CN102205720B - 液体喷射头及使用其的液体喷射装置以及压电元件 - Google Patents
液体喷射头及使用其的液体喷射装置以及压电元件 Download PDFInfo
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- CN102205720B CN102205720B CN201110061743.6A CN201110061743A CN102205720B CN 102205720 B CN102205720 B CN 102205720B CN 201110061743 A CN201110061743 A CN 201110061743A CN 102205720 B CN102205720 B CN 102205720B
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- piezoelectric
- piezoelectric element
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- body layer
- piezoelectric body
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- 239000007788 liquid Substances 0.000 title claims abstract description 45
- 239000011734 sodium Substances 0.000 claims abstract description 45
- 239000010955 niobium Substances 0.000 claims abstract description 40
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 35
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 34
- 229910052700 potassium Inorganic materials 0.000 claims abstract description 33
- 229910052744 lithium Inorganic materials 0.000 claims abstract description 31
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 28
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims abstract description 14
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 14
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims abstract description 13
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000011591 potassium Substances 0.000 claims abstract description 13
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000006104 solid solution Substances 0.000 claims abstract description 7
- DJOYTAUERRJRAT-UHFFFAOYSA-N 2-(n-methyl-4-nitroanilino)acetonitrile Chemical compound N#CCN(C)C1=CC=C([N+]([O-])=O)C=C1 DJOYTAUERRJRAT-UHFFFAOYSA-N 0.000 claims description 16
- 229910052797 bismuth Inorganic materials 0.000 claims description 4
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims 3
- KTMLBHVBHVXWKQ-UHFFFAOYSA-N dibismuth dioxido(dioxo)manganese Chemical compound [Bi+3].[Bi+3].[O-][Mn]([O-])(=O)=O.[O-][Mn]([O-])(=O)=O.[O-][Mn]([O-])(=O)=O KTMLBHVBHVXWKQ-UHFFFAOYSA-N 0.000 abstract description 19
- 239000010410 layer Substances 0.000 description 59
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- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 6
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- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
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- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- -1 (K x Substances 0.000 description 3
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- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
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- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
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- 238000000018 DNA microarray Methods 0.000 description 1
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- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
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- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 229910052808 lithium carbonate Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
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- 239000007769 metal material Substances 0.000 description 1
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- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000015320 potassium carbonate Nutrition 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
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- 238000007650 screen-printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
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- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
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- 238000003836 solid-state method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
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- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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| DE112012000207B4 (de) * | 2012-03-02 | 2016-08-25 | Honda Electronics Co. Ltd. | Piezokeramische Zusammensetzung |
| US9873274B2 (en) * | 2014-04-30 | 2018-01-23 | Hewlett-Packard Development Company, L.P. | Electrocaloric heating and cooling device |
| JP6388804B2 (ja) * | 2014-07-18 | 2018-09-12 | 国立研究開発法人産業技術総合研究所 | 広帯域化高感度ａｅセンサー |
| JP7012430B2 (ja) * | 2016-12-21 | 2022-01-28 | 東芝テック株式会社 | 薬液吐出装置と薬液滴下装置 |
| JP2018133458A (ja) * | 2017-02-15 | 2018-08-23 | セイコーエプソン株式会社 | 圧電素子、及び圧電素子応用デバイス |
| JP6925909B2 (ja) * | 2017-08-22 | 2021-08-25 | 東芝テック株式会社 | 薬液滴下装置及び薬液吐出装置 |
| JP7286929B2 (ja) * | 2018-08-29 | 2023-06-06 | セイコーエプソン株式会社 | 圧電素子、液体吐出ヘッド、およびプリンター |
| CN111393162A (zh) * | 2019-01-03 | 2020-07-10 | 清华大学 | 一种高压电性能和高稳定型抗还原铌酸钾钠基无铅压电陶瓷及其制备方法 |
| JP2020123649A (ja) * | 2019-01-30 | 2020-08-13 | セイコーエプソン株式会社 | 圧電素子、液体吐出ヘッド、およびプリンター |
| JP2023140424A (ja) * | 2022-03-23 | 2023-10-05 | セイコーエプソン株式会社 | 液滴吐出ヘッド、および、液滴吐出装置 |
| CN114855303A (zh) * | 2022-05-09 | 2022-08-05 | 湖北大学 | 一种knltn电纺液、纳米纤维及传感器的加工方法 |
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| Publication number | Publication date |
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| EP2364852A2 (en) | 2011-09-14 |
| US20110221829A1 (en) | 2011-09-15 |
| CN102205720A (zh) | 2011-10-05 |
| EP2364852B1 (en) | 2014-03-05 |
| US9318690B2 (en) | 2016-04-19 |
| EP2364852A3 (en) | 2013-01-02 |
| JP5614531B2 (ja) | 2014-10-29 |
| JP2011211139A (ja) | 2011-10-20 |
| US20150200352A1 (en) | 2015-07-16 |
| US9209384B2 (en) | 2015-12-08 |
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