CN102376515A - Objective pole shoe of transmission electron microscope - Google Patents
Objective pole shoe of transmission electron microscope Download PDFInfo
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- CN102376515A CN102376515A CN2011103499446A CN201110349944A CN102376515A CN 102376515 A CN102376515 A CN 102376515A CN 2011103499446 A CN2011103499446 A CN 2011103499446A CN 201110349944 A CN201110349944 A CN 201110349944A CN 102376515 A CN102376515 A CN 102376515A
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- pole shoe
- diameter
- bore
- spacer
- object lens
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Abstract
The invention discloses an objective pole shoe of a transmission electron microscope. The objective pole shoe comprises an upper pole shoe, a lower pole shoe and an isolating sleeve, wherein coaxiality is required to be guaranteed in matching of the upper pole shoe, the lower pole shoe and the isolating sleeve during assembly. In the invention, stressless connection of the upper pole shoe and the lower pole shoe of an objective is realized through the isolating sleeve, so that a good magnetic characteristic effect (due to inexistence of stress) is achieved; small holes of the upper pole shoe and the lower pole shoe are convenient in processing and good in processibility; through holes on the outer circumference of the isolating sleeve facilitate mounting of accessories such as an energy spectrometer and the like, so that extensibility is strong; the selected pole shoe material is high-performance soft magnetic material 1J22, so that reliability and a good effect are achieved; by using a three-section connection mode, the objective pole shoe has the characteristics of simple structure and convenience in maintenance, and practical performance is improved; and superior tin bronze, serving as a heat-conducting material, is used as a heat-transfer material and the isolating sleeve, so that a good effect and long life are guaranteed.
Description
Technical field
The present invention relates to a kind of object lens pole shoe of transmission electron microscope, belong to micro-nano observation and control technology field.
Background technology
People are unlimited to the observation of microscopic species, and electron microscope is exactly a kind of important instrument that can observe small material, and he can observe the material below the 0.25nm.Electron microscope as lighting source, with magnetic lens or the electrostatic lens device as the deflection electronics, realizes that optics amplifies with electron beam.Electron microscope has very application prospects in the army and the people fields such as physics, chemistry, material, scientific research, life science, geology, mine locating, mechanical industry, electronics industries.
Electron microscope is radiated on the sample through electron beam, through the focussing force of object lens, realizes the observation to sample, and the object lens magnetic circuit comprises around the pure iron skeleton of object lens coil and the extending part of pure iron skeleton, object lens pole shoe.The object lens pole shoe is the Primary Component that forms object lens magnetic field, is generally made by Precise Alloy, and making needs very accurate, otherwise, can produce astigmatism, picture distortion equal error, reduce resolution and readability.Also to consider the needs of Electronic Speculum installation accessories simultaneously,, could realize many-sided needs so structurally need take all factors into consideration.
In various object lens pole shoes, mostly have: the Design of Mechanical Structure more complicated, use dumb; And inconvenience assembling, inconvenience maintenance.
Summary of the invention
To the objective of the invention is in order addressing the above problem, to propose a kind of object lens pole shoe of transmission electron microscope.
A kind of object lens pole shoe of transmission electron microscope comprises pole shoe, following pole shoe and spacer;
Last pole shoe upper end is cylindrical, and the lower end is a turbination, and conical bottom is plane F
1, the cylindrical round thread hole A that is provided with is used for being connected with miscellaneous part; A lower end, round thread hole is provided with conical socket B, and conical socket B lower end is provided with pole shoe bore, and the diameter of last pole shoe bore is D
1, the part that last pole shoe bore is connected with conical socket B is provided with chamfering C; The diameter of round thread hole A is greater than conical socket B upper end diameter, and conical socket B lower end diameter is greater than the diameter of last pole shoe bore; The bottom is plane F
1External profile diameter be more than three times of diameter of last pole shoe bore; The turbination periphery also is provided with boss A, is used for the annular groove A interference fit with spacer, and the end face of annular groove A overlaps with the end face of boss A;
The described length that goes up pole shoe bore is greater than or equal to the diameter of pole shoe bore;
Following pole shoe is conical, and the top is plane F
2, the top is provided with down pole shoe bore, and the diameter of following pole shoe bore is D
2, D
2＜D
1, following pole shoe bore lower end is provided with bellmouth D, and bellmouth D lower end is provided with circular hole E; Circular hole E lower end is circular hole F; The diameter of bellmouth D upper surface is identical with the diameter of following pole shoe bore, and the diameter of lower surface is identical with the diameter of circular hole E, and the diameter of circular hole F is greater than the diameter of circular hole E; Periphery, the conical bottom of following pole shoe is provided with boss B, is used for the annular groove B interference fit with spacer, and the end face of annular groove B overlaps with the end face of boss B;
The length of described pole shoe bore down and bellmouth D is greater than or equal to down the diameter of pole shoe bore;
Plane F
1With plane F
2Between distance be S, S and D calculate according to electron optics;
Spacer is a cylindrical shape; Upper and lower side is respectively equipped with annular groove A and annular groove B, is used for pole shoe and following pole shoe on the interference fit, and inside also is provided with down the pole shoe dividing plate; Following pole shoe dividing plate is positioned at the periphery of pole shoe taper down, and the spacer excircle of following pole shoe dividing plate upper end is provided with through hole G; The spacer excircle of following pole shoe dividing plate lower end is provided with the through hole H of two symmetries, is used to install the object lens pole shoe.
The invention has the advantages that:
(1) the last pole shoe of object lens is realized unstressed the connection with following pole shoe through spacer, magnetic characteristic effective (because unstressed);
(2) go up pole shoe and be convenient to processing, good manufacturability with the aperture of following pole shoe;
(3) through hole on the spacer excircle is convenient to install annexes such as energy disperse spectroscopy, and extensibility is strong;
(4) pole shoe material selection high-performance soft magnetic materials 1J22 is reliable, effective;
(5) adopt the syllogic connected mode, had characteristics simple in structure, easy to maintenance, improved Practical Performance;
(6) adopted excellent heat conducting material tin bronze, as heat conducting material and spacer, effective, the life-span is long.
Description of drawings
Fig. 1 is the structural representation of object lens pole shoe of the present invention;
Fig. 2 is the longitudinal sectional drawing of object lens pole shoe of the present invention;
Fig. 3 is the transverse cross-sectional view of object lens pole shoe of the present invention;
Fig. 4 is the structural representation of pole shoe in the present invention;
Fig. 5 is the profile of pole shoe in the present invention;
Fig. 6 is the structural representation of pole shoe under the present invention;
Fig. 7 is the profile of pole shoe under the present invention;
Fig. 8 is the structural representation of spacer of the present invention;
Fig. 9 is the longitudinal sectional drawing of spacer of the present invention;
Figure 10 is the transverse cross-sectional view of spacer of the present invention;
Among the figure:
Pole shoe 3-spacer under the last pole shoe 2-of 1-
Pole shoe bore under the last pole shoe bore 5-of the 4-boss A 6-
Pole shoe dividing plate under the 7-boss B 8-
Embodiment
To combine accompanying drawing and embodiment that the present invention is done further detailed description below.
The present invention is a kind of object lens pole shoe of transmission electron microscope, like Fig. 1, Fig. 2, shown in Figure 3, comprises pole shoe 1, following pole shoe 2 and spacer 3.
The described length that goes up pole shoe bore 4 is greater than or equal to the diameter of pole shoe bore 4.
Following pole shoe 2 is like Fig. 6, shown in Figure 7, and following pole shoe 2 is conical, and the top is plane F
2, the top is provided with down pole shoe bore 6, and the diameter of following pole shoe bore 6 is D
2, D
2＜D
1, following pole shoe bore 6 lower ends are provided with bellmouth D, and bellmouth D lower end is provided with circular hole E; Circular hole E lower end is circular hole F; The diameter of bellmouth D upper surface is identical with the diameter of following pole shoe bore 6, and the diameter of lower surface is identical with the diameter of circular hole E, and the diameter of circular hole F is greater than the diameter of circular hole E.Periphery, following pole shoe 2 conical bottom is provided with boss B7, is used for the annular groove B interference fit with spacer 3, magnitude of interference 0.003-0.005mm, and the end face of annular groove B overlaps with the end face of boss B7.
The length of described pole shoe bore 6 down and bellmouth D is greater than or equal to down the diameter of pole shoe bore 6.
Plane F
1With plane F
2Between distance be S, S and D calculate according to electron optics.
Described upward pole shoe 1, following pole shoe 2 are all selected high-performance soft magnetic materials 1J22 for use.Spacer 3 is selected the heat conducting material tin bronze for use.
During assembling, last pole shoe 1, pole shoe 2 and 3 pairs of spacers are joined down, need to guarantee axiality.
Following pole shoe bore 6 is different with the aperture of last pole shoe bore 4, and last pole shoe bore 4 is big, and following pole shoe bore 6 is little, to avoid object lens magnetic field through pole shoe bore 6 excessive draining on the sample down, influences the collection of secondary electron.
The axle of object lens pole shoe is gone up field strength distribution through S, D
2, D
1Decision, very little with the shape relation of magnetic circuit.Last pole shoe 1 lower surface F
1When external profile diameter is excessive, can increase total magnetic flux in rain, obconic cone angle is taken as about 60 °-70 ° (semicircle cone angles), has so not only reduced total magnetic flux but also owing in the long-pending progressively increase of conical surface part core section, can avoid taking place saturated.
Pole shoe end face F in the object lens pole shoe
1, F
2, D
1, D
2Be the key of magnetic circuit, calculate that all the other sizes mainly are convenient to cooperate and be convenient to other parts process through the electron optics magnetic circuit.
Claims (8)
1. the object lens pole shoe of a transmission electron microscope is characterized in that, comprises pole shoe, following pole shoe and spacer;
Last pole shoe upper end is cylindrical, and the lower end is a turbination, and conical bottom is plane F
1, the cylindrical round thread hole A that is provided with is used for being connected with miscellaneous part; A lower end, round thread hole is provided with conical socket B, and conical socket B lower end is provided with pole shoe bore, and the diameter of last pole shoe bore is D
1, the part that last pole shoe bore is connected with conical socket B is provided with chamfering C; The diameter of round thread hole A is greater than conical socket B upper end diameter, and conical socket B lower end diameter is greater than the diameter of last pole shoe bore; The bottom is plane F
1External profile diameter be more than three times of diameter of last pole shoe bore; The turbination periphery also is provided with boss A, is used for the annular groove A interference fit with spacer, and the end face of annular groove A overlaps with the end face of boss A;
The described length that goes up pole shoe bore is greater than or equal to the diameter of pole shoe bore;
Following pole shoe is conical, and the top is plane F
2, the top is provided with down pole shoe bore, and the diameter of following pole shoe bore is D
2, D
2＜D
1, following pole shoe bore lower end is provided with bellmouth D, and bellmouth D lower end is provided with circular hole E; Circular hole E lower end is circular hole F; The diameter of bellmouth D upper surface is identical with the diameter of following pole shoe bore, and the diameter of lower surface is identical with the diameter of circular hole E, and the diameter of circular hole F is greater than the diameter of circular hole E; Periphery, the conical bottom of following pole shoe is provided with boss B, is used for the annular groove B interference fit with spacer, and the end face of annular groove B overlaps with the end face of boss B;
The length of described pole shoe bore down and bellmouth D is greater than or equal to down the diameter of pole shoe bore;
Plane F
1With plane F
2Between distance be S, S and D calculate according to electron optics;
Spacer is a cylindrical shape; Upper and lower side is respectively equipped with annular groove A and annular groove B, is used for pole shoe and following pole shoe on the interference fit, and inside also is provided with down the pole shoe dividing plate; Following pole shoe dividing plate is positioned at the periphery of pole shoe taper down, and the spacer excircle of following pole shoe dividing plate upper end is provided with through hole G; The spacer excircle of following pole shoe dividing plate lower end is provided with the through hole H of two symmetries, is used to install the object lens pole shoe.
2. the object lens pole shoe of a kind of transmission electron microscope according to claim 1 is characterized in that, A periphery, described round thread hole is provided with two little taper holes, and little taper hole is positioned on the same diameter, plays the mark effect.
3. the object lens pole shoe of a kind of transmission electron microscope according to claim 1 is characterized in that, the annular groove A interference fit in described boss A and the spacer, magnitude of interference 0.003-0.005mm.
4. the object lens pole shoe of a kind of transmission electron microscope according to claim 1 is characterized in that, the annular groove B interference fit in described boss B and the spacer, magnitude of interference 0.003-0.005mm.
5. the object lens pole shoe of a kind of transmission electron microscope according to claim 1 is characterized in that, the quantity of described through hole G is according to the decision of the annex quantity on the object lens, and annex gets into spacer through through hole.
6. the object lens pole shoe of a kind of transmission electron microscope according to claim 1 is characterized in that, described upward pole shoe, following pole shoe are all selected high-performance soft magnetic materials 1J22 for use.
7. the object lens pole shoe of a kind of transmission electron microscope according to claim 1 is characterized in that, described spacer is selected the heat conducting material tin bronze for use.
8. the object lens pole shoe of a kind of transmission electron microscope according to claim 1 is characterized in that, obconic cone angle is 60 °-70 ° (semicircle cone angles) in the described upward pole shoe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110349944.6A CN102376515B (en) | 2011-11-08 | 2011-11-08 | Objective pole shoe of transmission electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110349944.6A CN102376515B (en) | 2011-11-08 | 2011-11-08 | Objective pole shoe of transmission electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102376515A true CN102376515A (en) | 2012-03-14 |
| CN102376515B CN102376515B (en) | 2014-02-12 |
Family
ID=45794946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110349944.6A Active CN102376515B (en) | 2011-11-08 | 2011-11-08 | Objective pole shoe of transmission electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102376515B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360469A (en) * | 2014-09-29 | 2015-02-18 | 沈阳安创信息科技有限公司 | Special USB (universal serial bus) electron microscope for identifying two-dimensional codes |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231654A (en) * | 1976-09-17 | 1977-03-10 | Jeol Ltd | Object lens for electron microscope |
| JPH01211841A (en) * | 1988-02-19 | 1989-08-25 | Jeol Ltd | Objective lens for transmission electron microscope |
| CN102169790A (en) * | 2011-03-29 | 2011-08-31 | 北京航空航天大学 | First collecting mirror of electron microscope |
-
2011
- 2011-11-08 CN CN201110349944.6A patent/CN102376515B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231654A (en) * | 1976-09-17 | 1977-03-10 | Jeol Ltd | Object lens for electron microscope |
| JPH01211841A (en) * | 1988-02-19 | 1989-08-25 | Jeol Ltd | Objective lens for transmission electron microscope |
| CN102169790A (en) * | 2011-03-29 | 2011-08-31 | 北京航空航天大学 | First collecting mirror of electron microscope |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360469A (en) * | 2014-09-29 | 2015-02-18 | 沈阳安创信息科技有限公司 | Special USB (universal serial bus) electron microscope for identifying two-dimensional codes |
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| Publication number | Publication date |
|---|---|
| CN102376515B (en) | 2014-02-12 |
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Effective date of registration: 20210304 Address after: 215200 No. 666 Hu Xin Road, Wujiang economic and Technological Development Zone, Suzhou, Jiangsu Patentee after: Suzhou Bozhong Instrument Technology Co., Ltd Address before: 100191 No. 37, Haidian District, Beijing, Xueyuan Road Patentee before: BEIHANG University |
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