CN102192337B - 具有可枢转的阀关闭梁的活板输送阀 - Google Patents

具有可枢转的阀关闭梁的活板输送阀 Download PDF

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Publication number
CN102192337B
CN102192337B CN201110063229.6A CN201110063229A CN102192337B CN 102192337 B CN102192337 B CN 102192337B CN 201110063229 A CN201110063229 A CN 201110063229A CN 102192337 B CN102192337 B CN 102192337B
Authority
CN
China
Prior art keywords
valve
axis
supporting element
pivot
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201110063229.6A
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English (en)
Chinese (zh)
Other versions
CN102192337A (zh
Inventor
弗里德里克·盖泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAT Holding AG
Original Assignee
VAT Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VAT Holding AG filed Critical VAT Holding AG
Publication of CN102192337A publication Critical patent/CN102192337A/zh
Application granted granted Critical
Publication of CN102192337B publication Critical patent/CN102192337B/zh
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
    • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
    • F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
    • F16K1/2007—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member specially adapted operating means therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
    • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
    • F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
    • F16K1/2028—Details of bearings for the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
    • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
    • F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
    • F16K1/2042—Special features or arrangements of the sealing
    • F16K1/205—Special features or arrangements of the sealing the sealing being arranged on the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3308—Vertical transfer of a single workpiece
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3406—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door or cover

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Sliding Valves (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Details Of Valves (AREA)
CN201110063229.6A 2010-02-04 2011-02-01 具有可枢转的阀关闭梁的活板输送阀 Active CN102192337B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP10152682.0A EP2355132B1 (de) 2010-02-04 2010-02-04 Klappen-Transferventil mit schwenkbarem Ventilverschlussbalken
EP10152682.0 2010-02-04

Publications (2)

Publication Number Publication Date
CN102192337A CN102192337A (zh) 2011-09-21
CN102192337B true CN102192337B (zh) 2015-04-08

Family

ID=42813443

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110063229.6A Active CN102192337B (zh) 2010-02-04 2011-02-01 具有可枢转的阀关闭梁的活板输送阀

Country Status (5)

Country Link
US (1) US8622368B2 (cg-RX-API-DMAC10.html)
EP (1) EP2355132B1 (cg-RX-API-DMAC10.html)
JP (1) JP5777002B2 (cg-RX-API-DMAC10.html)
KR (1) KR101770990B1 (cg-RX-API-DMAC10.html)
CN (1) CN102192337B (cg-RX-API-DMAC10.html)

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CN103174841A (zh) * 2011-12-21 2013-06-26 麦丰密封科技股份有限公司 密封组件
US9732877B2 (en) * 2012-04-02 2017-08-15 Nicola Lucchesi Joint linkage actuating means for a valve
KR101385132B1 (ko) * 2012-06-18 2014-04-14 주식회사 씨엘디 가압 장치
CN104812939B (zh) * 2012-11-30 2017-02-22 应用材料公司 处理腔室气流设备、系统和方法
GB2517904A (en) * 2013-07-31 2015-03-11 Ingegneria Ceramica S R L An Improved Obturator and Method of Fabrication Thereof
US9530623B2 (en) * 2013-11-26 2016-12-27 Applied Materials, Inc. Process chamber apparatus, systems, and methods for controlling a gas flow pattern
US9970105B2 (en) * 2013-12-23 2018-05-15 Taiwan Semiconductor Manufacturing Co., Ltd Method for sealing processing module
DE202014005077U1 (de) 2014-06-23 2014-10-01 European Trailer Systems Gmbh Planenaufbau
JP2018520326A (ja) 2015-04-23 2018-07-26 ジェネラル・プラズマ・インコーポレーテッド チャンバ弁
US11629406B2 (en) 2018-03-09 2023-04-18 Asm Ip Holding B.V. Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
CN208014647U (zh) * 2018-04-24 2018-10-26 君泰创新（北京）科技有限公司 一种沉淀室的隔离设备
US10748727B2 (en) * 2018-05-30 2020-08-18 Mei Mei Memie WONG Electrical switch
EP3587243B1 (en) * 2018-06-29 2022-12-21 Hamilton Sundstrand Corporation Door closure mechanism
CN111089187B (zh) * 2018-10-23 2021-10-29 日扬科技股份有限公司 翻板输送阀
WO2021021504A1 (en) * 2019-07-31 2021-02-04 Applied Materials, Inc. Isolation valve
US11953113B2 (en) * 2020-02-14 2024-04-09 Crane Chempharma & Energy Corp. Valve with unobstructed flow path having increased flow coefficient
DE102020001179A1 (de) 2020-02-24 2021-08-26 Vat Holding Ag Vakuumventil zur Bereitstellung eines symmetrischen Fluidflusses
US11408530B2 (en) * 2020-08-05 2022-08-09 Applied Materials, Inc. Valve for varying flow conductance under vacuum
DE102021102283A1 (de) * 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
CN115306905B (zh) * 2022-10-10 2022-12-13 常州市彬达干燥制粒设备有限公司 一种具有阀片组件的排料阀门机构
DE102023000251A1 (de) 2023-01-27 2024-08-01 Vat Holding Ag Klappenventil und Dichtung mit verbesserter Dichtgeometrie für ein solches Ventil
CN118391488A (zh) * 2024-07-01 2024-07-26 艾庞半导体科技(四川)有限公司 一种真空传输阀门自锁装置
DE102024129341A1 (de) 2024-10-10 2026-04-16 Singulus Technologies Aktiengesellschaft Schleusenventil

Citations (6)

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Publication number Priority date Publication date Assignee Title
US3084904A (en) * 1957-03-04 1963-04-09 John B Mcgay Swinging gate valves
US4102496A (en) * 1976-01-29 1978-07-25 The Tappan Company Thermal valve
US5205532A (en) * 1992-02-07 1993-04-27 Leybold Aktiengesellschaft Pivoting air lock for a treatment chamber
US5275303A (en) * 1992-02-03 1994-01-04 Applied Materials, Inc. Valve closure mechanism for semiconductor deposition apparatus
US6343618B1 (en) * 2000-02-28 2002-02-05 Conbraco Industries, Inc. Swing check backflow preventer
CN1755175A (zh) * 2004-06-14 2006-04-05 应用材料股份有限公司 曲状狭缝阀门

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US1602236A (en) * 1924-04-30 1926-10-05 Borsig Gmbh Valve
US2394471A (en) * 1944-04-22 1946-02-05 Herman L Paul Valve
DE802855C (de) * 1949-08-26 1951-02-26 Gustav Friedrich Gerdts Schnellschaltventil
US3062232A (en) * 1958-12-29 1962-11-06 John B Mcgay Combination two direction check and gate valve
US3521659A (en) * 1967-05-18 1970-07-28 Blaw Knox Co High temperature valve for throttling or three-way application
JPS4716471Y1 (cg-RX-API-DMAC10.html) * 1969-09-08 1972-06-09
LU73780A1 (cg-RX-API-DMAC10.html) * 1975-11-11 1976-06-11
JPS5540292U (cg-RX-API-DMAC10.html) * 1978-09-09 1980-03-14
NO156704C (no) * 1984-04-06 1987-11-04 Norske Stats Oljeselskap Tilbakeslagsventil.
US5292393A (en) 1986-12-19 1994-03-08 Applied Materials, Inc. Multichamber integrated process system
US4785962A (en) * 1987-04-20 1988-11-22 Applied Materials, Inc. Vacuum chamber slit valve
DE3717724A1 (de) 1987-05-26 1988-12-08 Schertler Siegfried Ventilschieber mit einem schiebergehaeuse
US4821507A (en) * 1987-05-29 1989-04-18 Bachmann Industries, Inc. Gas flow diverter
US4919169A (en) * 1987-05-29 1990-04-24 Lothar Bachmann Gas flow diverter
DE3801998C1 (cg-RX-API-DMAC10.html) 1988-01-23 1989-05-18 Schertler, Siegfried, Haag, Ch
US5076205A (en) 1989-01-06 1991-12-31 General Signal Corporation Modular vapor processor system
US5236009A (en) * 1991-01-22 1993-08-17 Watts Investment Company Double check backflow preventer with improved toggle linkage check valve
DE4436569A1 (de) * 1994-10-13 1996-04-18 Rappold & Co Gmbh Hermann Spannhebelklappe, insbesondere für große Leitungsquerschnitte
DE19746241C2 (de) 1997-10-20 2000-05-31 Vat Holding Ag Haag Einrichtung zum Verschließen einer Öffnung
JP4225647B2 (ja) * 1999-09-08 2009-02-18 キヤノンアネルバ株式会社 ゲートバルブ
US6471181B2 (en) * 2001-01-11 2002-10-29 Vat Holding Ag Suspension of a valve plate of a vacuum valve
US6416037B1 (en) 2001-01-11 2002-07-09 Vat Holding Ag Vacuum pipe
US6629682B2 (en) 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
US7086416B2 (en) * 2004-05-27 2006-08-08 Zimmerman & Jansen, Inc. Valve assembly having a compensating gate
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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3084904A (en) * 1957-03-04 1963-04-09 John B Mcgay Swinging gate valves
US4102496A (en) * 1976-01-29 1978-07-25 The Tappan Company Thermal valve
US5275303A (en) * 1992-02-03 1994-01-04 Applied Materials, Inc. Valve closure mechanism for semiconductor deposition apparatus
US5205532A (en) * 1992-02-07 1993-04-27 Leybold Aktiengesellschaft Pivoting air lock for a treatment chamber
US6343618B1 (en) * 2000-02-28 2002-02-05 Conbraco Industries, Inc. Swing check backflow preventer
CN1755175A (zh) * 2004-06-14 2006-04-05 应用材料股份有限公司 曲状狭缝阀门

Also Published As

Publication number Publication date
KR20110090823A (ko) 2011-08-10
US8622368B2 (en) 2014-01-07
EP2355132B1 (de) 2014-05-21
EP2355132A1 (de) 2011-08-10
KR101770990B1 (ko) 2017-08-24
CN102192337A (zh) 2011-09-21
US20110186762A1 (en) 2011-08-04
JP2011163557A (ja) 2011-08-25
JP5777002B2 (ja) 2015-09-09

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