DE102009004158B4 - Verfahren und Vorrichtung zur Funktionsflächenbeschichtung - Google Patents

Verfahren und Vorrichtung zur Funktionsflächenbeschichtung Download PDF

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Publication number
DE102009004158B4
DE102009004158B4 DE102009004158.3A DE102009004158A DE102009004158B4 DE 102009004158 B4 DE102009004158 B4 DE 102009004158B4 DE 102009004158 A DE102009004158 A DE 102009004158A DE 102009004158 B4 DE102009004158 B4 DE 102009004158B4
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DE
Germany
Prior art keywords
coating
component
irradiation
screen
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102009004158.3A
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German (de)
English (en)
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DE102009004158A1 (de
Inventor
Dr. Schnagl Johann
Dr. Kursawe Serge
Hans-Joachim Scheibe
Volker Weihnacht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayerische Motoren Werke AG
Original Assignee
Bayerische Motoren Werke AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bayerische Motoren Werke AG filed Critical Bayerische Motoren Werke AG
Priority to DE102009004158.3A priority Critical patent/DE102009004158B4/de
Priority to CN2009801540678A priority patent/CN102272345A/zh
Priority to EP09795701.3A priority patent/EP2376667B8/de
Priority to PCT/EP2009/008914 priority patent/WO2010078914A1/de
Priority to JP2011544799A priority patent/JP2012514691A/ja
Publication of DE102009004158A1 publication Critical patent/DE102009004158A1/de
Priority to US13/178,157 priority patent/US20110300310A1/en
Application granted granted Critical
Publication of DE102009004158B4 publication Critical patent/DE102009004158B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Gears, Cams (AREA)
  • Physical Vapour Deposition (AREA)
  • Gear Transmission (AREA)
DE102009004158.3A 2009-01-09 2009-01-09 Verfahren und Vorrichtung zur Funktionsflächenbeschichtung Active DE102009004158B4 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102009004158.3A DE102009004158B4 (de) 2009-01-09 2009-01-09 Verfahren und Vorrichtung zur Funktionsflächenbeschichtung
CN2009801540678A CN102272345A (zh) 2009-01-09 2009-12-12 用于功能面涂覆的方法及装置
EP09795701.3A EP2376667B8 (de) 2009-01-09 2009-12-12 Verfahren zur funktionsflächenbeschichtung
PCT/EP2009/008914 WO2010078914A1 (de) 2009-01-09 2009-12-12 Verfahren und vorrichtung zur funktionsflächenbeschichtung
JP2011544799A JP2012514691A (ja) 2009-01-09 2009-12-12 機能表面のコーティングのための方法及び装置
US13/178,157 US20110300310A1 (en) 2009-01-09 2011-07-07 Method and Device for Coating Functional Surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009004158.3A DE102009004158B4 (de) 2009-01-09 2009-01-09 Verfahren und Vorrichtung zur Funktionsflächenbeschichtung

Publications (2)

Publication Number Publication Date
DE102009004158A1 DE102009004158A1 (de) 2010-07-15
DE102009004158B4 true DE102009004158B4 (de) 2023-03-30

Family

ID=41581045

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009004158.3A Active DE102009004158B4 (de) 2009-01-09 2009-01-09 Verfahren und Vorrichtung zur Funktionsflächenbeschichtung

Country Status (6)

Country Link
US (1) US20110300310A1 (https=)
EP (1) EP2376667B8 (https=)
JP (1) JP2012514691A (https=)
CN (1) CN102272345A (https=)
DE (1) DE102009004158B4 (https=)
WO (1) WO2010078914A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021203709B3 (de) 2021-04-14 2022-06-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Zahnrad und Verfahren zum Herstellen eines Zahnrads

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139930A (ja) 1983-01-31 1984-08-11 Konishiroku Photo Ind Co Ltd 蒸着装置
US4508612A (en) 1984-03-07 1985-04-02 International Business Machines Corporation Shield for improved magnetron sputter deposition into surface recesses
GB2191335A (en) 1986-05-29 1987-12-09 Mitsubishi Electric Corp Substrate support structure for ion implantation device
JPH04183848A (ja) 1990-11-16 1992-06-30 Mitsubishi Heavy Ind Ltd 窒化ホウ素成膜方法
JPH0551740A (ja) 1991-08-20 1993-03-02 Mitsubishi Heavy Ind Ltd 複雑形状基材への薄膜形成装置
DE4412906C1 (de) 1994-04-14 1995-07-13 Fraunhofer Ges Forschung Verfahren und Einrichtung für die ionengestützte Vakuumbeschichtung

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1029431A (en) 1973-08-31 1978-04-11 Lawrence R. Sohm Dual mode control logic for a multi-mode copier/duplicator
JPS5620162A (en) * 1979-07-26 1981-02-25 Fujitsu Ltd Vapor depositing method
JPS56111804A (en) 1980-02-09 1981-09-03 Dainippon Printing Co Ltd Manufacture of body differing in optical property according to direction
US4539461A (en) * 1983-12-21 1985-09-03 The Garrett Corporation Method and apparatus for laser gear hardening
JPS63137161A (ja) 1986-11-28 1988-06-09 Mitsubishi Electric Corp シヤフトの被膜形成法
US5288556A (en) * 1987-03-31 1994-02-22 Lemelson Jerome H Gears and gear assemblies
JPH04214854A (ja) * 1990-12-14 1992-08-05 Mitsubishi Heavy Ind Ltd 窒化ほう素膜の形成方法
US5482602A (en) * 1993-11-04 1996-01-09 United Technologies Corporation Broad-beam ion deposition coating methods for depositing diamond-like-carbon coatings on dynamic surfaces
GB9503305D0 (en) * 1995-02-20 1995-04-12 Univ Nanyang Filtered cathodic arc source
US5685797A (en) * 1995-05-17 1997-11-11 United Technologies Corporation Coated planet gear journal bearing and process of making same
US20060228497A1 (en) * 2002-05-08 2006-10-12 Satyendra Kumar Plasma-assisted coating
JP3825764B2 (ja) * 2003-06-23 2006-09-27 三菱マテリアル神戸ツールズ株式会社 再研摩・再コーティングホブ、ホブの再研摩・再コーティング方法
WO2005046957A1 (ja) * 2003-11-14 2005-05-26 Ogura Clutch Co., Ltd. 樹脂コーティング方法とインサート成形品並びに樹脂被覆金属歯車類
US20090087563A1 (en) * 2004-11-02 2009-04-02 Gerald Voegele Coating of displacer components (tooth components) for providing a displacer unit with chemical resistance and tribological protection against wear
CA2616628C (en) * 2005-07-28 2014-01-14 Klingelnberg Gmbh Universal machine for the soft machining of bevel gears and corresponding method
JP2008223105A (ja) * 2007-03-14 2008-09-25 Toyohashi Univ Of Technology 直進プラズマによる処理装置、処理方法及び処理物
DE102007051023A1 (de) 2007-10-25 2009-04-30 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Beschichten einer Oberfläche eines Bauteils

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139930A (ja) 1983-01-31 1984-08-11 Konishiroku Photo Ind Co Ltd 蒸着装置
US4508612A (en) 1984-03-07 1985-04-02 International Business Machines Corporation Shield for improved magnetron sputter deposition into surface recesses
GB2191335A (en) 1986-05-29 1987-12-09 Mitsubishi Electric Corp Substrate support structure for ion implantation device
JPH04183848A (ja) 1990-11-16 1992-06-30 Mitsubishi Heavy Ind Ltd 窒化ホウ素成膜方法
JPH0551740A (ja) 1991-08-20 1993-03-02 Mitsubishi Heavy Ind Ltd 複雑形状基材への薄膜形成装置
DE4412906C1 (de) 1994-04-14 1995-07-13 Fraunhofer Ges Forschung Verfahren und Einrichtung für die ionengestützte Vakuumbeschichtung

Also Published As

Publication number Publication date
EP2376667A1 (de) 2011-10-19
JP2012514691A (ja) 2012-06-28
US20110300310A1 (en) 2011-12-08
CN102272345A (zh) 2011-12-07
WO2010078914A1 (de) 2010-07-15
EP2376667B1 (de) 2016-03-16
EP2376667B8 (de) 2016-05-18
DE102009004158A1 (de) 2010-07-15

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Owner name: BAYERISCHE MOTOREN WERKE AKTIENGESELLSCHAFT, DE

Free format text: FORMER OWNERS: BAYERISCHE MOTOREN WERKE AKTIENGESELLSCHAFT, 80809 MUENCHEN, DE; FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80686 MUENCHEN, DE

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