CN102376515B - Objective pole shoe of transmission electron microscope - Google Patents
Objective pole shoe of transmission electron microscope Download PDFInfo
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- CN102376515B CN102376515B CN201110349944.6A CN201110349944A CN102376515B CN 102376515 B CN102376515 B CN 102376515B CN 201110349944 A CN201110349944 A CN 201110349944A CN 102376515 B CN102376515 B CN 102376515B
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- pole shoe
- diameter
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- objective
- spacer
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Abstract
The invention discloses an objective pole shoe of a transmission electron microscope. The objective pole shoe comprises an upper pole shoe, a lower pole shoe and an isolating sleeve, wherein coaxiality is required to be guaranteed in matching of the upper pole shoe, the lower pole shoe and the isolating sleeve during assembly. In the invention, stressless connection of the upper pole shoe and the lower pole shoe of an objective is realized through the isolating sleeve, so that a good magnetic characteristic effect (due to inexistence of stress) is achieved; small holes of the upper pole shoe and the lower pole shoe are convenient in processing and good in processibility; through holes on the outer circumference of the isolating sleeve facilitate mounting of accessories such as an energy spectrometer and the like, so that extensibility is strong; the selected pole shoe material is high-performance soft magnetic material 1J22, so that reliability and a good effect are achieved; by using a three-section connection mode, the objective pole shoe has the characteristics of simple structure and convenience in maintenance, and practical performance is improved; and superior tin bronze, serving as a heat-conducting material, is used as a heat-transfer material and the isolating sleeve, so that a good effect and long life are guaranteed.
Description
Technical field
The present invention relates to a kind of objective pole shoe of transmission electron microscope, belong to micro-nano observation and control technology field.
Background technology
People are unlimited to the observation of microscopic species, and electron microscope is exactly a kind of important instrument that can observe small material, and he can observe the material below 0.25nm.Electron microscope is usingd electron beam as lighting source, usings magnetic lens or electrostatic lens as the device of deflection electronics, realizes optical amplifier.Electron microscope has application prospect very widely at Military and civil fields such as physics, chemistry, material, scientific research, life science, geology, mine locating, mechanical industry, electronics industries.
Electron microscope on sample, by the focussing force of object lens, is realized the observation to sample by electron beam irradiation, and object lens magnetic circuit comprises around the pure iron skeleton of objective lens coil and the extending part of pure iron skeleton, objective pole shoe.Objective pole shoe is the Primary Component that forms magnetic objective, generally by Precise Alloy, is made, and making need to be very accurate, otherwise, can produce astigmatism, picture distortion equal error, reduce resolution and readability.Also to consider the needs of Electronic Speculum installation accessories simultaneously, so structurally need to consider, could realize many-sided needs.
In various objective pole shoes, mostly have: Design of Mechanical Structure more complicated, use dumb; And inconvenience assembling, inconvenience maintenance.
Summary of the invention
The object of the invention is, in order to address the above problem, to propose a kind of objective pole shoe of transmission electron microscope.
An objective pole shoe for transmission electron microscope, comprises pole shoe, lower pole shoe and spacer;
Upper pole shoe upper end is cylindrical, and lower end is turbination, and conical bottom is plane F
1, the cylindrical round thread hole A that is provided with, for being connected with miscellaneous part; A lower end, round thread hole is provided with conical socket B, and conical socket B lower end is provided with pole shoe bore, and the diameter of upper pole shoe bore is D
1, the part that upper pole shoe bore is connected with conical socket B is provided with chamfering C; The diameter of round thread hole A is greater than conical socket B upper end diameter, and conical socket B lower end diameter is greater than the diameter of pole shoe bore; Bottom is plane F
1external profile diameter the more than three times of diameter that are upper pole shoe bore; Turbination periphery is also provided with boss A, and for the annular groove A interference fit with spacer, the end face of annular groove A overlaps with the end face of boss A;
The length of described upper pole shoe bore is greater than or equal to the diameter of pole shoe bore;
Lower pole shoe is conical, and top is plane F
2, top is provided with lower pole shoe bore, and the diameter of lower pole shoe bore is D
2, D
2< D
1, lower pole shoe bore lower end is provided with bellmouth D, and bellmouth D lower end is provided with circular hole E, circular hole E lower end is circular hole F, the diameter of bellmouth D upper surface is identical with the diameter of lower pole shoe bore, and the diameter of lower surface is identical with the diameter of circular hole E, and the diameter of circular hole F is greater than the diameter of circular hole E; Lower pole shoe is arranged with boss B outside conical bottom, and for the annular groove B interference fit with spacer, the end face of annular groove B overlaps with the end face of boss B;
Described lower pole shoe bore and the length of bellmouth D are greater than or equal to the diameter of lower pole shoe bore;
Plane F
1with plane F
2between distance be S, S and D calculate according to electron optics;
Spacer is cylindrical shape, upper and lower side is respectively equipped with annular groove A and annular groove B, and for pole shoe in interference fit and lower pole shoe, inside is also provided with lower pole shoe dividing plate, lower pole shoe dividing plate is positioned at the periphery of lower pole shoe taper, and the spacer excircle of lower pole shoe dividing plate upper end is provided with through hole G; The spacer excircle of lower pole shoe dividing plate lower end is provided with two symmetrical through hole H, for objective pole shoe is installed.
The invention has the advantages that:
(1) the upper pole shoe of object lens is realized unstressed connection with lower pole shoe by spacer, magnetic characteristic effective (due to unstressed);
(2) aperture of upper pole shoe and lower pole shoe is convenient to processing, good manufacturability;
(3) through hole on spacer excircle is convenient to install the annexes such as energy disperse spectroscopy, and extensibility is strong;
(4) pole shoe material selection high-performance soft magnetic materials 1J22, reliable, effective;
(5) adopt syllogic connected mode, there is feature simple in structure, easy to maintenance, improved Practical Performance;
(6) adopted excellent heat conducting material tin bronze, as heat conducting material and spacer, effective, the life-span is long.
Accompanying drawing explanation
Fig. 1 is the structural representation of objective pole shoe of the present invention;
Fig. 2 is the longitudinal sectional drawing of objective pole shoe of the present invention;
Fig. 3 is the transverse cross-sectional view of objective pole shoe of the present invention;
Fig. 4 is the structural representation of pole shoe in the present invention;
Fig. 5 is the profile of pole shoe in the present invention;
Fig. 6 is the structural representation of pole shoe under the present invention;
Fig. 7 is the profile of pole shoe under the present invention;
Fig. 8 is the structural representation of spacer of the present invention;
Fig. 9 is the longitudinal sectional drawing of spacer of the present invention;
Figure 10 is the transverse cross-sectional view of spacer of the present invention;
In figure:
Pole shoe 3-spacer under the upper pole shoe 2-of 1-
Pole shoe bore under the upper pole shoe bore 5-of 4-boss A 6-
Pole shoe dividing plate under 7-boss B 8-
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
The present invention is a kind of objective pole shoe of transmission electron microscope, as shown in Figure 1, Figure 2, Figure 3 shows, comprises pole shoe 1, lower pole shoe 2 and spacer 3.
As shown in Figure 4, Figure 5, upper pole shoe 1 upper end is cylindrical to upper pole shoe 1, and lower end is turbination, and conical bottom is plane F
1, the cylindrical round thread hole A that is provided with, for being connected with miscellaneous part; Round thread hole A is arranged with two small taper holes outward, and small taper hole is positioned on same diameter, plays mark effect; A lower end, round thread hole is provided with conical socket B, and conical socket B lower end is provided with pole shoe bore 4, and the diameter of upper pole shoe bore 4 is D
1, the part that upper pole shoe bore 4 is connected with conical socket B is provided with chamfering C; The diameter of round thread hole A is greater than conical socket B upper end diameter, and conical socket B lower end diameter is greater than the diameter of pole shoe bore 4.Bottom is plane F
1external profile diameter be the more than three times of diameter of upper pole shoe bore 4.Turbination periphery is also provided with boss A5, for the annular groove A interference fit with spacer 3, and magnitude of interference 0.003-0.005mm, the end face of annular groove A overlaps with the end face of boss A5.
The length of described upper pole shoe bore 4 is greater than or equal to the diameter of pole shoe bore 4.
As shown in Figure 6, Figure 7, lower pole shoe 2 is conical to lower pole shoe 2, and top is plane F
2, top is provided with lower pole shoe bore 6, and the diameter of lower pole shoe bore 6 is D
2, D
2< D
1, lower pole shoe bore 6 lower ends are provided with bellmouth D, and bellmouth D lower end is provided with circular hole E, circular hole E lower end is circular hole F, the diameter of bellmouth D upper surface is identical with the diameter of lower pole shoe bore 6, and the diameter of lower surface is identical with the diameter of circular hole E, and the diameter of circular hole F is greater than the diameter of circular hole E.Lower pole shoe 2 is arranged with boss B7 outside conical bottom, for the annular groove B interference fit with spacer 3, and magnitude of interference 0.003-0.005mm, the end face of annular groove B overlaps with the end face of boss B7.
Described lower pole shoe bore 6 and the length of bellmouth D are greater than or equal to the diameter of lower pole shoe bore 6.
Plane F
1with plane F
2between distance be S, S and D calculate according to electron optics.
Described upper pole shoe 1, lower pole shoe 2 are all selected high-performance soft magnetic materials 1J22.Spacer 3 is selected heat conducting material tin bronze.
During assembling, upper pole shoe 1, lower pole shoe 2 and 3 pairs of spacers are joined, and need to guarantee axiality.
Lower pole shoe bore 6 is different from the aperture of upper pole shoe bore 4, and upper pole shoe bore 4 is large, and lower pole shoe bore 6 is little, to avoid magnetic objective to drain on sample by lower pole shoe bore 6 is excessive, affects the collection of secondary electron.
On the axle of objective pole shoe, field strength distribution is by S, D
2, D
1determine, very little with the shape relation of magnetic circuit.Upper pole shoe 1 lower surface F
1when external profile diameter is excessive, can increase in rain total magnetic flux, obconic cone angle is taken as 60 °-70 ° (semicircle cone angle) left and right, has so not only reduced total magnetic flux but also due in the long-pending progressively increase of conical surface part core section, can avoid occurring saturated.
Pole shoe end face F in objective pole shoe
1, F
2, D
1, D
2be the key of magnetic circuit, through electron optics magnetic circuit, calculate, processing is mainly convenient to coordinate with other parts and is convenient to all the other sizes.
Claims (7)
1. an objective pole shoe for transmission electron microscope, is characterized in that, comprises pole shoe, lower pole shoe and spacer;
Upper pole shoe upper end is cylindrical, and lower end is turbination, and conical bottom is plane F
1, the cylindrical round thread hole A that is provided with, for being connected with miscellaneous part; A lower end, round thread hole is provided with conical socket B, and conical socket B lower end is provided with pole shoe bore, and the diameter of upper pole shoe bore is D
1, the part that upper pole shoe bore is connected with conical socket B is provided with chamfering C; The diameter of round thread hole A is greater than conical socket B upper end diameter, and conical socket B lower end diameter is greater than the diameter of pole shoe bore; Bottom is plane F
1external profile diameter the more than three times of diameter that are upper pole shoe bore; Turbination periphery is also provided with boss A, and for the annular groove A interference fit with spacer, the end face of annular groove A overlaps with the end face of boss A;
The length of described upper pole shoe bore is greater than or equal to the diameter of pole shoe bore;
Lower pole shoe is conical, and top is plane F
2, top is provided with lower pole shoe bore, and the diameter of lower pole shoe bore is D
2, D
2<D
1, lower pole shoe bore lower end is provided with bellmouth D, and bellmouth D lower end is provided with circular hole E, circular hole E lower end is circular hole F, the diameter of bellmouth D upper surface is identical with the diameter of lower pole shoe bore, and the diameter of lower surface is identical with the diameter of circular hole E, and the diameter of circular hole F is greater than the diameter of circular hole E; Lower pole shoe is arranged with boss B outside conical bottom, and for the annular groove B interference fit with spacer, the end face of annular groove B overlaps with the end face of boss B;
Described lower pole shoe bore and the length of bellmouth D are greater than or equal to the diameter of lower pole shoe bore;
Plane F
1with plane F
2between distance be S, S calculates according to electron optics;
Spacer is cylindrical shape, upper and lower side is respectively equipped with annular groove A and annular groove B, and for pole shoe in interference fit and lower pole shoe, inside is also provided with lower pole shoe dividing plate, lower pole shoe dividing plate is positioned at the periphery of lower pole shoe taper, and the spacer excircle of lower pole shoe dividing plate upper end is provided with through hole G; The spacer excircle of lower pole shoe dividing plate lower end is provided with two symmetrical through hole H, for objective pole shoe is installed.
2. the objective pole shoe of a kind of transmission electron microscope according to claim 1, is characterized in that, described round thread hole A is arranged with two small taper holes outward, and small taper hole is positioned on same diameter, plays mark effect.
3. the objective pole shoe of a kind of transmission electron microscope according to claim 1, is characterized in that, described boss A and the annular groove A interference fit in spacer, magnitude of interference 0.003-0.005mm.
4. the objective pole shoe of a kind of transmission electron microscope according to claim 1, is characterized in that, described boss B and the annular groove B interference fit in spacer, magnitude of interference 0.003-0.005mm.
5. the objective pole shoe of a kind of transmission electron microscope according to claim 1, is characterized in that, the quantity of described through hole G is according to the annex quantity decision on object lens, and annex enters spacer by through hole.
6. the objective pole shoe of a kind of transmission electron microscope according to claim 1, is characterized in that, described upper pole shoe, lower pole shoe are all selected high-performance soft magnetic materials 1J22.
7. the objective pole shoe of a kind of transmission electron microscope according to claim 1, is characterized in that, described spacer is selected heat conducting material tin bronze.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110349944.6A CN102376515B (en) | 2011-11-08 | 2011-11-08 | Objective pole shoe of transmission electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110349944.6A CN102376515B (en) | 2011-11-08 | 2011-11-08 | Objective pole shoe of transmission electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102376515A CN102376515A (en) | 2012-03-14 |
| CN102376515B true CN102376515B (en) | 2014-02-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110349944.6A Active CN102376515B (en) | 2011-11-08 | 2011-11-08 | Objective pole shoe of transmission electron microscope |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360469A (en) * | 2014-09-29 | 2015-02-18 | 沈阳安创信息科技有限公司 | Special USB (universal serial bus) electron microscope for identifying two-dimensional codes |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102169790A (en) * | 2011-03-29 | 2011-08-31 | 北京航空航天大学 | First collecting mirror of electron microscope |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231654A (en) * | 1976-09-17 | 1977-03-10 | Jeol Ltd | Object lens for electron microscope |
| JPH0654646B2 (en) * | 1988-02-19 | 1994-07-20 | 日本電子株式会社 | Objective lens in transmission electron microscope |
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2011
- 2011-11-08 CN CN201110349944.6A patent/CN102376515B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102169790A (en) * | 2011-03-29 | 2011-08-31 | 北京航空航天大学 | First collecting mirror of electron microscope |
Non-Patent Citations (2)
| Title |
|---|
| JP平1-211841A 1989.08.25 |
| JP特开昭52-31654A 1977.03.10 |
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Effective date of registration: 20210304 Address after: 215200 No. 666 Hu Xin Road, Wujiang economic and Technological Development Zone, Suzhou, Jiangsu Patentee after: Suzhou Bozhong Instrument Technology Co., Ltd Address before: 100191 No. 37, Haidian District, Beijing, Xueyuan Road Patentee before: BEIHANG University |
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