for obtaining Terahertz quantum cascaded laser
The spectral characteristic for the optical beat signal that device generates, which is characterized in that the system includes:
Terahertz quantum well detector, for detect the Terahertz multi-mode laser of Terahertz quantum cascaded laser transmitting with
And the optical beat signal for the generation that interacts between the Terahertz multi-mode laser, and by the Terahertz multi-mode laser and institute
It states optical beat signal and is converted to electric signal；
Off-axis throwing face microscope group between the Terahertz quantum cascaded laser and the Terahertz quantum well detector is set,
For converging the Terahertz multi-mode laser of the Terahertz quantum cascaded laser generation and directing it to the Terahertz amount
Sub- well detector；
Detector DC source, for exporting direct current to the Terahertz quantum well detector；
The T-type bias device being connected between the detector DC source and the Terahertz quantum well detector, being used for will be described
The direct current of detector DC source output is biased to be supplied to the Terahertz quantum well detector after obtaining direct current biasing, and
It is coupled out the optical beat signal that the Terahertz quantum well detector detects；
The amplifier connecting with the T-type bias device, the optical beat signal for being coupled out to the T-type bias device are put
Greatly；And
The high-frequency detection device being connect with the amplifier, for obtaining the spectral characteristic of the optical beat signal.
2. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, which is characterized in that
It is connected between each device being connected in the system using high frequency transmission line.
3. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, which is characterized in that
The Terahertz quantum well detector is encapsulated using high speed packaging method.
4. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, which is characterized in that
The high-frequency detection device is spectrum analyzer.
5. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, which is characterized in that
The Terahertz quantum cascaded laser includes:
Half-insulating GaAs substrate；
Positioned at the lower contact layer of the upper surface of substrate；
GaAs/AlGaAs multi-quantum well active region positioned at the lower contact layer upper surface；
Upper contact layer positioned at the active area upper surface；
Upper electrode metal layer positioned at the upper contact layer upper surface；And
Lower electrode metal layer positioned at the part lower contact layer upper surface.
6. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, which is characterized in that
The Terahertz quantum well detector includes:
Half-insulating GaAs substrate；
Positioned at the lower contact layer of the upper surface of substrate；
GaAs/AlGaAs multiple quantum wells positioned at the lower contact layer upper surface；
Upper contact layer positioned at the multiple quantum wells upper surface；
Upper electrode metal layer positioned at the upper contact layer upper surface；And
Lower electrode metal layer positioned at the part lower contact layer upper surface.
7. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, which is characterized in that
The Terahertz quantum cascaded laser and the Terahertz quantum well detector are using liquid helium refrigeration or compressor refrigeration.
8. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, which is characterized in that
The Terahertz quantum cascaded laser is powered by a laser DC source, wherein the laser DC source is DC voltage
Source or DC current source.
9. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, which is characterized in that
The detector DC source is DC voltage source.
10. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, feature exist
In the lasing frequency of the Terahertz quantum cascaded laser is 1~5THz.
11. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, feature exist
In the spectral response range of the Terahertz quantum well detector covers the lasing spectrum model of the Terahertz quantum cascaded laser
It encloses.
12. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, feature exist
In the longitudinal mode spacing of the Terahertz quantum cascaded laser is 1~20GHz.
13. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, feature exist
In the frequency of the optical beat signal is equal with the longitudinal mode spacing of the Terahertz quantum cascaded laser.
14. Terahertz quantum cascaded laser optical beat signal detection system according to claim 1, feature exist
In, the T-type bias device include the inductance being connected between the Terahertz quantum well detector and the detector DC source,
And it is connected to the capacitor between the Terahertz quantum well detector and the amplifier.
15. a kind of Terahertz quantum cascaded laser optical beat signal detection method, which is characterized in that this method is based on right
It is required that the Terahertz quantum cascaded laser optical beat signal detection system in 1 is realized, comprising the following steps:
Direct current is exported by the detector DC source, and exported the detector DC source by the T-type bias device
Direct current is biased to be supplied to the Terahertz quantum well detector after obtaining direct current biasing；
The Terahertz multi-mode laser of the Terahertz quantum cascaded laser transmitting is converged by the off-axis throwing face microscope group and is incited somebody to action
It is guided to the Terahertz quantum well detector；
The Terahertz multi-mode laser and the Terahertz multi-mode laser phase are detected by the Terahertz quantum well detector
The optical beat signal that interaction generates, and the Terahertz multi-mode laser and the optical beat signal are converted to telecommunications
Number；
The optical beat signal that the Terahertz quantum well detector detects is coupled out by the T-type bias device；
It is amplified by the optical beat signal that the amplifier is coupled out the T-type bias device；And
The spectral characteristic of the optical beat signal is obtained by the high-frequency detection device.
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| CN113092072B (en) * | 2021-03-01 | 2022-06-24 | 中国科学院上海微系统与信息技术研究所 | Single-mode terahertz quantum cascade laser tuning characteristic characterization device |
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