CN107204267A - A kind of charged particle justifies magnetic lenses - Google Patents
A kind of charged particle justifies magnetic lenses Download PDFInfo
- Publication number
- CN107204267A CN107204267A CN201710433947.5A CN201710433947A CN107204267A CN 107204267 A CN107204267 A CN 107204267A CN 201710433947 A CN201710433947 A CN 201710433947A CN 107204267 A CN107204267 A CN 107204267A
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- China
- Prior art keywords
- magnetic
- clad
- annular
- charged particle
- magnetic lenses
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- 239000002245 particle Substances 0.000 title claims abstract description 15
- 238000003384 imaging method Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 239000006101 laboratory sample Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 230000005670 electromagnetic radiation Effects 0.000 abstract description 3
- 230000005389 magnetism Effects 0.000 abstract description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000002964 excitative effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
The invention belongs to charged particle opticses technical field of imaging, more particularly to a kind of circle magnetic lenses of charged particle.Including hot-wire coil and annular iron-clad, hot-wire coil is located in annular iron-clad, has at least one annular gap on annular iron-clad, and annular gap is located at the end face of annular iron-clad.By introducing annular gap in end face magnetic circuit, the technical problems such as the focal imaging of electromagnetic radiation electronics can not be completed due to that can not be placed in inside magnetic lenses by solving some laboratory samples, breach existing round magnetism lens technique bottleneck, the technique effect for making lens field regions be located at outside lens enclosed space is realized, thus possesses wider array of application field.
Description
Technical field
The invention belongs to charged particle opticses technical field of imaging, more particularly to a kind of circle magnetic lenses of charged particle.
Background technology
Circle magnetic lenses is the important member of the charged particle opticses technical field of imaging such as electron microscope, electron beam lithography system
Part.In transmission electron microscope, the point focusing charge pattern to form high power；In some other situation, such as electron beam lithography
System, focuses on to form low power charge pattern to the X-section to electron source, to obtain microbeam spot electron probe.It is excitatory to reduce
Electric current number of ampere turns (or permanent-magnet material volume), and make lens magnetic field spatially more concentrate to form the magnetic field of higher intensity, one
As all make lens carry iron-clad and magnetic pole piece.Annular gap is provided with the inside of iron-clad, iron-clad together constitutes magnetic circuit, magnetic with pole shoe
Gap location in road is main lens field regions, as shown in Figure 1 a, 1 b.
Conventional circle magnetic lenses at present, its magnetic circuit gap is frequently located in the inside of iron-clad enclosed space so that peak magnetic field institute
Lens field regions also be located at justifying the inside of magnetic lenses enclosed space.Such round magnetic lenses structure and Field distribution characteristic so that
It is in some application environments, such as in the case that laboratory sample can not be placed in magnetic lenses inside, faces intrinsic bottleneck problem.Cause
This, seeks new magnetic lenses design, lens field regions is located at the outside of lens enclosed space, it has also become the art
Research and development focus.
The content of the invention
In order to solve some laboratory samples the poly- of electromagnetic radiation electronics can not be completed due to that can not be placed in inside magnetic lenses
The technical problems such as Jiao's imaging, the present invention provides a kind of charged particle circle magnetic lenses, can by introducing annular gap in end face magnetic circuit
Realize the technique effect for making lens field regions be located at outside lens enclosed space so that laboratory sample is easy to be placed on lens
Field regions and the focal imaging for realizing electromagnetic radiation electronics.
The technical solution of the present invention is to provide a kind of charged particle circle magnetic lenses, including hot-wire coil and annular iron
Shell, above-mentioned hot-wire coil is located in annular iron-clad, and it is characterized in that：With between at least one annular on above-mentioned annular iron-clad
Gap, above-mentioned annular gap is located at the end face of annular iron-clad.
Preferably, in order that lens magnetic field spatially more concentrates to form the magnetic field of higher intensity, above-mentioned annular iron-clad
End face can also set 2n magnetic pole piece, the radius size in the tapering of each magnetic pole piece is different, the tapering of two neighboring magnetic pole piece
Annular gap is formed, wherein n is positive integer.
Preferably, annular gap can be that any angle is set with circle magnetic lenses symmetry axis.
Preferably, annular gap is parallel with circle magnetic lenses symmetry axis.
Preferably, above-mentioned annular gap is one.
Wherein hot-wire coil provides magnetic field for circle magnetic lenses, and annular iron-clad, annular iron-clad and magnetic pole piece constitute high magnetic permeability
Magnetic circuit, the annular gap for constraining and guiding magnetic field to be set in the distribution in space, annular iron-clad end face makes the local side leakage in magnetic field, from
And form peak field in the outside of lens enclosed space, that is, it is externally formed with lens field regions.
Magnetic pole piece is the conical ring of magnetic material, and the position of lens field regions and magnetic therein can be controlled by magnetic pole piece
Field distribution characteristic.
The beneficial effects of the invention are as follows：
1st, charged particle circle magnetic lenses proposed by the present invention, by introducing annular gap in end face magnetic circuit, is breached existing
Circle magnetism lens technique bottleneck, realizes the technique effect for making lens field regions be located at outside lens enclosed space, thus possesses more
Wide application field；
2nd, the position of lens field regions and Distribution Characteristic of Magnetic Field are together decided on by hot-wire coil and magnetic pole piece so that it is focused on
The design of characteristic has more flexibility and tuning performance；
3rd, the circle magnetic lenses design method proposed by the present invention that annular gap is introduced in end face magnetic circuit, can be as other more
The basis of complicated magnetic lenses design and reference, such as introduce more annular gaps or the gap of other shapes, thus possess pervasive
Property and representativeness.
Brief description of the drawings
Fig. 1 a are round magnetic lenses structural representation in the prior art；
Fig. 1 b are the corresponding round magnetic lenses axle Distribution of Magnetic Field figures of Fig. 1 a；
Fig. 2 is that one of which of the present invention justifies magnetic lenses diagrammatic cross-section；
Fig. 3 is another circle magnetic lenses diagrammatic cross-section of the present invention；
Fig. 4 is circle magnetic lenses diagrammatic cross-section in embodiment；
Fig. 5 has the circle magnetic lenses end face side view of an annular gap for the present invention；
Fig. 6 is Distribution of Magnetic Field and parameter r on magnetic lenses axlebDependence；
Fig. 7 is Distribution of Magnetic Field and parameter r on magnetic lenses axlecDependence；
Fig. 8 is Distribution of Magnetic Field and parameter r on magnetic lenses axleaDependence；
Fig. 9 is Crossed Circle gap magnetic lenses diagrammatic cross-section.
Reference is：1- magnetic pole pieces, 2- hot-wire coils, 3- magnetic circuits, 4- circle magnetic lenses symmetry axis, 5- magnetic circuits gap.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
By taking single annular gap as an example, from fig. 4, it can be seen that the internal diameter of the annular gap is ra, external diameter is rb.Magnetic lenses
The internal diameter of system is rc, exciting curent number of ampere turns is NI.Because the focus characteristics and Distribution of Magnetic Field on its axle of magnetic lenses are closely related,
Thus consider from qualitative angle, the dependence of Distribution of Magnetic Field on axle to pole shoe parameter is analyzed here, as shown in figs 6-8.Its
The middle position of abscissa 0 corresponds to the outer face of pole shoe, and abscissa negative sense represents the outside of lens space.As seen from the figure, such circle
The peak region in magnetic field on magnetic lenses axle, namely lens focus area, are always positioned at the outside of lens enclosed space；And peak magnetic field point
Distance apart from lensed endface is by parameter ra、rbAnd rcTogether decide on, thus possess good tuning performance and engineering flexibility.Can
With, it is envisioned that being designed for other kinds of magnetic pole piece shape, the Crossed Circle gap magnetic lenses that such as Fig. 9 is provided, this qualitative results
Still set up.
Claims (5)
1. a kind of charged particle justifies magnetic lenses, including hot-wire coil and annular iron-clad, the hot-wire coil is located in annular iron-clad,
It is characterized in that：There is at least one annular gap, the annular gap is located at the end face of annular iron-clad on the annular iron-clad.
2. charged particle according to claim 1 justifies magnetic lenses, it is characterised in that：The end face of the annular iron-clad sets 2n
Magnetic pole piece, the radius size in the tapering of each magnetic pole piece is different, and the tapering of two neighboring magnetic pole piece forms annular gap, wherein n
For positive integer.
3. charged particle according to claim 2 justifies magnetic lenses, it is characterised in that：The annular gap and circle magnetic lenses pair
Axle is claimed to be set with any angle.
4. charged particle according to claim 3 justifies magnetic lenses, it is characterised in that：The annular gap and circle magnetic lenses pair
Claim axle parallel.
5. charged particle according to claim 4 justifies magnetic lenses, it is characterised in that：The annular gap is one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710433947.5A CN107204267A (en) | 2017-06-09 | 2017-06-09 | A kind of charged particle justifies magnetic lenses |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710433947.5A CN107204267A (en) | 2017-06-09 | 2017-06-09 | A kind of charged particle justifies magnetic lenses |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107204267A true CN107204267A (en) | 2017-09-26 |
Family
ID=59907376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710433947.5A Pending CN107204267A (en) | 2017-06-09 | 2017-06-09 | A kind of charged particle justifies magnetic lenses |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107204267A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2067348A (en) * | 1980-01-11 | 1981-07-22 | Zeiss Jena Veb Carl | A deflecting objective for corpuscular radiation apparatus |
| CN1404617A (en) * | 2000-01-27 | 2003-03-19 | Ict半导体集成电路测试有限公司 | Objective lens for a charged particle beam device |
| CN1630926A (en) * | 2000-02-25 | 2005-06-22 | 汉民微测科技股份有限公司 | Swinging retarding immersion type lens electron optics focusing, deflection and signal collection system and method |
| JP2007311117A (en) * | 2006-05-17 | 2007-11-29 | Hitachi High-Technologies Corp | Electron lens and charged particle beam device using it |
| CN101388317A (en) * | 2008-03-21 | 2009-03-18 | 北京威孚物理科技有限公司 | Scanning electronic microscope |
| TW201209877A (en) * | 2010-08-24 | 2012-03-01 | Hermes Microvision Inc | Charged particle apparatus |
| WO2013161684A1 (en) * | 2012-04-24 | 2013-10-31 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
| TWI502616B (en) * | 2014-08-08 | 2015-10-01 | Nat Univ Tsing Hua | Desktop electron microscope and wide range tunable magnetic lens thereof |
| CN206907735U (en) * | 2017-06-09 | 2018-01-19 | 中国科学院西安光学精密机械研究所 | A kind of charged particle justifies magnetic lenses |
-
2017
- 2017-06-09 CN CN201710433947.5A patent/CN107204267A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2067348A (en) * | 1980-01-11 | 1981-07-22 | Zeiss Jena Veb Carl | A deflecting objective for corpuscular radiation apparatus |
| CN1404617A (en) * | 2000-01-27 | 2003-03-19 | Ict半导体集成电路测试有限公司 | Objective lens for a charged particle beam device |
| CN1630926A (en) * | 2000-02-25 | 2005-06-22 | 汉民微测科技股份有限公司 | Swinging retarding immersion type lens electron optics focusing, deflection and signal collection system and method |
| JP2007311117A (en) * | 2006-05-17 | 2007-11-29 | Hitachi High-Technologies Corp | Electron lens and charged particle beam device using it |
| CN101388317A (en) * | 2008-03-21 | 2009-03-18 | 北京威孚物理科技有限公司 | Scanning electronic microscope |
| TW201209877A (en) * | 2010-08-24 | 2012-03-01 | Hermes Microvision Inc | Charged particle apparatus |
| WO2013161684A1 (en) * | 2012-04-24 | 2013-10-31 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
| TWI502616B (en) * | 2014-08-08 | 2015-10-01 | Nat Univ Tsing Hua | Desktop electron microscope and wide range tunable magnetic lens thereof |
| CN206907735U (en) * | 2017-06-09 | 2018-01-19 | 中国科学院西安光学精密机械研究所 | A kind of charged particle justifies magnetic lenses |
Non-Patent Citations (1)
| Title |
|---|
| 刘祖平，冯光耀: "《束流光学》", vol. 2, 中国科学技术大学出版社, pages: 86 * |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20170926 |