CN206907735U - A kind of charged particle justifies magnetic lenses - Google Patents
A kind of charged particle justifies magnetic lenses Download PDFInfo
- Publication number
- CN206907735U CN206907735U CN201720668890.2U CN201720668890U CN206907735U CN 206907735 U CN206907735 U CN 206907735U CN 201720668890 U CN201720668890 U CN 201720668890U CN 206907735 U CN206907735 U CN 206907735U
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- magnetic
- clad
- annular
- charged particle
- magnetic lenses
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Abstract
The utility model belongs to charged particle opticses technical field of imaging, more particularly to a kind of circle magnetic lenses of charged particle.Including hot-wire coil and annular iron-clad, hot-wire coil is located in annular iron-clad, has at least one annular gap on annular iron-clad, and annular gap is located at the end face of annular iron-clad.By introducing annular gap in end face magnetic circuit, the technical problems such as the focal imaging of electromagnetic radiation electronics can not be completed due to that can not be placed in inside magnetic lenses by solving some laboratory samples, breach existing round magnetism lens technique bottleneck, the technique effect for making lens field regions be located at outside lens enclosed space is realized, thus possesses wider array of application field.
Description
Technical field
The utility model belongs to charged particle opticses technical field of imaging, more particularly to a kind of circle magnetic lenses of charged particle.
Background technology
Circle magnetic lenses is the important member of the charged particle opticses technical field of imaging such as electron microscope, electron beam lithography system
Part.In transmission electron microscope, to form the point focusing charge pattern of high power；In some other situation, such as electron beam lithography
System, to focus on to form low power charge pattern to the X-section of electron source, to obtain microbeam spot electron probe.It is excitatory to reduce
Electric current number of ampere turns (or permanent-magnet material volume), and lens magnetic field is spatially more concentrated to form the magnetic field of higher intensity, one
As lens is carried iron-clad and magnetic pole piece.Annular gap is provided with the inside of iron-clad, iron-clad together constitutes magnetic circuit, magnetic with pole shoe
Gap location in road is main lens field regions, as shown in Figure 1 a, 1 b.
Currently used round magnetic lenses, its magnetic circuit gap are frequently located in the inside of iron-clad enclosed space so that peak magnetic field institute
Lens field regions also be located at justifying the inside of magnetic lenses enclosed space.Such round magnetic lenses structure and Field distribution characteristic so that
It faces intrinsic bottleneck problem in some application environments, such as in the case that laboratory sample can not be placed in magnetic lenses inside.Cause
This, seeks new magnetic lenses design, lens field regions is located at the outside of lens enclosed space, it has also become the art
Research and development focus.
Utility model content
In order to solve some laboratory samples the poly- of electromagnetic radiation electronics can not be completed due to that can not be placed in inside magnetic lenses
The technical problems such as Jiao's imaging, the utility model provides a kind of charged particle circle magnetic lenses, by being introduced in end face magnetic circuit between annular
Gap, the technique effect for making lens field regions be located at outside lens enclosed space can be achieved so that laboratory sample is easy to be placed
The focal imaging of electromagnetic radiation electronics is realized in lens field regions.
Technical solution of the present utility model is to provide a kind of charged particle circle magnetic lenses, including hot-wire coil and annular
Iron-clad, above-mentioned hot-wire coil are located in annular iron-clad, and it is characterized in that：There is at least one annular on above-mentioned annular iron-clad
Gap, above-mentioned annular gap are located at the end face of annular iron-clad.
Preferably, in order that lens magnetic field is spatially more concentrated to form the magnetic field of higher intensity, above-mentioned annular iron-clad
End face can also set 2n magnetic pole piece, the radius size in the tapering of each magnetic pole piece is different, the tapering of two neighboring magnetic pole piece
Annular gap is formed, wherein n is positive integer.
Preferably, annular gap can be that any angle is set with circle magnetic lenses symmetry axis.
Preferably, annular gap is parallel with circle magnetic lenses symmetry axis.
Preferably, above-mentioned annular gap is one.
Wherein hot-wire coil provides magnetic field for circle magnetic lenses, and annular iron-clad, annular iron-clad and magnetic pole piece form high magnetic permeability
Magnetic circuit, constrain and guide distribution of the magnetic field in space, the annular gap that annular iron-clad end face is set, make magnetic field part side leakage, from
And form peak field in the outside of lens enclosed space, that is, it is externally formed with lens field regions.
Magnetic pole piece is the conical ring of magnetic material, and the position of lens field regions and magnetic therein can be controlled by magnetic pole piece
Field distribution characteristic.
The beneficial effects of the utility model are：
1st, the utility model proposes charged particle justify magnetic lenses, by end face magnetic circuit introduce annular gap, breach
Existing round magnetism lens technique bottleneck, the technique effect for making lens field regions be located at outside lens enclosed space is realized, thus had
Standby wider array of application field；
2nd, the position of lens field regions and Distribution Characteristic of Magnetic Field are together decided on by hot-wire coil and magnetic pole piece so that it is focused on
The design of characteristic has more flexibility and tuning performance；
3rd, the utility model proposes end face magnetic circuit introduce annular gap circle magnetic lenses design method, it can be used as
The basis of his more complicated magnetic lenses design and reference, such as introduce more annular gaps or the gap of other shapes, thus possess
Universality and representativeness.
Brief description of the drawings
Fig. 1 a are round magnetic lenses structural representation in the prior art；
Fig. 1 b are circle magnetic lenses axle Distribution of Magnetic Field figure corresponding to Fig. 1 a；
Fig. 2 is that the utility model one of which justifies magnetic lenses diagrammatic cross-section；
Fig. 3 is another circle magnetic lenses diagrammatic cross-section of the utility model；
Fig. 4 is circle magnetic lenses diagrammatic cross-section in embodiment；
Fig. 5 is the circle magnetic lenses end face side view that the utility model has an annular gap；
Fig. 6 is Distribution of Magnetic Field and parameter r on magnetic lenses axlebDependence；
Fig. 7 is Distribution of Magnetic Field and parameter r on magnetic lenses axlecDependence；
Fig. 8 is Distribution of Magnetic Field and parameter r on magnetic lenses axleaDependence；
Fig. 9 is Crossed Circle gap magnetic lenses diagrammatic cross-section.
Reference is：1- magnetic pole pieces, 2- hot-wire coils, 3- magnetic circuits, 4- circle magnetic lenses symmetry axis, 5- magnetic circuits gap.
Embodiment
The utility model is further described below in conjunction with drawings and the specific embodiments.
By taking single annular gap as an example, from fig. 4, it can be seen that the internal diameter of the annular gap is ra, external diameter is rb.Magnetic lenses
The internal diameter of system is rc, exciting curent number of ampere turns is NI.Because the focus characteristics of magnetic lenses and Distribution of Magnetic Field on its axle are closely related,
Thus consider from qualitative angle, analyze the dependence of Distribution of Magnetic Field on axle to pole shoe parameter here, as shown in figs 6-8.Its
The middle position correspondence of abscissa 0 represents the outside of lens space in the outer face of pole shoe, abscissa negative sense.As seen from the figure, such circle
The peak region in magnetic field on magnetic lenses axle, namely lens focus area, it is always positioned at the outside of lens enclosed space；And peak magnetic field point
Distance apart from lensed endface is by parameter ra、rbAnd rcTogether decide on, thus possess good tuning performance and engineering flexibility.Can
With, it is envisioned that being designed for other kinds of magnetic pole piece shape, such as the Crossed Circle gap magnetic lenses that Fig. 9 is provided, this qualitative results
Still set up.
Claims (5)
1. a kind of charged particle justifies magnetic lenses, including hot-wire coil and annular iron-clad, the hot-wire coil are located in annular iron-clad,
It is characterized in that：There is at least one annular gap, the annular gap is located at the end face of annular iron-clad on the annular iron-clad.
2. charged particle according to claim 1 justifies magnetic lenses, it is characterised in that：The end face of the annular iron-clad sets 2n
Magnetic pole piece, the radius size in the tapering of each magnetic pole piece is different, and the tapering of two neighboring magnetic pole piece forms annular gap, wherein n
For positive integer.
3. charged particle according to claim 2 justifies magnetic lenses, it is characterised in that：The annular gap and circle magnetic lenses pair
Axle is claimed to be set with any angle.
4. charged particle according to claim 3 justifies magnetic lenses, it is characterised in that：The annular gap and circle magnetic lenses pair
Claim axle parallel.
5. charged particle according to claim 4 justifies magnetic lenses, it is characterised in that：The annular gap is one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720668890.2U CN206907735U (en) | 2017-06-09 | 2017-06-09 | A kind of charged particle justifies magnetic lenses |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720668890.2U CN206907735U (en) | 2017-06-09 | 2017-06-09 | A kind of charged particle justifies magnetic lenses |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206907735U true CN206907735U (en) | 2018-01-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201720668890.2U Expired - Fee Related CN206907735U (en) | 2017-06-09 | 2017-06-09 | A kind of charged particle justifies magnetic lenses |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107204267A (en) * | 2017-06-09 | 2017-09-26 | 中国科学院西安光学精密机械研究所 | A kind of charged particle justifies magnetic lenses |
-
2017
- 2017-06-09 CN CN201720668890.2U patent/CN206907735U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107204267A (en) * | 2017-06-09 | 2017-09-26 | 中国科学院西安光学精密机械研究所 | A kind of charged particle justifies magnetic lenses |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180119 |
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| CF01 | Termination of patent right due to non-payment of annual fee |