CN102169790A - First collecting mirror of electron microscope - Google Patents
First collecting mirror of electron microscope Download PDFInfo
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- CN102169790A CN102169790A CN 201110077399 CN201110077399A CN102169790A CN 102169790 A CN102169790 A CN 102169790A CN 201110077399 CN201110077399 CN 201110077399 CN 201110077399 A CN201110077399 A CN 201110077399A CN 102169790 A CN102169790 A CN 102169790A
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- upper cover
- ring
- water jacket
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Abstract
The invention discloses a first collecting mirror of an electron microscope, belonging to the field of electron microscopes. The first collecting mirror comprises a shell, an upper cover plate, a sealing space ring, a magnetic ring, a lead plate, a fixed diaphragm assembly, a pole shoe assembly, a magnetic circuit coil and a water jacket space ring assembly, wherein the shell is a cylindrical annular cavity with openings at two ends; the upper cover plate, the sealing space ring and the magnetic ring are connected and then arranged in the shell, the upper cover plate covers the opening at the upper end of the shell, the lead plate is arranged on the upper cover plate; middle parts of the upper cover plate, the sealing space ring and the magnetic ring are provided with mutually communicated through holes; the communicated through holes in the upper cover plate, the sealing space ring and the magnetic ring are internally sequentially provided with the fixed diaphragm assembly and the pole shot assembly, middle parts of the fixed diaphragm assembly and the pole shot assembly are provided with mutually communicated through holes which are used as electron beam channels of a first collecting mirror; and the magnetic path coil is arranged around the outside of the sealing space ring and the magnetic ring at the joint of the pole shoe assembly, the water jacket space ring assembly is arranged on the magnetic path coil, and the upper cover plate is arranged on the water jacket space ring assembly. The first collecting mirror has the advantages of simple structure, less parts, convenience for operation, assembly and maintenance, can be used for largely reducing electron beam spots on cross points of the electron gun, thereby improving properties of the electron microscope.
Description
Technical field
The present invention relates to the Electron Microscopy field, relate in particular to a kind of first condenser of electron microscope.
Background technology
Electron microscope is a kind of important instrument that can observe small material, can observe the following material of 0.25nm.Electron microscope as lighting source, with magnetic lens or the electrostatic lens device as the deflection electronics, realizes that optics amplifies with electron beam.Electron microscope has very application prospects in the army and the people fields such as physics, chemistry, material, scientific research, life science, geology, mine locating, mechanical industry, electronics industries.
Electron microscope is radiated on the sample by electron beam, realizes the observation to sample, and electron gun and condenser are the illuminators of electron microscope.Electron microscope requires condenser that the electron beam of high-high brightness can be provided, and the electron beam aperture that is radiated on the sample must be able to be regulated within the specific limits, and the big I of illuminated spot is selected on demand.Condenser is that the crosspoint with electron gun is imaged onto on the sample as imaging object, it is generally acknowledged that crossover of electron gun, is of a size of tens microns.In order to keep certain height and to be limited in beam spot minimum to the influence that sample heats, the bundle spot that requires the sample place is several microns, to this, condenser must dwindle beam spot, and first condenser in the early stage electron microscope, dwindling of beam spot to crossover of electron gun, is not very clever words, influenced the performance of electron microscope.
Summary of the invention
The purpose of embodiment of the present invention provides a kind of first condenser of electron microscope, is used in the electron microscope, the beam spot of crossover of electron gun, can be dwindled significantly, improves the performance of electron microscope.
The objective of the invention is to be achieved through the following technical solutions:
Embodiment of the present invention provides a kind of first condenser of electron microscope, comprising:
Shell, upper cover plate, sealing spacer ring, magnet ring, stereotype, fixed aperture assembly, pole shoe member, magnetic circuit coil and water jacket spacer assemblies;
Described shell is the cylinder toroidal cavity of both ends open;
Described upper cover plate, sealing spacer ring and be arranged in the described shell after magnet ring is connected successively, upper cover plate covers the upper end open of described shell, stereotype is set on upper cover plate, and the middle part of described upper cover plate, sealing spacer ring and magnet ring is equipped with through hole, and three's through hole is interconnected;
Set gradually fixed aperture assembly and pole shoe member from top to bottom in the through hole after the connection of described upper cover plate, sealing spacer ring and magnet ring, described fixed aperture assembly and pole shoe member middle part are equipped with through hole, and each through hole is communicated with the electron beam path as this first condenser; Sealing spacer ring and magnet ring outer surrounding in described pole shoe member junction are provided with described magnetic circuit coil, are provided with the water jacket spacer assemblies above the magnetic circuit coil, and the top of water jacket spacer assemblies is described upper cover plate, fixedlys connected with described upper cover plate.
The technical scheme that is provided by the invention described above execution mode as can be seen, organic cooperation by shell, upper cover plate, sealing spacer ring, magnet ring, stereotype, fixed aperture assembly, pole shoe member, magnetic circuit coil and water jacket spacer assemblies in the embodiment of the present invention has formed first condenser, be looped around magnetic circuit coil shell, upper cover plate and magnet ring on every side, can compile the magnetic line of force, after coil flows through exciting curent, owing to making magnetic field, magnetic induction strengthens, thus the effect grow of electron lens.This first condenser has simple in structure, installation, easy to operate, and parts are less, and volume is little, is convenient to the advantage of assembling and keeping in repair.Being used for electron microscope can dwindle the beam spot of crossover of electron gun, significantly, effectively improves the performance of electron microscope.
Description of drawings
In order to be illustrated more clearly in the technical scheme of the embodiment of the invention, the accompanying drawing of required use is done to introduce simply in will describing embodiment below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite of not paying creative work, can also obtain other accompanying drawings according to these accompanying drawings.
The structural representation of first condenser that Fig. 1 provides for the embodiment of the invention;
The structural representation of another angle of first condenser that Fig. 2 provides for the embodiment of the invention;
First condenser that Fig. 3 provides for the embodiment of the invention face structural representation;
Fig. 4 is that the A-A of Fig. 3 is to cross-sectional view;
The structural representation of the shell of first condenser that Fig. 5 provides for the embodiment of the invention;
The structural representation that the upper cover plate of first condenser that Fig. 6 provides for the embodiment of the invention, sealing spacer ring are connected with magnet ring;
The upper cover plate of first condenser that Fig. 7 provides for the embodiment of the invention, sealing spacer ring are connected with magnet ring faces structural representation;
Fig. 8 is that the B-B of Fig. 7 is to cross-sectional view;
The structural representation of the last pole shoe of the pole shoe member of first condenser that Fig. 9 provides for the embodiment of the invention;
Figure 10 is that the C-C of Fig. 9 is to cross-sectional view;
The structural representation of the spacer ring of the pole shoe member of first condenser that Figure 11 provides for the embodiment of the invention;
The structural representation of the following pole shoe of the pole shoe member of first condenser that Figure 12 provides for the embodiment of the invention;
Figure 13 is that the D-D of Figure 12 is to cross-sectional view;
The explosive decomposition structural representation of the pole shoe member of first condenser that Figure 14 provides for the embodiment of the invention;
The structural representation of the fixed aperture assembly of first condenser that Figure 15 provides for the embodiment of the invention;
The cross-sectional view of the fixed aperture assembly of first condenser that Figure 16 provides for the embodiment of the invention;
The coil former structural representation of the magnetic circuit coil of first condenser that Figure 17 provides for the embodiment of the invention;
The structural representation of the water jacket spacer assemblies of first condenser that Figure 18 provides for the embodiment of the invention;
Figure 19 is that the E-E of Figure 18 is to cross-sectional view;
Each label is among the figure: the 1-shell; The 2-upper cover plate; 21-seals spacer ring; The 211-sealing ring; The 22-magnet ring; The 3-stereotype; 4-fixed aperture assembly; 41-fixed aperture seat; The 42-clamping nut; 43-fixed aperture sheet; The through hole of 44-fixed aperture assembly; The 45-packing ring; The last pole shoe of 5-; The through hole of the last pole shoe of 51-; The 6-spacer ring; Through hole on the 61-spacer ring wall; Pole shoe under the 7-; The through hole of pole shoe under the 71-; The 8-magnetic circuit coil; The 811-overhead gage; The 812-lower baffle plate; 813-annular column; The annular groove of 814-coil former; 9-water jacket spacer assemblies; 91-water jacket body; 92-water jacket spacer ring; The through hole of 93-water jacket spacer assemblies.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills belong to protection scope of the present invention not making the every other embodiment that is obtained under the creative work prerequisite.
Below in conjunction with accompanying drawing the embodiment of the invention is described in further detail.
Present embodiment provides a kind of first condenser of electron microscope, can be used in the electron microscope, be arranged on above second condenser, shown in Fig. 1～5, this first condenser comprises: shell 1, upper cover plate 2, sealing spacer ring 21, magnet ring 22, stereotype 3, fixed aperture assembly 4, pole shoe member, magnetic circuit coil 8 and water jacket spacer assemblies 9;
Wherein, the described shell 1 cylinder toroidal cavity that is both ends open; Upper cover plate 2, sealing spacer ring 21 and be arranged in the described shell 1 after magnet ring 22 is connected successively, upper cover plate 2 covers the upper end open of described shell 1, stereotype 3 is set on upper cover plate 2, and the middle part of described upper cover plate 2, sealing spacer ring 21 and magnet ring 22 is equipped with through hole, and three's through hole is interconnected;
Set gradually fixed aperture assembly 4 and pole shoe member from top to bottom in the through hole after the connection of described upper cover plate 2, sealing spacer ring 21 and magnet ring 22, described fixed aperture assembly 4 and pole shoe member middle part are equipped with through hole, and each through hole is communicated with the electron beam path as this first condenser; Sealing spacer ring 21 and magnet ring 22 outer surrounding in described pole shoe member junction are provided with described magnetic circuit coil 8, are provided with water jacket spacer assemblies 9 above the magnetic circuit coil 8, and the top of water jacket spacer assemblies 9 is described upper cover plate 2, fixedlys connected with described upper cover plate 2.
Magnetic circuit coil 8 shell 1, upper cover plate 2 and the magnet ring 22 on every side that be looped around in above-mentioned first condenser all adopts soft magnetic material to make, has the characteristic of compiling the magnetic line of force, after coil flows through exciting curent,, thereby make the effect grow of electron lens owing to magnetic induction makes the magnetic field enhancing.
Shown in Fig. 6～8, upper cover plate 2 in above-mentioned first condenser is circular, its centre is provided with the annular hollow cylinder, the length of annular hollow cylinder is greater than the thickness of described upper cover plate, the upper end of annular hollow cylinder is higher than upper cover plate 2 upper surfaces and forms circular projection, the lower end of annular hollow cylinder protrudes in the bottom surface of upper cover plate 2, and end, annular hollow cylinder lower end is provided with annular boss;
This structure that above-mentioned upper cover plate 2, sealing spacer ring 21 and magnet ring 22 form not only is convenient to be provided with each parts such as fixed aperture assembly, pole shoe member and magnetic circuit coil, and be beneficial to and converge the magnetic line of force, strengthen the effect of electron lens, promote the performance of first condenser.
The pole shoe member of above-mentioned first condenser is connected in sequence by last pole shoe 5, spacer ring 6 and following pole shoe 7; Wherein, shown in Fig. 9,10, last pole shoe 5 is a pyramidal structure, and its inside is provided with conical cavity, and the middle part of conical cavity bottom is provided with through hole 51.
The structure of following pole shoe 7 is inverted cone-shaped structure shown in Figure 12,13, its inside is provided with conical cavity, and the middle part at conical cavity top is provided with through hole 71.
The state that the last pole shoe 5 of the pole shoe member of above-mentioned first condenser is connected with following pole shoe 7 through spacer ring 6 as shown in figure 14.
Shown in Figure 15～16, the fixed aperture assembly 4 in above-mentioned first condenser comprises: fixed aperture seat 41, clamping nut 42, packing ring 45 and fixed aperture sheet 43;
Wherein, fixed aperture sheet 43 is arranged on the bottom of fixed aperture seat 41 by clamping nut 42 and packing ring 45, the middle part of fixed aperture sheet 41, clamping nut 42, packing ring 45 and fixed aperture seat 41 is equipped with through hole, and four through hole is communicated with the through hole that formation is passed through for electron beam.
Magnetic circuit coil 8 in above-mentioned first condenser is the annulus cylindricality, be to be wrapped in the coil that coiling forms on the coil former by enamelled wire, wherein, the structure of coil former as shown in figure 17, be the structure that has annular groove 814 that is made of upper and lower baffle plate 811,812 and annular column 813, described enamelled wire is wound in the annular groove 814 between the upper and lower baffle plate 811,812 of coil former.
Shown in Figure 18～19, the water jacket spacer assemblies 9 in above-mentioned first condenser comprises: water jacket body 91, water jacket partition and water jacket spacer ring 92;
Wherein, water jacket body 91 is a ring channel structures, be respectively equipped with inlet opening and apopore on the cannelure sidewall of water jacket body 91, be provided with the water jacket partition (not shown) in the cannelure of water jacket body, water jacket partition is arranged between inlet opening and the apopore, inlet opening and apopore can be separated, avoid water-in and water-out to influence each other, the water jacket spacer ring 92 by annular above the cannelure of water jacket body 91 covers sealing.
The magnetic circuit coil of first condenser that the embodiment of the invention provides is the annulus cylindricality, the shell, upper cover plate and the magnet ring that are formed by soft magnetic material around it play the magnetic line of force effect that compiles, when coil has electric current to pass through, owing to magnetic induction makes the magnetic field enhancing, thereby make the effect grow of electron lens; The last pole shoe of pole shoe member, following pole shoe are positioned at the centre of upper cover plate, sealing spacer ring and magnet ring, also be to make by soft magnetic material, because pole shoe extends near the axle, therefore can form the lens magnetic field that magnetic field is stronger, magnetic field range is more concentrated, make this first condenser can utilize the magnetic field in the upper and lower pole shoe gap that electron gun electrons emitted Shu Jinhang is focused on; The fixed aperture of first condenser is adorned the aperture top of pole shoe thereon, plays the effect of restriction electron beam aperture; The water jacket spacer assemblies of between the magnetic circuit coil of first condenser and upper cover plate, installing, the heat that produces in the time of can coming the cooling magnetic circuit coil working by water.
This first condenser has simple in structure, installation, easy to operate, and parts are less, and volume is little, is convenient to the advantage of assembling and keeping in repair.Being used for electron microscope can dwindle significantly to the beam spot of crossover of electron gun,, effectively improves the performance of electron microscope.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection range of claims.
Claims (10)
1. first condenser of an electron microscope is characterized in that, comprising:
Shell, upper cover plate, sealing spacer ring, magnet ring, stereotype, fixed aperture assembly, pole shoe member, magnetic circuit coil and water jacket spacer assemblies;
Described shell is the cylinder toroidal cavity of both ends open;
Described upper cover plate, sealing spacer ring and be arranged in the described shell after magnet ring is connected successively, upper cover plate covers the upper end open of described shell, stereotype is set on upper cover plate, and the middle part of described upper cover plate, sealing spacer ring and magnet ring is equipped with through hole, and three's through hole is interconnected;
Set gradually fixed aperture assembly and pole shoe member from top to bottom in the through hole after the connection of described upper cover plate, sealing spacer ring and magnet ring, described fixed aperture assembly and pole shoe member middle part are equipped with through hole, and each through hole is communicated with the electron beam path as this first condenser; Sealing spacer ring and magnet ring outer surrounding in described pole shoe member junction are provided with described magnetic circuit coil, are provided with the water jacket spacer assemblies above the magnetic circuit coil, and the top of water jacket spacer assemblies is described upper cover plate, fixedlys connected with described upper cover plate.
2. first condenser of electron microscope according to claim 1, it is characterized in that, described upper cover plate is circular, its centre is provided with the annular hollow cylinder, the length of annular hollow cylinder is greater than the thickness of described upper cover plate, the upper end of annular hollow cylinder is higher than the upper cover plate upper surface and forms circular projection, and the lower end of annular hollow cylinder protrudes in the bottom surface of upper cover plate, and the end of annular hollow cylinder lower end is provided with annular boss;
Described sealing spacer ring is an annular, and the end, two ends of sealing spacer ring is provided with annular concave platform, and the annular concave platform place is equipped with closure gasket groove, is equipped with sealing ring in the closure gasket groove;
Described magnet ring is circular, and its centre is provided with annular hollow cylinder, and the upper end of annular hollow cylinder is higher than the magnet ring upper surface, and the end, upper end of annular hollow cylinder is provided with annular boss, and the lower end of annular hollow cylinder protrudes in the bottom surface of magnet ring;
Described upper cover plate, sealing spacer ring are connected to successively with magnet ring: upper cover plate is connected with magnet ring through the sealing spacer ring, the annular boss of the annular hollow cylinder lower end of upper cover plate is arranged in the annular concave platform of sealing spacer ring upper end, the annular boss of the annular hollow cylinder upper end of magnet ring is arranged in the annular concave platform of sealing spacer ring lower end, and the cross section that has cannelure in the middle of upper cover plate, sealing spacer ring and magnet ring are connected to form is " doing " font structure.
3. first condenser of electron microscope according to claim 1 is characterized in that, described shell, upper cover plate and magnet ring all adopt soft magnetic material to make.
4. first condenser of electron microscope according to claim 1 is characterized in that, described fixed aperture assembly comprises:
Fixed aperture seat, clamping nut, packing ring and fixed aperture sheet;
The fixed aperture sheet is arranged on the bottom of fixed aperture seat by packing ring and clamping nut, and the middle part of fixed aperture sheet, clamping nut, packing ring and fixed aperture seat is equipped with through hole, and four through hole is communicated with and forms the through hole that passes through for electron beam.
5. first condenser of electron microscope according to claim 1 is characterized in that, described pole shoe member is connected in sequence by last pole shoe, spacer ring and following pole shoe, and wherein upper and lower pole shoe also is to adopt soft magnetic material to make.
6. first condenser of electron microscope according to claim 5 is characterized in that, described upward pole shoe is a pyramidal structure, and its inside is provided with conical cavity, and the middle part of conical cavity bottom is provided with through hole.
7. first condenser of electron microscope according to claim 5, it is characterized in that, described spacer ring is the annular hollow post, and the external diameter of the upper end of annular hollow post and upper cover plate inwall contact portion is provided with four through holes greater than its lower end external diameter around the distribution of the middle part of annular hollow post.
8. first condenser of electron microscope according to claim 5 is characterized in that, described pole shoe down is an inverted cone-shaped structure, and its inside is provided with conical cavity, and the middle part at conical cavity top is provided with through hole.
9. first condenser of electron microscope according to claim 1 is characterized in that, described magnetic circuit coil is the annulus cylindricality, is to be wrapped in the coil that coiling forms on the coil former by enamelled wire; Wherein, the structure that have annular groove of described coil former for being made of upper and lower baffle plate and annular column, described enamelled wire are wrapped in the annular groove between the upper and lower baffle plate of coil former.
10. first condenser of electron microscope according to claim 1 is characterized in that, described water jacket spacer assemblies comprises:
Water jacket body, water jacket partition and water jacket spacer ring;
Described water jacket body is a ring channel structures, be respectively equipped with inlet opening and apopore on the cannelure sidewall of water jacket body, be provided with water jacket partition in the cannelure of water jacket body, water jacket partition is arranged between inlet opening, the apopore, inlet opening and apopore can be separated, the water jacket spacer ring by annular above the cannelure of water jacket body covers sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110077399XA CN102169790B (en) | 2011-03-29 | 2011-03-29 | First collecting mirror of electron microscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110077399XA CN102169790B (en) | 2011-03-29 | 2011-03-29 | First collecting mirror of electron microscope |
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| CN102169790A true CN102169790A (en) | 2011-08-31 |
| CN102169790B CN102169790B (en) | 2012-07-04 |
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| CN201110077399XA Active CN102169790B (en) | 2011-03-29 | 2011-03-29 | First collecting mirror of electron microscope |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102376515A (en) * | 2011-11-08 | 2012-03-14 | 北京航空航天大学 | Objective pole shoe of transmission electron microscope |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3833811A (en) * | 1972-07-11 | 1974-09-03 | Jeol Ltd | Scanning electron microscope with improved means for focusing |
| EP0205185A2 (en) * | 1985-06-14 | 1986-12-17 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Objective with spectrometer in the electron beam measuring technique |
| CN201226335Y (en) * | 2008-06-20 | 2009-04-22 | 高伟烘 | Electronic microscope |
-
2011
- 2011-03-29 CN CN201110077399XA patent/CN102169790B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3833811A (en) * | 1972-07-11 | 1974-09-03 | Jeol Ltd | Scanning electron microscope with improved means for focusing |
| EP0205185A2 (en) * | 1985-06-14 | 1986-12-17 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Objective with spectrometer in the electron beam measuring technique |
| CN201226335Y (en) * | 2008-06-20 | 2009-04-22 | 高伟烘 | Electronic microscope |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102376515A (en) * | 2011-11-08 | 2012-03-14 | 北京航空航天大学 | Objective pole shoe of transmission electron microscope |
| CN102376515B (en) * | 2011-11-08 | 2014-02-12 | 北京航空航天大学 | Objective pole shoe of transmission electron microscope |
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| Publication number | Publication date |
|---|---|
| CN102169790B (en) | 2012-07-04 |
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Effective date of registration: 20210222 Address after: 215200 No. 666 Hu Xin Road, Wujiang economic and Technological Development Zone, Suzhou, Jiangsu Patentee after: Suzhou Bozhong Instrument Technology Co., Ltd Address before: 100083 No. 37, Haidian District, Beijing, Xueyuan Road Patentee before: BEIHANG University |
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