CN102272345A - 用于功能面涂覆的方法及装置 - Google Patents

用于功能面涂覆的方法及装置 Download PDF

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Publication number
CN102272345A
CN102272345A CN2009801540678A CN200980154067A CN102272345A CN 102272345 A CN102272345 A CN 102272345A CN 2009801540678 A CN2009801540678 A CN 2009801540678A CN 200980154067 A CN200980154067 A CN 200980154067A CN 102272345 A CN102272345 A CN 102272345A
Authority
CN
China
Prior art keywords
coating
tooth
source
applies
cone gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2009801540678A
Other languages
English (en)
Chinese (zh)
Inventor
J·施纳格尔
S·库尔萨韦
H-J·沙伊贝
V·魏纳赫特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayerische Motoren Werke AG
Original Assignee
Bayerische Motoren Werke AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bayerische Motoren Werke AG filed Critical Bayerische Motoren Werke AG
Publication of CN102272345A publication Critical patent/CN102272345A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Gears, Cams (AREA)
  • Physical Vapour Deposition (AREA)
  • Gear Transmission (AREA)
CN2009801540678A 2009-01-09 2009-12-12 用于功能面涂覆的方法及装置 Pending CN102272345A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009004158.3 2009-01-09
DE102009004158.3A DE102009004158B4 (de) 2009-01-09 2009-01-09 Verfahren und Vorrichtung zur Funktionsflächenbeschichtung
PCT/EP2009/008914 WO2010078914A1 (de) 2009-01-09 2009-12-12 Verfahren und vorrichtung zur funktionsflächenbeschichtung

Publications (1)

Publication Number Publication Date
CN102272345A true CN102272345A (zh) 2011-12-07

Family

ID=41581045

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801540678A Pending CN102272345A (zh) 2009-01-09 2009-12-12 用于功能面涂覆的方法及装置

Country Status (6)

Country Link
US (1) US20110300310A1 (https=)
EP (1) EP2376667B8 (https=)
JP (1) JP2012514691A (https=)
CN (1) CN102272345A (https=)
DE (1) DE102009004158B4 (https=)
WO (1) WO2010078914A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021203709B3 (de) 2021-04-14 2022-06-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Zahnrad und Verfahren zum Herstellen eines Zahnrads

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111804A (en) * 1980-02-09 1981-09-03 Dainippon Printing Co Ltd Manufacture of body differing in optical property according to direction
WO1995012693A2 (en) * 1993-11-04 1995-05-11 United Technologies Corporation Method for producing diamond-like carbon layers
US6319369B1 (en) * 1995-02-20 2001-11-20 Filplas Vacuum Technology Pte, Ltd. Ignition means for a cathodic arc source

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1029431A (en) 1973-08-31 1978-04-11 Lawrence R. Sohm Dual mode control logic for a multi-mode copier/duplicator
JPS5620162A (en) * 1979-07-26 1981-02-25 Fujitsu Ltd Vapor depositing method
JPS59139930A (ja) 1983-01-31 1984-08-11 Konishiroku Photo Ind Co Ltd 蒸着装置
US4539461A (en) * 1983-12-21 1985-09-03 The Garrett Corporation Method and apparatus for laser gear hardening
US4508612A (en) 1984-03-07 1985-04-02 International Business Machines Corporation Shield for improved magnetron sputter deposition into surface recesses
JP2582552B2 (ja) 1986-05-29 1997-02-19 三菱電機株式会社 イオン注入装置
JPS63137161A (ja) 1986-11-28 1988-06-09 Mitsubishi Electric Corp シヤフトの被膜形成法
US5288556A (en) * 1987-03-31 1994-02-22 Lemelson Jerome H Gears and gear assemblies
JPH04183848A (ja) 1990-11-16 1992-06-30 Mitsubishi Heavy Ind Ltd 窒化ホウ素成膜方法
JPH04214854A (ja) * 1990-12-14 1992-08-05 Mitsubishi Heavy Ind Ltd 窒化ほう素膜の形成方法
JPH0551740A (ja) 1991-08-20 1993-03-02 Mitsubishi Heavy Ind Ltd 複雑形状基材への薄膜形成装置
DE4412906C1 (de) 1994-04-14 1995-07-13 Fraunhofer Ges Forschung Verfahren und Einrichtung für die ionengestützte Vakuumbeschichtung
US5685797A (en) * 1995-05-17 1997-11-11 United Technologies Corporation Coated planet gear journal bearing and process of making same
US20060228497A1 (en) * 2002-05-08 2006-10-12 Satyendra Kumar Plasma-assisted coating
JP3825764B2 (ja) * 2003-06-23 2006-09-27 三菱マテリアル神戸ツールズ株式会社 再研摩・再コーティングホブ、ホブの再研摩・再コーティング方法
WO2005046957A1 (ja) * 2003-11-14 2005-05-26 Ogura Clutch Co., Ltd. 樹脂コーティング方法とインサート成形品並びに樹脂被覆金属歯車類
US20090087563A1 (en) * 2004-11-02 2009-04-02 Gerald Voegele Coating of displacer components (tooth components) for providing a displacer unit with chemical resistance and tribological protection against wear
CA2616628C (en) * 2005-07-28 2014-01-14 Klingelnberg Gmbh Universal machine for the soft machining of bevel gears and corresponding method
JP2008223105A (ja) * 2007-03-14 2008-09-25 Toyohashi Univ Of Technology 直進プラズマによる処理装置、処理方法及び処理物
DE102007051023A1 (de) 2007-10-25 2009-04-30 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Beschichten einer Oberfläche eines Bauteils

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111804A (en) * 1980-02-09 1981-09-03 Dainippon Printing Co Ltd Manufacture of body differing in optical property according to direction
WO1995012693A2 (en) * 1993-11-04 1995-05-11 United Technologies Corporation Method for producing diamond-like carbon layers
US6319369B1 (en) * 1995-02-20 2001-11-20 Filplas Vacuum Technology Pte, Ltd. Ignition means for a cathodic arc source

Also Published As

Publication number Publication date
EP2376667A1 (de) 2011-10-19
JP2012514691A (ja) 2012-06-28
US20110300310A1 (en) 2011-12-08
WO2010078914A1 (de) 2010-07-15
DE102009004158B4 (de) 2023-03-30
EP2376667B1 (de) 2016-03-16
EP2376667B8 (de) 2016-05-18
DE102009004158A1 (de) 2010-07-15

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Application publication date: 20111207