CN103406657A - Electromagnetic deflection scanning coil for machining electron beam - Google Patents
Electromagnetic deflection scanning coil for machining electron beam Download PDFInfo
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- CN103406657A CN103406657A CN2013103465063A CN201310346506A CN103406657A CN 103406657 A CN103406657 A CN 103406657A CN 2013103465063 A CN2013103465063 A CN 2013103465063A CN 201310346506 A CN201310346506 A CN 201310346506A CN 103406657 A CN103406657 A CN 103406657A
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CN2013103465063A CN103406657A (en) | 2013-08-09 | 2013-08-09 | Electromagnetic deflection scanning coil for machining electron beam |
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CN2013103465063A CN103406657A (en) | 2013-08-09 | 2013-08-09 | Electromagnetic deflection scanning coil for machining electron beam |
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CN103406657A true CN103406657A (en) | 2013-11-27 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106170172A (en) * | 2016-08-30 | 2016-11-30 | 中广核达胜加速器技术有限公司 | A kind of two-way broad width scanning device for low-energy electronic accelerator |
CN106981410A (en) * | 2017-05-03 | 2017-07-25 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
CN107768220A (en) * | 2017-09-21 | 2018-03-06 | 北京中科科仪股份有限公司 | A kind of encapsulating device of scanning coil, ESEM and scanning coil |
CN108305701A (en) * | 2018-01-10 | 2018-07-20 | 桂林狮达机电技术工程有限公司 | A kind of the deflection scanning device and deflection and scanning system of polyphase windings |
WO2019137183A1 (en) * | 2018-01-10 | 2019-07-18 | 桂林狮达技术股份有限公司 | Deflection scanning device for multi-phase winding and deflection scanning system |
CN114864128A (en) * | 2022-04-28 | 2022-08-05 | 苏州博众仪器科技有限公司 | Electron beam electromagnetic deflection device and deflector |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3857014A (en) * | 1971-08-25 | 1974-12-24 | A Khotina | Electron beam generator |
JPS6433834A (en) * | 1987-07-28 | 1989-02-03 | Mitsubishi Electric Corp | Electron beam device |
CN2077591U (en) * | 1990-10-31 | 1991-05-22 | 东南大学 | Multi-pole magnetic deflection coil in kinescope |
JP2007232609A (en) * | 2006-03-02 | 2007-09-13 | Mitsubishi Heavy Ind Ltd | Electron beam irradiation device |
CN201471078U (en) * | 2009-08-07 | 2010-05-19 | 桂林狮达机电技术工程有限公司 | Welding seam magnetic deviation trailing and magnetic scanning electron beam welding system |
-
2013
- 2013-08-09 CN CN2013103465063A patent/CN103406657A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3857014A (en) * | 1971-08-25 | 1974-12-24 | A Khotina | Electron beam generator |
JPS6433834A (en) * | 1987-07-28 | 1989-02-03 | Mitsubishi Electric Corp | Electron beam device |
CN2077591U (en) * | 1990-10-31 | 1991-05-22 | 东南大学 | Multi-pole magnetic deflection coil in kinescope |
JP2007232609A (en) * | 2006-03-02 | 2007-09-13 | Mitsubishi Heavy Ind Ltd | Electron beam irradiation device |
CN201471078U (en) * | 2009-08-07 | 2010-05-19 | 桂林狮达机电技术工程有限公司 | Welding seam magnetic deviation trailing and magnetic scanning electron beam welding system |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106170172A (en) * | 2016-08-30 | 2016-11-30 | 中广核达胜加速器技术有限公司 | A kind of two-way broad width scanning device for low-energy electronic accelerator |
CN106981410A (en) * | 2017-05-03 | 2017-07-25 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
CN106981410B (en) * | 2017-05-03 | 2019-06-28 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
CN107768220A (en) * | 2017-09-21 | 2018-03-06 | 北京中科科仪股份有限公司 | A kind of encapsulating device of scanning coil, ESEM and scanning coil |
CN107768220B (en) * | 2017-09-21 | 2019-05-31 | 北京中科科仪股份有限公司 | A kind of encapsulating device of scanning coil, scanning electron microscope and scanning coil |
CN108305701A (en) * | 2018-01-10 | 2018-07-20 | 桂林狮达机电技术工程有限公司 | A kind of the deflection scanning device and deflection and scanning system of polyphase windings |
WO2019137183A1 (en) * | 2018-01-10 | 2019-07-18 | 桂林狮达技术股份有限公司 | Deflection scanning device for multi-phase winding and deflection scanning system |
US10804070B2 (en) | 2018-01-10 | 2020-10-13 | Guilin Thd Technology Co., Ltd | Deflection scanning device with multi-phase winding and deflection scanning system |
CN108305701B (en) * | 2018-01-10 | 2023-09-19 | 桂林狮达技术股份有限公司 | Deflection scanning device and deflection scanning system of multiphase winding |
CN114864128A (en) * | 2022-04-28 | 2022-08-05 | 苏州博众仪器科技有限公司 | Electron beam electromagnetic deflection device and deflector |
CN114864128B (en) * | 2022-04-28 | 2024-03-22 | 苏州博众仪器科技有限公司 | Electron beam electromagnetic deflection device and deflector |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent of invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Peng Yong Inventor after: Yang Li Inventor after: Wang Xiaoyu Inventor after: Zhou Qi Inventor after: Wang Kehong Inventor after: Zuo Congjin Inventor after: Xu Haiying Inventor after: Shi Meiling Inventor after: Zhang Haining Inventor after: Qian Hongli Inventor before: Peng Yong Inventor before: Yang Li Inventor before: Wang Xiaoyu Inventor before: Zhou Qi Inventor before: Wang Kehong Inventor before: Zuo Congjin Inventor before: Xu Haiying Inventor before: Shi Meiling Inventor before: Zhang Haining Inventor before: Qian Hongli |
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C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20131127 |