CN103406657A - Electromagnetic deflection scanning coil for machining electron beam - Google Patents
Electromagnetic deflection scanning coil for machining electron beam Download PDFInfo
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- CN103406657A CN103406657A CN2013103465063A CN201310346506A CN103406657A CN 103406657 A CN103406657 A CN 103406657A CN 2013103465063 A CN2013103465063 A CN 2013103465063A CN 201310346506 A CN201310346506 A CN 201310346506A CN 103406657 A CN103406657 A CN 103406657A
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Abstract
The invention discloses an electromagnetic deflection scanning coil for machining an electron beam. The electromagnetic deflection scanning coil comprises a magnetic core framework and coil windings (9). The magnetic core framework comprises a magnetic ring (7) and magnetic poles (8) which are formed integrally. The coil windings (9) are wound on all the magnetic poles (8) of the magnetic core framework, the number of the magnetic poles (8) is 4N, N is the integer larger than or equal to 3, and the magnetic poles (8) of the magnetic core framework are made of a soft magnetic material. By means of the electromagnetic deflection scanning coil of the structure, the evenness of an electron beam deflection scanning magnetic field is improved, the size and the weight of coils are reduced, and manufacture cost is saved. In addition, by means of the soft magnetic material, deflection scanning frequency of the electron beam is improved, and eddy-current loss is reduced.
Description
Technical field
The invention belongs to the electronic beam current processing technique field, particularly a kind of scanning coil of electromagnetic deflection for electron beam process.
Background technology
To an electron beam process equipment, for the Theoretical Design of research electron gun and actual difference, the impact of the factors such as the stability of electron gun electric power system and vacuum variation on the electron beam line, need to accurately study the characteristic of line, the distribution of Measurement of Electron Beam beam power density, but because the sub-beam power of used for welding is large, the power density of focus is high, can melt any refractory material, this just brings difficulty to measurement.
The high speed deflection scanning of electron beam can be distributed to energy whole scanning area, avoids line to concentrate heating sensor.The realization key of the high speed deflection scanning of electron beam is the high-velocity scanning control system, and wherein deflection coil is the final load that control signal drives, and is also the key factor that directly affects scanning result, and the distribution of its electromagnetic field is very large to the deflection influential effect of line.The core structure of electromagnetic deflection scanning coil can directly affect the uniformity of magnetic deflection field.In the structural design of deflection coil, traditional structural design is fairly simple, the bipolar boots structure and the loop configuration that have or not magnet ring: bipolar boots structure wherein, perpendicularity to 2 directions is had relatively high expectations, and the precision of the precision of machining, the location of pole shoe and coiling all can directly affect the uniformity in magnetic field; And in order to obtain the magnetic field of larger width, the appearance and size of coil need to design very greatly, not only heaviness but also increase manufacturing cost; In loop configuration, because the outside in coil windings is just in time opposite with the magnetic direction of hub of a spool, have the part magnetic field intensity and cancel out each other, having limited the magnetic field size produced just has larger restriction.
Summary of the invention
The object of the present invention is to provide the scanning coil of the electromagnetic deflection for electron beam process that a kind of Distribution of Magnetic Field is even, eddy-current loss is low, reduced size and the weight of coil, saved manufacturing cost.
The technical solution that realizes the object of the invention is: a kind of scanning coil of electromagnetic deflection for electron beam process, comprise magnetic core framework and coil windings, wherein magnetic core framework comprises integrated magnet ring and magnetic pole, coil windings is wound in respectively each magnetic pole of magnetic core framework, and the quantity of magnetic pole is that 4N and N are more than or equal to 3 integer.
The magnetic pole of described magnetic core framework is soft magnetic materials; Each magnetic pole of magnetic core framework is uniformly distributed along the magnet ring internal diameter of magnetic core framework; Coil windings equal turn numbers on each magnetic pole of magnetic core framework.
Compared with prior art, remarkable advantage of the present invention is: (1) adopts 4N(N >=3, and N is integer) the magnetic core framework structure of individual magnetic pole improved the uniformity of deflection of a beam of electrons scanning magnetic field; (2) magnetic core framework of deflection scanning coil adopts soft magnetic materials to improve the deflection scanning frequency of electron beam, has reduced eddy-current loss; (3) magnetic core framework of deflection scanning coil adopts many field structures that whole magnetic field is compressed in limited space, has reduced size and the weight of coil, saves manufacturing cost.
The accompanying drawing explanation
Fig. 1 is electronic beam current deflection scanning schematic diagram of the present invention.
Fig. 2 is the three-dimensional structure diagram of electromagnetic deflection scanning coil of the present invention.
Fig. 3 is the top view of electromagnetic deflection scanning coil magnetic core framework structure of the present invention.
Fig. 4 is that the B-B of electromagnetic deflection scanning coil magnetic core framework structure in Fig. 3 is to cutaway view.
Fig. 5 is the three-dimensional structure diagram of electromagnetic deflection scanning coil magnetic core framework of the present invention.
In figure: 1-electron beam emitting cathode, 2-electronic beam current, 3-focus coil, 4-electromagnetic deflection scanning coil, 5-vacuum chamber, 6-sensor, 7-magnet ring, 8-magnetic pole, 9-coil windings.
The specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is made to further description.
For the solenoid of electron beam high speed deflection scanning, be specially adapted to electron beam line power density distribution and measure.A kind of electromagnetic deflection scanning coil for the test of electron beam process beam power Density Distribution of the present invention is that the magnetic field that produces alternation makes electron beam at sensor upper surface deflection scanning, is arranged in electron beam process equipment.Fig. 1 is electronic beam current deflection scanning schematic diagram, and electron beam process equipment comprises electron beam emitting cathode 1, focus coil 3, electromagnetic deflection scanning coil 4, vacuum chamber 5, when test, and the interior placement sensor 6 of vacuum chamber 5.Focus coil 3, electromagnetic deflection scanning coil 4 are coaxial, and focus coil 3 is on electromagnetic deflection scanning coil 4, and the upper surface of electromagnetic deflection scanning coil 4 is close to the top of vacuum chamber 5, and sensor 6 is arranged under electromagnetic deflection scanning coil 4.
While due to electron beam line power density distribution, testing, the deflection scanning frequency is very high, and the magnetic core framework of electromagnetic deflection scanning coil 4 should adopt soft magnetic materials, to reduce eddy current and magnetic hystersis loss.The magnetic core framework material should meet following selection principle: (1) magnetic conductivity μ wants high; (2) have less coercivity H and narrow hysteresis curve; (3) electricalresistivityρ wants high; (4) has higher saturation induction density Bs.Adopt the uniformity that produces magnetic field under the methods analyst multiple line coil structures of numerical analysis, designed a kind of 4N(N of having >=3, N is integer) magnetic core framework of individual magnetic pole, specific as follows:
In conjunction with Fig. 2, the present invention is for the electromagnetic deflection scanning coil 4 of electron beam process, comprise magnetic core framework and coil windings 9, wherein magnetic core framework comprises integrated magnet ring 7 and magnetic pole 8, coil windings 9 is wound in respectively each magnetic pole 8 of magnetic core framework, and the quantity of magnetic pole 8 is that 4N and N are more than or equal to 3 integer.The magnetic pole 8 of described magnetic core framework is soft magnetic materials; Each magnetic pole 8 of magnetic core framework is uniformly distributed along magnet ring 7 internal diameters of magnetic core framework; Coil windings 9 equal turn numbers on each magnetic pole 8 of magnetic core framework.
According to the maximum beam deflection angle of beam power density distribution tests, determine required maximum magnetic induction, and then the coil windings number of ampere turns on each magnetic pole of definite magnetic core framework.After the number of ampere turns of coil windings has been determined, can determine the number of turn and the rated current of coil windings.In order to improve the frequency characteristic of deflection coil, the driving power voltage of requirement deflection of a beam of electrons scanning control system is greater than the self induction electromotive force of deflection scanning coil, and the self induction electromotive force of deflection scanning coil is directly proportional to current changing rate, be directly proportional to the number of turn square of coil windings.For reducing the self induction electromotive force of deflection scanning coil, should adopt as far as possible large current strength, reduce the number of turn of coil windings.
In conjunction with Fig. 3 ~ 5, designed a scanning coil of the electromagnetic deflection for electron beam process, the concrete structure parameter is: referring to Fig. 3, the quantity of magnetic pole 8 is 4N=24(N=6) individual, the magnet ring 7 external diameter R of magnetic core framework are 110mm, magnet ring 7 internal diameter r are 90mm, each magnetic pole end face is 35mm to the magnet ring 7 cylindrical centers of circle apart from d, in conjunction with Fig. 4, the height h of magnetic core framework is 30mm, and whole magnetic core framework adopts Fe-based amorphous material compressing.
Electron beam process equipment is selected the electron-beam welder of model ZD150-15A, and research institute provides by the Beijing Aviation manufacturing engineering, and the maximum accelerating potential of welding machine is 150kV, and maximum beam intensity is 100mA.For ZD150-15A type electron-beam welder workpiece welding job distance commonly used, during the test of electronic beam current power density, electromagnetic deflection scanning coil 4 is 200mm ~ 400mm with the distance H (test height) of sensor 6 upper surfaces, the maximum deflection scanning distance D of electron beam on sensor 6 is 20mm in whole test height scope, determines the maximum deflection scanning angle
a max=arctan (D/H)=arctan (20/200)=5.7 °, consider electromagnetic deflection scanning coil design margin, gets 6 ° of maximum deflection scanning angles, the maximum magnetic induction of corresponding electromagnetic deflection scanning coil
B X For 45Gs.In conjunction with Fig. 5, because coil windings 9 numbers of ampere turns on each magnetic pole 8 are equal, synthesize by magnetic vector
B X =2 (
B n Cos7.5 °+
B n Cos22.5 °+
B n Cos37.5 °), draw the maximum magnetic induction that every pair of magnetic pole 8 produces
B n For 7.8Gs.For two utmost point electromagnet, the number of ampere turns of coil windings 9
NI=0.8
fgB n , wherein
f=1.1,
gFor magnetic pole 8 spacing 7cm,
B n Maximum magnetic induction for every pair of magnetic pole 8 produces, obtain the number of ampere turns on every pair of magnetic pole
NI=48, coil windings 9 numbers of ampere turns on each magnetic pole 8 are 24.After the number of ampere turns of electromagnetic deflection scanning coil has been determined, can determine the number of turn and the rated current of coil windings 9.In order to reduce the self induction electromotive force of electromagnetic deflection scanning coil, should adopt as far as possible large rated current intensity, reduce the number of turn of coil windings 9.So obtaining current intensity 2A, on each magnetic pole 8, coil windings 9 numbers of turn are 12 circles, the electromagnetic deflection scanning coil that coiling completes is as shown in Figure 2.
In sum, the present invention, for the electromagnetic deflection scanning coil of electron beam process, adopts 4N(N >=3, and N is integer) the magnetic core framework structure of individual magnetic pole improved the uniformity of deflection of a beam of electrons scanning magnetic field; The magnetic core framework of deflection scanning coil adopts soft magnetic materials to improve the deflection scanning frequency of electron beam, has reduced eddy-current loss; The magnetic core framework of deflection scanning coil adopts many field structures that whole magnetic field is compressed in limited space, has reduced size and the weight of coil, has saved manufacturing cost.
Claims (4)
1. scanning coil of the electromagnetic deflection for electron beam process, it is characterized in that, comprise magnetic core framework and coil windings (9), wherein magnetic core framework comprises integrated magnet ring (7) and magnetic pole (8), coil windings (9) is wound in respectively each magnetic pole (8) of magnetic core framework, and the quantity of magnetic pole (8) is that 4N and N are more than or equal to 3 integer.
2. the scanning coil of the electromagnetic deflection for electron beam process according to claim 1, is characterized in that, the magnetic pole of described magnetic core framework (8) is soft magnetic materials.
3. the scanning coil of the electromagnetic deflection for electron beam process according to claim 1, is characterized in that, each magnetic pole (8) of described magnetic core framework is uniformly distributed along magnet ring (7) internal diameter of magnetic core framework.
4. the scanning coil of the electromagnetic deflection for electron beam process according to claim 1, is characterized in that, coil windings (9) equal turn numbers on each magnetic pole (8) of described magnetic core framework.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013103465063A CN103406657A (en) | 2013-08-09 | 2013-08-09 | Electromagnetic deflection scanning coil for machining electron beam |
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| CN2013103465063A CN103406657A (en) | 2013-08-09 | 2013-08-09 | Electromagnetic deflection scanning coil for machining electron beam |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106170172A (en) * | 2016-08-30 | 2016-11-30 | 中广核达胜加速器技术有限公司 | A kind of two-way broad width scanning device for low-energy electronic accelerator |
| CN106981410A (en) * | 2017-05-03 | 2017-07-25 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
| CN107768220A (en) * | 2017-09-21 | 2018-03-06 | 北京中科科仪股份有限公司 | A kind of encapsulating device of scanning coil, ESEM and scanning coil |
| CN108305701A (en) * | 2018-01-10 | 2018-07-20 | 桂林狮达机电技术工程有限公司 | A kind of the deflection scanning device and deflection and scanning system of polyphase windings |
| WO2019137183A1 (en) * | 2018-01-10 | 2019-07-18 | 桂林狮达技术股份有限公司 | Deflection scanning device for multi-phase winding and deflection scanning system |
| CN114864128A (en) * | 2022-04-28 | 2022-08-05 | 苏州博众仪器科技有限公司 | Electron beam electromagnetic deflection device and deflector |
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| JPS6433834A (en) * | 1987-07-28 | 1989-02-03 | Mitsubishi Electric Corp | Electron beam device |
| CN2077591U (en) * | 1990-10-31 | 1991-05-22 | 东南大学 | Multi-pole magnetic deflection coil in kinescope |
| JP2007232609A (en) * | 2006-03-02 | 2007-09-13 | Mitsubishi Heavy Ind Ltd | Electron beam irradiation device |
| CN201471078U (en) * | 2009-08-07 | 2010-05-19 | 桂林狮达机电技术工程有限公司 | Welding seam magnetic deviation trailing and magnetic scanning electron beam welding system |
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| US3857014A (en) * | 1971-08-25 | 1974-12-24 | A Khotina | Electron beam generator |
| JPS6433834A (en) * | 1987-07-28 | 1989-02-03 | Mitsubishi Electric Corp | Electron beam device |
| CN2077591U (en) * | 1990-10-31 | 1991-05-22 | 东南大学 | Multi-pole magnetic deflection coil in kinescope |
| JP2007232609A (en) * | 2006-03-02 | 2007-09-13 | Mitsubishi Heavy Ind Ltd | Electron beam irradiation device |
| CN201471078U (en) * | 2009-08-07 | 2010-05-19 | 桂林狮达机电技术工程有限公司 | Welding seam magnetic deviation trailing and magnetic scanning electron beam welding system |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106170172A (en) * | 2016-08-30 | 2016-11-30 | 中广核达胜加速器技术有限公司 | A kind of two-way broad width scanning device for low-energy electronic accelerator |
| CN106981410A (en) * | 2017-05-03 | 2017-07-25 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
| CN106981410B (en) * | 2017-05-03 | 2019-06-28 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
| CN107768220A (en) * | 2017-09-21 | 2018-03-06 | 北京中科科仪股份有限公司 | A kind of encapsulating device of scanning coil, ESEM and scanning coil |
| CN107768220B (en) * | 2017-09-21 | 2019-05-31 | 北京中科科仪股份有限公司 | A kind of encapsulating device of scanning coil, scanning electron microscope and scanning coil |
| CN108305701A (en) * | 2018-01-10 | 2018-07-20 | 桂林狮达机电技术工程有限公司 | A kind of the deflection scanning device and deflection and scanning system of polyphase windings |
| WO2019137183A1 (en) * | 2018-01-10 | 2019-07-18 | 桂林狮达技术股份有限公司 | Deflection scanning device for multi-phase winding and deflection scanning system |
| US10804070B2 (en) | 2018-01-10 | 2020-10-13 | Guilin Thd Technology Co., Ltd | Deflection scanning device with multi-phase winding and deflection scanning system |
| CN108305701B (en) * | 2018-01-10 | 2023-09-19 | 桂林狮达技术股份有限公司 | Deflection scanning device and deflection scanning system of multiphase winding |
| CN114864128A (en) * | 2022-04-28 | 2022-08-05 | 苏州博众仪器科技有限公司 | Electron beam electromagnetic deflection device and deflector |
| CN114864128B (en) * | 2022-04-28 | 2024-03-22 | 苏州博众仪器科技有限公司 | Electron beam electromagnetic deflection device and deflector |
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Inventor after: Peng Yong Inventor after: Yang Li Inventor after: Wang Xiaoyu Inventor after: Zhou Qi Inventor after: Wang Kehong Inventor after: Zuo Congjin Inventor after: Xu Haiying Inventor after: Shi Meiling Inventor after: Zhang Haining Inventor after: Qian Hongli Inventor before: Peng Yong Inventor before: Yang Li Inventor before: Wang Xiaoyu Inventor before: Zhou Qi Inventor before: Wang Kehong Inventor before: Zuo Congjin Inventor before: Xu Haiying Inventor before: Shi Meiling Inventor before: Zhang Haining Inventor before: Qian Hongli |
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Application publication date: 20131127 |